Dual-channel quartz resonance humidity-sensitive device
By creating separating grooves on the upper and lower surfaces of a quartz substrate, the thickness of the non-electrode region is changed, increasing the difference in cutoff frequencies between the electrode and non-electrode regions. This solves the vibration interference problem of traditional quartz resonators and enables precise humidity measurement and improved stability in special environments.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHENGSIPAI (SUZHOU) INTELLIGENT EQUIP TECH CO LTD
- Filing Date
- 2025-04-03
- Publication Date
- 2026-05-01
AI Technical Summary
Traditional single-channel quartz resonant humidity sensors are susceptible to large measurement errors due to external environmental interference such as temperature, while dual-channel quartz resonant humidity sensors suffer from severe vibration interference, affecting their performance.
A dual-channel quartz resonant humidity sensor is designed. By creating separating grooves on the upper and lower surfaces of the quartz substrate, the thickness of the non-electrode region is changed, the difference in cutoff frequency between the electrode region and the non-electrode region is increased, vibration coupling and interference are reduced, and a thermistor is used to sense temperature changes.
It enables accurate humidity measurement in special environments, improves the operational stability and reliability of the device, and reduces processing costs.
Smart Images
Figure CN224189937U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to a dual-channel quartz resonant humidity sensor. Background Technology
[0002] Quartz resonant humidity sensors are crucial for measuring humidity in extreme environments such as aerospace, military semiconductors, and nuclear reactors. Traditional single-channel quartz resonant humidity sensors are susceptible to interference from external environmental factors such as temperature. When the external environment changes significantly, the resonant frequency of the quartz resonator changes noticeably. Random fluctuations in ambient temperature and other factors can lead to significant errors in the measurement results. Dual-channel quartz resonant humidity sensors can effectively eliminate frequency fluctuations caused by environmental changes through difference frequency modulation. However, traditional dual-channel quartz resonant humidity sensors suffer from severe vibration interference. When the vibration interference between the two channels is significant, the difference frequency modulation cannot accurately reflect the measured value, thus severely impacting the performance of the dual-channel quartz resonant humidity sensor.
[0003] Therefore, to address the above problems, a novel device structure is proposed that can suppress the vibration coupling of a dual-channel quartz resonant humidity sensor, thus meeting the requirements for humidity measurement in special environments. Utility Model Content
[0004] The purpose of this invention is to provide a dual-channel quartz resonant humidity sensor that can be used for accurate humidity measurement in special environments, with good working stability and higher reliability.
[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows:
[0006] This invention provides a dual-channel quartz resonant humidity sensor, comprising a quartz substrate, a first vibrating electrode group, a second vibrating electrode group, and a thermistor, wherein:
[0007] The first vibration electrode group includes a first upper electrode and a first lower electrode. The first upper electrode and the first lower electrode with the same shape are respectively disposed on the upper surface and the lower surface of the quartz substrate, and the first upper electrode and the first lower electrode overlap vertically in the axial direction. The first upper electrode and the first lower electrode are connected to the external wire harness through the pads, and the first upper electrode and the first lower electrode are connected to each pad through the connecting electrode.
[0008] The second vibration electrode group includes a second upper electrode and a second lower electrode. The second upper electrode and the second lower electrode with the same shape are respectively disposed on the upper surface and the lower surface of the quartz substrate, and the second upper electrode and the second lower electrode overlap vertically in the axial direction. The second upper electrode and the second lower electrode are connected to the external wire harness through the pads, and the second upper electrode and the second lower electrode are connected to each pad through the connecting electrode.
[0009] A first separating groove is formed on the upper surface of the quartz substrate, and the first separating groove is disposed between the first upper electrode and the second upper electrode. A second separating groove is formed on the lower surface of the quartz substrate, and the second separating groove is disposed between the first lower electrode and the second lower electrode.
[0010] A groove is formed on the upper surface of the quartz substrate, and the thermistor is embedded in the groove. The two ends of the groove are provided with pads, and the two ends of the thermistor are electrically connected to the pads.
