A gas isolation device of a coated glass production line

Abstract

The utility model discloses a gas isolation device of coated glass production line, and the gas isolation device (4) includes base plate (4a) and a pair of baffle (4c), and each baffle is equipped with airflow cover (4e) respectively, and the upper edge distribution of baffle and airflow cover is equipped with sealing strip and molecular cover plate bottom plate sealed connection, and the angle steel (4b) on base plate (4a) is connected with the inner wall of the upper cabin (3) of coating, and the bypass passage a between baffle and connecting plate and the molecular pump (2) intercommunication of airflow cover and both sides between two baffle (4c) form the molecular pump intercommunication of middle road channel (b) and molecular cover plate (1) between, baffle and connecting plate between bypass passage a and airflow cover and two sides molecular pump (2) intercommunication. The utility model / utility model will need two molecular pump positions to realize the gas isolation function originally, and merge into one molecular pump position, not only can shorten the length of production line coating area, but also can effectively reduce production cost and improve the efficiency of production line.

Description

Technical Field

[0001] This utility model relates to the technical field of low-emissivity magnetron sputtering coated glass production lines, specifically a gas isolation device for coated glass production lines. Background Technology

[0002] Gas isolation devices are a very important component in low-emissivity magnetron sputtering coated glass production lines. On the one hand, they prevent uneven gas pressure in the coating area from causing airflow disturbances. On the other hand, they prevent cross-contamination between process gases and sputtered materials during coating processes at adjacent cathode sites.

[0003] like Figure 1 As shown, existing low-emissivity magnetron sputtering coated glass production lines consist of multiple coating chambers. Molecular pump covers are installed above the coating chamber units, and gas isolation devices are installed below the molecular pump covers between adjacent coating chambers. When adjacent coating chambers use different process gases, two gas isolation devices and two sets of molecular pump covers are required between the coating chambers. This necessitates setting two molecular pump positions in the coating area of ​​the entire low-emissivity magnetron sputtering coated glass production line to achieve effective gas isolation. This design results in a relatively long coating area, a large number of molecular pump covers, and high manufacturing and operating costs. Utility Model Content

[0004] The purpose of this invention is to provide a gas isolation device for a coated glass production line, which aims to solve the problems of long coating areas, low coating efficiency, and high processing costs in existing low-emissivity magnetron sputtering coated glass production lines.

[0005] To achieve the above objectives, the present invention provides the following technical solution:

[0006] A high-performance gas isolation device for a coated glass production line includes a molecular pump cover plate, an upper gas isolation component, a lower gas isolation component, and an edge gas isolation component. The molecular pump cover plate and the upper gas isolation component are key components of this invention. The molecular pump cover plate can be configured with seven molecular pumps, and together with the high-performance gas isolation component, forms three gas-isolating channels to achieve effective gas extraction and isolation for adjacent coating units.

[0007] This invention provides a gas isolation device with a special structure that combines the gas isolation function, which originally required two molecular pump positions, into a single molecular pump position. This design not only significantly shortens the length of the coating area on the production line, thus saving valuable space, but also effectively reduces production costs. Through this optimized gas isolation solution, the efficiency and economy of the production line are significantly improved. Attached Figure Description

[0008] Figure 1 A schematic diagram of an existing multi-stage coating chamber and its molecular pump cover;

[0009] Figure 2 This utility model's gas isolation device is used in a coating chamber. (Structure diagram of the device)

[0010] The components include: 1. Molecular pump cover plate, 2. Rotating cathode cover plate, 3. Planar cathode cover plate, 4. Gas isolation device, and 5. Coating chamber unit.

