Liquid delivery system

Abstract

The application relates to a liquid delivery system, wherein the liquid delivery system comprises a liquid supply module, a pressure detection module, an execution module and a control module; the pressure detection module is connected with the liquid supply module and the control module, is used for detecting a pressure value of the liquid supply module in a liquid supply process, and reports the pressure value to the control module; the control module is connected with the pressure detection module and the execution module, is used for controlling the execution module to supplement pressure or release pressure for the pressure in the liquid supply process based on the pressure value. Through the application, the problem that the liquid delivery system cannot be timely adjusted or misoperation leads to abnormality of the liquid delivery system in the prior art through manual pressure monitoring of the liquid delivery system is solved.

Description

Technical Field

[0001] This application relates to the field of liquid transportation, and more particularly to a liquid transportation system. Background Technology

[0002] In semiconductor manufacturing, processes such as thin film deposition require liquid sources to supply raw materials. For example, liquid tetraethyl orthosilicate (TEOS) is needed to provide Si (silicon) for the chemical reaction in thin film deposition. Currently, the pressure stabilization of liquid delivery systems mainly relies on manual monitoring by equipment personnel, who then manually adjust the valves based on the monitoring results. This manual adjustment method has the following problems: personnel may not be able to adjust the valves in a timely manner, and misoperation can easily lead to abnormalities in the manufacturing process, resulting in product scrap. Utility Model Content

[0003] This application provides a liquid delivery system to solve the problem that in the prior art, pressure monitoring of liquid delivery systems is carried out manually, which is prone to problems such as failure to adjust valves in a timely manner or misoperation leading to abnormalities in the liquid delivery system.

[0004] In a first aspect, this application provides a liquid delivery system, the system including a liquid supply module, a pressure detection module, an execution module and a control module;

[0005] The pressure detection module is connected to the liquid supply module and the control module, and is used to detect the pressure value of the liquid supply module during the liquid supply process and report the pressure value to the control module.

[0006] The control module is connected to the pressure detection module and the execution module, and is used to control the execution module to replenish or release pressure during the liquid supply process based on the pressure value.

[0007] Optionally, the liquid supply module includes a source liquid bottle, a buffer bottle, pipelines, and a gas-liquid separation module; wherein, the pipeline includes multiple branch pipelines; one end of the first branch pipeline is an inlet for the propelling gas, and the other end of the first branch pipeline extends into the source liquid bottle; one end of the second branch pipeline extends into the source liquid bottle, and the other end of the second branch pipeline extends into the buffer bottle; one end of the third branch pipeline extends into the buffer bottle and shares one end with the second branch pipeline, and the other end of the third branch pipeline is connected to the first branch pipeline via a three-way valve; one end of the fourth branch pipeline is connected to the first branch pipeline via the three-way valve, and the other end of the fourth branch pipeline is connected to a gas cylinder; the gas-liquid separation module is used to separate the liquid and gas in the buffer bottle and output the liquid; wherein, the liquid and gas in the buffer bottle are liquid and gas pushed from the source liquid bottle to the buffer bottle by the propelling gas.

[0008] Optionally, the pressure detection module includes three sets of pressure sensors. One set of pressure sensors is located at the end of the third branch pipeline near the three-way valve and is used to detect the pressure of the gas pipeline in the control module. Another set of pressure sensors is located at the end of the first branch pipeline near the source liquid bottle and is used to detect the gas phase pressure of the source liquid bottle in the control module. A third set of pressure sensors is located at the end of the third branch pipeline near the buffer bottle and is used to detect the gas phase pressure of the buffer bottle in the control module.

[0009] Optionally, the set of pressure sensors includes two pressure sensors, namely a main pressure sensor and a backup pressure sensor.

[0010] Optionally, the distance between the main pressure sensor and the backup pressure sensor is greater than or equal to 50 mm.

[0011] Optionally, the execution module includes a pressure replenishing unit and a pressure relief unit; the pressure replenishing unit is used to supply gas to the pipeline when the pressure value is lower than a preset low pressure value; the pressure relief unit is used to relieve pressure on the pipeline when the pressure value is higher than a preset high pressure value.

[0012] Optionally, the pressurization unit includes a gas cylinder and a three-way valve; the gas cylinder and the three-way valve are connected through the fourth branch pipeline.

[0013] Optionally, the pressure relief unit includes a main pressure relief valve and a secondary pressure relief valve; the main pressure relief valve and the secondary pressure relief valve are disposed on both sides of the first branch pipeline used to transport the driving gas, and are respectively connected to the first branch pipeline through the branch pipeline.

