Gas isolation device of coated glass production line
By designing a super-performance gas isolation device, the three-channel gas isolation channels are used to combine the gas isolation function, which solves the problems of long coating areas, low efficiency and high cost in the low-radiation magnetron sputtering coated glass production line, and achieves space savings and cost reduction.
Patent Information
- Application Number
- CN202510046243.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-13
- Publication Date
- 2025-03-07
AI Technical Summary
The existing low-radiation magnetron sputtering coating glass production lines have longer coating areas, low coating efficiency and high processing costs.
A super-performance gas isolation device is designed, including a molecular pump cover plate, an upper gas isolation assembly, a lower gas isolation assembly and a side gas isolation assembly. Gas isolation is achieved through three gas isolation channels, and the gas isolation function that originally required two molecular pump positions were used to achieve.
The length of the coating area of the production line is significantly shortened, the coating efficiency is improved, the production cost is reduced, and the efficiency and economicality of the production line is improved.
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Abstract
Description
Technical Field
[0001] The invention relates to the technical field of low-radiation magnetron sputtering coated glass production line, and specifically to a gas isolation device for a coated glass production line. Background Art
[0002] The gas isolation device is a very important component in the low-radiation magnetron sputtering coated glass production line. On the one hand, it is to prevent the uneven air pressure in the coating area from causing air flow movement. On the other hand, it is to prevent the process gas and sputtering products from crossing each other during the process coating of adjacent cathode positions and causing contamination.
[0003] like Figure 1 As shown, the existing low-radiation magnetron sputtering coated glass production line includes a multi-stage coating compartment, a molecular pump cover is installed above the coating compartment unit, and a gas isolation device is installed at the bottom of the molecular pump cover between adjacent coating compartments. When different process gases are used in adjacent coating compartments, two gas isolation devices and two sets of molecular pump covers need to be set in the middle of the coating compartments. This requires that two molecular pump positions be set in the coating area of the entire low-radiation magnetron sputtering coated glass production line to achieve effective gas isolation. The coating area of the production line with this design is longer, the molecular pump cover is used in large quantities, and the manufacturing and use costs are higher. Summary of the invention
[0004] The purpose of the present invention is to provide a gas isolation device for a coated glass production line, aiming to solve the problems of a relatively long coating area, low coating efficiency and high processing cost in the existing low-radiation magnetron sputtering coated glass production line.
[0005] To achieve the above object, the present invention provides the following technical solutions: A super-performance gas isolation device for a coated glass production line includes a molecular pump cover, an upper gas isolation component, a lower gas isolation component, and an edge gas isolation component. The molecular pump cover and the upper gas isolation are important components of this invention. The molecular pump cover can be equipped with seven molecular pumps, and a three-way gas isolation channel is formed through a gas isolation sealing strip and a super-performance gas isolation component to meet the effect of exhausting and isolating adjacent coating units.
[0006] The present invention provides a gas isolation device with a special structure, which can integrate the gas isolation function that originally required two molecular pumping positions into one molecular pumping position. This design can not only significantly shorten the length of the coating area of the production line, thereby saving valuable space, but also effectively reduce production costs. Through this optimized gas isolation solution, the efficiency and economy of the production line have been significantly improved. BRIEF DESCRIPTION OF THE DRAWINGS
[0007] Figure 1Schematic diagram of the existing multi-stage coating compartment and its molecular pump cover; Figure 2 A schematic diagram of the structure of the gas isolation device of the present invention used in a coating compartment; Among them: 1. Molecular pump cover, 2. Rotating cathode cover, 3. Planar cathode cover, 4. Coating chamber unit, 5. Gas isolation device; Figure 3 is a cross-sectional view of a gas isolation device of the present invention; Figure 4 yes Figure 5 The top view shows the location of the molecular pump (shown by the dotted line). Figure 5 is a perspective view of an upper gas isolation device of the present invention; Figure 6 A three-dimensional diagram of the upper gas isolation device of the present invention cooperating with the molecular pump cover plate; Figure 7 yes Figure 6 Stereoscopic view from above. DETAILED DESCRIPTION
[0008] The present invention will be further described below in conjunction with the accompanying drawings and embodiments: The present embodiment provides a gas isolation device for a coated glass production line, comprising the following components: 1. Gas isolation device 4, such as Figure 5 As shown, it includes a base plate 4a, on which a pair of partitions 4c are symmetrically connected along the length direction of the center line, and each partition 4c is provided with an airflow cover 4e at a symmetrical position in front and behind, and the shape of the airflow cover is a concave cavity extending between the two partitions based on the partition 4c, and the upper edge of the cavity is flush with the upper edge of the partition, and a sealing strip 4f is provided on the upper edge of the partition and the cavity; the airflow cover 4a can be welded by a stainless steel bent plate, and a plurality of through holes are provided around it, which are penetrated through the isolation plate 4c by bolts and locked with nuts to form a whole.
