Coating roll and coating device
By setting spaced and non-interconnected grooves on the outer side of the coating roller, the problem of uneven coating of perovskite solar cells was solved, resulting in more uniform film formation and improved coating speed.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- LAPLACE RENEWABLE ENERGY TECH CO LTD
- Filing Date
- 2025-06-13
- Publication Date
- 2026-06-19
AI Technical Summary
During the coating process of perovskite solar cells, the thickness of the substrate at the edge and center is uneven, resulting in uneven coating and reduced photoelectric conversion efficiency.
Design a coating roller with spaced, non-communicating grooves on its outer surface. The solution is transferred to the substrate surface through the grooves, forming non-communicating liquid units to avoid overall solution shrinkage and achieve uniform coating.
It improves film uniformity, increases coating yield, and increases coating speed and solution coating amount.
Smart Images
Figure CN224371858U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor or photovoltaic material processing, specifically to a coating roller and a coating apparatus. Background Technology
[0002] Perovskite solar cells possess a series of advantages, including high photoelectric conversion efficiency, simple structure, low cost, and diverse applications, making them highly promising for industrialization. Coating is the core process in perovskite solar cell production, significantly impacting their efficiency and lifespan. During production, achieving a more uniform coating process is crucial for ensuring the highest quality perovskite solar cells.
[0003] In related technologies, perovskite coating equipment transfers the perovskite solution to the substrate surface using coating rollers. Due to the higher roughness of the substrate edges, the perovskite solution covering the substrate edges experiences greater capillary forces, resulting in stronger adsorption of the perovskite solution at the substrate edges. Simultaneously, due to the liquid surface tension of the perovskite solution itself on the substrate, the perovskite solution contracts inward. Under these two factors, the thickness of the portion of the perovskite solution between the edge region and the center region on the substrate (referred to as the lost film region) is much thinner than the thickness of the edge region and the center region, leading to uneven perovskite solution coating and reducing the photoelectric conversion efficiency of the perovskite solar cell. Utility Model Content
[0004] To address the aforementioned technical problems, this application is proposed. Embodiments of this application provide a coating roller and a coating apparatus.
[0005] In a first aspect, one embodiment of this application provides a coating roller, characterized in that it includes: a roller body extending along a first direction, the outer surface of the roller body having a plurality of spaced and non-communicating grooves, wherein after the grooves come into contact with a solution, the solution can be adsorbed into the grooves and form liquid units within the grooves; wherein the outer surface of the roller body can be close to the surface of a substrate, so that the liquid units adsorbed by the plurality of grooves can be transferred to the surface of the substrate, and after the plurality of liquid units diffuse on the surface of the substrate, a liquid layer can be formed on the surface of the substrate.
[0006] In some embodiments, the distance between adjacent grooves is equal, and / or, the dimensions of the multiple grooves are equal.
[0007] In some embodiments, the plurality of grooves are evenly distributed along the circumference of the roller body, and / or, the plurality of grooves are evenly distributed along the axial direction of the roller body.
[0008] In some embodiments, the shape of the groove projected radially onto the outer surface of the roller body is annular, circular, elliptical, or polygonal.
[0009] In some embodiments, the groove is annular in shape when projected radially onto the outer surface of the roller.
[0010] In some embodiments, the diameter of the inner circle of the ring is equal to the difference between the radius of the outer circle and the radius of the inner circle, and is equal to the distance between adjacent grooves.
[0011] In some embodiments, the diameter of the inner circle of the ring ranges from 0.1 mm to 1 mm, and / or the difference between the radius of the outer circle and the radius of the inner circle of the ring ranges from 0.1 mm to 1 mm, and / or the distance between adjacent grooves ranges from 0.1 mm to 1 mm.
[0012] In some embodiments, the diameter of the roller gradually increases from the middle to both ends of the roller in the axial direction.
[0013] In some embodiments, the difference between the diameters at both ends of the roller and the diameter at the middle of the roller in the axial direction ranges from 1 micrometer to 10 micrometers.
[0014] Secondly, one embodiment of this application provides a coating apparatus, comprising: a solution tank containing a solution; a coating roller according to any of the first aspects, capable of extending into the solution tank, wherein after the groove on the outer side of the coating roller body contacts the solution, the solution is adsorbed into the groove to form a liquid unit; a carrier device configured to carry a substrate; and a driving device connected to the coating roller or the carrier device, configured to drive the coating roller or the carrier device to move, so that the outer side of the roller body can approach the surface of the substrate, thereby transferring the liquid units adsorbed by the multiple grooves to the surface of the substrate, wherein after the multiple liquid units diffuse on the surface of the substrate, a liquid layer can be formed on the surface of the substrate.