[0011] Optionally, each electrode in the first and second vibration electrode groups is circular, and has the same diameter and thickness.
[0012] Optionally, the length of the first separating groove is not less than the diameter of the first upper electrode and the second upper electrode, and the length of the second separating groove is not less than the diameter of the second upper electrode and the second lower electrode.
[0013] Optionally, the depth of the first dividing groove is 30 to 50 times the thickness of the first upper electrode and the second upper electrode.
[0014] Optionally, the quartz substrate is in the shape of a disc, and the first and second separating grooves are arranged along the radial direction of the quartz substrate, and the lengths of the first and second separating grooves are less than the diameter of the quartz substrate.
[0015] Optionally, the first and second separating grooves are perpendicular to the line connecting the center point of the first vibration electrode group and the center point of the second vibration electrode group.
[0016] Optionally, the thermistor is a platinum resistance thermometer.
[0017] Due to the application of the above technical solution, this utility model has the following advantages compared with the prior art:
[0018] This invention relates to a dual-channel quartz resonator humidity sensor, which is based on the energy trapping theory of quartz crystals. This theory states that only waves with frequencies higher than the cutoff frequency can propagate on a quartz substrate. By creating recessed dividing grooves in the non-electrode areas on the upper and lower surfaces of the quartz substrate, the thickness of the non-electrode areas can be altered, thus changing the cutoff frequency of the non-electrode areas and increasing the difference between the cutoff frequencies of the electrode and non-electrode areas. This prevents waves from propagating from one vibrating electrode group to the electrode area of another vibrating electrode group, thereby reducing vibration coupling and interference in the dual-channel quartz resonator. The device features a simple structure, low manufacturing cost, and effectively solves the vibration interference problem of traditional dual-channel quartz resonators. Attached Figure Description
[0019] The following sections will describe some specific embodiments of the present invention in a detailed manner by way of example and not limitation, with reference to the accompanying drawings. The same reference numerals in the drawings denote the same or similar parts or components. Those skilled in the art should understand that these drawings are not necessarily drawn to scale. In the drawings:
[0020] Figure 1 This is a schematic diagram of the overall structure of a dual-channel quartz resonant humidity sensor according to an embodiment of the present invention;
[0021] Figure 2 This is a schematic diagram of the upper surface of a dual-channel quartz resonant humidity sensor according to an embodiment of the present invention;
[0022] Figure 3 This is a schematic diagram of the lower surface of a dual-channel quartz resonant humidity sensor according to an embodiment of the present invention.
[0023] The annotations in the attached figures are explained as follows:
[0024] 1. Quartz substrate; 11. First dividing groove; 12. Second dividing groove;
[0025] 21. First upper electrode; 22. First lower electrode;
[0026] 31. Second upper electrode; 32. Second lower electrode;
[0027] 4. Thermistor;
[0028] 5. Connect the electrodes;
[0029] 6. Solder pads. Detailed Implementation
[0030] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.
[0031] In the description of this utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.
[0032] Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.
[0033] This embodiment provides a dual-channel quartz resonant humidity sensor, such as... Figures 1 to 3 As shown, it includes a quartz substrate 1, a first vibrating electrode group, a second vibrating electrode group, and a thermistor 4, wherein:
[0034] The first vibration electrode group includes a first upper electrode 21 and a first lower electrode 22. The first upper electrode 21 and the first lower electrode 22 with the same shape are respectively disposed on the upper surface and the lower surface of the quartz substrate 1, and the first upper electrode 21 and the first lower electrode 22 overlap vertically in the axial direction. The first upper electrode 21 and the first lower electrode 22 are connected to the external wire harness through the pads 6, and the first upper electrode 21 and the first lower electrode 22 are connected to each pad 6 through the connecting electrode 5.
