A bearing device and a machining apparatus

Abstract

This utility model provides a supporting device and processing equipment, including: a platform with several through holes and a bearing surface for supporting workpieces, the through holes penetrating the bearing surface; and a lifting mechanism including a lifting rod and a pressing component, the pressing component having an upper side and a lower side, the lifting rod corresponding to the pressing component passing through the through holes and fixed to the lower side of the pressing component, the lifting rod corresponding to the workpiece passing through the through holes and abutting against the workpiece, the lifting rod moving vertically within the through holes, the lower side of the pressing component pressing the workpiece, the upper side of the pressing component supporting the workpiece, and the lifting rod driving the workpiece and the pressing component to move up and down. This supporting device allows for more efficient workpiece handling.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, and in particular to a carrier device and processing equipment. Background Technology

[0002] In semiconductor manufacturing equipment, to increase throughput, multiple samples are placed within the same machine and processed simultaneously using the same technology, reducing the number of repetitive processing operations and saving time. However, in some cases, samples of different sizes need to undergo the same process. It's difficult to ensure simultaneous processing of samples of different sizes within the same machine. Furthermore, many existing machines, especially those with a moving stage, require secure sample placement and good positional repeatability to ensure sample retrieval and placement are within an operable range. This necessitates adding a positioning element above the sample for limiting its movement. When retrieving or placing the sample, this positioning element must be removed first to detach it from the sample. This requires operation on the positioning element. Removing the positioning element before retrieving the sample, or placing the sample first and then placing the positioning element, are both relatively cumbersome processes. Therefore, a more efficient and convenient support device is needed. Utility Model Content

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention proposes a supporting device that can improve the efficiency of picking up and placing workpieces.

[0004] This utility model also proposes a processing equipment.

[0005] According to a first aspect of the present invention, a carrying device includes: a platform having a plurality of through holes and a bearing surface for supporting a workpiece, the through holes penetrating the bearing surface; and a lifting mechanism including a lifting rod and a pressing member, the pressing member including an upper side and a lower side, the lifting rod corresponding to the pressing member passing through the through holes and connected to the lower side of the pressing member, the lifting rod corresponding to the workpiece passing through the through holes and abutting against the workpiece, the lifting rod moving vertically within the through holes, the lower side of the pressing member pressing the workpiece, the upper side of the pressing member supporting the workpiece above, and the lifting rod driving the workpiece and the pressing member to move up and down.

[0006] The bearing device according to the first aspect of this utility model has at least the following beneficial effects: by providing a lifting mechanism, the pressing member can not only support the upper workpiece but also fix and press the lower workpiece. That is, when the bearing device needs to move, the pressing member presses and positions the workpiece; when the workpiece needs to be processed, the workpiece and the pressing member can be separated, making the processing of the workpiece more convenient and efficient.

[0007] According to some embodiments of the present invention, a groove is provided on the lower side surface. When the pressing member is pressed onto the workpiece, the bottom surface of the groove abuts against the workpiece, and there is a gap between the edge of the groove and the edge of the workpiece.

[0008] According to some embodiments of the present invention, the pressing member has an exposed opening that penetrates the pressing member. The projection of the exposed opening in the vertical direction is on the corresponding workpiece. The projection of the exposed opening in the vertical direction on the platform is a first projection. The projection of the lifting rod corresponding to the workpiece with the exposed opening in the vertical direction on the platform is a second projection. The second projection is within the first projection.

[0009] According to some embodiments of the present invention, in the vertical direction, the projection of the pressing member on the platform is located within the projection of the upper pressing member on the platform; in the vertical direction, the projection of the lifting rod corresponding to the pressing member on the platform is a third projection, and the projection of the lower pressing member on the platform is a fourth projection, and the third projection is disposed outside the fourth projection.

[0010] According to some embodiments of the present invention, a buffer portion is provided at the end of the lifting rod that abuts against the workpiece.

[0011] According to some embodiments of the present invention, a protrusion is provided on the bearing surface, the protrusion abuts against the workpiece, and there is a gap between the workpiece and the bearing surface.

[0012] According to some embodiments of this utility model, the distance between the edge of the exposed opening and the edge of the corresponding workpiece is not greater than 15mm and not less than 1mm.

[0013] A processing apparatus according to a second aspect of the present invention includes the carrying device described in any of the above embodiments.

[0014] According to some embodiments of the present invention, it also includes a housing, which together with the stage defines the cavity, and the workpiece and the pressing member are accommodated in the cavity.

[0015] According to some embodiments of the present invention, a heating device and an air intake device are also included. The heating device is disposed in the cavity and heats the cavity, and the air intake device is connected to the cavity and is used to release gas into the cavity.

