Electrode-limited non-hanging acoustic resonator

Abstract

Acoustic volume wave resonator (2) comprising the following: a resonator body (4) comprising the following: a piezoelectric layer (8) wherein the piezoelectric layer (8) is a single crystal of LiNbO3, wherein the single crystal is cut at an angle and has a thickness wherein the angle and the thickness are designed to enable a mode 3 or mode 4 resonance; a device layer (12); and an upper conductive layer (6) on the piezoelectric layer (8) on the side opposite the device layer (12), wherein substantially the entire surface of the device layer (12) on the side opposite the piezoelectric layer (8) is provided for attaching the resonator body (4) to the support (14), which is not part of the resonator body (4).