Scanning probe microscope optical tracking structure and scanning probe microscope

Abstract

The utility model provides a scanning probe microscope optical tracking structure and a scanning probe microscope, and the structure comprises a tracking assembly which comprises a detection light source, a probe, a detector, a reflector, a first Z-direction displacement assembly, a second Z-direction displacement assembly, and an XY-direction displacement assembly. The position of a light beam irradiated on the detector can be kept unchanged in the process that the probe moves in the Z direction, and the position change of the light beam on the detector caused by the movement of the probe can be eliminated when the probe is close to or far away from a detected object, so that the detection of the detected object cannot be interfered when the probe is close to or far away from the detected object; besides, the first Z-direction displacement assembly can be utilized to realize rapid movement of the probe along the Z direction, and the second Z-direction displacement assembly is matched, so that rapid and accurate Z-direction position adjustment of the probe can be realized.

Description

An optical tracking structure for a scanning probe microscope and a scanning probe microscope Technical Field

[0001] This utility model belongs to the field of scanning probe microscope technology, specifically relating to an optical tracking structure for a scanning probe microscope and a scanning probe microscope. Background Technology

[0002] Scanning probe microscopy (SPM) measures the surface shape of a sample by bringing a probe close to or into contact with the sample surface. Its applications are wide-ranging, including the analysis of surface structure, physical properties, chemical reactions, nanofabrication, and information storage characteristics of conductors, semiconductors, insulators, biological materials, organic materials, and nanomaterials. Most existing SPMs employ a method known as the optical lever method for detecting the analyte. Specifically, the optical lever method involves shining a light beam onto the probe arm and detecting changes in the position of the reflected beam using a detector. This allows for the detection of the probe's position and / or orientation, thereby obtaining the position of the probe tip and / or the interaction force between the tip and the analyte, ultimately enabling the detection of the corresponding surface properties of the analyte.

[0003] Before or during the detection of the object under test, it is necessary to adjust the relative position between the probe and the object, especially the distance between them, to ensure contact or to keep the relative position within a preset range so that the interaction force between the probe tip and the object is within a preset range. However, because scanning probe microscopes use optical levers for detection, changes in probe position as it moves closer to or further away from the object cause changes in the optical path. This results in the beam not illuminating the same location on the detector, making it impossible to distinguish the signals from the probe's proximity or distance from the object, or the signals corresponding to the interaction force between the object and the probe, ultimately preventing the detection from being completed.

[0004] The information disclosed in the background section is only intended to enhance the understanding of the background of this utility model, and therefore may contain information that does not constitute prior art known to those skilled in the art. Summary of the Invention

[0005] To address the problem in existing technologies where the probe's proximity or distance from the object interferes with the detection of the object, this application provides an optical tracking structure for a scanning probe microscope, including a tracking component. The tracking component comprises a detection light source, a probe, a detector, a reflector, a first Z-axis displacement component, a second Z-axis displacement component, and an XY-axis displacement component. The second Z-axis displacement component and the XY-axis displacement component are disposed at the moving end of the first Z-axis displacement component. The detection light source is disposed at the moving end of the XY-axis displacement component. The probe, detector, and reflector are disposed at the moving end of the second Z-axis displacement component. The light beam emitted by the detection light source passes through at least the probe and the reflector and is incident on the detector. The detector is configured to generate a corresponding signal based on the position of the light incident upon it.

[0006] According to one embodiment of this application, the tracking component further includes an objective lens, and the light beam emitted by the detection light source illuminates the probe at least through the objective lens, the objective lens being disposed at the moving end of the XY displacement component.

[0007] According to one embodiment of this application, it further includes an observation assembly, which includes an observation lens and at least one of a camera or an eyepiece; the observation lens is disposed between the camera or eyepiece and the probe;

[0008] The observation lens is configured to enable the probe to be imaged in the camera, or to be imaged in the human eye via the eyepiece.

[0009] According to one embodiment of this application, the observation assembly further includes an observation light source, the light beam emitted by the observation light source illuminating the probe.

[0010] According to one embodiment of this application, the observation assembly further includes a first beam splitter, wherein the light beam emitted by the observation light source illuminates the probe at least through the first beam splitter, and the first beam splitter is disposed between the observation lens and the probe.