[0015] The coating roller and coating apparatus proposed in this application have multiple grooves on the outer side of the roller body that are spaced apart and not interconnected. This allows multiple liquid units transferred to the substrate surface via these grooves to also be spaced apart and not interconnected. In this way, the multiple liquid units are not subjected to the large adsorption force from the substrate edge and their own large liquid surface tension as a single unit, preventing the solution transferred to the substrate surface from contracting inwards as a single unit. Instead, the multiple liquid units diffuse on the substrate surface and interconnect, forming a smooth and uniform liquid layer. Therefore, this structure improves film uniformity and coating yield. Furthermore, by providing grooves on the outer side of the roller body, the roller body can adsorb more solution, thereby enabling the coating of more solution onto the substrate and increasing the coating speed. Attached Figure Description
[0016] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.
[0017] Figure 1 The diagram shows an ideal perovskite solution coated on a substrate.
[0018] Figure 2 The diagram shows a perovskite solution coated onto a substrate using a conventional coating roller.
[0019] Figure 3 The diagram shown is a schematic diagram of the structure of a coating roller provided in an exemplary embodiment of this application.
[0020] Figure 4 The image shown is an exemplary embodiment of this application. Figure 3 The image shows a magnified view of the coating roller in region A.
[0021] Figure 5 The diagram shown is a schematic representation of the shape of the first type of groove projected radially onto the outer side of the roller body according to an exemplary embodiment of this application.
[0022] Figure 6 The diagram shown is a schematic representation of the shape of the second type of groove projected radially onto the outer side of the roller body according to an exemplary embodiment of this application.
[0023] Figure 7 The diagram shown is a schematic representation of the shape of the third type of groove projected radially onto the outer side of the roller body according to an exemplary embodiment of this application.
[0024] Figure 8 The diagram shown is a schematic representation of the shape of the fourth type of groove projected radially onto the outer side of the roller body according to an exemplary embodiment of this application.
[0025] Figure 9 The diagram shown is a structural schematic of a coating roller provided in another exemplary embodiment of this application.
[0026] Figure 10 The diagram shown is a schematic diagram of the coating apparatus provided in an exemplary embodiment of this application.
[0027] Figure label:
[0028] 100, Substrate; 200, Coating; 310, Edge area; 320, Center area; 330, Loss of film area; 400, Coating roller; 410, Roller body; 411, Groove; 500, Coating device; 510, Solution tank; 520, Support device; 530, Drive device. Detailed Implementation
[0029] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0030] Application Overview
[0031] Figure 1 The diagram shows an ideal perovskite solution coated on a substrate. Figure 2 The diagram shows a perovskite solution coated onto a substrate using a conventional coating roller.
[0032] like Figure 1 As shown, under ideal conditions, the perovskite solution is coated onto the substrate 100 to form a coating 200, which can uniformly and smoothly cover the surface of the substrate 100.
[0033] In related technologies, when coating a perovskite solution onto a substrate 100, a smooth cylindrical coating roller is typically used. Specifically, after the coating roller passes through the solution chamber, the perovskite solution is adsorbed onto the outer surface of the coating roller due to the liquid tension of the perovskite solution. Then, the outer surface of the coating roller is brought close to the substrate surface, thereby transferring the perovskite solution to the substrate surface.
[0034] like Figure 2 As shown, due to the large edge roughness of the substrate 100, the perovskite solution covering the edge of the substrate 100 experiences a large capillary force, resulting in a stronger adsorption force between the edge of the substrate 100 and the perovskite solution. At the same time, due to the liquid tension of the perovskite solution on the substrate 100, the perovskite solution will shrink inward. Under these two factors, the thickness of the part between the edge region 310 and the central region 320 of the perovskite solution on the substrate 100 (referred to as the lost film region 330) will be much thinner than the thickness of the edge region 310 and the central region 320, resulting in uneven coating of the perovskite solution and reducing the photoelectric conversion efficiency of the perovskite solar cell.