[0014] Optionally, the main pressure relief valve is a solenoid valve, and the secondary pressure relief valve is a pneumatic valve.

[0015] Optionally, the high pressure value includes a pressure relief value and an emergency value; if the pressure value exceeds the pressure relief value but does not exceed the emergency value, the control module controls the main pressure relief valve to relieve pressure; if the pressure value exceeds the emergency value, the control module controls the main pressure relief valve and the secondary pressure relief valve to relieve pressure simultaneously, and controls the liquid delivery system to shut down.

[0016] Compared with the prior art, the technical solution provided in this application has the following advantages: In this application embodiment, the pressure value of the liquid supply module during the liquid supply process is detected by the pressure detection module in the liquid delivery system, and the pressure value is reported to the control module. Then, the control module controls the execution module to replenish or release pressure during the liquid supply process based on the pressure value. There is no need for manual monitoring of the pressure or manual adjustment when the pressure value is abnormal. The pressure detection module can detect the pressure value, and the control module can release or replenish pressure when adjustment is needed. This not only ensures the stability of the liquid delivery system, but also improves the monitoring efficiency of the liquid delivery system. Attached Figure Description

[0017] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with the present invention and, together with the description, serve to explain the principles of the present invention.

[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, for those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] One or more embodiments are illustrated by way of example with reference numerals in the accompanying drawings. These illustrations do not constitute a limitation on the embodiments. Elements with the same reference numerals in the drawings are denoted as similar elements. Unless otherwise stated, the figures in the drawings are not to be limited by scale.

[0020] Figure 1 This is a schematic diagram of a liquid delivery system provided in an embodiment of this application;

[0021] Figure 2 This is a schematic diagram of an optional structure of a liquid delivery system provided in an embodiment of this application;

[0022] Figure 3 This is a flowchart of an adaptive pressure control method for a liquid delivery system provided in an embodiment of this application.

[0023] Reference numerals in the attached diagram: Liquid supply module-11, Pressure detection module-21, Execution module-31, Control module-41, Source liquid bottle-111, Buffer bottle-112, Pipeline-113, Gas-liquid separation module-114, First branch pipeline-1131, Second branch pipeline-1132, Third branch pipeline-1133, Fourth branch pipeline-1134, One set of pressure sensors-211, One set of pressure sensors-212, One set of pressure sensors-213, Pressure replenishment unit-311, Pressure relief unit-312, Gas cylinder-3111, Three-way valve-3112, Main pressure relief valve-3121, Secondary pressure relief valve-3122. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0025] The following disclosure provides numerous different embodiments or examples for implementing various structures of the present invention. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the scope of the invention. Furthermore, reference numerals and / or letters may be repeated in different examples. Such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed.

[0026] It should be noted that the liquid delivery system in this application embodiment is mainly used in thin film deposition processes. Thin film deposition is one of the four major processes in semiconductor manufacturing, a technique for fabricating one or more layers of solid materials on the surface of a substrate (such as a silicon wafer or silicon carbide wafer). Tetraethyl orthosilicate (TEOS) is a key precursor for SiO2 thin films, and its stable delivery and vaporization are the cornerstones of successful CVD processes. TEOS is liquid at room temperature and is stored in cylinders or other carriers. It needs to be supplied to the process equipment via a carrier gas (such as helium) through a liquid delivery system, and after vaporization, it is sent into the reaction chamber. Ensuring that TEOS is stably and continuously carried out of the liquid source by helium (He) directly determines the stability of the TEOS flow rate entering the reaction chamber. Pressure fluctuations can cause instantaneous changes in the TEOS flow rate, thereby disrupting the deposition reaction and affecting the uniformity, performance, and production yield of the thin film. Therefore, any pressure fluctuation can directly translate into a decrease in thin film quality and a loss of product yield.

[0027] The working principle of the liquid delivery system in this application embodiment is as follows: the liquid in the buffer bottle is pushed by an external pushing gas through the pipeline to the gas separation module and then supplied to the corresponding equipment. When the liquid in the buffer bottle is insufficient, liquid will be replenished from the source liquid bottle, that is, the liquid is pushed from the source liquid bottle to the buffer bottle.

[0028] To address the problem that manual pressure monitoring of liquid delivery systems in existing technologies is prone to issues such as untimely valve adjustments or misoperation leading to system malfunctions, this application provides a liquid delivery system, such as... Figure 1 As shown, the liquid delivery system includes a liquid supply module 11, a pressure detection module 21, an execution module 31, and a control module 41.

[0029] The pressure detection module 21 is connected to the liquid supply module 11 and the control module 41. It is used to detect the pressure value of the liquid supply module 11 during the liquid supply process and report the pressure value to the control module 41.