[0011] According to one embodiment of this application, the observation lens is a focal length adjustable lens.

[0012] And / or,

[0013] The observation assembly further includes a third displacement assembly, wherein the observation lens is disposed at the movable end of the third displacement assembly, and the movable end of the third displacement assembly is configured to be movable along the direction of the optical path in which the observation lens, camera, or eyepiece is located.

[0014] According to one embodiment of this application, the tracking component further includes a second beam splitter, the light beam emitted by the detection light source is irradiated onto the probe by the second beam splitter, the second beam splitter is disposed at the moving end of the XY displacement component; the second beam splitter is disposed between the observation lens and the probe, and the light reflected by the probe passes through at least the second beam splitter and the observation lens and is incident on at least one of the camera or the eyepiece.

[0015] According to one embodiment of this application, the detector may be a four-quadrant detector, a position-sensitive detector, or a camera.

[0016] According to one embodiment of this application, the tracking component further includes a vibration driving device, the probe is connected to the vibration driving device, and the vibration driving device is disposed at the moving end of the second Z-axis displacement component.

[0017] Another aspect of this application provides a scanning probe microscope that uses the optical tracking structure as described above.

[0018] This utility model has at least the following beneficial effects: The scanning probe microscope optical tracking structure provided in this application can ensure that the light beam emitted by the detection light source illuminates the probe in the same direction and keeps its position unchanged during the movement of the probe along the Z-axis, thereby keeping the position of the light beam on the detector unchanged, thus realizing optical path tracking when the probe moves along the Z-axis. This eliminates the positional change of the light beam on the detector caused by the probe movement when the probe approaches or moves away from the object being measured, ensuring that the probe does not interfere with the detection of the object being measured when it approaches or moves away from the object being measured. In addition, the first Z-axis displacement component can be used to realize the rapid movement of the probe along the Z-axis, and in conjunction with the second Z-axis displacement component, the Z-axis position adjustment of the probe can be realized quickly and accurately. Attached Figure Description

[0019] Figure 1 is a schematic diagram of one embodiment of the optical tracking structure of a scanning probe microscope.

[0020] Figure 2 is a schematic diagram of one embodiment of the optical tracking structure of a scanning probe microscope.

[0021] Figure 3 is a schematic diagram of one embodiment of the optical tracking structure of a scanning probe microscope.

[0022] Figure 4 is a schematic diagram of one embodiment of the optical tracking structure of a scanning probe microscope.

[0023] Figure 5 is a schematic diagram of one embodiment of the optical tracking structure of a scanning probe microscope.

[0024] Figure 6 is a schematic diagram of one embodiment of a scanning probe microscope. Detailed Implementation

[0025] To make the objectives and features of this utility model clearer and easier to understand, the specific embodiments of this utility model will be further described below with reference to the accompanying drawings. It should be noted that the drawings are all in a very simplified form and use non-precise ratios, and are only used to facilitate and clearly assist in illustrating the embodiments of this utility model.

[0026] This application provides an optical tracking structure for a scanning probe microscope, including a tracking component. The tracking component enables optical tracking so that when the probe 12 moves, the detection light moves with the probe 12, attempting to keep the position of the detection light on the probe 12 substantially unchanged. Specifically, the tracking component includes a detection light source 11, a probe 12, a detector 13, a mirror 14, a first Z-axis displacement component 15, a second Z-axis displacement component 16, and an XY-axis displacement component 17. The second Z-axis displacement component 16 and the XY-axis displacement component 17 are disposed at the moving end 151 of the first Z-axis displacement component 15, allowing the second Z-axis displacement component 16 and the XY-axis displacement component 17 to move along the Z-direction under the influence of the moving end 151 of the first Z-axis displacement component 15. The detection light source 11 is disposed at the moving end 171 of the XY-axis displacement component 17, so that the detection light source... 11 can move along the XY direction under the drive of the moving end 171 of the XY displacement component 17; the probe 12, detector 13, and reflector 14 are disposed at the moving end 161 of the second Z displacement component 16, so that the relative positions of the probe 12, detector 13, and reflector 14 remain substantially unchanged, and can move along the Z axis under the drive of the moving end 161 of the second Z displacement component 16; the light beam emitted by the detection light source 11 passes through at least the probe 12 and the reflector 14 and enters the detector 13, and the detector 13 is configured to form a corresponding signal according to the position of the light illuminating it.

