A high-precision anti-stuck vertical motion platform

Abstract

The utility model discloses a high accuracy, prevent dead vertical motion platform, include: vertical left side motion mechanism and right side motion module and the beam of cross arrangement in left side motion mechanism and right side motion module on, left side motion mechanism and right side motion module are provided with first bearing and second bearing respectively for supporting the both ends of beam, and at least one end on the beam is provided with the waist groove that can with first bearing and / or second bearing relative horizontal sliding. Adopt left side motion mechanism and right side motion module synchronous drive beam lifting and realize high accuracy motion, through setting first bearing and second bearing connection beam and left side motion mechanism and right side motion module, and setting waist groove on the beam realizes the relative displacement between first bearing or second bearing, thereby prevent when left side motion mechanism and right side motion module appear synchronous deviation, utilize first bearing or second bearing in waist groove and move and prevent motion dead lock, thereby ensure the precision and stable of beam movement.

Description

Technical fields:

[0001] This utility model relates to the field of automation technology, and specifically refers to a high-precision, jam-proof vertical motion platform. Background technology:

[0002] Vertical motion platforms are core components of modern industrial automation and precision manufacturing. Through mechatronics design (such as linear motors, ball screws, or piezoelectric ceramic drives), they achieve high-precision vertical displacement control of objects. Their technical features include nanometer-level positioning accuracy (up to ±10nm), multi-axis cooperative motion capabilities, and intelligent compensation systems (such as AI real-time correction). They are widely used in fields such as semiconductor lithography, optical inspection, and medical surgical robots.

[0003] However, for traditional vertical motion platforms, to ensure accuracy, guides or drives are typically used on both sides. For example, Chinese utility model patent CN20766215U discloses a cantilevered vertical motion mechanism, including a mounting bracket and a loading platform. Its key feature is that a pushing device is mounted on the mounting bracket, the top of which is connected to the loading platform, and the pushing device is connected to a vertical guide device. This cantilevered vertical motion mechanism has a simple and compact structure and is easy to operate. By setting a vertical guide device, the loading platform moves parallel to the linear guide rail, thus preventing deformation or damage to the pushing device and extending the service life of the electric push rod. Because both sides of the motion platform are restricted vertically, when the force on the motion platform is uneven, it will generate a force that tilts to one side. This force not only causes increased wear and tear, affecting accuracy, but may even cause jamming and inability to move. Alternatively, if the drive devices on both sides cannot work synchronously, the motion platform may also jam.

[0004] In view of the above, the inventors propose the following technical solution. Utility Model Content:

[0005] The purpose of this invention is to overcome the shortcomings of the existing technology and provide a high-precision, jam-proof vertical motion platform.

[0006] To solve the above-mentioned technical problems, the present invention adopts the following technical solution: a high-precision, anti-jamming vertical motion platform, comprising: a vertically arranged left motion mechanism and a right motion module, and a crossbeam spanning the left motion mechanism and the right motion module, wherein the left motion mechanism and the right motion module are respectively provided with a first bearing and a second bearing for supporting the two ends of the crossbeam, and at least one end of the crossbeam is provided with a waist groove that can slide horizontally relative to the first bearing and / or the second bearing.

[0007] Furthermore, in the above technical solution, the waist groove is elliptical or racetrack-shaped, and the first bearing and / or the second bearing are fitted into the waist groove with clearance fit.

[0008] Furthermore, in the above technical solution, the two ends of the crossbeam are provided with a first mounting block and a second mounting block for assembly and connection with the first bearing and the second bearing.

[0009] Furthermore, in the above technical solution, the first mounting block is provided with a groove and is installed with a clearance fit to the first bearing; the second mounting block is provided with a slot and is installed with a tight fit to the second bearing.

[0010] Furthermore, in the above technical solution, the left-side motion mechanism includes a vertically arranged support frame, a lead screw motor module vertically mounted on the support frame, a first guide rail and a second guide rail arranged on both sides of the lead screw motor module, a sliding seat slidably arranged on the first guide rail and the second guide rail and extending through to the other side of the support frame, a third guide rail and a fourth guide rail vertically arranged on the other side of the support frame, a motion support seat slidably arranged on the third guide rail and the fourth guide rail, and a bearing support seat arranged on the motion support seat for mounting the first bearing, wherein the sliding seat and the motion support seat are provided with floating joints.

[0011] Furthermore, in the above technical solution, the side of the motion support is provided with a reading head for reading the position, and the side of the support frame is provided with a grating ruler for cooperating with the reading head to determine the position.

[0012] Furthermore, in the above technical solution, the right motion module has the same structure as the left motion mechanism, and the left motion mechanism and the right motion module are directly connected by a connecting beam.

