An optical detection system

Abstract

This invention provides an optical detection system. In one specific embodiment, it includes a light source, a shaping module, a first acquisition module, and a second acquisition module. The shaping module is located at the output end of the light source and includes a first collimating mirror and a first focusing mirror. The first collimating mirror collimates the incident light beam from the light source and reflects it to the first focusing mirror. The first focusing mirror focuses the light beam from the first collimating mirror and reflects it to the thin film sample. The first acquisition module acquires the reflected light beam from the thin film sample. The second acquisition module acquires the incident light beam. This embodiment calculates the reflectivity of the thin film sample using the acquired reflected and incident light beams. Furthermore, by collimating and focusing the incident light first, the installation tolerance requirements are significantly reduced during the alignment and installation of the first focusing mirror and the first collimating mirror, effectively reducing manufacturing and installation costs.

Description

Technical Field

[0001] This utility model relates to the field of thin film sample detection. More specifically, it relates to an optical detection system. Background Technology

[0002] Currently, in the semiconductor and panel manufacturing industries, thin films need to be deposited by vapor deposition. The thickness of these films directly affects device performance and yield, thus requiring high-precision online monitoring methods. However, the stringent assembly and adjustment tolerances of existing high-precision optical systems significantly increase the cost of the equipment. Utility Model Content

[0003] The purpose of this invention is to provide an optical inspection system with low tolerance requirements, so as to solve at least one of the problems existing in the prior art.

[0004] To achieve the above objectives, the present invention adopts the following technical solution:

[0005] This utility model provides an optical detection system for detecting thin film samples, including a light source, a shaping module, a first acquisition module, and a second acquisition module;

[0006] The shaping module is disposed at the output end of the light source and includes a first collimating mirror and a first focusing mirror; the first collimating mirror is used to collimate the incident light beam from the light source and reflect it to the first focusing mirror; the first focusing mirror is used to focus the light beam from the first collimating mirror and reflect it to the thin film sample.

[0007] The first acquisition module is used to acquire the reflected light beam from the thin film sample;

[0008] The second acquisition module is used to acquire the incident light beam.

[0009] Furthermore, the first collimating mirror and the first focusing mirror are both 90° off-axis parabolic mirrors.

[0010] Furthermore, the optical detection system also includes a beam splitter disposed between the output end of the light source and the shaping module. The beam splitter is used to split the incident beam from the light source and output it to the first collimating mirror and the second acquisition module respectively.

[0011] Furthermore, the optical detection system also includes a second focusing mirror disposed at the acquisition end of the second acquisition module, used to focus the incident beam and reflect it to the second acquisition module.

[0012] Furthermore, the shaping module also includes a filter disposed between the first collimating mirror and the first focusing mirror for filtering the light beam from the first collimating mirror.

[0013] Furthermore, the shaping module also includes a collimating lens and a focusing lens disposed between the first collimating mirror and the first focusing mirror;

[0014] The focusing lens is used to focus the light beam from the first collimating mirror and transmit it to the collimating lens;

[0015] The collimating lens is used to collimate the light beam from the focusing lens and output it to the first focusing mirror.

[0016] Furthermore, the optical detection system also includes a light source assembly, which includes a first optical fiber for transmitting an input beam, a second optical fiber for receiving a reflected beam, an optical fiber coupler, and a third optical fiber. The first optical fiber and the second optical fiber are respectively coupled to the third optical fiber through the optical fiber coupler. The third optical fiber has a first channel communicating with the first optical fiber and a second channel communicating with the second optical fiber.

[0017] Furthermore, the first channel includes a plurality of first sub-channels arranged in a ring around the second channel.

[0018] Furthermore, the optical detection system also includes a vacuum chamber;

[0019] The shaping module and the platform for holding the thin film sample are disposed within the vacuum chamber.

[0020] Furthermore, the optical detection system also includes a first vacuum flange, a second vacuum flange, and a third vacuum flange respectively disposed on the vacuum chamber;

[0021] The output end of the light source is connected to the first vacuum flange;

[0022] The acquisition end of the first acquisition module is connected to the second vacuum flange;

[0023] The acquisition end of the second acquisition module is connected to the third vacuum flange.