[0035] In view of this, this application proposes a coating roller and a coating apparatus. Because multiple grooves on the outer side of the roller are spaced apart and not interconnected, multiple liquid units transferred to the surface of the substrate through the grooves can also be spaced apart and not interconnected. In this way, the multiple liquid units will not be subjected to a large adsorption force from the edge of the substrate and a large liquid surface tension as a whole, thus avoiding the solution transferred to the substrate surface from shrinking inward as a whole. Then, the multiple liquid units will diffuse on the surface of the substrate and connect with each other to form a flat and uniform liquid layer. Therefore, this structure can improve the uniformity of the film layer and increase the coating yield. Furthermore, by setting grooves on the outer side of the roller, the roller can adsorb more solution, thereby coating more solution onto the substrate and increasing the coating speed.
[0036] Exemplary device
[0037] Figure 3 The diagram shown is a schematic representation of the structure of a coating roller provided in an exemplary embodiment of this application. Figure 4 The image shown is an exemplary embodiment of this application. Figure 3 The image shows a magnified view of the coating roller in region A.
[0038] like Figure 3 and Figure 4 As shown in the figure, this application embodiment provides a coating roller 400, which includes a roller body 410. The roller body 410 extends along a first direction (such as the X direction in the figure). The outer surface of the roller body 410 has a plurality of spaced and non-communicating grooves 411. After the grooves 411 come into contact with the solution, the solution can be adsorbed into the grooves 411 and form liquid units within the grooves 411. The outer surface of the roller body 410 can be close to the surface of the substrate so that the liquid units adsorbed by the plurality of grooves 411 can be transferred to the surface of the substrate. After the plurality of liquid units diffuse on the surface of the substrate, a liquid layer can be formed on the surface of the substrate.
[0039] For example, the substrate can be a wafer, a glass substrate, a solar cell, etc.
[0040] In some applications, the solution is a perovskite solution, the substrate is a solar cell, and the coating roller 400 is used in the fabrication process of perovskite solar cells.
[0041] In practical applications, the roller 410 can be immersed in the solution first. Due to the liquid tension, the solution will be adsorbed into the groove 411 to form liquid units. Then, the roller 410 is controlled to move so that the outer side of the roller 410 is close to the surface of the substrate, and the liquid units in the groove 411 are transferred to the surface of the substrate. Multiple liquid units can form a liquid layer after self-diffusion on the surface of the substrate.
[0042] In the above embodiment, since the multiple grooves 411 on the outer side of the roller 410 are spaced apart and not interconnected, the multiple liquid units transferred to the surface of the substrate through the grooves 411 are also spaced apart and not interconnected. In this way, the multiple liquid units will not be subjected to a large adsorption force from the edge of the substrate and a large liquid tension as a whole, thus avoiding the solution transferred to the substrate surface from shrinking inward as a whole (a small amount of solution may remain between adjacent liquid units on the substrate surface to connect adjacent liquid units, but the thickness of this part of the solution is very thin, so that the multiple liquid units as a whole will not be subjected to a large force from the edge of the substrate, nor will the multiple liquid units as a whole bear a large liquid tension). Then, the multiple liquid units will diffuse on the surface of the substrate and thus connect with each other to form a flat and uniform liquid layer. Therefore, this structure can improve the uniformity of the film layer, increase the coating yield, and by setting the grooves 411 on the outer side of the roller 410, the roller 410 can adsorb more solution, thereby coating more solution onto the substrate and increasing the coating speed.
[0043] In some embodiments, such as Figure 4 As shown, the distance between adjacent grooves 411 is equal, and / or, the dimensions of multiple grooves 411 are equal.
[0044] For example, the distance between adjacent grooves 411 is 0.5 mm.
[0045] For example, the groove 411 is a column extending radially along the roller body 410, and the diameter and depth of the plurality of grooves 411 are equal.
[0046] In the above embodiments, by making the distance between adjacent grooves 411 equal, multiple liquid units can be evenly distributed after being transferred to the substrate, thereby making the liquid layer formed after the diffusion of multiple liquid units more flat and uniform; by making the size of multiple grooves 411 equal, multiple liquid units can have the same volume, thereby making the liquid layer formed after the diffusion of multiple liquid units more flat and uniform.
[0047] In some embodiments, such as Figure 4 As shown, multiple grooves 411 are evenly distributed along the circumference of the roller body 410, that is, the distance between adjacent grooves 411 along the circumference of the roller body 410 is equal; and / or, multiple grooves 411 are evenly distributed along the axial direction of the roller body 410, that is, the distance between adjacent grooves 411 along the axial direction of the roller body 410 is equal.
