Support for preventing ignition in high-voltage test

By using a combination of bracket and jet pipe design in high-pressure testing, the injected flame retardant gas isolates the air, solving the problem of high-pressure test ignition, improving the reliability of the test and reducing costs.

CN222850655UActive Publication Date: 2025-05-09SHENZHEN JIHUA MICROELECTRONICS CO LTD
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Patent Information

Application Number
CN202421584066.5
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-07-05
Publication Date
2025-05-09
Estimated Expiration
2034-07-05

AI Technical Summary

Technical Problem

During high-voltage testing, high-voltage voltage may cause air discharge and ignite, interfere with test results, and may damage semiconductor devices and reduce their reliability.

Method used

Design a bracket, which is set on the probe table, and a probe holder is placed on the top, and the probe holder extends to the bottom of the bracket and is plugged into the chip. There are multiple jet pipes at the bottom of the bracket, which sprays flame retardant gas to isolate the air around the chip, thereby preventing high-pressure test ignition.

Benefits of technology

Isolate the air by injecting flame retardant gas, effectively prevent high-pressure test ignition, protect semiconductor devices, improve test reliability, and reduce costs.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a support for preventing ignition in a high-voltage test, and the support comprises a support which is disposed on a bearing object, the top of the support is suitable for placing a probe frame, and the probe frame extends to the bottom of the support and is in plugging cooperation with an external workpiece; and the multiple gas ejector pipes are arranged at the bottom of the support at equal intervals in a surrounding mode, and the multiple gas ejector pipes are suitable for ejecting flame-retardant gas to external workpieces so as to isolate air around the external workpieces.
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Description

Technical Field

[0001] The utility model relates to the technical field of wafer testing, in particular to a bracket for preventing sparks during high-voltage testing. Background Art

[0002] At present, the rated voltage of high-power semiconductor devices such as IGBT, high-voltage MOSFET, and high-voltage thyristor has reached 2000V~10000V. During the CP test of these wafer core particles, a very high bias voltage is required to test the voltage resistance of the wafer core particles. Excessive voltage will discharge and spark in the air, interfering with the test results. At the same time, when it comes into contact with the wafer core particles, it will burn the wafer core particles, causing the reliability of the wafer core particles to be reduced.

[0003] The existing technology to prevent sparks during testing is to coat the surface of the wafer with a layer of high molecular polymer, which increases costs; or to coat the surface of the wafer with a layer of flame retardant liquid to isolate the air, which also increases costs when removing the flame retardant liquid later. Utility Model Content

[0004] The utility model aims to solve one of the technical problems in the related art at least to a certain extent. To this end, one purpose of the utility model is to provide a bracket for preventing high voltage test sparks, comprising:

[0005] A bracket, the bracket is arranged on the carrier, and the top of the bracket is suitable for placing a probe rack, and the probe rack extends to the bottom of the bracket and is plugged and matched with an external workpiece;

[0006] A plurality of jet pipes are arranged at equal intervals around the bottom of the bracket, and the plurality of jet pipes are suitable for spraying flame-retardant gas to the external workpiece to isolate the air around the external workpiece.

[0007] Preferably, an annular pipe is provided inside the bracket.

[0008] Preferably, an air inlet is provided at the top of the bracket, and the air inlet passes through the annular pipe and is connected to the annular pipe.

[0009] Preferably, a plurality of mounting plates are provided on the outer circumferential surface of the bracket, and the plurality of mounting plates are arranged on the outer circumferential surface of the bracket at equal intervals.

[0010] Preferably, a plurality of mounting holes are respectively provided in the plurality of mounting plates, and the plurality of mounting holes are respectively arranged through the plurality of mounting plates along a thickness direction.

[0011] Preferably, a positioning hole is provided in the middle of the bracket, and the positioning hole is arranged through the bracket along the thickness direction.

[0012] Preferably, a plurality of the air injection pipes are connected to the annular pipeline.

[0013] The above solution of the utility model includes at least the following beneficial effects:

[0014] The bracket is installed on a carrier, which is a probe station. The workpiece to be tested is then placed on the probe station, which is a chip. The probe holder on the bracket passes through the bracket and is plugged into the chip to start testing. During the test, multiple jet tubes spray flame-retardant gas toward the chip to isolate the air, thereby preventing ignition during high-voltage testing.

[0015] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0017] Figure 1 It is a schematic diagram of the structure of a bracket for preventing ignition during high-voltage testing provided in an embodiment of the utility model;

[0018] Figure 2 yes Figure 1 Schematic diagram of the AA cross-section structure.

[0019] Description of Figure Numbers:

[0020] 1. Bracket, 2. Jet pipe;

[0021] 101. annular duct, 102. air inlet, 103. mounting plate, 104. mounting hole, 105. positioning hole.