[0024] The beneficial effects of this utility model are as follows:

[0025] This invention uses a first collector to collect the reflected light beam from a thin film sample and a second collector to collect the incident light beam output from a light source. The reflectivity of the thin film sample is calculated using the collected reflected and incident light beams. Furthermore, the incident light beam emitted from the light source is first collimated by a first collimating mirror and then focused by a first focusing mirror. Because the collimated parallel beam is far less sensitive to deviations in component position and angle than the diverging and converging beams, the overall installation tolerance requirements for the first focusing and collimating mirrors are significantly reduced during alignment and installation, effectively lowering manufacturing and installation costs. Attached Figure Description

[0026] The specific embodiments of this utility model will be further described in detail below with reference to the accompanying drawings.

[0027] Figure 1 A schematic diagram of the overall structure of the optical detection system according to the first embodiment of the present invention is shown.

[0028] Figure 2 This diagram illustrates the optical path transmission structure of the optical detection system according to the first embodiment of the present invention.

[0029] Figure 3 The diagram shows the structure of the first optical fiber, the second optical fiber, the third optical fiber, and the fourth optical fiber of this invention.

[0030] Figure 4 This diagram shows the second beam of the present invention after collimation and focusing.

[0031] Figure 5 This diagram illustrates the optical path transmission structure of the optical detection system according to a second embodiment of the present invention.

[0032] Figure 6 This diagram illustrates the optical path transmission structure of the optical detection system according to the third embodiment of the present invention.

[0033] Figure 7 This diagram illustrates the optical path transmission structure of the optical detection system according to the fourth embodiment of the present invention.

[0034] Figure 8 This diagram illustrates the optical path transmission structure of the optical detection system according to the fifth embodiment of the present invention.

[0035] Figure 9 This diagram illustrates the optical path transmission structure of the optical detection system according to the sixth embodiment of the present invention.

[0036] Figure 10This diagram illustrates the optical path transmission structure of the optical detection system according to the seventh embodiment of the present invention.

[0037] Figure 11 This diagram illustrates the optical path transmission structure of the optical detection system according to the eighth embodiment of the present invention.

[0038] Figure 12 This diagram illustrates the optical path transmission structure of the optical detection system according to the ninth embodiment of the present invention.

[0039] Figure 13 This diagram illustrates the optical path transmission structure of the optical detection system according to the tenth embodiment of the present invention. Detailed Implementation

[0040] To more clearly illustrate this utility model, the following description, in conjunction with embodiments and accompanying drawings, further explains the present utility model. Similar components in the drawings are indicated by the same reference numerals. Those skilled in the art should understand that the specific description below is illustrative rather than restrictive and should not be construed as limiting the scope of protection of this utility model.

[0041] This invention provides an optical detection system for detecting thin film sample 10, such as... Figure 1 and Figure 2 As shown, it includes a light source 20, a shaping module 50, a first acquisition module 40, and a second acquisition module 30;

[0042] The shaping module 50 is disposed at the output end of the light source 20, and includes a first collimating mirror 08 and a first focusing mirror 09; the first collimating mirror 08 is used to collimate the incident light beam from the light source 20 and reflect it to the first focusing mirror 09; the first focusing mirror 09 is used to focus the light beam from the first collimating mirror 08 and reflect it to the thin film sample 10.

[0043] The first acquisition module 40 is used to acquire the reflected light beam of the thin film sample 10;

[0044] The second acquisition module 30 is used to acquire the incident light beam.

[0045] In this invention, the reflected light beam from the thin film sample 10 is collected by a first collector, and the incident light beam output from the light source 20 is collected by a second collector. The reflectivity of the thin film sample 10 is calculated from the collected reflected light beam and the incident light beam. Furthermore, the incident light beam emitted from the light source 20 is first collimated by a first collimating mirror 08 and then focused by a first focusing mirror 09. Since the collimated parallel beam is far less sensitive to deviations in element position and angle than the diverging and converging beams, the overall installation tolerance requirements of the first focusing mirror 09 and the first collimating mirror 08 are significantly reduced during alignment and installation, effectively lowering manufacturing and installation costs.

[0046] In a specific example, the light source 20 outputs an incident beam to the first collimating mirror 08;

[0047] The first collimating mirror 08 is used to collimate the received incident beam and output it to the first focusing mirror 09; the first focusing mirror 09 is used to focus the received second beam and output it to the thin film sample 10; the first acquisition module 40 is used to acquire the reflected beam of the thin film sample 10, and the second acquisition module 30 is used to acquire the incident beam. Thus, the film thickness of the thin film sample 10 is calculated by using the light intensity of the incident beam and the light intensity of the reflected beam.