[0011] Figure 3 This is a cross-sectional view of the gas isolation device of this utility model;

[0012] Figure 4 yes Figure 5 Mid-top view, showing the location of the molecular pump (as indicated by the dashed line);

[0013] Figure 5 This is a perspective view of the upper gas isolation device of this utility model;

[0014] Figure 6 A perspective view of the upper gas isolation device of this utility model in conjunction with the molecular pump cover plate;

[0015] Figure 7 yes Figure 6 A three-dimensional diagram viewed from below. Detailed Implementation

[0016] The present invention will be further described below with reference to the accompanying drawings and embodiments:

[0017] This embodiment provides a gas isolation device for a coated glass production line, comprising the following components:

[0018] 1. Gas isolation device 4, such as Figure 5 As shown, it includes a base plate 4a, on which a pair of partitions 4c are symmetrically connected along the length of the center line. Each partition 4c is provided with an airflow hood 4e at a symmetrical position before and after it. The shape of the airflow hood is a concave cavity extending from the partition 4c between the two partitions. The upper edge of the cavity is flush with the upper edge of the partition. A sealing strip 4f is provided on the upper edge of the partition and the cavity. The airflow hood 4a can be made of stainless steel bent plate welded together. It has multiple through holes around its perimeter, which are bolted through the partition 4c and locked with nuts to form a whole.

[0019] An angle steel 4b is connected to each side of the substrate 4a, forming a central channel b between the two partitions 4c, and a bypass channel a is formed between each partition 4c and its corresponding angle steel 4b. Figure 7As shown, an elongated opening 4h is provided in the middle of the substrate 4a between the two partitions 4c along the length direction, and the opening 4h is connected to the central channel b.

[0020] Except for the sealing strip, all the above components are made of steel. The sealing strip is made of fluororubber with a Shore hardness of 60±5 and must not contain oil or other volatile components to prevent contamination of the coating environment.

[0021] II. Molecular pump cover plate 1, reference Figure 3 , Figure 6 and Figure 7 As shown, the molecular pump cover plate 1 includes a rectangular frame consisting of two opposing side plates 1a and an end plate 1b connecting the end faces of the two side plates. A bottom plate 1e is connected to the lower end of the rectangular frame. A pair of bridge plates 1d connects the two side plates. A vacuum main pipe 1c passes through and connects to the center of the pair of bridge plates and the center of one end plate. A set of molecular pumps is connected to the bottom plate 1e within the rectangular frame, as shown in the diagram. Figure 4 , Figure 6 As shown, the molecular pumps are set up according to the following rules: two symmetrical first molecular pumps 2 are set at the front and back positions with the center of the base plate 1e as the center. The two first molecular pumps 2 partially cover the bypass channels a on both sides of the gas isolation device 4. The remaining parts of the two first molecular pumps 2 cover the airflow hoods 4e at the corresponding positions. One second molecular pump 2a is set at the front, middle and back with the center of the base plate as the center. The three second molecular pumps 2a cover the middle channel b in the gas isolation device 4.

[0022] The aforementioned cover chamber can be equipped with seven molecular pumps. Compared to the previous side-by-side distribution of molecular pumps, the three rows of molecular pumps respectively pump gas through the three channels formed by the upper gas isolation device and the molecular pump cover. The structure is more compact and the pumping performance is also improved.

[0023] III. Installation and Coating Chamber Relationship of Gas Isolation Device 4

[0024] like Figure 3 As shown, the gas isolation device 4 is installed in the upper compartment 3 of the coating. The angle steel 4b below the gas isolation device 4 is connected to the inner wall 6 of the upper compartment 3 by a connector. The two partitions 4c and the airflow hoods 4e in the gas isolation device 4 are distributed and connected to the bottom plate 1e of the molecular pump cover plate 1. The sealing strips 4f on the two partitions 4c and the airflow hoods 4e are sealed to the bottom plate 1e. The bypass channel a expands the coverage area with the molecular pump 2 through the airflow hood 4e, so that the molecular pump 2 will not draw gas from the middle channel b. Figure 7 As shown, the airflow shroud 4e fits well with the bottom hole 1f in the bottom plate 1e that communicates with the molecular pump 2, providing favorable conditions for setting up two gas isolation devices in a limited compartment.