[0027] Please refer to Figure 1, which illustrates a feasible implementation. The present application will now be further described with reference to Figure 1. The detection light source 11 is indirectly disposed on the moving end 151 of the first Z-axis displacement component 15 via the XY-axis displacement component 17. The probe 12, detector 13, and reflector 14 are indirectly disposed on the moving end 151 of the first Z-axis displacement component 15 via the second Z-axis displacement component 16. Accordingly, the detection light source 11, probe 12, detector 13, and reflector 14 can move along the Z-axis under the drive of the moving end 151 of the first Z-axis displacement component 15; correspondingly, the tracking component as a whole can achieve rapid lifting and lowering in the Z-axis direction to quickly approach or move away from the object being measured. Probe 12, detector 13, and reflector 14 are all disposed on the moving end 161 of the second Z-axis displacement component 16, and can move together along the Z-direction under the drive of the moving end 161 of the second Z-axis displacement component 16. During this movement, the relative positions of probe 12, detector 13, and reflector 14 remain unchanged. Accordingly, the detection unit composed of probe 12, detector 13, and reflector 14 can be raised and lowered in the Z-direction to adjust the position of the detection unit in the Z-direction when detecting the object under test or when precisely adjusting the distance between probe 12 and the object under test. Detection light source 11 is disposed on the moving end 171 of the XY-axis displacement component 17, and can move in the XY-direction under the drive of the moving end 171 of the XY-axis displacement component 17, thereby adjusting the position of the light beam illuminating probe 12.

[0028] In some cases, as shown in Figures 1, 2, and 4, the light beam emitted by the detection light source 11 can be incident on the probe 12 at a preset angle to the Z-direction. Correspondingly, when the detection unit consisting of the probe 12, detector 13, and reflector 14 moves along the Z-direction under the drive of the moving end 161 of the second Z-direction displacement component 16, the detection light source 11 can be moved correspondingly in the XY direction by the moving end 171 of the XY-direction displacement component 17, so that the light beam emitted by the detection light source 11 can illuminate the same position of the probe 2 in the same direction. Combined with the characteristic that the relative position of the detection unit consisting of the probe 12, detector 13, and reflector 14 remains unchanged, the position of the light beam emitted by the detection light source 11 illuminating the detector 13 after being reflected by the probe 12 and the reflector 14 remains unchanged. Thus, when the position of the probe 12 in the Z-direction is adjusted by the moving end 161 of the second Z-direction displacement component 16, the position of the light beam of the detection light source 11 illuminating the detector 13 remains unchanged, which is convenient for data analysis.

[0029] In some cases, as shown in Figures 3 and 5, the light beam emitted by the detection light source 11 can be incident on the probe 12 along the Z-direction. This allows the detection unit consisting of the probe 12, detector 13, and reflector 14 to move along the Z-direction under the drive of the moving end 161 of the second Z-direction displacement component 16. The light beam emitted by the detection light source 11 can illuminate the same position of the probe 2 in the same direction. Combined with the characteristic that the relative positions of the detection unit consisting of the probe 12, detector 13, and reflector 14 remain unchanged, the position of the light beam emitted by the detection light source 11 illuminating the detector 13 after being reflected by the probe 12 and reflector 14 remains unchanged. This ensures that when the position of the probe 12 in the Z-direction is adjusted using the moving end 161 of the second Z-direction displacement component 16, the position of the light beam emitted by the detection light source 11 illuminating the detector 13 remains unchanged, which is beneficial for data analysis.

[0030] In summary, this application provides an optical tracking structure for a scanning probe microscope. During the movement of the probe 12 along the Z-axis, the light beam emitted by the detection light source 11 illuminates the probe 12 in the same direction and maintains a constant position. This ensures that the position of the light beam emitted by the detection light source 11 remains constant after passing through the probe 12 and the reflector 14 and illuminating the detector 13. This achieves optical path tracking as the probe 12 moves along the Z-axis, enabling positional adjustment between the probe 12 and the object under test. When the probe 12 approaches or moves away from the object, the positional variation of the light beam on the detector 13 caused by the movement of the probe 12 is eliminated, ensuring that the probe 12 does not interfere with the detection of the object when it approaches or moves away. Furthermore, the first Z-axis displacement component 15 enables rapid movement of the probe 12 along the Z-axis, and in conjunction with the second Z-axis displacement component 15, rapid and precise Z-axis position adjustment of the probe 12 can be achieved.