[0048] In one possible implementation, the first collimating mirror 08 and the first focusing mirror 09 are both 90° off-axis parabolic mirrors. Compared to other aspherical mirrors, the 90° off-axis parabolic mirror can perfectly eliminate spherical aberration. The parabola can converge parallel light to the focal point without aberration, while the ellipsoid or hyperboloid is only optimized for a specific conjugate distance. In addition, its pure reflective geometry allows it to maintain a constant focal length in the ultraviolet to terahertz band without the need for complex coating compensation. Moreover, the right-angle bend design with 90° optical path folding saves more space than small-angle off-axis mirrors and completely avoids central obstruction.

[0049] In one possible implementation, the optical detection system further includes a beam splitter 05 disposed between the output end of the light source 20 and the shaping module 50. The beam splitter 05 is used to split the incident beam from the light source 20 and output it to the first collimating mirror 08 and the second acquisition module 30 respectively.

[0050] In one specific example, the optical detection system further includes a second focusing mirror 06 disposed at the acquisition end of the second acquisition module 30, for focusing the incident beam and reflecting it to the second acquisition module 30.

[0051] Following the example above, the optical detection system also includes a fourth optical fiber 07, a beam splitter 05 that splits the received incident beam into a first beam and a second beam, and outputs the first beam to the second focusing mirror 06 and the second beam to the first collimating mirror 08.

[0052] The second focusing mirror 06 is used to focus the received first beam and output it to the fourth optical fiber 07; the fourth optical fiber 07 is used to output the received first beam to the second acquisition module 30.

[0053] The first collimating mirror 08 is used to collimate the received second beam and output it to the first focusing mirror 09; the first focusing mirror 09 is used to focus the received second beam and output it to the thin film sample 10.

[0054] In one possible implementation, such as Figure 6 As shown, the shaping module 50 further includes a filter 13 disposed between the first collimating mirror 08 and the first focusing mirror 09, for filtering the light beam from the first collimating mirror 08. In this embodiment, the filter 13 can suppress specific wavelengths, resulting in a smoother reflectivity curve of the thin film sample 10 calculated in real time according to the above formula during production on the production line, thus improving the linearity of the entire system.

[0055] Following the example above, the first collimating mirror 08 is used to collimate the second beam from the beam splitter 05 and output it to the filter 13;

[0056] The filter 13 is used to filter the second beam from the first collimating mirror 08 and output it to the first focusing mirror 09.

[0057] In one possible implementation, such as Figure 5 As shown, the shaping module 50 also includes a collimating lens 12 and a focusing lens 11 disposed between the first collimating mirror 08 and the first focusing mirror 09;

[0058] The focusing lens 11 is used to focus the light beam from the first collimating mirror 08 and transmit it to the collimating lens 12;

[0059] Collimating lens 12 is used to collimate the beam from focusing lens 11 and output it to the first focusing mirror 09. In this embodiment, focusing lens 11 first focuses the second beam, and then collimates it through collimating lens 12. This method narrows the width of the second beam split by the beam splitter (or the incident beam if there is no beam splitter), making the divergence angle of the reflected light from the thin film smaller, resulting in higher light energy utilization and less stray light. The smaller divergence angle of the second beam makes the illumination conditions closer to vertical illumination, which is more consistent with the reflectivity film thickness calculation model. Compared with mirrors, lenses can be placed in the original optical path, occupying a small volume and requiring no modification or adjustment to the original optical path. Users can set different collimating lenses 12 and focusing lenses 11 according to their needs, greatly improving the flexibility of the optical detection system configuration.

[0060] In one possible implementation, such as Figure 7 The shaping module 50 also includes a collimating lens 12, a filter 13 and a focusing lens 11 arranged sequentially from top to bottom. The working principle is similar to that described above, so this embodiment will not elaborate further.