[0030] The control module 41 is connected to the pressure detection module 21 and the execution module 31, and is used to control the execution module 31 to replenish or release pressure during the liquid supply process based on the pressure value.

[0031] As can be seen, in this embodiment of the application, the pressure detection module in the liquid delivery system detects the pressure value of the liquid supply module during the liquid supply process and reports the pressure value to the control module. Then, the control module controls the execution module to replenish or release pressure during the liquid supply process based on the pressure value. There is no need for manual pressure monitoring or manual adjustment when the pressure value is abnormal. The pressure detection module can detect the pressure value, and the control module can release or replenish pressure when adjustment is needed. This not only ensures the stability of the liquid delivery system, but also improves the monitoring efficiency of the liquid delivery system.

[0032] like Figure 2 As shown, the liquid supply module 11 in this embodiment may further include a source liquid bottle 111, a buffer bottle 112, a pipeline 113 and a gas-liquid separation module 114;

[0033] The pipeline 113 includes multiple branch pipelines; one end of the first branch pipeline 1131 is the inlet for the propelling gas, and the other end of the first branch pipeline 1131 extends into the source liquid bottle 111; one end of the second branch pipeline 1132 extends into the source liquid bottle 111, and the other end of the second branch pipeline 1132 extends into the buffer bottle 112; one end of the third branch pipeline 1133 extends into the buffer bottle 112 and shares one end with the second branch pipeline 1132, and the other end of the third branch pipeline 1133 is connected to the first branch pipeline 1131 through a three-way valve; one end of the fourth branch pipeline 1134 is connected to the first branch pipeline 1131 through a three-way valve, and the other end of the fourth branch pipeline 1134 is connected to the gas cylinder 3111.

[0034] The gas-liquid separation module 114 is used to separate the liquid and gas in the buffer bottle 112, output the liquid, and return the gas to the third branch pipeline 1133; wherein, the liquid and gas in the buffer bottle 112 are the liquid and gas pushed by the driving gas in the source liquid bottle 111 to the buffer bottle 112.

[0035] As can be seen, in this embodiment of the application, after the pushing gas is input from one end of the first branch pipe 1131, the liquid in the source liquid bottle 111 is pushed to the buffer bottle 112 through the second branch pipe 1132. Then, the copper drum gas-liquid separation module 114 separates the liquid and gas in the buffer bottle 112 and transports the separated liquid outward.

[0036] like Figure 2 As shown, the pressure detection module 21 in this embodiment includes three sets of pressure sensors. One set of pressure sensors 211 is located at the end of the third branch pipe 1133 near the three-way valve and is used to detect the pressure of the gas pipe in the control module. One set of pressure sensors 212 is located at the end of the first branch pipe 1131 near the source liquid bottle 111 and is used to detect the gas phase pressure of the source liquid bottle 111 in the control module. One set of pressure sensors 213 is located at the end of the third branch pipe 1133 near the buffer bottle 112 and is used to detect the gas phase pressure of the buffer bottle 112 in the control module.

[0037] The pressure sensor set includes two sensors: a main pressure sensor and a backup pressure sensor. Furthermore, the distance between the main and backup pressure sensors is greater than or equal to 50 mm to avoid local interference and to monitor the pressure of the liquid delivery system in real time.

[0038] like Figure 2As shown, the execution module 31 in this embodiment includes a pressure replenishing unit 311 and a pressure relief unit 312; the pressure replenishing unit 311 is used to supply gas to the pipeline 113 when the pressure value is lower than the preset low pressure value; the pressure relief unit 312 is used to relieve pressure on the pipeline 113 when the pressure value is higher than the preset high pressure value.

[0039] The pressurization unit 311 includes a gas cylinder 3111 and a three-way valve 3112; the gas cylinder 3111 and the three-way valve 3112 are connected by a fourth branch pipe 1134.

[0040] In addition, the pressure relief unit 312 includes a main pressure relief valve 3121 and a secondary pressure relief valve 3122; wherein, the main pressure relief valve 3121 and the secondary pressure relief valve 3122 are disposed on both sides of the first branch pipeline 1131 for conveying the driving gas end, and are respectively connected to the first branch pipeline 1131 through the branch pipeline.

[0041] It should be noted that, in this embodiment, the main pressure relief valve 3121 is a solenoid valve, meaning its opening is adjusted according to the rate of pressure change, and the opening is calculated and adjusted in real time by monitoring data from a pressure sensor. The secondary pressure relief valve 3122, on the other hand, is a pneumatic valve, driven by an independent air source, and serves as a backup in case the main valve fails.