[0031] In some cases, the first Z-axis displacement component 15, the second Z-axis displacement component 16, and the XY-axis displacement component 17 can be displacement stages. More specifically, the second Z-axis displacement component 16 and the XY-axis displacement component 17 can further employ piezoelectric displacement devices or piezoelectric blocks to achieve precise displacement. The displacement accuracy of the first Z-axis displacement component 15 can be less than that of the second Z-axis displacement component 16 and the XY-axis displacement component 17, and the displacement range of the first Z-axis displacement component 15 can be greater than that of the second Z-axis displacement component 16 and the XY-axis displacement component 17 to meet a wide range of Z-axis displacement requirements.

[0032] Please refer to Figures 1 to 6. The light beam emitted by the detection light source 11 illuminates the probe arm 121 of the probe 12 and is reflected by the probe arm 121 to the reflector 14 for further reflection to the detector 13.

[0033] In some cases, an objective lens 18 can be further provided to adjust the light beam emitted by the detection light source 11, so that the light beam emitted by the detection light source 11 is at least focused on the probe 12. Specifically, the tracking component may also include an objective lens 18, through which the light beam emitted by the detection light source 11 illuminates the probe 12; the objective lens 18 is disposed at the moving end 171 of the XY displacement component 17, thereby fixing the relative position of the objective lens 18 and the detection light source 11 and moving synchronously.

[0034] In some cases, the optical tracking structure provided in this application may also include an observation component for observing, at least by an external device or human eye, the spot of the light beam emitted by the probe 12 and the detection light source 11 thereon. As one possible implementation, the observation component includes an observation lens 21 and at least one of a camera 221 or an eyepiece 222; the observation lens 21 is disposed between the camera 221 or the eyepiece 222 and the probe, and the observation lens 21 is configured to enable the probe 12 to be imaged in the camera 221 or imaged in the human eye via the eyepiece 222.

[0035] In some cases, a third displacement component can be provided, and its movable end can be configured to move along the direction of the optical path where the observation lens 21, camera 221, or eyepiece 222 is located. The observation lens 21 is placed at the movable end of the third displacement component, so that the movable end of the third displacement component drives the observation lens 21 to move along the optical path direction of the observation lens 21, camera 221, or eyepiece 222, thereby adjusting the position of the observation lens 21 in the optical path. In some cases, a focal length adjustable lens, such as a liquid lens, can also be used as the observation lens 21 to adjust the focal length of the observation lens 21. Through the aforementioned methods, the optical path formed by the observation component can be adjusted when the probe 12 is in different Z-axis positions to achieve clear imaging in the camera 221 or the human eye. In some cases, both a focal length adjustable lens as the observation lens 21 and a third displacement component can be provided to meet the corresponding observation optical path adjustment requirements.

[0036] In some cases, the light entering the camera 221 or eyepiece 222 through the observation lens 21 in the observation optical path can be ambient light reflected by the probe 12. In some cases, an observation light source 23 can be further provided in the observation assembly, and the light beam emitted by the observation light source 23 can illuminate the probe 12 to increase the light entering the camera 221 or eyepiece 222, improve the brightness of the imaging or observed image, and facilitate observation.

[0037] The observation light source 23 can be configured to directly illuminate the probe 12. For example, see Figure 4, which shows an embodiment where the observation light source 23 directly illuminates the probe 12. Alternatively, the optical path of the beam of the observation light source 23 can be adjusted by configuring other optical elements. For example, the observation assembly can also include a first beam splitter 24, through which the beam of the observation light source 23 illuminates the probe 12. The first beam splitter 24 is disposed between the observation lens 21 and the probe 12. See Figure 5, which shows an embodiment in which the beam of the observation light source 23 shares at least part of the optical path with the beam of the observation light source 23 that enters the camera 221 or eyepiece 222 through the observation lens 21. This allows the beam of the observation light source 23 to maintain illumination of the probe 12 even when the position of the probe 12 changes in the Z direction.

