Material transfer device for an etching machine

Abstract

The utility model relates to etching machine technical field, especially relates to a material transfer device of etching machine, including etching support frame, its characterized in be equipped with first transmission module in the left side of etching support frame, it is equipped with second transmission module in its right side, be equipped with etching module between first transmission module and second transmission module, be equipped with transfer module in the rear of etching module, the transfer module includes first sliding limit guide rail, second sliding limit guide rail, first sliding limit guide rail, second sliding limit guide rail all lay on a support vertical board, the support vertical board is fixed in the inside of etching support frame, on first sliding limit guide rail, second sliding limit guide rail sliding clamping and set up a sliding support plate, a material transfer device of etching machine can realize the quick transfer to frock blue.

Description

Technical Field

[0001] This utility model relates to the field of etching machine technology, and in particular to a material transfer device for an etching machine. Background Technology

[0002] Etching machines are essential equipment in semiconductor manufacturing, electronic component production, and metal processing. They remove the surface layer of materials using chemical or physical methods to form precise patterns or structures. During the etching process, the material is placed in a tooling basket, and the process involves transferring the basket to achieve heating, etching, and cleaning. However, current etching machine material transfer devices suffer from low transfer efficiency. Summary of the Invention

[0003] The purpose of this utility model is to provide a material transfer device for an etching machine, which can realize the rapid transfer of tooling baskets.

[0004] To achieve the above objectives, the technical solution of this utility model is as follows:

[0005] A material transfer device for an etching machine includes an etching support frame, a first conveying module on the left side of the etching support frame, a second conveying module on the right side of the etching support frame, an etching module between the first conveying module and the second conveying module, and a transfer module behind the etching module.

[0006] The transfer module includes a first sliding limit guide rail and a second sliding limit guide rail. Both the first and second sliding limit guide rails are laid on a support plate. The support plate is fixed inside the etching support frame. A sliding support plate is slidably engaged on the first and second sliding limit guide rails.

[0007] A lifting cylinder is fixed on the sliding support plate, an L-shaped bracket is fixed on the slider of the lifting cylinder, and a lifting bracket is fixed vertically downward on the L-shaped bracket. The lifting bracket is located above the etching module and includes several lifting hooks.

[0008] As an improvement, several proximity switches are provided on the side wall of the cylinder of the lifting cylinder, and a metal detection body adapted to the proximity switches is provided on the slider of the lifting cylinder.

[0009] As an improvement: a transmission rack is provided between the first sliding limit guide rail and the second sliding limit guide rail, and the transmission rack is fixed to the support plate;

[0010] A drive motor is horizontally mounted on the sliding support plate, and a drive gear that meshes with a drive rack is fixed on the rotor of the drive motor.

[0011] As an improvement: the first transmission module includes a first transmission bracket, the first transmission bracket is fixed on the left side of the etching support frame, a first transmission belt is rotatably mounted on the first transmission bracket, and a first support groove is slidably mounted on the first transmission bracket;

[0012] A first connecting block is fixed on the first transmission belt body. The first connecting block is connected to the bottom of the first support groove. A first limit switch is provided at the left end of the first transmission bracket, and a second limit switch is provided at its right end. A first contact plate is fixed at the bottom of the first support groove.

[0013] As an improvement: the second transmission module includes a second transmission bracket, which is fixed to the right side of the etching support frame. A second transmission belt is rotatably mounted on the second transmission bracket, and a second support groove is slidably engaged on the second transmission bracket.

[0014] A second connecting block is fixed on the second transmission belt body. The second connecting block is connected to the bottom of the second support groove. A fourth limit switch is provided at the left end of the second transmission bracket, and a third limit switch is provided at its right end. A second contact plate is fixed at the bottom of the second support groove.

[0015] In summary, this utility model has the following beneficial effects:

[0016] 1. Through the cooperation of the transfer module and the first and second conveying modules, the tooling basket can be quickly transferred from outside the etching machine to the corresponding tank. After etching is completed, it can be quickly transferred out of the etching machine.

[0017] 2. The lifting height of the lifting hook can be precisely controlled by the combination of proximity switch and lifting cylinder. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in this utility model, the accompanying drawings used in the description of the embodiments or prior art will be briefly introduced below.