[0048] For example, a plurality of grooves 411 are distributed in m rows and n columns on the outer side of the roller body 410, with each row of grooves 411 arranged sequentially along the axial direction of the roller body 410 and each column of grooves 411 arranged sequentially along the circumferential direction of the roller body 410.
[0049] For example, such as Figure 4 As shown, multiple grooves 411 are distributed in p rows on the outer surface of the roller body 410. Each row of grooves 411 is arranged sequentially along the axial direction of the roller body 410, and every two adjacent rows of grooves 411 are staggered along the axial direction of the roller body 410. In other words, for two adjacent rows of grooves 411, one row of grooves 411 (e.g. Figure 4 The groove 411 in the solid line frame extends circumferentially into another row of grooves 411 (e.g., groove 411 in the solid line frame). Figure 4 The groove 411 in the dashed box is between two adjacent grooves 411. This arrangement of grooves 411 makes the arrangement of grooves 411 more compact, thereby making the distribution of liquid units transferred to the substrate surface more dense, which makes the liquid layer formed after the self-diffusion of multiple liquid units more uniform.
[0050] In the above embodiments, by making the multiple grooves 411 evenly distributed along the circumference of the roller body 410, and / or making the multiple grooves 411 evenly distributed along the axial direction of the roller body 410, the multiple liquid units can be evenly distributed after being transferred to the substrate, thereby making the liquid layer formed after the multiple liquid units diffuse more flat and uniform.
[0051] Figure 5 The diagram shown is a schematic representation of the shape of the first type of groove projected radially onto the outer surface of the roller body according to an exemplary embodiment of this application. Figure 6 The diagram shown is a schematic representation of the shape of the second type of groove projected radially onto the outer surface of the roller body according to an exemplary embodiment of this application. Figure 7 The diagram shown is a schematic representation of the shape of the third type of groove projected radially onto the outer surface of the roller body according to an exemplary embodiment of this application. Figure 8 The diagram shown is a schematic representation of the shape of the fourth type of groove projected radially onto the outer side of the roller body according to an exemplary embodiment of this application.
[0052] In some embodiments, such as Figures 4-8 As shown, the shape of the orthographic projection of the groove 411 along the radial direction of the roller 410 onto the outer surface of the roller 410 is annular, circular, elliptical, or polygonal.
[0053] For example, the ring can be a circular ring or a square ring, and the polygon can be a triangle, a quadrilateral, a pentagon, a hexagon, etc.
[0054] In the above embodiments, by selecting grooves 411 of different shapes, the liquid units can have different shapes, thereby affecting the uniformity and smoothness of the liquid layer formed after the liquid units self-diffusion.
[0055] In some embodiments, such as Figure 5As shown, the orthographic projection of the groove 411 along the radial direction of the roller body 410 onto the outer surface of the roller body 410 is an annular shape.
[0056] In the above embodiments, by selecting a groove 411 whose shape is an annular and whose orthogonal projection on the outer side of the roller 410 along the radial direction of the roller 410 can be used, multiple liquid units can be evenly diffused, thereby making the formed liquid layer more flat and uniform.
[0057] In some embodiments, such as Figure 5 As shown, the diameter of the inner circle of the annulus (e.g.) Figure 5 In this context, d1) is equal to the radius of the outer circle of the annulus (e.g., ...). Figure 5 R in the equation (e.g., the radius of the inner circle) and the radius of the inner circle (e.g., the Figure 5 The difference between r) and the distance between adjacent grooves 411 is equal to the distance between them.
[0058] In the above embodiments, by making the diameter of the inner circle of the ring, the difference between the radius of the outer circle of the ring and the radius of the inner circle, and the distance between adjacent grooves 411 equal, the liquid units transferred to the substrate surface can diffuse inward and outward at approximately the same distance, and with a suitable solution, the liquid units can diffuse sufficiently uniformly, thereby forming a flat and uniform liquid layer.
[0059] In some embodiments, the diameter of the inner circle of the ring ranges from 0.1 mm to 1 mm, and / or the difference between the radius of the outer circle and the radius of the inner circle of the ring ranges from 0.1 mm to 1 mm, and / or the distance between adjacent grooves 411 ranges from 0.1 mm to 1 mm.