[0061] In one possible implementation, the optical detection system further includes a light source 20 assembly, which includes a first optical fiber 02 for transmitting an input beam, a second optical fiber 03 for receiving a reflected beam, an optical fiber coupler 01, and a third optical fiber 04. The first optical fiber 02 and the second optical fiber 03 are respectively coupled to the third optical fiber 04 through the optical fiber coupler 01. The third optical fiber 04 has a first channel 18 communicating with the first optical fiber 02 and a second channel 19 communicating with the second optical fiber 03.

[0062] Following the example above, the first optical fiber 02 is used to output the incident beam from the light source 20 to the optical fiber coupler 01; the optical fiber coupler 01 is used to output the incident beam from the first optical fiber 02 to the first channel 18 of the third optical fiber 04; the first channel 18 of the third optical fiber 04 is used to output the received incident beam to the beam splitter 05; the beam splitter 05 is used to split the received incident beam into a first beam and a second beam, and output the first beam to the second focusing mirror 06 and the second beam to the first collimating mirror 08.

[0063] The second focusing mirror 06 is used to focus the received first beam and output it to the fourth optical fiber 07; the fourth optical fiber 07 is used to output the received first beam to the second acquisition module 30.

[0064] The first collimating mirror 08 is used to collimate the received second beam and output it to the first focusing mirror 09; the first focusing mirror 09 is used to focus the received second beam and output it to the thin film sample 10.

[0065] The second channel 19 of the third optical fiber 04 is used to output part of the reflected light from the thin film sample 10 to the fiber coupler 01; the fiber coupler 01 is used to output part of the received reflected light to the second optical fiber 03; the second optical fiber 03 is used to output part of the received reflected light to the first acquisition module 40. In this embodiment, during the incident phase, the incident beam is split into a second beam and a first beam by the beam splitter 05: the first beam is output to the second acquisition module 30 through the second focusing mirror 06 and the fourth optical fiber 07; the second beam illuminates the thin film sample 10 through the first collimating mirror 08 and the first focusing mirror 09; during the reflection phase, part of the reflected light from the thin film sample 10 is output to the first acquisition module 40 after passing through the second channel 19 of the third optical fiber 04 and the fiber coupler 01; the beam splitter 05 changes the propagation direction of the first beam in the incident phase and the reflected light in the reflection phase, thus achieving physical isolation between the first beam and the reflected light. In addition, the first channel 18 of the third optical fiber 04 transmits the incident beam in one direction, and the second channel 19 transmits the reflected light in one direction; physical isolation is achieved through the dual channels of the third optical fiber 04 to avoid crosstalk between the incident beam and the reflected light inside the optical fiber.

[0066] Following the example above, such as Figure 2 In the optical detection system provided in this embodiment, the incident beam emitted by the light source 20 passes sequentially through the first optical fiber 02, the optical fiber coupler 01, the first channel 18 of the third optical fiber 04, and the beam splitter 05. The incident beam is split into a second beam and a first beam by the beam splitter 05.

[0067] The first beam is output to the fourth optical fiber 07 via the second focusing mirror 06, and then output to the second acquisition module 30 via the fourth optical fiber 07, where it is acquired to obtain the incident light intensity k1.

[0068] Correspondingly, the second beam is focused onto the thin film sample 10 by the first collimating mirror 08 and the first focusing mirror 09; the second beam is reflected by the thin film sample 10, outputting reflected light, which is then output to the end face of the second channel 19 of the third optical fiber 04 near the side of the beam splitter 05 via the first focusing mirror 09, the first collimating mirror 08, and the beam splitter 05. Part of the reflected light is output to the first acquisition module 40 via the second channel 19 of the third optical fiber 04, the fiber coupler 01, and the second optical fiber 03, where it is acquired to obtain the reflected light intensity k2. It should be noted that in this embodiment, the first acquisition module 40 and the second acquisition module 30 are light intensity collectors.

[0069] According to the formula

[0070]

[0071] The reflectance of the thin film sample 10 is obtained, where α is an adjustment factor obtained based on the beam splitting ratio of the beam splitter 05 and the ratio of the reflected light received by the second channel 19.

[0072] The thickness of the thin film sample 10 is obtained based on the reflectivity n of the thin film sample 10.

[0073] In one possible implementation, such as Figure 3 As shown, the first channel 18 includes multiple first sub-channels arranged in a ring around the second channel 19.