[0009] An angle steel 4b is connected to each side of the base plate 4a, a middle channel b is formed between the two partitions 4c, and a bypass channel a is formed between each partition 4c and the corresponding angle steel 4b. Figure 7 As shown, a long opening 4h is provided in the middle of the base plate 4a between the two partitions 4c along the length direction, and the opening 4h is correspondingly connected to the middle channel b.
[0010] Except for the sealing strip, the above components are made of steel material. The sealing strip is made of fluororubber with a Shore hardness of 60±5, and it is strictly prohibited to contain volatile components such as oil to prevent the coating environment from being contaminated.
[0011] 2. Molecular pump cover 1, reference Figure 3 , Figure 6 and Figure 7 As shown, the molecular pump cover plate 1 includes a rectangular frame consisting of two opposite side plates 1a and an end plate 1b connecting the end surfaces of the two side plates. The lower end of the rectangular frame is connected to the bottom plate 1e. A pair of bridge plates 1d are connected between the two side plates. A vacuum main pipe 1c passes through and is connected to the center of the pair of bridge plates and the center of an end plate. A group of molecular pumps are connected to the bottom plate 1e in the rectangular frame, as shown in FIG. Figure 4 , Figure 6 As shown, the setting rules of the molecular pump are as follows: two symmetrical first molecular pumps 2 are respectively arranged at the front and rear positions symmetrically with the center of the bottom plate 1e, and the two first molecular pumps 2 partially cover the bypass channels a on both sides of the gas isolation device 4, and the remaining parts of the two first molecular pumps 2 cover the airflow covers 4e at the corresponding positions, and a second molecular pump 2a is respectively arranged at the front, middle and rear positions symmetrically with the center of the bottom plate, and the three second molecular pumps 2a respectively cover the middle channel b in the gas isolation device 4.
[0012] Seven molecular pumps can be installed on the above-mentioned cover bin. Compared with the previous molecular pumps distributed side by side, three rows of molecular pumps respectively pump air from the three channels formed by the upper gas isolation device and the molecular pump cover. The structure is more compact and the pumping performance is also improved.
[0013] 3. Installation and coordination between the gas isolation device 4 and the coating chamber like Figure 3 As shown, the gas isolation device 4 is arranged in the coating upper compartment 3, and the angle steel 4b below the gas isolation device 4 is connected to the inner wall 6 of the coating upper compartment 3 by a connector, and the two partitions 4c in the gas isolation device 4 and the airflow cover 4e thereon are distributed and connected to the bottom plate 1e of the molecular pump cover 1. The sealing strips 4f above the two partitions 4c and the airflow cover 4e thereon are sealed with the bottom plate 1e, and the bypass channel a expands the coverage area with the molecular pump 2 through the airflow cover 4e, so that the molecular pump 2 will not pump the gas of the middle channel b. Figure 7 As shown, the airflow cover 4e fits well with the bottom hole 1f in the bottom plate 1e which is in communication with the molecular pump 2, providing favorable conditions for setting up two gas isolation devices in a limited compartment.