[0019] Figure 1 This is a schematic diagram of the overall structure of a material transfer device for an etching machine;

[0020] Figure 2 This is a partial structural diagram of a material transfer device for an etching machine;

[0021] Figure 3 for Figure 2 Schematic diagram of part A in the middle;

[0022] Figure 4 This is a schematic cross-sectional view of a material transfer device for an etching machine.

[0023] Figure 5 for Figure 4 Schematic diagram of Part B in the middle section;

[0024] Figure 6 for Figure 4 Schematic diagram of the structure of part C;

[0025] The components include: 1. Etching support frame; 2. First sliding limit guide rail; 3. Second sliding limit guide rail; 4. Support plate; 5. Sliding support plate; 6. Lifting cylinder; 7. L-shaped bracket; 8. Lifting bracket; 9. Lifting hook; 10. Proximity switch; 11. Metal detector; 12. Transmission rack; 13. Transmission motor; 14. First transmission bracket; 15. First transmission belt; 16. First support groove; 17. First docking block; 18. First limit switch; 19. Second limit switch; 20. First contact plate; 21. Second transmission bracket; 22. Second transmission belt; 23. Second support groove; 24. Second docking block; 25. Third limit switch; 26. Fourth limit switch; 27. Tooling basket. Detailed Implementation

[0026] The present invention will now be described in further detail with reference to the accompanying drawings.

[0027] Please refer to Figures 1-3 A material transfer device for an etching machine includes an etching support frame 1, a first conveying module on the left side of the etching support frame 1, a second conveying module on the right side of the etching support frame 1, an etching module between the first conveying module and the second conveying module, and a transfer module behind the etching module.

[0028] The transfer module includes a first sliding limit guide rail 2 and a second sliding limit guide rail 3. Both the first sliding limit guide rail 2 and the second sliding limit guide rail 3 are laid on a support plate 4. The support plate 4 is fixed inside the etching support frame 1. A sliding support plate 5 is slidably engaged on the first sliding limit guide rail 2 and the second sliding limit guide rail 3.

[0029] A lifting cylinder 6 is fixed on the sliding support plate 5. An L-shaped bracket 7 is fixed on the slider of the lifting cylinder 6. A lifting bracket 8 is fixed vertically downward on the L-shaped bracket 7. The lifting bracket 8 is located above the etching module and includes several lifting hooks 9.

[0030] In this embodiment, through the cooperation of the transfer module and the first and second conveying modules, the tooling basket can be quickly transferred from outside the etching machine to the corresponding tank. After etching is completed, it can be quickly transferred out of the etching machine.

[0031] Several proximity switches 10 are provided on the side wall of the cylinder of the lifting cylinder 6, and metal detectors 11 adapted to the proximity switches 10 are provided on the slider of the lifting cylinder 6. In this embodiment, the lifting height of the lifting hook 9 can be precisely controlled by the cooperation of the proximity switches 10 and the lifting cylinder 6.

[0032] A transmission rack 12 is provided between the first sliding limit guide rail 2 and the second sliding limit guide rail 3, and the transmission rack 12 is fixed on the support plate 4; a transmission motor 13 is horizontally provided on the sliding support plate 5, and a transmission gear that meshes with the transmission rack 12 is fixed on the rotor of the transmission motor 13. In this embodiment, the horizontal displacement of the lifting hook 9 can be adjusted by the cooperation of the transmission motor 13, the transmission gear, and the transmission rack 12.

[0033] Please refer to Figure 4 , Figure 5 The first conveying module includes a first transmission bracket 14, which is fixed to the left side of the etching support frame 1. A first transmission belt 15 is rotatably mounted on the first transmission bracket 14, and a first support groove 16 is slidably engaged on the first transmission bracket 14. A first docking block 17 is fixed on the first transmission belt 15 and connected to the bottom of the first support groove 16. A first limit switch 18 is provided at the left end of the first transmission bracket 14, and a second limit switch 19 is provided at its right end. A first contact plate 20 is fixed at the bottom of the first support groove 16. In this embodiment, the tooling basket 27 can be conveyed into the interior of the etching machine through the first conveying module, and the first support groove 16 is used to place the tooling basket 27.

