Method for detecting oxa content of trimethylaluminum

By using octamethyltrisiloxane to capture the dissociation of oxaluminium in trimethylaluminum to generate specific anions, and combining it with electrospray ionization-time-of-flight mass spectrometry, accurate quantitative detection of oxaluminium content in trimethylaluminum was achieved. This solves the accuracy and cost problems of existing detection methods and is suitable for quality control in the semiconductor industry.

CN122448948AActive Publication Date: 2026-07-24JIANGSU NATA OPTO ELECTRONIC MATERIAL CO LTD
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Patent Information

Application Number
CN202610877803.8
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-06-17
Publication Date
2026-07-24
Estimated Expiration
2046-06-17

AI Technical Summary

Technical Problem

Existing detection methods are difficult to accurately quantify the oxygen content in trimethylaluminum, especially at the ppb level, where the detection difficulty increases significantly and the cost is high.

Method used

Octamethyltrisiloxane was used as a coordinating reagent, and the characteristic peak of the specific anion was detected by electrospray ionization-time-of-flight mass spectrometry. Octamethyltrisiloxane was used to capture the dissociated cation Me2Al+ in the coordination system, which pulled the oxaluminum to dissociate and generate the specific anion, thus realizing the quantitative detection of oxaluminum.

Benefits of technology

It improves detection accuracy, lowers detection limits, simplifies sample pretreatment, is suitable for industrial batch testing, has controllable costs, and is compatible with the quality control of semiconductor-grade TMA.

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Abstract

The invention discloses a method for detecting the oxa content of trimethylaluminum, which comprises the following steps: adding an anhydrous solvent into trimethylaluminum to be detected for dilution to obtain a system to be detected; octamethyltrisiloxane is added into the to-be-detected system for a reaction, oxa-aluminum is pulled to be dissociated through the coordination capture effect of octamethyltrisiloxane, and specific anions are generated; performing electrospray ionization-time-of-flight mass spectrometry on the to-be-detected system, and detecting the characteristic peak of the specific anion; and quantitatively detecting the content of oxaaluminum species based on the characteristic peak area of the specific anion. According to the present invention, by using the principle that octamethyltrisiloxane captures the dissociated cation Me2Al < + > in the coordination system and pulls the oxalaluminum to continuously dissociate to generate the specific anion, the quantitative detection of the oxalaluminum is achieved through the electrospray ionization-time-of-flight mass spectrometry, the TMA body interference is eliminated, and the detection precision is effectively improved.
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