[0060] For example, the diameter of the inner circle of the ring is 0.5 mm.
[0061] For example, the radius of the outer circle of the ring is 0.2 mm, and the radius of the inner circle of the ring is 0.1 mm, that is, the difference between the radius of the outer circle and the radius of the inner circle of the ring is 0.1 mm.
[0062] For example, the distance between adjacent grooves 411 is 0.1 mm.
[0063] In the above embodiments, if the difference between the radius of the outer circle and the radius of the inner circle of the ring is too small, the narrow groove 411 can adsorb too little solution. If the difference between the radius of the outer circle and the radius of the inner circle of the ring is too large, the wide groove 411 will not have sufficient adsorption force on the solution. If the diameter of the inner circle of the ring is too large, and / or the distance between adjacent grooves 411 is too large, the liquid unit cannot diffuse evenly between adjacent rings and inside the inner circle. By setting the ring according to the above numerical range, multiple liquid units can be evenly diffused to form a liquid layer, and the formed liquid layer is more flat and uniform.
[0064] In practical applications, for solutions with low viscosity, the diameter of the inner circle of the ring, the difference between the radius of the outer circle and the inner circle, and the distance between adjacent grooves 411 can be set to be less than the above range. For solutions with high viscosity, the diameter of the inner circle of the ring, the difference between the radius of the outer circle and the inner circle, and the distance between adjacent grooves 411 can be set to be greater than the above range.
[0065] Figure 9 The diagram shown is a structural schematic of a coating roller provided in another exemplary embodiment of this application. Figure 9 The groove 411 is hidden in the middle.
[0066] In some embodiments, such as Figure 9 As shown, the diameter of the roller 410 gradually increases from the middle to both ends along the axial direction of the roller 410.
[0067] Traditional coating rollers typically have a cylindrical roller body. Due to the strong adhesion of the substrate edges to the solution, such as... Figure 2 As shown, the edge region 310 is typically thicker than other regions, resulting in liquid accumulation. In the above embodiment, by gradually increasing the diameter of the roller 410 from the middle to both ends, even though the diameters of the roller 410 are larger at both ends and smaller in the middle, the outer surface of the roller 410 approaches the substrate surface. This results in a closer distance between the ends of the roller 410 and the substrate, and a greater distance between the middle of the roller 410 and the substrate. Consequently, the thickness of the edge region of the liquid layer is reduced, eliminating the liquid accumulation phenomenon at the edge region of the liquid layer.
[0068] In some embodiments, such as Figure 9 As shown, the difference between the diameters at both ends of the roller 410 (d2 and d3 in the figure) and the diameter at the middle part of the roller 410 (d4 in the figure) in the axial direction ranges from 1 micrometer to 10 micrometers.
[0069] For example, the difference between the diameters at both ends of the roller 410 and the diameter at the middle of the roller 410 in the axial direction is 3 micrometers.
[0070] In the above embodiments, if the difference between the diameters at both ends of the roller 410 and the diameter at the middle of the roller 410 is too large, the distance between the liquid units adsorbed at the middle of the roller 410 and the substrate will be too far during substrate coating, thus preventing them from being transferred to the substrate surface. If the difference between the diameters at both ends of the roller 410 and the diameter at the middle of the roller 410 is too small, the difference between the distances between the two ends of the roller 410 and the substrate and the distance between the middle of the roller 410 and the substrate will be too small during substrate coating, failing to adequately adjust the thickness of the edge region of the liquid layer compared to other regions, thus failing to eliminate the liquid accumulation phenomenon at the edge region of the liquid layer. By making the difference between the diameters at both ends of the roller 410 and the diameter at the middle of the roller 410 range from 1 micrometer to 10 micrometers, the thickness of the edge region of the liquid layer can be sufficiently reduced while ensuring that the roller 410 can transfer the liquid units in the middle to the substrate surface, resulting in a more uniform film thickness of the liquid layer.
[0071] Figure 10 The diagram shown is a schematic diagram of the coating apparatus provided in an exemplary embodiment of this application.