[0014] Depend on Figure 3 It can be seen that a through hole is opened on the inner wall of the upper coating compartment 3, and the process gas is pumped out through the bypass channel a through the molecular pump 2; a through hole is opened on the inner wall of the lower coating compartment 7, and the process gas enters the middle channel b through the opening 4h on the substrate 4a, and then is pumped out through the middle molecular pump 2a.
[0015] The specific working conditions of this embodiment are as follows: Figure 2As shown, the gas isolation device is arranged in the middle of adjacent coating compartments. When the coating compartment starts sputtering, the molecular pumps on both sides of the molecular pump cover plate perform process pumping to prevent the reaction gas in the adjacent coating compartment from accidentally penetrating into another coating compartment. The three molecular pumps in the middle perform isolation pumping to stabilize the gas pressure in the coating area and prevent the air flow from moving and the sputtering of the sputtered objects from flying.
[0016] In the commonly used structures in the past, when the process gases used in adjacent coating units are different, two molecular pumps are usually required in between to meet the gas isolation function. This embodiment has a compact structure and is easy to install. The gas isolation function that originally required two molecular pumps can be combined into one molecular pump, thereby shortening the length of the coating area, improving the coating efficiency and reducing the production cost.
Claims
1. A gas isolation device for a coated glass production line, comprising a coating compartment of the coated glass production line, wherein a molecular pump cover is provided on the coating compartment, characterized in that The gas isolation device (4) comprises a base plate (4a), a pair of partition plates (4c) are symmetrically connected on the base plate (4a) along the length direction of the center line, and each partition plate (4c) is provided with an airflow cover (4e) at a front-back symmetrical position, the airflow cover is in the shape of a concave cavity extending between the two partition plates based on the partition plate (4c), the upper side of the cavity is flush with the upper side of the partition plate, and a sealing strip (4f) is provided on the upper side of the partition plate and the cavity; An angle steel (4b) is connected to each side of the base plate (4a), a central channel (b) is formed between the two partition plates (4c), a bypass channel (a) is formed between each partition plate (4c) and the corresponding angle steel (4b), and a long opening (4h) is provided in the middle of the base plate (4a) between the two partition plates (4c) along the length direction, and the opening (4h) is correspondingly connected to the central channel (b).
2. The gas isolation device for a coated glass production line according to claim 1, characterized in that: The molecular pump cover plate (1) comprises a rectangular frame, the lower end of the rectangular frame is connected to a bottom plate (1e), the rectangular frame is connected to a pair of bridge plates (1d), a vacuum main pipe (1c) passes through and is connected to the center of the pair of bridge plates and the center of an end plate of the rectangular frame, and a group of molecular pumps are connected to the bottom plate (1e) in the rectangular frame. The molecular pumps are arranged according to the following rules: two symmetrical first molecular pumps (2) are arranged at the front and rear positions symmetrically with the center of the bottom plate (1e), the two first molecular pumps (2) partially cover the bypass channels (a) on both sides of the gas isolation device (4), and the remaining parts of the two first molecular pumps (2) cover the airflow covers (4e) at the corresponding positions, and a second molecular pump (2a) is arranged at the front, middle and rear positions symmetrically with the center of the bottom plate, and the three second molecular pumps (2a) cover the middle channel (b) in the gas isolation device (4).
3. A gas isolation device for a coated glass production line according to claim 1 or 2, characterized in that: The gas isolation device (4) is arranged in the coating upper compartment (3), and the angle steel (4b) at the bottom of the gas isolation device (4) is connected to the inner wall of the coating upper compartment (3) by a connecting piece. The two partitions (4c) in the gas isolation device (4) and the airflow hood (4e) thereon are distributed and connected to the bottom plate (1e) of the molecular pump cover plate (1). The sealing strips (4f) on the two partitions (4c) and the airflow hood (4e) thereon are sealed with the bottom plate (1e). The bypass channel (a) expands the coverage area with the molecular pump 2) through the airflow hood (4e), so that the molecular pump (2) will not draw gas from the middle channel (b), and the airflow hood (4e) covers the bottom hole (1f) in the bottom plate (1e) that is connected to the molecular pump (2).