[0016] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0017] Figure 1 This is a structural schematic diagram of a bearing device according to the present invention; Figure 2 This is a cross-sectional structural diagram of a processing equipment according to the present invention; Figure 3 This is a partial cross-sectional schematic diagram of the pressing component of a bearing device according to the present invention.

[0018] Icon labels: 1. Bearing device; 11. Platform; 111. Bearing surface; 112. Through hole; 113. Protrusion; 12. Lifting mechanism; 121. Lifting rod; 122. Pressing part; 123. Groove; 124. Exposed opening; 125. Upper side; 126. Lower side; 127. Buffer part; 2. Heating device; 3. Air intake device; 4. Housing; 5. Cavity; 6. Workpiece. Detailed Implementation

[0019] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0020] In the description of this utility model, it should be understood that the orientation descriptions, such as up and down, are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0021] In the description of this utility model, "multiple" refers to two or more. The use of "first" and "second" is for distinguishing technical features only and should not be construed as indicating or implying relative importance, or implicitly indicating the number of technical features or their sequential relationship.

[0022] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0023] Reference Figure 1 , Figure 2 and Figure 3 The bearing device in the first embodiment of this utility model includes: a platform 11 and a lifting mechanism 12. The platform 11 is provided with a plurality of through holes 112 and a bearing surface 111. The bearing surface 111 is used to bear the workpiece 6. The through holes 112 penetrate the bearing surface 111. The lifting mechanism 12 includes a lifting rod 121 and a pressing member 122. The pressing member 122 includes an upper side 125 and a lower side 126. The lifting rod 121 corresponding to the pressing member 122 passes through the through holes 112 and is connected to the lower side 126 of the pressing member 122. The connection between the lifting rod 121 and the pressing member 122 can be a fixed connection or an abutment. A lifting rod 121 corresponding to workpiece 6 passes through the through hole 112 and abuts against workpiece 6. The lifting rod 121 moves vertically within the through hole 112. The lower side 126 of the pressing member 122 is used to press workpiece 6, and the upper side 125 of the pressing member 122 is used to support workpiece 6. The lifting rod 121 is used to drive workpiece 6 and pressing member 122 to rise and fall. Taking a platform with two lifting mechanisms 12 as an example, when the platform 11 needs to move, the lower pressing member 122 can press one workpiece 6 onto the platform 11, while the upper pressing member 122 presses the other workpiece 6 onto the lower pressing member 122. At this time, when the platform 11 moves, both workpieces 6 are fixed, preventing the two workpieces 6 from moving relative to the platform 11 and avoiding affecting the subsequent processing of workpiece 6. The two workpieces 6 can be workpieces of the same size or workpieces of different sizes. When the two workpieces 6 are of different sizes, preferably, the smaller workpiece is placed on the lower side. When the stage 11 moves to the processing position and processes the workpiece 6, the lifting rod 121 separates the workpiece 6 from the pressing part 122. This prevents one side of the workpiece 6 from touching, thus allowing the workpiece 6 to be better exposed to the processing environment. Maintaining a certain distance between the workpieces 6 significantly improves processes such as heat coating of the workpiece 6.

[0024] The platform 11 and lifting mechanism 12 are used to divide the workpiece 6 because a certain interval needs to be maintained between the workpieces 6 during the coating, oxidation, and etching processes. This is because the semiconductor manufacturing process requires high precision and cleanliness. Maintaining a certain interval between the workpieces 6 prevents cross-contamination, thus ensuring the processing quality of the semiconductor workpieces 6. If no interval is maintained between the workpieces 6, contamination can easily occur during processing. Furthermore, this also helps improve the processing efficiency of the workpieces 6, preventing adjacent workpieces 6 from affecting processing speed and quality. It also helps reduce the failure rate of the processing equipment, making maintenance and cleaning of the equipment more convenient.

[0025] On the other hand, many processes in semiconductor manufacturing require heating the workpiece 6. To achieve uniform and rapid heating of the workpiece 6, gaps must be placed between multiple workpieces 6 during processing to better expose the heated surfaces. The purposes of heating include increasing the rate and uniformity of chemical reactions, enhancing impurity diffusion, improving crystal structure and electrical properties, and promoting oxidation reactions. In thin film deposition processes such as chemical vapor deposition, precise temperature control can promote reactions and form high-quality, uniform thin films; heating also helps to evenly distribute impurities and repair lattice damage. Heating can also improve crystal structure and optimize electrical properties. In oxidation processes, heating can promote the reaction of silicon oxide to form an oxide layer.