[0072] Based on the same concept, such as Figure 10 As shown in the illustration, this application provides a coating apparatus 500, which includes a solution tank 510, a coating roller 400 as described in the above embodiment, a support device 520, and a driving device 530. The solution tank 510 holds a solution. The coating roller 400 extends into the solution tank 510. After the groove 411 on the outer side of the roller body 410 of the coating roller 400 comes into contact with the solution, the solution is adsorbed into the groove 411 to form liquid units. The support device 520 is configured to support a substrate. The driving device 530 is connected to the coating roller 400 or the support device 520 and is configured to drive the coating roller 400 or the support device 520 to move, so that the outer side of the roller body 410 can approach the surface of the substrate, thereby transferring the liquid units adsorbed by the multiple grooves 411 to the surface of the substrate. After the multiple liquid units diffuse on the surface of the substrate, a liquid layer can be formed on the surface of the substrate.
[0073] For example, the solution tank 510 holds a perovskite solution.
[0074] For example, the carrier device 520 includes a suction cup.
[0075] For example, the drive unit 530 includes a linear module.
[0076] In practical applications, the driving device 530 can first drive the carrier device 520 to move towards the solution tank 510, so that the substrate carried by the carrier device 520 is immersed in the solution carried by the solution tank 510, and the grooves 411 adsorb the solution to form liquid units; then the driving device 530 drives the carrier device 520 to move towards the substrate, so that the surface of the substrate carried by the carrier device 520 is close to the outer side of the roller body 410, so that the liquid units adsorbed by the multiple grooves 411 can be transferred to the surface of the substrate. After the multiple liquid units diffuse on the surface of the substrate, they can form a liquid layer on the surface of the substrate.
[0077] Since the coating apparatus 500 includes the coating roller 400, all the technical features and effects of the coating apparatus 500 including the coating roller 400 will not be described in detail here.
[0078] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.
[0079] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.
[0080] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.
[0081] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.
[0082] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.
Claims
1. A coating roll, characterized in that include: A roller body extends along a first direction, and the outer surface of the roller body has a plurality of spaced and non-communicating grooves. After the grooves come into contact with the solution, the solution can be adsorbed into the grooves and form liquid units in the grooves. The outer side of the roller can be close to the surface of the substrate so that the liquid units adsorbed by the multiple grooves can be transferred to the surface of the substrate. After the multiple liquid units diffuse on the surface of the substrate, they can form a liquid layer on the surface of the substrate.
2. The coating roller according to claim 1, characterized in that, The distance between adjacent grooves is equal, and / or the multiple grooves are of equal size.
3. The coating roller according to claim 2, characterized in that, The plurality of grooves are evenly distributed along the circumference of the roller body, and / or the plurality of grooves are evenly distributed along the axial direction of the roller body.
4. The coating roller according to any one of claims 1 to 3, characterized in that, The shape of the groove projected radially onto the outer surface of the roller body is annular, circular, elliptical, or polygonal.
5. The coating roller according to claim 4, characterized in that, The groove, when projected radially onto the outer surface of the roller, is an annular shape.
6. The coating roller according to claim 5, characterized in that, The diameter of the inner circle of the ring is equal to the difference between the radius of the outer circle and the radius of the inner circle, and is equal to the distance between adjacent grooves.
7. The coating roller according to claim 5, characterized in that, The diameter of the inner circle of the ring is in the range of 0.1 mm to 1 mm, and / or the difference between the radius of the outer circle of the ring and the radius of the inner circle is in the range of 0.1 mm to 1 mm, and / or the distance between adjacent grooves is in the range of 0.1 mm to 1 mm.
8. The coating roller according to any one of claims 1 to 3, characterized in that, Along the axial direction of the roller, the diameter of the roller gradually increases from the middle to both ends.
9. The coating roller according to claim 8, characterized in that, Along the axial direction of the roller, the difference between the diameters at both ends of the roller and the diameter at the middle of the roller ranges from 1 micrometer to 10 micrometers.
10. A coating apparatus, characterized in that, include: Solution tank, which holds the solution; The coating roller according to any one of claims 1 to 9 can extend into the solution tank. After the groove on the outer side of the coating roller body comes into contact with the solution, the solution can be adsorbed into the groove to form a liquid unit. The support device is configured to support the substrate; A driving device, connected to the coating roller or the carrier device, is configured to drive the coating roller or the carrier device to move so that the outer side of the roller body can approach the surface of the substrate, thereby transferring the liquid units adsorbed by the plurality of grooves to the surface of the substrate. After the plurality of liquid units diffuse on the surface of the substrate, they can form a liquid layer on the surface of the substrate.