[0074] In a specific example, such as Figure 3 As shown, the first channel 18 includes multiple first sub-channels arranged in a ring around the second channel 19; the first optical fiber 02 includes the first channel 18; the second optical fiber 03 and the fourth optical fiber 07 each include the second channel 19.

[0075] Following the example above, such as Figure 3 As shown, the first optical fiber 02 includes six first sub-channels, and the third optical fiber 04 also includes six first sub-channels. The first sub-channels of the first optical fiber 02 and the first sub-channels of the third optical fiber 04 are connected one-to-one through optical fiber couplers 01.

[0076] Following the example above, such as Figure 3 As shown, the second channel 19 of the fourth optical fiber 07 is located at the center of the fourth optical fiber 07.

[0077] Following the example above, such as Figure 3 As shown, the second channel 19 of the second optical fiber 03 is located at the center of the second optical fiber 03; the second channel 19 of the third optical fiber 04 is connected to the second channel 19 of the second optical fiber 03 through the optical fiber coupler 01.

[0078] Following the example above, since the first channel 18 of the first optical fiber 02 has six channels, therefore... Figure 4 As shown, the second beam output from the first channel 18 via the beam splitter 05, after being collimated by the first collimating mirror 08 and focused by the first focusing mirror 09, presents a plum blossom-shaped light spot.

[0079] Following the example above, the first sub-channel and the second channel 19 are the fiber cores, respectively. Specifically, the first sub-channel and the second channel 19 are constructed from fiber cores. The third fiber 04 and the first fiber 02 are multi-core fibers (MCFs). A multi-core fiber (MCF) is a novel type of optical fiber that contains multiple independent fiber cores in a common cladding region, enabling independent transmission of multiple optical signals through space division multiplexing technology. Its typical structure employs a fluorine-doped cladding refractive index profile or microstructure design, significantly improving transmission capacity and reducing crosstalk between fiber cores. It should be noted that the second fiber 03 and the fourth fiber 07 can also be multi-core fibers. In practice, one of the fiber cores of the multi-core fiber is used, or an optical fiber with only one fiber core is used. This embodiment does not impose any restrictions on this.

[0080] Following the example above, the first collimating mirror 08 and the first focusing mirror 09 are both aspherical mirrors. The first collimating mirror 08 is used to collimate the second beam from the beam splitter 05 and reflect it to the first focusing mirror 09. The first focusing mirror 09 is used to focus the second beam from the first collimating mirror 08 and reflect it to the thin film sample 10. The combination of the first collimating mirror 08 and the first focusing mirror 09, using aspherical mirrors, can eliminate chromatic aberration and efficiently correct monochromatic aberrations such as spherical aberration, coma, and astigmatism, thereby obtaining a very small, high-quality focused spot close to the diffraction limit in the deep ultraviolet to far-infrared band. This results in ultra-high spectral resolution, ultra-wide spectral range adaptability, high light throughput or signal-to-noise ratio due to the absence of central obstruction, and high spatial resolution. Furthermore, due to the inherent dispersion and absorption characteristics of the material itself, and the need to achieve extremely low chromatic aberration and low loss over a wide wavelength range, the first collimating mirror 08 and the first focusing mirror 09 in this embodiment do not use aspherical transmission mirrors.

[0081] It should be noted that in the above example, the first optical fiber 02, the second optical fiber 03, the third optical fiber 04, and the fourth optical fiber 07 may not have cladding and coating layers outside the corresponding channels, and may only include the corresponding fiber cores. This embodiment does not impose any restrictions on this.

[0082] In a specific example, the second channel 19 of the third optical fiber 04 is used to output part of the reflected light from the thin film sample 10 to the fiber coupler 01. Specifically, the reflected light reflected by the thin film sample 10 passes through the first focusing mirror, the first collimating mirror 08, and the beam splitter 05 and then illuminates the end face of the third optical fiber 04 near the beam splitter 05. Therefore, the second channel 19 of the third optical fiber 04 receives part of the transmitted light from the beam splitter 05 and outputs it to the fiber coupler 01.

[0083] In one possible implementation, the optical detection system also includes a vacuum chamber 14;

[0084] The shaping module 50 and the platform for carrying the thin film sample 10 are disposed in the vacuum chamber 14.