[0034] Please refer to Figure 4 , Figure 6 The second conveying module includes a second transmission bracket 21, which is fixed to the right side of the etching support frame 1. A second transmission belt 22 is rotatably mounted on the second transmission bracket 21, and a second support groove 23 is slidably engaged on the second transmission bracket 21. A second docking block 24 is fixed on the second transmission belt 22 and connected to the bottom of the second support groove 23. A fourth limit switch 26 is provided at the left end of the second transmission bracket 21, and a third limit switch 25 is provided at its right end. A second contact plate is fixed at the bottom of the second support groove 23. In this embodiment, the tooling basket 27 can be conveyed out from inside the etching machine through the second conveying module, and the second support groove 23 is used to place the tooling basket 27.

[0035] Working principle: The etching material is placed in the tooling basket 27, which is then placed in the corresponding first support groove 16. The first transmission belt 15 rotates. When the first contact plate 20 contacts the second limit switch 19, the first transmission belt 15 stops moving. At this time, the tooling basket 27 is located inside the etching machine. Then, the lifting cylinder 6 is activated to move downwards, and the transmission motor 13 is activated to move the lifting hook 9 to below the docking frame of the tooling basket 27. The lifting cylinder 6 is activated again to move upwards, hooking the tooling basket 27 up. The transmission motor 13 is activated again to realize the translation operation of the tooling basket 27. Repeating the above operation multiple times can realize the steps of heating, etching, and cleaning of the etching material. After etching is completed, the above operation is repeated again. The tooling basket 27 is placed on the second support groove 23, and the second transmission belt 22 is activated. When the second contact plate contacts the third limit switch 25, the second transmission belt 22 stops moving. At this time, the tooling basket 27 is located outside the etching machine.

[0036] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and not to limit it; although the utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications can still be made to the specific implementation of this utility model or equivalent substitutions can be made to some technical features without departing from the spirit of the technical solution of this utility model, and all such modifications and substitutions should be covered within the scope of the technical solution claimed by this utility model.

Claims

1. A material transfer device for an etching machine, comprising an etching support frame, characterized in that, A first conveying module is provided on the left side of the etching support frame, a second conveying module is provided on its right side, an etching module is provided between the first conveying module and the second conveying module, and a transfer module is provided behind the etching module. The transfer module includes a first sliding limit guide rail and a second sliding limit guide rail. Both the first and second sliding limit guide rails are laid on a support plate. The support plate is fixed inside the etching support frame. A sliding support plate is slidably engaged on the first and second sliding limit guide rails. A lifting cylinder is fixed on the sliding support plate, an L-shaped bracket is fixed on the slider of the lifting cylinder, and a lifting bracket is fixed vertically downward on the L-shaped bracket. The lifting bracket is located above the etching module and includes several lifting hooks.

2. The material transfer device for the etching machine according to claim 1, characterized in that, Several proximity switches are provided on the side wall of the cylinder of the lifting cylinder, and a metal detection body adapted to the proximity switches is provided on the slider of the lifting cylinder.

3. The material transfer device for the etching machine according to claim 1, characterized in that, A transmission rack is provided between the first sliding limit guide rail and the second sliding limit guide rail, and the transmission rack is fixed to the support plate; A drive motor is horizontally mounted on the sliding support plate, and a drive gear that meshes with a drive rack is fixed on the rotor of the drive motor.

4. The material transfer device for the etching machine according to claim 1, characterized in that, The first transmission module includes a first transmission bracket, which is fixed to the left side of the etching support frame. A first transmission belt is rotatably mounted on the first transmission bracket, and a first support groove is slidably mounted on the first transmission bracket. A first connecting block is fixed on the first transmission belt body. The first connecting block is connected to the bottom of the first support groove. A first limit switch is provided at the left end of the first transmission bracket, and a second limit switch is provided at its right end. A first contact plate is fixed at the bottom of the first support groove.

5. The material transfer device for the etching machine according to claim 1, characterized in that, The second transmission module includes a second transmission bracket, which is fixed to the right side of the etching support frame. A second transmission belt is rotatably mounted on the second transmission bracket, and a second support groove is slidably mounted on the second transmission bracket. A second connecting block is fixed on the second transmission belt body. The second connecting block is connected to the bottom of the second support groove. A fourth limit switch is provided at the left end of the second transmission bracket, and a third limit switch is provided at its right end. A second contact plate is fixed at the bottom of the second support groove.

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