[0038] In some cases, the optical tracking structure can be configured so that the tracking component and the observation component share part of the optical path, thereby meeting the corresponding detection requirements. Referring to Figures 3 and 5, several feasible implementations are shown. In one implementation, the tracking component further includes a second beam splitter 19. The light beam emitted from the detection light source 11 is irradiated onto the probe 12 via the second beam splitter 19. The second beam splitter 19 is located at the moving end 171 of the XY displacement component 17. The second beam splitter 19 is positioned between the observation lens 21 and the probe 12. The light reflected from the probe 12 passes through at least the second beam splitter 19 and the observation lens 21 and is incident on at least one of the camera 221 and the eyepiece 222. It should be noted that the light beam emitted from the detection light source 11 can either be reflected by the second beam splitter 19 to irradiate the probe 12, or it can be transmitted through the second beam splitter 19 to irradiate the probe 12. Similarly, the light received by the camera 221 or the eyepiece 222 from the probe 12 can either be transmitted through the second beam splitter 19 or reflected by it.

[0039] Referring to Figure 3, in some cases, the optical paths of the tracking component and the observation component can share the objective lens 18. Specifically, the optical path of the light beam emitted from the detection light source 11 incident on the probe 12 through the objective lens 18, and the optical path of the light reflected from the probe 12 passing through the objective lens 18, the observation lens 21, and entering the camera 221 and the eyepiece 222, are at least substantially coaxial between the objective lens 18 and the probe 12. In some cases, the optical path between the objective lens and the probe 12 can be set along the Z-axis, so that the tracking component and the observation component can both adjust their corresponding optical paths through the objective lens 18. This allows the optical paths of the tracking component and the observation component to be adjusted synchronously through the objective lens 18 when the probe 12 moves along the Z-axis for detection and observation.

[0040] Please refer to Figure 5, which illustrates an embodiment in which an observation light source 23 is provided and the tracking component and the observation component share a portion of the optical path. The observation component includes a first beam splitter 24 to at least partially share the optical path of the light beam emitted from the observation light source 23 incident on the probe 12, and the optical path of the light reflected from the probe 12 incident on the camera 221 or eyepiece 222. A second beam splitter 19 is further incorporated to further share the optical paths of the tracking component and the observation component. This method allows for a further reduction in the size of the optical path, facilitating device miniaturization.

[0041] Detector 13 can be a four-quadrant detector, a position-sensitive detector, or a camera. In other words, detector 13 mainly refers to a device that can convert the position of light shining on it into a corresponding signal. As for the specific selection of detector 13, those skilled in the art can make corresponding configurations based on the concept of this application.

[0042] In some cases, to detect the object being measured, the tip 122 of the probe 12 can be configured either to contact the object or to vibrate in a preset manner. Specifically, the tracking assembly also includes a vibration drive device 110, which is connected to the probe 12. The vibration drive device 110 is located at the moving end 161 of the second Z-axis displacement assembly 16. When the tip 122 needs to be in contact with the object being measured, the vibration drive device 110 does not vibrate; when the tip 122 needs to be configured to vibrate in a preset manner, the vibration drive device 110 vibrates accordingly, thereby driving the tip 122 of the probe 12 to vibrate in the preset manner. The vibration drive device 110 can be made of piezoelectric material and driven by voltage or current for easy control and use.

[0043] Please refer to Figure 6, which illustrates a scanning probe microscope using the optical tracking structure provided in this application. The tracking component is mounted on a mounting bracket 4. Specifically, the tracking component can be mounted by installing a first Z-axis displacement component 15 on the mounting bracket 4. For the mounting methods of the various components in the tracking component, please refer to the foregoing description, which will not be repeated here. A sample stage 3 can also be mounted on the mounting bracket 4 to support the analyte. In some cases, the analyte can also be moved to adjust the relative position of the analyte and the probe 12, facilitating the detection of the target area.