[0026] When setting the lifting rods 121, they can be set to the same length or different lengths. When the lengths are the same, the different lifting rods 121 need to be controlled separately. When the lifting rods 121 are set to different lengths, the lifting rods 121 corresponding to the lower workpiece 6 or pressing part 122 are shorter, while the lifting rods 121 corresponding to the upper workpiece 6 are longer. Therefore, when it is necessary to separate the workpiece 6 and the pressing part 122, it is only necessary to drive the lifting rods 121 from below through a plane, so that the workpiece 6 and the pressing part 122 can be raised to different heights. After the workpiece 6 and the pressing part 122 are separated, it is easier to use a robot to pick up or place the workpiece 6 or to perform further processing.

[0027] According to some embodiments of this utility model, a groove 123 is provided on the lower side 126. When the pressing member 122 presses onto the workpiece 6, the bottom surface of the groove 123 abuts against the workpiece 6, and there is a gap between the edge of the groove 123 and the edge of the workpiece 6. By setting the groove 123, the workpiece 6 can be positioned well without applying excessive downward pressure. The gap between the edge of the groove 123 and the edge of the workpiece 6 allows the workpiece 6 to be better pressed by the bottom surface of the groove 123. At the same time, it also avoids the workpiece 6 being squeezed or rubbed by the surface of the groove 123 when it enters the groove 123, thus better protecting the workpiece 6.

[0028] According to some embodiments of this utility model, the pressing part 122 has an exposed opening 124 that penetrates the pressing part 122. The vertical projection of the exposed opening 124 is projected onto the corresponding workpiece 6. The vertical projection of the exposed opening 124 onto the platform 11 is the first projection, and the vertical projection of the lifting rod 121 corresponding to the workpiece 6 is the second projection. The second projection is within the first projection. Firstly, when the exposed opening 124 is not provided, an adsorption effect will occur between the workpiece 6 and the pressing part 122, making separation difficult and even causing displacement of the workpiece 6. When the smoothness of the object surface exceeds a certain limit, the friction between the two surfaces will increase. The molecules on the two smooth surfaces are adjacent and have a small distance between them, attracting each other due to electromagnetic effects. Furthermore, the smooth surface reduces the mechanical interlocking effect, resulting in a greater attractive force from molecular adsorption. Additionally, when two smooth planes are bonded, the adsorption effect can be understood from the perspective of vacuum degree. Considering one piece as a suction cup, the adsorption force is proportional to the vacuum degree and the contact area. The vacuum degree is related to the sealing performance, which in turn is related to the surface roughness. The atmospheric pressure on the pressing component 122 will easily press the workpiece 6 and the pressing component 122 together. After setting the exposed opening 124, the contact area between the workpiece 6 and the pressing component 122 is greatly reduced, thereby effectively reducing the possibility of the workpiece 6 adhering to the pressing component 122.

[0029] According to some embodiments of the present invention, in the vertical direction, the projection of the pressing member 122 on the platform is located within the projection of the upper pressing member 122 on the platform 11; in the vertical direction, the projection of the lifting rod 121 corresponding to the pressing member 122 on the platform 11 is the third projection, and the projection of the lower pressing member 122 on the platform 11 is the fourth projection, and the third projection is located outside the fourth projection. When the lifting rod 121 corresponding to the pressing member 122 is located inside the vertical projection of the lower pressing member 122, it would be necessary to drill holes in the lower pressing member 122 to allow the lifting rod 121 to pass through, which could even affect the placement of the lower workpiece 6. Drilling holes in the lower pressing member 122 would also affect the smoothness of the lifting rod 121's movement. Therefore, the lifting rod 121 corresponding to the pressing member 122 needs to be located outside the vertical projection of the lower pressing member 122. This avoids both the lower pressing member 122's influence on the lifting rod 121 and the lifting rod 121's influence on the placement of the workpiece 6. When the vertical projection of the pressing member 122 is outside the upper pressing member 122, it would create a shearing force on the workpiece 6 during pressing, potentially damaging it. Therefore, the vertical projection of the pressing member 122 needs to be inside the upper pressing member 122.

[0030] According to some embodiments of this utility model, a buffer portion 127 is provided at the end of the lifting rod 121 corresponding to the workpiece 6 that abuts against the workpiece 6. To prevent the workpiece 6 from being damaged by the lifting rod 121, the buffer portion 127 is provided to protect the workpiece 6. Optionally, the material of the buffer portion 127 can be epoxy resin. Epoxy resin is widely used in the semiconductor packaging field, possessing excellent adhesion, electrical insulation, and mechanical strength, providing good mechanical support and protection for the chip and preventing external factors from damaging it. The material of the buffer portion 127 can also be phenolic resin, which has good heat resistance, corrosion resistance, and mechanical strength, providing more stable mechanical support for the chip. Polyimide resin has excellent high-temperature resistance and good mechanical properties, and is often used as a buffer layer and insulating layer between the chip and the substrate. It can withstand high-temperature reflow soldering processes while reducing the impact of thermal stress on the packaging structure, improving the reliability and performance of the packaging. The material of the buffer portion 127 can also be silicone resin, which performs excellently in dealing with temperature changes. It possesses excellent low-temperature flexibility and good weather resistance, and can maintain elasticity and performance stability in extremely low-temperature environments, providing reliable mechanical support for semiconductor devices.