[0025] Depend on Figure 3 As can be seen, through holes are opened in the inner wall of the upper coating compartment 3, and the process gas is extracted through the bypass channel a via the molecular pump 2; through holes are opened in the inner wall of the lower coating compartment 7, and the process gas enters the central channel b through the opening 4h on the substrate 4a, and is then extracted through the central molecular pump 2a.

[0026] The specific operating conditions of this embodiment are as follows: Figure 2 As shown, the gas isolation device is positioned between adjacent coating compartments. When sputtering begins in a coating compartment, the molecular pumps on both sides of the molecular pump cover perform process pumping to prevent the reactant gas in the adjacent coating compartment from accidentally permeating into another coating compartment. The three molecular pumps in the middle perform isolation pumping to stabilize the gas pressure in the coating area and prevent gas flow deviation and splashing of sputtered materials.

[0027] In conventional structures, when adjacent coating units use different process gases, two molecular pump positions are typically required to achieve gas isolation. This embodiment features a compact structure and simple installation, combining the gas isolation function that originally required two molecular pump positions into a single pump position. This shortens the length of the coating area, improves coating efficiency, and reduces production costs.

Claims

1. A gas isolation device of a coated glass production line, comprising a coating chamber of the coated glass production line, wherein a molecular pump cover plate is arranged on the coating chamber, characterized in that The gas isolation device (4) includes a base plate (4a), on which a pair of partitions (4c) are symmetrically connected along the length of the center line. Each partition (4c) is provided with an airflow hood (4e) at a symmetrical position at the front and back. The airflow hood is shaped as a concave cavity extending from the partition (4c) to the space between the two partitions. The upper edge of the cavity is flush with the upper edge of the partition. A sealing strip (4f) is provided on the upper edge of the partition and the cavity. An angle steel (4b) is connected to each side of the base plate (4a). A central channel (b) is formed between the two partitions (4c). A bypass channel (a) is formed between each partition (4c) and the corresponding angle steel (4b). An elongated opening (4h) is provided in the middle of the base plate (4a) between the two partitions (4c) along the length direction. The opening (4h) is connected to the central channel (b).

2. The gas isolation device of claim 1, wherein, The molecular pump cover plate (1) includes a rectangular frame, the lower end of which is connected to a base plate (1e). The rectangular frame is connected to a pair of bridge plates (1d). A vacuum main pipe (1c) passes through and is connected to the center of the pair of bridge plates and the center of the end plate of the rectangular frame. A set of molecular pumps is connected on the base plate (1e) inside the rectangular frame. The molecular pumps are set up according to the following rules: two symmetrical first molecular pumps (2) are set at the front and back positions with the center of the base plate (1e) as the center. The two first molecular pumps (2) partially cover the two bypass channels (a) on both sides of the gas isolation device (4). The remaining parts of the two first molecular pumps (2) cover the corresponding gas flow hoods (4e). A second molecular pump (2a) is set at the front, middle and back with the center of the base plate as the center. The three second molecular pumps (2a) cover the middle channel (b) in the gas isolation device (4). A gas isolation device for a coated glass production line according to claim 1, characterized in that, The gas isolation device (4) is installed in the upper compartment (3) of the coating. The angle steel (4b) below the gas isolation device (4) is connected to the inner wall of the upper compartment (3) of the coating by a connector. The two partitions (4c) and the airflow hood (4e) in the gas isolation device (4) are connected to the bottom plate (1e) of the molecular pump cover plate (1). The sealing strip (4f) on the two partitions (4c) and the airflow hood (4e) is sealed with the bottom plate (1e). The bypass channel (a) expands the coverage area with the molecular pump (2) through the airflow hood (4e), so that the molecular pump (2) will not draw gas from the middle channel (b). The airflow hood (4e) covers the bottom hole (1f) in the bottom plate (1e) that communicates with the molecular pump (2).

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