[0042] Furthermore, in this embodiment, the high pressure value may include a pressure relief value and an emergency value. That is, when the pressure value exceeds the pressure relief value but does not exceed the emergency value, the control module controls the main pressure relief valve to relieve pressure; when the pressure value exceeds the emergency value, the control module controls both the main pressure relief valve and the secondary pressure relief valve to relieve pressure simultaneously, and controls the liquid delivery system to shut down.

[0043] The following is in conjunction with the above. Figure 1 and Figure 2 The process by which the adaptive pressure control system adjusts the pressure of the liquid delivery system in the embodiments of this application is explained in detail. For example... Figure 3 As shown, the steps of the adaptive pressure control method for a liquid delivery system include:

[0044] Step 301: The pressure sensor monitors the pressure in real time;

[0045] Step 302: Determine if the pressure is within the set range; if yes, the process ends; if no, proceed to step 303.

[0046] Step 303: Determine if the pressure is less than the set value; if yes, proceed to step 304; if no, proceed to step 305.

[0047] Step 304: Switch the air supply from the pressure replenishment unit;

[0048] Step 305: Determine if the pressure value is greater than the emergency value; if not, proceed to step 306; if yes, proceed to step 307.

[0049] Step 306: Adjust the pressure using the main pressure relief valve;

[0050] Step 307: Fully open the pressure relief valve and shut down the system.

[0051] In this embodiment, the pressure range is set at 37-42 psi, the pressure relief level is 42-48.3 psi, and the emergency level is 115% of the maximum pressure, i.e., 48.3 psi. Pressure needs to be added if the pressure is below 37 psi, and the pressure varies depending on the liquid being transported.

[0052] Based on steps 301 to 307 above, it can be seen that the adaptive pressure regulation in this embodiment is divided into two cases: pressure below the set value and pressure above the set value.

[0053] To address situations where pressure exceeds a set value and pressure relief is required, a two-stage pressure relief mechanism is first established, setting two pressure thresholds (relief stage and emergency stage). Each stage triggers a different action: when the detected pressure is greater than the relief stage but less than the emergency stage, the corresponding main pressure relief valve is opened via PLC control to relieve pressure. The pressure relief valve uses a proportional regulating solenoid valve, and its opening degree is adjusted according to the rate of pressure change. The opening degree is calculated and adjusted in real time by monitoring data from the pressure sensor (e.g., the opening degree increases instantaneously when the pressure rises sharply). When the set value is reached, the main pressure relief valve is closed. Where k p =10% / psi, k d =5% / (psi / s). For the emergency level: the system is also equipped with a secondary pressure relief valve: a pneumatic valve, driven by an independent air source, as a backup in case of main valve failure. When the pressure detected is greater than the emergency level, it triggers full-open pressure relief + system shutdown.

[0054] For situations where the pressure is lower than the set value, requiring pressure replenishment, the pressure replenishment unit features a dual-channel parallel design, equipped with a helium cylinder (other delivery gases can be selected depending on the liquid being transported), and outputs a stable pressure to the backup pipeline via a pressure reducing valve. When the pressure is detected to be lower than the set value, the main pressure supply pipeline and the backup cylinder pipeline are connected in parallel via a three-way valve (three-way solenoid valve). When switching valves, a "connect first, disconnect later" logic is used to avoid sudden pressure drops; that is, the backup pipeline is switched on first, and then the main supply pipeline is shut off.

[0055] In this embodiment, dual-sensor cross-validation is implemented: when the difference between the primary and secondary pressure sensor data exceeds the limit, the system automatically switches to the secondary sensor and triggers an alarm. Specifically, when the difference between the primary and secondary pressure sensor data exceeds the limit (e.g., ≥ ±0.2%), the system automatically switches to the secondary pressure sensor and triggers an alarm.

[0056] As can be seen, in this embodiment of the application, the pressure of the liquid delivery system is adjusted by an adaptive pressure control system, that is, by dynamic pressure relief, the pressure fluctuation of the liquid delivery system is reduced; and the pressure replenishment switching process temporarily covers the abnormality when the pressure is insufficient, so as to avoid product abnormalities caused by abnormal liquid supply in the liquid delivery system.

[0057] The device embodiments described above are merely illustrative. The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the modules can be selected to achieve the purpose of this embodiment according to actual needs.

[0058] Through the above description of the embodiments, those skilled in the art can clearly understand that each embodiment can be implemented using software plus a general-purpose hardware platform, or of course, using hardware. Based on this understanding, the above technical solutions, in essence or the parts that contribute to the related technology, can be embodied in the form of a software product. This computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, magnetic disk, optical disk, etc., and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute the methods described in the various embodiments or some parts of the embodiments.