[0035] The second vibration electrode group includes a second upper electrode 31 and a second lower electrode 32. The second upper electrode 31 and the second lower electrode 32 with the same shape are respectively disposed on the upper surface and the lower surface of the quartz substrate 1, and the second upper electrode 31 and the second lower electrode 32 overlap vertically in the axial direction. The second upper electrode 31 and the second lower electrode 32 are connected to the external wire harness through the pads 6, and the second upper electrode 31 and the second lower electrode 32 are connected to each pad 6 through the connecting electrode 5.
[0036] The upper surface of the quartz substrate 1 is provided with a first separating groove 11, which is disposed between the first upper electrode 21 and the second upper electrode 31. The lower surface of the quartz substrate 1 is provided with a second separating groove 12, which is disposed between the first lower electrode 22 and the second lower electrode 32.
[0037] A groove is formed on the upper surface of the quartz substrate 1, and the thermistor 4 is embedded in the groove. Pads 6 are provided at both ends of the groove, and the two ends of the thermistor 4 are electrically connected to the pads 6. (The thermistor 4 is a platinum resistance thermometer. The thermistor 4 can sense the surface temperature of the quartz substrate 1 and can be used to measure ambient temperature, or to obtain the dew point temperature of the measured high-temperature gas when the device is used as a dew point sensor component.)
[0038] like Figure 2 and Figure 3 As shown, each electrode in the first and second vibration electrode groups is circular, and has the same diameter and thickness.
[0039] The length of the first separating groove 11 is not less than the diameter of the first upper electrode 21 and the second upper electrode 31, the length of the second separating groove 12 is not less than the diameter of the second upper electrode 31 and the second lower electrode 32, and the depth of the first separating groove 11 is 30 to 50 times the thickness of the first upper electrode 21 and the second upper electrode 31.
[0040] Optionally, the quartz substrate 1 is in the shape of a disc, and the first separating groove 11 and the second separating groove 12 are arranged radially along the quartz substrate 1, and the length of the first separating groove 11 and the second separating groove 12 is less than the diameter of the quartz substrate 1. The first separating groove 11 and the second separating groove 12 are perpendicular to the line connecting the center point of the first vibrating electrode group and the center point of the second vibrating electrode group.
[0041] The cutoff frequency of the non-electrode region of quartz substrate 1 is obtained according to equation (1).
[0042] (1)
[0043] In the formula, The cutoff frequency of the non-electrode region of quartz substrate 1. To enhance the shear modulus of thickness, For a quartz substrate with density 1, The thickness of quartz substrate 1 is given.
[0044] The cutoff frequency of electrode region 1 of quartz substrate is obtained according to equation (2).
[0045] (2)
[0046] In the formula, The cutoff frequency of electrode region 1 on the quartz substrate. To enhance the shear modulus of thickness, For a quartz substrate with density 1, The thickness of quartz substrate 1 is given. The mass ratio of the vibrating electrode to the quartz substrate 1 is given.
[0047] Based on the relationship between the thickness and cutoff frequency of the electrode area (electrode) and non-electrode area on the quartz substrate 1, a suitable size of separation groove is selected. That is, separation grooves are opened in the non-electrode area on the upper and lower surfaces of the quartz substrate 1 to change the cutoff frequency of the non-electrode area of the quartz substrate 1, increase the difference in cutoff frequency between the electrode area and the non-electrode area of the quartz substrate 1, thereby reducing the resonant wave interference generated by the two electrode areas.
[0048] In one example, the resonant frequency of the quartz substrate 1 is 10 MHz, the diameter is 10 mm, and the thickness is 0.166 mm. The separation grooves formed on the upper and lower surfaces of the quartz substrate 1 have a length of 3.5 mm, a width of 0.1 mm, and a thickness of 0.008 mm. The separation grooves ensure that the quartz substrate 1 has sufficient mechanical strength while effectively reducing vibration interference between the two vibration electrode groups (i.e., the two channels). There are two electrodes on each of the upper and lower surfaces of the quartz substrate 1 distributed on both sides of the separation groove. Each electrode has the same shape and size, with a diameter of 2.6 mm and a thickness of 200 nm. Each electrode is connected to a pad 6 through a connecting electrode 5, which has a width of 0.3 mm and a thickness of 200 nm.