[0085] In one possible implementation, the optical detection system also includes a first vacuum flange 15, a second vacuum flange 16, and a third vacuum flange 17 respectively disposed on the vacuum chamber 14;

[0086] The output end of the light source 20 is connected to the first vacuum flange 15;

[0087] The acquisition end of the first acquisition module 40 is connected to the second vacuum flange 16;

[0088] The acquisition end of the second acquisition module 30 is connected to the third vacuum flange 17.

[0089] In one specific example, the device also includes a first vacuum flange 15, a second vacuum flange 16, and a third vacuum flange 17;

[0090] The first optical fiber 02 is sealed and connected to the light source 20 through the first vacuum flange 15;

[0091] The second optical fiber 03 is sealed and connected to the first acquisition module 40 through the second vacuum flange 16;

[0092] The fourth optical fiber 07 is sealed and connected to the second acquisition module 30 through the third vacuum flange 17.

[0093] Specifically:

[0094] like Figure 9 As shown, fiber optic coupler 01, first fiber 02, second fiber 03, third fiber 04, fourth fiber 07, beam splitter 05, first collimating mirror 08, second focusing mirror 06, first focusing mirror 09, and thin film sample 10 are disposed in vacuum chamber 14.

[0095] The output end of the light source 20 is sealed to the vacuum chamber 14 via the first vacuum flange 15;

[0096] The acquisition end of the second acquisition module 30 is sealed to the vacuum chamber 14 through the second vacuum flange 16;

[0097] The acquisition end of the first acquisition module 40 is sealed to the vacuum chamber 14 through the third vacuum flange 17.

[0098] In one specific example, the device includes a platform, wherein the platform includes a displacement device disposed on the production line and a loading stage disposed on the displacement device; the loading stage is used to carry the film sample 10; the displacement device is selected from a linear displacement platform or a multi-axis displacement slide; the loading stage moves on the displacement device for automated production;

[0099] The output optical axis is perpendicular to the surface of the thin film sample 10 placed on the loading stage, so that when the loading stage is close to the optical detection system, the second beam is perpendicularly incident on the thin film sample 10 placed on the displacement platform, thereby enabling online real-time monitoring of the thin film sample 10.

[0100] Following the example above, the detection system also includes a controller and a proximity switch;

[0101] The proximity switch is installed on the displacement device. When the shortest distance between the optical detection system and the loading table is a preset distance, the displacement device triggers the proximity switch.

[0102] The controller is connected to a proximity switch, and the controller identifies whether the loading platform is close to the optical detection system based on the trigger state of the proximity switch.

[0103] In one possible implementation, such as Figure 8 As shown, in order to eliminate air refractive index disturbance, in this embodiment, at least the beam splitter 05, the first collimating mirror 08, the second focusing mirror 06, the first focusing mirror 09, and the thin film sample 10 need to be placed in the vacuum chamber 14.

[0104] Following the example above, the first collimating mirror 08 and the first focusing mirror 09 are off-axis aspherical mirrors, which means that the system pursues extremely high wavefront accuracy and resolution. This makes the optical detection system more sensitive to environmental interference, so a vacuum chamber 14 is needed to provide a vacuum environment for the optical detection system.

[0105] In a specific example, such as Figure 8 As shown, in this embodiment, the device also includes a first vacuum flange 15 and a second vacuum flange 16;

[0106] The third optical fiber 04, the fourth optical fiber 07, the beam splitter 05, the first collimating mirror 08, the second focusing mirror 06, the first focusing mirror 09, and the thin film sample 10 are disposed in the vacuum chamber 14.

[0107] The end of the third optical fiber 04 away from the optical fiber coupler 01 is sealed to the vacuum chamber 14 through the first vacuum flange 15.

[0108] The end of the fourth optical fiber 07 near the second focusing mirror 06 is sealed to the vacuum chamber 14 via the second vacuum flange 16.

[0109] In a specific example, such as Figure 10 As shown, the device also includes a first vacuum flange 15 and a second vacuum flange 16;

[0110] The third optical fiber 04, the fourth optical fiber 07, the first collimating mirror 08, the first focusing mirror 09, and the thin film sample 10 are disposed in the vacuum chamber 14.

[0111] The portion of the third optical fiber 04 near the optical fiber coupler 01 and the portion of the fourth optical fiber 07 near the second focusing mirror 06 are exposed outside the vacuum chamber 14.

[0112] The third optical fiber 04 is sealed to the vacuum chamber 14 via the first vacuum flange 15.