[0044] Referring to Figure 6, in some cases, an observation component can also be set up to observe the object under test or the probe 12. Accordingly, at least one of the camera 221 or the objective lens 222, as well as the observation lens 21, can be mounted on the mounting bracket 4. It should be noted that in some cases, the observation lens 21 can move along the optical path between the probe 12 and the camera 221 or the objective lens 222. Accordingly, when the observation lens 21 is located in the Z-direction portion of the optical path between the probe 12 and the camera 221 or the objective lens 222, the observation lens 21 can be mounted on the moving end of the third Z-direction displacement component, and the third Z-direction displacement component can be mounted on the mounting bracket 4, thereby enabling the observation lens 21 to move along the Z-direction to adjust the imaging effect of the camera 221 or the human eye through the objective lens 222.

[0045] In some cases, the moving end 171 of the XY displacement component 17 may be provided with a light-transmitting hole 172, and the light reflected by the probe 12 passes through at least the light-transmitting hole 172, the observation lens 21 and enters at least one of the camera 221 or the eyepiece 222.

[0046] The basic principles, main features, and advantages of this utility model have been shown and described above. Therefore, the above are merely embodiments of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are only the principles of this utility model. Without departing from the spirit and scope of this utility model, this utility model also includes various equivalent changes and modifications, all of which fall within the scope of this utility model as claimed.

Claims

1. An optical tracking structure for a scanning probe microscope, characterized in that: The system includes a tracking component comprising a detection light source, a probe, a detector, a reflector, a first Z-axis displacement component, a second Z-axis displacement component, and an XY-axis displacement component. The second Z-axis displacement component and the XY-axis displacement component are disposed at the moving end of the first Z-axis displacement component. The detection light source is disposed at the moving end of the XY-axis displacement component. The probe, detector, and reflector are disposed at the moving end of the second Z-axis displacement component. The light beam emitted by the detection light source passes through at least the probe and the reflector and is incident on the detector. The detector is configured to generate a corresponding signal based on the position of the light incident upon it.

2. The scanning probe microscope optical tracking structure as described in claim 1, characterized in that: The tracking component also includes an objective lens, and the light beam emitted by the detection light source illuminates the probe at least through the objective lens. The objective lens is disposed at the moving end of the XY displacement component.

3. The scanning probe microscope optical tracking structure as described in claim 1, characterized in that: It also includes an observation component, which includes an observation lens and at least one of a camera or an eyepiece; the observation lens is disposed between the camera or eyepiece and the probe; the observation lens is configured to enable the probe to image in the camera or to image in the human eye via the eyepiece.

4. The scanning probe microscope optical tracking structure as described in claim 3, characterized in that: The observation assembly also includes an observation light source, the light beam emitted by which illuminates the probe.

5. The scanning probe microscope optical tracking structure as described in claim 4, characterized in that: The observation assembly further includes a first beam splitter, wherein the light beam emitted by the observation light source illuminates the probe at least through the first beam splitter, and the first beam splitter is disposed between the observation lens and the probe.

6. The scanning probe microscope optical tracking structure as described in claim 3, characterized in that: The observation lens is a focal length adjustable lens, and / or the observation assembly further includes a third displacement assembly, the observation lens being disposed at the moving end of the third displacement assembly, the moving end of the third displacement assembly being configured to be movable along the direction of the optical path where the observation lens, camera, or eyepiece is located.

7. The scanning probe microscope optical tracking structure as described in claim 3, characterized in that: The tracking component further includes a second beam splitter, through which the light beam emitted by the detection light source is irradiated onto the probe. The second beam splitter is disposed at the moving end of the XY displacement component. The second beam splitter is disposed between the observation lens and the probe, and the light reflected by the probe passes through at least the second beam splitter and the observation lens and is incident on at least one of the camera or the eyepiece.

8. The scanning probe microscope optical tracking structure as described in claim 1, characterized in that: The detector can be a four-quadrant detector, a position-sensitive detector, or a camera.

9. The scanning probe microscope optical tracking structure as described in claim 1, characterized in that: The tracking component further includes a vibration driving device, and the probe is connected to the vibration driving device in a transmission manner. The vibration driving device is disposed at the moving end of the second Z-axis displacement component.

10. A scanning probe microscope, characterized in that: Use the optical tracking structure as described in any one of claims 1-9.

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