[0059] It should be understood that the terminology used herein is for the purpose of describing particular exemplary embodiments only and is not intended to be limiting. Unless the context clearly indicates otherwise, the singular forms “a,” “an,” and “described” as used herein may also include the plural forms. The terms “comprising,” “including,” “containing,” and “having” are inclusive and therefore indicate the presence of the stated features, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein are not construed as requiring them to be performed in a particular order described or illustrated unless the order of performance is explicitly indicated. It should also be understood that additional or alternative steps may be used.

[0060] The above description is merely a specific embodiment of this utility model, enabling those skilled in the art to understand or implement this utility model. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein can be applied without departing from the present invention.

[0061] Within the spirit or scope of the utility model, it is implemented in other embodiments. Therefore, this utility model...

[0062] The invention is not to be limited to the embodiments shown herein, but is to be conformed to the embodiments described herein.

[0063] The widest range that is consistent with the principle and novel features of the application.

Claims

1. A liquid delivery system, characterized in that, The liquid delivery system includes a liquid supply module, a pressure detection module, an execution module, and a control module; The pressure detection module is connected to the liquid supply module and the control module, and is used to detect the pressure value of the liquid supply module during the liquid supply process and report the pressure value to the control module. The control module is connected to the pressure detection module and the execution module, and is used to control the execution module to replenish or release pressure during the liquid supply process based on the pressure value.

2. The system according to claim 1, characterized in that, The liquid supply module includes a source liquid bottle, a buffer bottle, pipelines, and a gas-liquid separation module; The pipeline includes multiple branch pipelines; one end of the first branch pipeline is the inlet for propelling gas, and the other end of the first branch pipeline extends into the source liquid bottle; one end of the second branch pipeline extends into the source liquid bottle, and the other end of the second branch pipeline extends into the buffer bottle; one end of the third branch pipeline extends into the buffer bottle and shares one end with the second branch pipeline, and the other end of the third branch pipeline is connected to the first branch pipeline via a three-way valve; one end of the fourth branch pipeline is connected to the first branch pipeline via the three-way valve, and the other end of the fourth branch pipeline is connected to the gas cylinder; The gas-liquid separation module is used to separate the liquid and gas in the buffer bottle and output the liquid; wherein, the liquid and gas in the buffer bottle are liquid and gas pushed into the buffer bottle by the propelling gas.

3. The system according to claim 2, characterized in that, The pressure detection module includes three sets of pressure sensors. One set of pressure sensors is located at the end of the third branch pipeline near the three-way valve and is used to detect the pressure of the gas pipeline in the control module. Another set of pressure sensors is located at the end of the first branch pipeline near the source liquid bottle and is used to detect the gas phase pressure of the source liquid bottle in the control module. The third set of pressure sensors is located at the end of the third branch pipeline near the buffer bottle and is used to detect the gas phase pressure of the buffer bottle in the control module.

4. The system according to claim 3, characterized in that, The set of pressure sensors includes two pressure sensors, which are a main pressure sensor and a backup pressure sensor.

5. The system according to claim 4, characterized in that, The distance between the main pressure sensor and the backup pressure sensor is greater than or equal to 50 mm.

6. The system according to claim 2, characterized in that, The execution module includes a pressure replenishing unit and a pressure relief unit; the pressure replenishing unit is used to supply gas to the pipeline when the pressure value is lower than a preset low pressure value; the pressure relief unit is used to relieve pressure on the pipeline when the pressure value is higher than a preset high pressure value.

7. The system according to claim 6, characterized in that, The pressurization unit includes a gas cylinder and a three-way valve; the gas cylinder and the three-way valve are connected through the fourth branch pipeline.

8. The system according to claim 6, characterized in that, The pressure relief unit includes a main pressure relief valve and a secondary pressure relief valve; The main pressure relief valve and the secondary pressure relief valve are located on both sides of the first branch pipeline used to transport the propellant gas, and are respectively connected to the first branch pipeline through the branch pipeline.

9. The system according to claim 8, characterized in that, The main pressure relief valve is a solenoid valve, and the secondary pressure relief valve is a pneumatic valve.

10. The system according to claim 8, characterized in that, The high pressure value includes a pressure relief value and an emergency value; if the pressure value exceeds the pressure relief value but does not exceed the emergency value, the control module controls the main pressure relief valve to release pressure. If the pressure value exceeds the emergency value, the control module controls the main pressure relief valve and the secondary pressure relief valve to release pressure simultaneously, and controls the liquid delivery system to shut down.

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