[0113] The fourth optical fiber 07 is sealed to the vacuum chamber 14 via the second vacuum flange 16.

[0114] Following the example above, such as Figure 11 As shown, in this embodiment, the beam splitter 05, the first collimating mirror 08, the collimating lens 12, the second focusing mirror 06, the first focusing mirror 09, the focusing lens 11, and the thin film sample 10 are disposed in the vacuum chamber 14.

[0115] Following the example above, such as Figure 12 As shown, in this embodiment, the beam splitter 05, the first collimating mirror 08, the second focusing mirror 06, the first focusing mirror 09, the filter 13, and the thin film sample 10 are disposed in the vacuum chamber 14.

[0116] Following the example above, such as Figure 13 As shown, in this embodiment, the beam splitter 05, the first collimating mirror 08, the collimating lens 12, the second focusing mirror 06, the first focusing mirror 09, the focusing lens 11, the filter 13, and the thin film sample 10 are disposed in the vacuum chamber 14.

[0117] In the description of this utility model, it should be noted that the terms "upper," "lower," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Unless otherwise expressly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal connection of two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0118] It should also be noted that in the description of this utility model, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0119] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating this utility model, and are not intended to limit the implementation of this utility model. For those skilled in the art, other variations or modifications can be made based on the above description. It is impossible to exhaustively list all the implementation methods here. All obvious variations or modifications derived from the technical solutions of this utility model are still within the protection scope of this utility model.

Claims

1. An optical inspection system for inspecting thin film samples, characterized in that, Includes a light source, a shaping module, a first acquisition module, and a second acquisition module; The shaping module is disposed at the output end of the light source and includes a first collimating mirror and a first focusing mirror; The first collimating mirror is used to collimate the incident beam from the light source and reflect it back to the first focusing mirror; The first focusing mirror is used to focus the light beam from the first collimating mirror and reflect it to the thin film sample; The first acquisition module is used to acquire the reflected light beam from the thin film sample; The second acquisition module is used to acquire the incident light beam.

2. The optical detection system according to claim 1, characterized in that, The first collimating mirror and the first focusing mirror are both 90° off-axis parabolic mirrors.

3. The optical detection system according to claim 1, characterized in that, The optical detection system further includes a beam splitter disposed between the output end of the light source and the shaping module. The beam splitter is used to split the incident beam from the light source and output it to the first collimating mirror and the second acquisition module respectively.

4. The optical detection system according to claim 1, characterized in that, The optical detection system further includes a second focusing mirror disposed at the acquisition end of the second acquisition module, used to focus the incident beam and reflect it to the second acquisition module.

5. The optical inspection system according to claim 3, characterized in that, The shaping module further includes a filter disposed between the first collimating mirror and the first focusing mirror for filtering the light beam from the first collimating mirror.

6. The optical detection system according to claim 1, characterized in that, The shaping module further includes a collimating lens and a focusing lens disposed between the first collimating mirror and the first focusing mirror; The focusing lens is used to focus the light beam from the first collimating mirror and transmit it to the collimating lens; The collimating lens is used to collimate the light beam from the focusing lens and output it to the first focusing mirror.

7. The optical detection system according to claim 1, characterized in that, The optical detection system further includes a light source assembly, which includes a first optical fiber for transmitting an input beam, a second optical fiber for receiving a reflected beam, an optical fiber coupler, and a third optical fiber. The first optical fiber and the second optical fiber are respectively coupled to the third optical fiber through the optical fiber coupler. The third optical fiber has a first channel communicating with the first optical fiber and a second channel communicating with the second optical fiber.

8. The optical detection system according to claim 7, characterized in that, The first channel includes a plurality of first sub-channels arranged in a ring around the second channel.

9. The optical detection system according to claim 1, characterized in that, The optical detection system also includes a vacuum chamber; The shaping module and the platform for holding the thin film sample are disposed within the vacuum chamber.

10. The optical detection system according to claim 9, characterized in that, The optical detection system also includes a first vacuum flange, a second vacuum flange, and a third vacuum flange respectively disposed on the vacuum chamber; The output end of the light source is connected to the first vacuum flange; The acquisition end of the first acquisition module is connected to the second vacuum flange; The acquisition end of the second acquisition module is connected to the third vacuum flange.

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