Cluster multichannel quality selection device
By designing an improved electrode group structure and external power supply in a cluster multi-channel mass selection device and adding a transversely elongated metal mesh, the problem of low cluster ion beam flow yield in the prior art is solved, and more efficient ion beam flow intensity and cluster yield are achieved.
Patent Information
- Application Number
- CN202420994924.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-09
- Publication Date
- 2025-03-07
- Estimated Expiration
- 2034-05-09
AI Technical Summary
The existing mass selectors produce too low in cluster ion beam flow, and the increased beam density is limited by Coulomb forces, resulting in a limited number of cluster ions passing through.
A cluster multi-channel mass selection device is designed, including a cluster ion beam inlet slit plate, outlet slit plate, parallel plate electrode group and metal mesh. By improving the electrode group structure and external power supply, it is necessary to ensure that the ion beam flow is not affected by deceleration pulses when passing through the metal mesh, and to increase the transversely elongated metal mesh to reduce deflection.
The ion beam intensity and cluster yield entering the mass selector are improved, ensuring more efficient mass selection and separation, and the device remains consistent on the spatial scale.
Smart Images
Figure CN222581089U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of cluster multi-channel mass selection, in particular to a cluster multi-channel mass selection device. Background Art
[0002] The existing ion beam entering the mass selector usually enters from the inlet as a circular cluster ion flow, and after the mass selector screens and separates the single mass clusters, it still leaves the outlet and is collected as a nearly circular parallel ion beam. The disadvantage of the existing mass selector is that the macroscopic yield of clusters is too low.
[0003] The existing multi-channel mass selector can select clusters of various masses, but its inlet and outlet are both circular holes, and the shape of the ion beam passing through is approximately circular. Due to the Coulomb force between ions, the beam density cannot be increased indefinitely, so the number of cluster ions passing through is limited, and the cluster yield collected after separation and screening is not high. Utility Model Content
[0004] The purpose of the utility model is to provide a cluster multi-channel mass selection device to solve the problems raised in the above background technology.
[0005] In order to solve the above technical problems, the utility model provides the following technical solutions:
[0006] A cluster multi-channel mass selection device, comprising:
[0007] A cluster ion beam inlet slit plate, a plurality of outlet slit plates, a parallel plate electrode group and a plurality of side plates;
[0008] The cluster ion beam inlet slit plate and the exit slit plate are perpendicular to the side plates and the parallel plate electrode group to form a rectangle; an inlet slit is opened at the center of the cluster ion beam inlet slit plate, and an exit slit is opened at the center of the exit slit plate; a long strip of equal width (the inlet slit and the exit slit) is opened on the parallel plate electrode and a metal mesh is laid.
[0009] According to the above technical solution, the metal mesh and the area on the right side of the metal mesh are externally connected to a constant voltage DC power supply with a voltage amplitude of -V0 to ensure that the particle beam passing horizontally through the metal mesh is no longer affected by the deceleration pulse of the next cycle and is deflected.
[0010] According to the above technical solution, the plurality of parallel plate electrodes include a first parallel plate electrode, a second parallel plate electrode, a third parallel plate electrode and a fourth parallel plate electrode group, and the fourth parallel plate electrode group includes a plurality of parallel plate electrodes;
[0011] The fourth parallel plate electrode group is located above the third parallel plate electrode, the third parallel plate electrode is located above the second parallel plate electrode, and the second parallel plate electrode is located above the first parallel plate electrode; there are intervals between the parallel plate electrodes.
[0012] According to the above technical solution, the second parallel plate electrode and the third parallel plate electrode are externally connected to a constant voltage DC power supply with a voltage amplitude of -V0; each parallel plate electrode in the first parallel plate electrode and the fourth parallel plate electrode group is externally connected to a high voltage pulse power supply.
[0013] According to the above technical solution, the high-voltage pulses are all square waves with the same peak value and period, but different duty cycles and phase differences.
