Method for the automated mechanical adjustment of a particle beam column, associated computer program product and particle beam column

Abstract

Method for mechanically adjusting a particle beam column (100), wherein the particle beam column (100) has the following: a beam generator (120) with a particle source (1) and with an extractor aperture (121) for generating a particle beam (122) with charged particles, an anode aperture (3), a condenser lens system (4, 8) for focusing the particle beam (122), a condenser aperture (6) for shaping the particle beam (122), a first deflection unit (5) for deflecting the particle beam (122), which is arranged between the anode aperture (3) and the condenser aperture (6) with respect to the particle-optical beam path, an objective lens system (11, 12) for focusing the particle beam (122) onto an object (13), wherein interaction particles are produced when the particle beam (122) interacts with the object (13), a detection system (10) for detecting the interaction particles, and a control unit (20) for controlling the particle beam column (100) wherein the method in an operating mode in which the particle beam column (100) is operated with the condenser lens system (4, 8) switched off and with the objective lens system (11, 12) switched off comprises the following steps: for multiple K from different positions Pij: a1) Positioning the beam generator (120) in a position Pij by means of an electrically controlled mechanical beam head adjustment device; b1) A scanning the condenser aperture (6) with the particle beam (122) using the first deflection unit (5) and generating a raster image Sij of the condenser aperture (6) using the detection system (10); c1) Analyzing the raster image Sij with respect to the condenser aperture depicted on it (6a); d1) Determining a best raster image S best based on the analysis or analyses according to step c1); and e1) Positioning the beam generator (120) by means of the electrically controlled mechanical beam head adjustment device in a position P best , in which the best raster image S best was produced.