[0031] According to some embodiments of this utility model, a protrusion 113 is provided on the bearing surface 111, and the protrusion 113 abuts against the workpiece 6, with a gap between the workpiece 6 and the bearing surface 111. By providing the protrusion 113 on the bearing surface 111, the workpiece 6 is prevented from adhering to the support platform 11, making it easier to separate the workpiece 6 from the support platform 11.

[0032] According to some embodiments of this utility model, the distance between the edge of the exposed opening 124 and the corresponding edge of the workpiece 6 is no greater than 15mm and no less than 1mm. If the distance is too large, it is easy to damage a large area of ​​the workpiece 6; if the distance is too small, it is easy to cause excessive pressure on the workpiece 6 and damage the workpiece 6. Therefore, the distance is limited to avoid damaging the workpiece 6 and also to avoid damaging too much of the surface of the workpiece 6.

[0033] A processing apparatus according to a second aspect of the present invention includes a support device 1 as described in any of the above embodiments.

[0034] According to some embodiments of this utility model, it also includes a housing 4, which, together with the platform 11, restricts the cavity 5, in which the workpiece 6 and the pressing component 122 are accommodated. By restricting the cavity 5 together with the platform 11, the lifting mechanism 12 and the workpiece 6 can more easily enter the processing environment.

[0035] According to some embodiments of this utility model, it also includes a heating device 2 and an air inlet device 3. The heating device 2 is disposed inside the cavity 5 and heats the cavity 5. The air inlet device 3 is connected to the cavity 5 and is used to release gas into the cavity 5. This makes it more convenient to perform heating and etching processes on the workpiece 6.

[0036] The embodiments of the present utility model have been described in detail above with reference to the accompanying drawings. However, the present utility model is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present utility model.

Claims

1. A supporting device, characterized in that, include: A platform is provided with several through holes and a bearing surface for supporting workpieces. The through holes penetrate the bearing surface. A lifting mechanism includes a lifting rod and a pressing component. The pressing component includes an upper side and a lower side. The lifting rod corresponding to the pressing component passes through the through hole and is connected to the lower side of the pressing component. The lifting rod corresponding to the workpiece passes through the through hole and is used to abut against the workpiece. The lifting rod moves vertically within the through hole. The lower side of the pressing component is used to press the workpiece, and the upper side of the pressing component is used to support the workpiece. The lifting rod is used to drive the workpiece and the pressing component to move up and down.

2. The bearing device according to claim 1, characterized in that, A groove is provided on the lower side surface. When the pressing component is pressed onto the workpiece, the bottom surface of the groove abuts against the workpiece, and there is a gap between the edge of the groove and the edge of the workpiece.

3. The bearing device according to claim 1, characterized in that, The pressing component has an exposed opening that penetrates through it. The projection of the exposed opening in the vertical direction is onto the corresponding workpiece. The projection of the exposed opening in the vertical direction onto the platform is a first projection. The projection of the lifting rod corresponding to the workpiece with the exposed opening in the vertical direction onto the platform is a second projection. The second projection is within the first projection.

4. The bearing device according to claim 1, characterized in that, In the vertical direction, the projection of the pressing member on the platform is located within the projection of the upper pressing member on the platform; Along the vertical direction, the projection of the lifting rod corresponding to the pressing component on the platform is the third projection, and the projection of the pressing component below on the platform is the fourth projection. The third projection is located outside the fourth projection.

5. The bearing device according to claim 1, characterized in that, A buffer section is provided at the end of the lifting rod that abuts against the workpiece.

6. The bearing device according to claim 1, characterized in that, The bearing surface is provided with a protrusion, which abuts against the workpiece, and there is a gap between the workpiece and the bearing surface.

7. The bearing device according to claim 3, characterized in that, The distance between the edge of the exposed opening and the edge of the corresponding workpiece is not greater than 15mm and not less than 1mm.

8. A processing equipment, characterized in that, Includes the support device according to any one of claims 1-7.

9. The processing equipment according to claim 8, characterized in that, It also includes a housing, which, together with the stage, defines a cavity in which the workpiece and the pressing component are housed.

10. The processing equipment according to claim 9, characterized in that, It also includes a heating device and an air intake device. The heating device is disposed in the cavity and heats the cavity, and the air intake device is connected to the cavity and is used to release gas into the cavity.

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