[0014] Compared with the prior art, the utility model has the following beneficial effects: the utility model increases the ion beam current intensity entering the mass selector, and the corresponding beam current intensity leaving the mass selector is also increased, and the cluster yield is improved. The utility model adds a transversely elongated metal mesh so that the ions of the previous cycle are not affected by the deceleration voltage of the next cycle, and the length, width and height of the improved mass selection device are all on the same or similar spatial scale. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:
[0016] Figure 1 It is a schematic diagram of the structure of a cluster multi-channel mass selection device of the present invention;
[0017] Figure 2 is a schematic structural diagram of the cluster multi-channel mass selection device in Example 1;
[0018] Figure 3 This is the front view of the ion trajectory when the slit width is 3m;
[0019] In the figure: 1. entrance slit; 2. exit slit; 3. first parallel plate electrode; 4. second parallel plate electrode; 5. third parallel plate electrode; 6. fourth parallel plate electrode group; 7. metal mesh; a. fourth parallel plate electrode; b. fifth parallel plate electrode; c. sixth parallel plate electrode; d. seventh parallel plate electrode; e. eighth parallel plate electrode; f. ninth parallel plate electrode; g. tenth parallel plate electrode; h. eleventh parallel plate electrode; i. twelfth parallel plate electrode; j. thirteenth parallel plate electrode. DETAILED DESCRIPTION
[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0021] Embodiment 1 This device is designed as a multi-channel mass selector for collecting gold 1 to gold 10 cluster ions with a positive charge (or other ions of the same proportion), comprising: a cluster ion beam inlet slit plate, 11 outlet slit plates, a parallel plate electrode group and a plurality of side plates;
[0022] The cluster ion beam inlet slit plate and the exit slit plate are perpendicular to the side plates and the parallel plate electrode group, forming a rectangle; an inlet slit 1 is provided at the center of the cluster ion beam inlet slit plate, and an exit slit 2 is provided at the center of the exit slit plate; a long strip of equal width to the inlet slit 1 and the exit slit 2 is provided on the parallel plate electrode and a metal mesh 7 is laid; the parallel plate electrode group includes a first parallel plate electrode 3, a second parallel plate electrode 4, a third parallel plate electrode 5 and a fourth parallel plate electrode group 6, and the fourth parallel plate electrode group 6 includes 10 parallel plate electrodes, which are respectively referred to as a fourth parallel plate electrode a, a fifth parallel plate electrode b, ..., and a thirteenth parallel plate electrode j;
[0023] The fourth parallel plate electrode group 6 is located above the third parallel plate electrode 5 , the third parallel plate electrode 5 is located above the second parallel plate electrode 4 , and the second parallel plate electrode 4 is located above the first parallel plate electrode 3 ; there are intervals between the parallel plate electrodes.
[0024] The acceleration zone is between the first parallel plate electrode 3 and the second parallel plate electrode 4 .
[0025] The area between the second parallel plate electrode 4 and the third parallel plate electrode 5 is a uniform speed flight area.
[0026] The deceleration zone 1 is between the third parallel plate electrode 5 and the fourth parallel plate electrode a, where gold 1 ions are collected.
[0027] The area between the fourth parallel plate electrode a and the fifth parallel plate electrode b is a deceleration zone 2 for collecting gold 2 ions.
[0028] The deceleration zone 3 is between the fifth parallel plate electrode b and the sixth parallel plate electrode c, where gold 3 ions are collected.
[0029] The deceleration zone 4 is between the sixth parallel plate electrode c and the seventh parallel plate electrode d, where gold 4 ions are collected.
[0030] The area between the seventh parallel plate electrode d and the eighth parallel plate electrode e is a deceleration zone 5 for collecting gold 5 ions.
[0031] Between the eighth parallel plate electrode e and the ninth parallel plate electrode f is a deceleration section 6 for collecting Au6 ions.
[0032] Between the ninth parallel plate electrode f and the tenth parallel plate electrode g is a deceleration section 7 for collecting Au7 ions.
[0033] Between the tenth parallel plate electrode g and the eleventh parallel plate electrode h is a deceleration section 8 for collecting Au8 ions.
[0034] Between the eleventh parallel plate electrode h and the twelfth parallel plate electrode i is a deceleration section 9 for collecting Au9 ions.
[0035] Between the twelfth parallel plate electrode i and the thirteenth parallel plate electrode j is a deceleration section 10 for collecting Au10 ions.
[0036] In the initial state, the initial overall voltage of all parallel plate electrodes and the metal mesh 7 is -V0.
[0037] Embodiment 2
[0038] Based on the cluster multi-channel mass selector of Embodiment 1, a constant voltage DC power supply is externally connected to the metal mesh and the area on the right side of the metal mesh, and the voltage amplitude is -V0 = -2000V;
[0039] A constant voltage DC power supply is externally connected to the second parallel plate electrode 4 and the third parallel plate electrode 5, and the voltage amplitude is -V0 = -2000V;
[0040] A high-voltage pulse power supply is externally connected to the first parallel plate electrode 3. After the ion beam horizontally moves for a period of time td, an acceleration pulse is turned on, the pulse duration is tp, the high-voltage pulses are all square waves and the period is T = td + tp = 170 us (td = 150 us, tp = 20 us). When the high-voltage pulse is turned on, the voltage changes from -V0 = -2000V to 0 potential;
[0041] Each parallel plate electrode in the fourth parallel plate electrode group 6 is externally connected to a high-voltage pulse power supply. After the ion beam deceleration section, a deceleration pulse is turned on, the pulse duration is related to the time when leaving the acceleration section, each high-voltage pulse is a square wave and the period is also T = td + tp (td = 150 us, tp = 20 us). When the high-voltage pulse is turned on, the voltage changes from -V0 to 0 potential.