[0022] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0023] The embodiments of the utility model are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the utility model, and cannot be understood as limiting the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the utility model.

[0024] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "circumferential", "radial" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0025] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0026] In the present invention, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0027] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0028] The bracket for preventing high-voltage test sparking according to an embodiment of the utility model will be described in detail below with reference to the accompanying drawings.

[0029] See also Figures 1-2 In this embodiment, it includes: a bracket 1, which is arranged on a carrier, and the top of the bracket 1 is suitable for placing a probe rack, and the probe rack extends to the bottom of the bracket 1 and is plugged into and matched with an external workpiece; a plurality of jet tubes 2, which are arranged around the bottom of the bracket 1 at equal intervals, and the plurality of jet tubes 2 are suitable for spraying flame-retardant gas to the external workpiece to isolate the air around the external workpiece; the bracket 1 is installed on a carrier, the above-mentioned carrier is a probe station, and then the workpiece to be tested is placed on the probe station, the above-mentioned workpiece is a chip, and the probe rack on the bracket 1 passes through the bracket 1 and is plugged into and matched with the chip to start testing, and during the test, the plurality of jet tubes 2 spray flame-retardant gas toward the chip to isolate the air, thereby preventing ignition during high-voltage testing, and the above-mentioned bracket 1 is made of PVC material, so that the bracket 1 plays an insulating role.

[0030] In this embodiment, an annular pipe 101 is provided inside the bracket 1; an air inlet 102 is provided at the top of the bracket 1, and the air inlet 102 passes through the annular pipe 101 and is connected to the annular pipe 101; the air inlet 102 is externally connected to a flame-retardant gas device so that the external flame-retardant gas device can transport flame-retardant gas to the annular pipe 101.

[0031] In this embodiment, a plurality of mounting plates 103 are provided on the outer circumference of the bracket 1, and the plurality of mounting plates 103 are arranged on the outer circumference of the bracket 1 at equal intervals; a plurality of mounting holes 104 are respectively provided in the plurality of mounting plates 103, and the plurality of mounting holes 104 are respectively arranged through the thickness direction of the plurality of mounting plates 103; the bracket 1 is installed by firstly attaching the plurality of mounting plates 103 to the probe station, and then respectively passing bolts or screws through the plurality of mounting holes 104 to fix them to the probe station, so that the bracket 1 is installed on the probe station, so that the bracket 1 will not be offset during the test.

[0032] In this embodiment, a positioning hole 105 is provided in the middle of the bracket 1 , and the positioning hole 105 is arranged through the thickness direction of the bracket 1 ; the test end of the probe holder passes through the positioning hole 105 and is plugged into the chip to be tested.

[0033] In this embodiment, a plurality of injection pipes 2 are connected to the annular duct 101 , and the flame-retardant gas in the annular duct 101 is injected from the plurality of injection pipes 2 onto the chip, thereby isolating the air around the chip.

[0034] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0035] The above description is only a preferred embodiment of the utility model, and does not limit the patent scope of the utility model. All equivalent structural changes made by using the contents of the utility model specification and drawings under the utility model concept, or directly / indirectly used in other related technical fields are included in the patent protection scope of the utility model.

Claims

1. A bracket for preventing sparks during high voltage testing, characterized in that: include: A bracket, the bracket is arranged on the carrier, and the top of the bracket is suitable for placing a probe rack, and the probe rack extends to the bottom of the bracket and is plugged and matched with an external workpiece; A plurality of jet pipes are arranged at equal intervals around the bottom of the bracket, and the plurality of jet pipes are suitable for spraying flame-retardant gas to the external workpiece to isolate the air around the external workpiece.

2. A bracket for preventing high voltage test sparks according to claim 1, characterized in that: An annular pipeline is arranged inside the support.

3. A bracket for preventing high voltage test sparks according to claim 2, characterized in that: An air inlet is provided on the top of the bracket, and the air inlet passes through the annular pipe and is connected to the annular pipe.

4. A bracket for preventing high voltage test sparks according to claim 1, characterized in that: The outer circumference of the bracket is provided with a plurality of mounting plates, and the plurality of mounting plates are arranged at equal intervals on the outer circumference of the bracket.

5. A bracket for preventing high voltage test sparks according to claim 4, characterized in that: A plurality of mounting holes are respectively arranged in the plurality of mounting plates, and the plurality of mounting holes are respectively arranged through the plurality of mounting plates in the thickness direction.

6. A bracket for preventing high voltage test sparks according to claim 1, characterized in that: A positioning hole is provided in the middle of the bracket, and the positioning hole is arranged through the bracket along the thickness direction.

7. A bracket for preventing high voltage test sparks according to claim 2, characterized in that: A plurality of the air injection pipes are communicated with the annular pipeline.