[0049] In summary, the dual-channel quartz resonator humidity sensor of this invention is based on the energy trapping theory of quartz crystals, which states that only waves with frequencies higher than the cutoff frequency can propagate on the quartz substrate 1. By creating recessed dividing grooves in the non-electrode areas on the upper and lower surfaces of the quartz substrate 1 to change the thickness of the non-electrode areas, the cutoff frequency of the non-electrode areas of the quartz substrate 1 can be changed, increasing the difference in cutoff frequencies between the electrode areas and non-electrode areas of the quartz substrate 1. This prevents waves from being transmitted from the electrode area of one vibrating electrode group on the quartz substrate 1 to the electrode area of the other vibrating electrode group, thereby reducing the vibration coupling and interference of the dual-channel quartz resonator. The device has a simple structure, low processing cost, and effectively solves the vibration interference problem of traditional dual-channel quartz resonators.
[0050] The above embodiments are only for illustrating the technical concept and features of this utility model. Their purpose is to enable those skilled in the art to understand the content of this utility model and implement it accordingly. They should not be used to limit the protection scope of this utility model. All equivalent changes or modifications made in accordance with the spirit and essence of this utility model should be included within the protection scope of this utility model.
Claims
1. A dual-channel quartz resonant humidity sensor, characterized in that, Includes a quartz substrate, a first vibrating electrode group, a second vibrating electrode group, and a thermistor, wherein: The first vibration electrode group includes a first upper electrode and a first lower electrode. The first upper electrode and the first lower electrode with the same shape are respectively disposed on the upper surface and the lower surface of the quartz substrate, and the first upper electrode and the first lower electrode overlap vertically in the axial direction. The first upper electrode and the first lower electrode are connected to the external wire harness through the pads, and the first upper electrode and the first lower electrode are connected to each pad through the connecting electrode. The second vibration electrode group includes a second upper electrode and a second lower electrode. The second upper electrode and the second lower electrode with the same shape are respectively disposed on the upper surface and the lower surface of the quartz substrate, and the second upper electrode and the second lower electrode overlap vertically in the axial direction. The second upper electrode and the second lower electrode are connected to the external wire harness through the pads, and the second upper electrode and the second lower electrode are connected to each pad through the connecting electrode. A first separating groove is formed on the upper surface of the quartz substrate, and the first separating groove is disposed between the first upper electrode and the second upper electrode. A second separating groove is formed on the lower surface of the quartz substrate, and the second separating groove is disposed between the first lower electrode and the second lower electrode. A groove is formed on the upper surface of the quartz substrate, and the thermistor is embedded in the groove. The two ends of the groove are provided with pads, and the two ends of the thermistor are electrically connected to the pads.
2. The dual-channel quartz resonant humidity sensor according to claim 1, characterized in that, Each electrode in the first and second vibration electrode groups is circular, and has the same diameter and thickness.
3. The dual-channel quartz resonant humidity sensor according to claim 2, characterized in that, The length of the first dividing groove is not less than the diameter of the first upper electrode and the second upper electrode, and the length of the second dividing groove is not less than the diameter of the second upper electrode and the second lower electrode.
4. The dual-channel quartz resonant humidity sensor according to claim 3, characterized in that, The depth of the first dividing groove is 30 to 50 times the thickness of the first upper electrode and the second upper electrode.
5. The dual-channel quartz resonant humidity sensor according to any one of claims 1 to 4, characterized in that, The quartz substrate is in the shape of a disc, and the first and second separating grooves are arranged along the radial direction of the quartz substrate, and the length of the first and second separating grooves is less than the diameter of the quartz substrate.
6. The dual-channel quartz resonant humidity sensor according to claim 5, characterized in that, The first and second separating grooves are perpendicular to the line connecting the center point of the first vibration electrode group and the center point of the second vibration electrode group.
7. The dual-channel quartz resonant humidity sensor according to claim 1, characterized in that, The thermistor used is a platinum resistance thermometer.