[0042] At time t0 (0 < t0 < td), the cluster ion beam enters from the entrance slit and horizontally moves for a period of time Δt1.
[0043] Affected by the acceleration pulse, it accelerates upward until it leaves the acceleration interval. The acceleration time is Δt2. It flies upward at a constant speed until it enters the corresponding deceleration interval. The constant speed flight time is Δt3. The deceleration pulse is turned on in the deceleration interval, and the pulse duration is Δt4.
[0044] Among them, the deceleration pulse duration of gold 1 is t41=6.09us, the deceleration pulse duration of gold 2 is t42=8.61us, the deceleration pulse duration of gold 3 is t43=10.55us, the deceleration pulse duration of gold 4 is t44=12.18us, the deceleration pulse duration of gold 5 is t45=13.61us, the deceleration pulse duration of gold 6 is t46=14.91us, the deceleration pulse duration of gold 7 is t47=16.11us, the deceleration pulse duration of gold 8 is t48=17.22us, the deceleration pulse duration of gold 9 is t49=18.27us, and the deceleration pulse duration of gold 10 is t410=19.25us.
[0045] The ion beam resumes horizontal motion and continues to move horizontally for a period of time Δt5, passing through the metal mesh. The electric field on the right side of the metal mesh remains constant, and the ion beam moves horizontally until it leaves the exit slit.
[0046] In order to ensure that the deceleration pulse of the second cycle does not affect the particle trajectory of the first cycle, the ions of the first cycle have passed through the metal mesh when the deceleration pulse of the second cycle begins.
[0047] The front view of the ion trajectory with a slit width of 3m ( Figure 3 ) It can be seen that the pulsed electric field enables the ion beam originally flying horizontally at a uniform speed to obtain kinetic energy in the vertical direction and accelerate upward. After a period of uniform motion, the pulsed electric field in the opposite direction stops the upward motion, thereby restoring the ion beam to horizontal motion. By using the principle that the longitudinal flight time and displacement of charged ions of different masses are related to their masses, ions of different masses are dispersed into parallel beams with different displacements, realizing the sorting function of corresponding multi-channel mass cluster ions.
[0048] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.
[0049] Finally, it should be noted that the above description is only a preferred embodiment of the utility model and is not intended to limit the utility model. Although the utility model is described in detail with reference to the above embodiments, those skilled in the art can still modify the technical solutions recorded in the above embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.
Claims
1. A cluster multi-channel mass selection device, characterized in that: include: A cluster ion beam inlet slit plate, a plurality of outlet slit plates, a parallel plate electrode group and a plurality of side plates; The cluster ion beam inlet slit plate and the outlet slit plate are perpendicular to each other and are in a rectangular shape along with the side plates and the parallel plate electrode group. An inlet slit (1) is provided at the center of the cluster ion beam inlet slit plate, and an outlet slit (2) is provided at the center of the outlet slit plate. Long strips of equal width to the inlet slit (1) and the outlet slit (2) are provided on the parallel plate electrodes and a metal mesh (7) is laid.
2. A cluster multi-channel mass selection device according to claim 1, characterized in that: The metal mesh and the area on the right side of the metal mesh (7) are externally connected to a constant voltage DC power supply, and the voltage amplitude is -V0.
3. A cluster multi-channel mass selection device according to claim 1, characterized in that: The plurality of parallel plate electrodes include a first parallel plate electrode (3), a second parallel plate electrode (4), a third parallel plate electrode (5) and a fourth parallel plate electrode group (6), and the fourth parallel plate electrode group (6) includes a plurality of parallel plate electrodes; The fourth parallel plate electrode group (6) is located above the third parallel plate electrode (5), the third parallel plate electrode (5) is located above the second parallel plate electrode (4), and the second parallel plate electrode (4) is located above the first parallel plate electrode (3); there is a gap between the parallel plate electrodes.
4. A cluster multi-channel mass selection device according to claim 3, characterized in that: The second parallel plate electrode (4) and the third parallel plate electrode (5) are externally connected to a constant voltage DC power supply, and the voltage amplitude is -V0; Each parallel plate electrode in the first parallel plate electrode (3) and the fourth parallel plate electrode group (6) is externally connected to a high-voltage pulse power supply.
5. The cluster multi-channel mass selection device according to claim 4, characterized in that: Each of the high-voltage pulses is a square wave with the same peak value and period, but different duty cycle and phase difference.