[0013] After adopting the above technical solution, the present invention has the following beneficial effects compared with the prior art: The present invention uses the left motion mechanism and the right motion module to synchronously drive the crossbeam to lift and lower to achieve high-precision motion. The crossbeam is connected to the left motion mechanism and the right motion module by setting the first bearing and the second bearing, and the crossbeam is provided with a waist groove to realize the relative displacement between the crossbeam and the first bearing or the second bearing. This prevents the crossbeam from jamming when there is a synchronous deviation between the left motion mechanism and the right motion module. The first bearing or the second bearing moves in the waist groove to prevent the motion from jamming, thereby ensuring the accuracy and stability of the crossbeam movement. Attached image description:

[0014] Figure 1 This is a perspective view of the present invention;

[0015] Figure 2 This is a reference diagram showing the usage state of this utility model;

[0016] Figure 3This is a schematic diagram of the left-side motion mechanism in this utility model. Figure 1 ;

[0017] Figure 4 This is a schematic diagram of the left-side motion mechanism in this utility model. Figure 2 ;

[0018] Figure 5 This is a schematic diagram of the left-side motion mechanism in this utility model. Figure 3 . Detailed implementation method:

[0019] The present invention will be further described below with reference to specific embodiments and accompanying drawings.

[0020] See Figures 1 to 5 As shown, a high-precision, anti-jamming vertical motion platform includes: a vertically arranged left motion mechanism 1 and a right motion module 2, and a crossbeam 3 spanning the left motion mechanism 1 and the right motion module 2. The left motion mechanism 1 and the right motion module 2 are respectively equipped with a first bearing 4 and a second bearing 5 to support the two ends of the crossbeam 3. At least one end of the crossbeam 3 is provided with a groove 30 that can slide horizontally relative to the first bearing 4 and / or the second bearing 5. High-precision motion is achieved by synchronously driving the crossbeam 3 up and down using the left motion mechanism 1 and the right motion module 2. The first bearing 4 and the second bearing 5 connect the crossbeam 3 to the left motion mechanism 1 and the right motion module 2. The groove 30 on the crossbeam 3 allows for relative displacement with the first bearing 4 or the second bearing 4, thus preventing jamming when there is a synchronization deviation between the left motion mechanism 1 and the right motion module 2. The movement of the first bearing 4 or the second bearing within the groove 30 prevents jamming, ensuring the precise and stable movement of the crossbeam 3.

[0021] The waist groove 30 is elliptical or racetrack-shaped, and the first bearing 4 and / or the second bearing 5 are fitted with a clearance fit within the waist groove 30. The two ends of the crossbeam 3 are provided with a first mounting block 31 and a second mounting block 32 for assembly and connection with the first bearing 4 and the second bearing 5. The first mounting block 31 has a waist groove 30 and is fitted with the first bearing 4 with a clearance fit; the second mounting block 32 has a slot 300 and is fitted with the second bearing 5 with a tight fit. By setting the first mounting block 31 and the second mounting block 32 at both ends of the crossbeam 3 to be assembled with the first bearing 4 and the second bearing 5 respectively, when the movement speeds of the left motion mechanism 1 and the right motion module 2 are not synchronized, a height difference will occur between the two ends of the crossbeam 3. At this time, the first bearing 30 can be displaced within the waist groove 30, and the second mounting block 32 can rotate relative to the second bearing 5, allowing the crossbeam 3 to tilt to avoid jamming. Furthermore, the relative rotation of the first mounting block 31 and the second mounting block 32 with the first bearing 4 and the second bearing 5 prevents the crossbeam 3 from tilting and generating stress.

[0022] The left-side motion mechanism 1 includes a vertically arranged support frame 11, a lead screw motor module 12 vertically mounted on the support frame 11, a first guide rail 13 and a second guide rail 14 arranged on both sides of the lead screw motor module 12, a sliding seat 15 slidably arranged on the first guide rail 13 and the second guide rail 14 and extending through to the other side of the support frame 11, a third guide rail 16 and a fourth guide rail 17 vertically arranged on the other side of the support frame 11, a motion support seat 18 slidably arranged on the third guide rail 16 and the fourth guide rail 17, and a bearing support seat 19 arranged on the motion support seat 18 for mounting the first bearing 4. Floating joints 6 are provided on the sliding seat 15 and the motion support seat 18.

[0023] The side of the motion support 18 is provided with a reading head 7 for reading the position, and the side of the support frame 11 is provided with a grating ruler 8 for determining the position in conjunction with the reading head 7. By using the grating ruler 8 on the side of the support frame 11, and by moving the reading head 7 on the motion support 18 along the grating ruler 8, high-precision movement of the motion support 18 can be achieved.

[0024] The right motion module 2 has the same structure as the left motion mechanism 1, and the left motion mechanism 1 and the right motion module 2 are directly connected by a connecting beam 9.

[0025] In summary, this utility model uses a high-precision lead screw, an absolute grating ruler 8, and a bearing structure to build a motion platform in the Z-axis direction, thereby achieving precise movement of the platform in the vertical direction.

[0026] During operation, the high-precision ball screw module provides real-time feedback and position adjustments, thereby precisely controlling the platform's movement. A linear encoder (8) compensates for this movement, further ensuring accuracy and synchronization between the two motion modules. Bearings are used at the load connection points to prevent the overall structure from jamming if the two modules' positions differ, ensuring the normal operation of the entire motion platform and extending its service life. The functions of each component are as follows:

[0027] The grating ruler 8 provides real-time feedback on the current position, compares it with the target position, compensates for any discrepancies, and adjusts the position to control the positional error between the two motion platforms to the micrometer level. Furthermore, the grating ruler feedback and motor operation achieve closed-loop control, significantly improving the system's stability and fault tolerance.

[0028] The floating joint 6 is used to make a flexible connection when connecting the lead screw motion module and the motion platform, making the platform move more smoothly.

[0029] The lead screw motor module 12 provides power with a micron-level motion accuracy, ensuring the precision of the entire structure. Utilizing a front-drive, rear-output structure guarantees the balance of the entire mechanism, making it more stable and safer during operation. Simultaneously, when a load is installed at the rear, the front-drive lead screw motor module 12 also acts as a counterweight, ensuring the mechanism's balance and reducing the tensile force between the guide rail and the slider, thus extending its service life.

[0030] The bearing structure is used when the motion platform connects to the crossbeam 3. When the two Z-axis modules are not synchronized, the middle crossbeam will tilt. When the crossbeam tilts, the bearing rotates. For the two modules, one bearing uses a tight fit, and the other has a gap. When the crossbeam 3 tilts, it changes from horizontal to tilted. The length required to connect the two modules needs to be increased, and the gap just compensates for this part of the length, avoiding jamming.

[0031] Of course, the above description is only a specific embodiment of the present utility model and is not intended to limit the scope of the present utility model. All equivalent changes or modifications made to the structure, features and principles described in the claims of the present utility model should be included in the scope of the claims of the present utility model.

Claims

1. A high-precision, jam-proof vertical motion platform, characterized in that, include: A vertically arranged left motion mechanism (1) and right motion module (2) and a horizontal beam (3) spanning the left motion mechanism (1) and right motion module (2), wherein the left motion mechanism (1) and right motion module (2) are respectively provided with a first bearing (4) and a second bearing (5) for supporting the two ends of the horizontal beam (3), and at least one end of the horizontal beam (3) is provided with a waist groove (30) that can slide horizontally relative to the first bearing (4) and / or the second bearing (5).

2. The high-precision, anti-jamming vertical motion platform according to claim 1, characterized in that: The waist groove (30) is elliptical or racetrack shaped, and the first bearing (4) and / or the second bearing (5) are fitted into the waist groove (30) with clearance fit.

3. The high-precision, anti-jamming vertical motion platform according to claim 2, characterized in that: The two ends of the crossbeam (3) are provided with a first mounting block (31) and a second mounting block (32) for assembly and connection with the first bearing (4) and the second bearing (5).

4. A high-precision, anti-jamming vertical motion platform according to claim 3, characterized in that: The first mounting block (31) is provided with a waist groove (30) and is installed with a clearance fit with the first bearing (4); the second mounting block (32) is provided with a slot (300) and is installed with a tight fit with the second bearing (5).

5. A high-precision, anti-jamming vertical motion platform according to any one of claims 1-4, characterized in that: The left-side motion mechanism (1) includes a vertically arranged support frame (11), a screw motor module (12) vertically mounted on the support frame (11), a first guide rail (13) and a second guide rail (14) arranged on both sides of the screw motor module (12), a sliding seat (15) slidably arranged on the first guide rail (13) and the second guide rail (14) and extending through to the other side of the support frame (11), a third guide rail (16) and a fourth guide rail (17) vertically arranged on the other side of the support frame (11), a motion support seat (18) slidably arranged on the third guide rail (16) and the fourth guide rail (17), and a bearing support seat (19) arranged on the motion support seat (18) for mounting the first bearing (4). Floating joints (6) are provided on the sliding seat (15) and the motion support seat (18).

6. A high-precision, anti-jamming vertical motion platform according to claim 5, characterized in that: The side of the motion support base (18) is provided with a reading head (7) for reading the position, and the side of the support frame (11) is provided with a grating ruler (8) for cooperating with the reading head (7) to determine the position.

7. A high-precision, anti-jamming vertical motion platform according to claim 6, characterized in that: The right motion module (2) has the same structure as the left motion mechanism (1), and the left motion mechanism (1) and the right motion module (2) are directly connected by a connecting beam (9).

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