Modeling apparatus, and modeling method

Abstract

To provide a modeling apparatus capable of appropriately modeling a structural object.SOLUTION: A modeling apparatus radiates a beam with a first position as a radiation position of the beam to model a first modeled object, and radiates the beam to the first modeled object with the second position of the first modeled object as a radiation position of the beam to model a second modeled object, thereby to model a first structural layer. The modeling apparatus further radiates the beam to the first structural layer with the third position of the first structural layer as a radiation position of the beam to model a third modeled object, and radiates the beam to the third modeled object with the fourth position of the third modeled object as a radiation position of the beam to model a fourth modeled object, thereby to model a second structural layer. At least one of the distance between the first position and the second position and the distance between the third position and the fourth position is shorter than the distance between the second position and the third position. As its result, the modeling apparatus models a structural object that includes the first and the second structural layers and inclined with respect to a light-axis direction.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to the technical field of a molding apparatus and a molding method capable of molding, for example, a structure. [Background technology]

[0002] An example of a modeling apparatus capable of modeling a structure is described in Patent Document 1. With such a modeling apparatus, a technical challenge is to appropriately model a structure. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] US Patent Application Publication No. 2014 / 0197576 Summary of the Invention

[0004] According to a first aspect, there is provided a modeling apparatus including a beam irradiation unit including an optical system that emits an energy beam, and a modeling unit including at least a material supply unit that supplies modeling material to an irradiation position of the energy beam, and a modeling control unit that controls modeling of a structure by the modeling unit, wherein the modeling control unit controls the modeling unit to form a first structure by irradiating the energy beam to a first position as the irradiation position of the energy beam, and to form a second structure by irradiating the first structure with the energy beam to a second position of the first object as the irradiation position of the energy beam, and to form a first structural layer by irradiating the first structural layer with the energy beam to a third position of the first structural layer as the irradiation position of the energy beam, and to form a third structure by irradiating the first structural layer with the energy beam to a fourth position of the third object as the irradiation position of the energy beam. A modeling device is provided that controls the modeling unit to form a second structural layer by irradiating an energy beam to form a fourth object, and controls the modeling unit so that at least one of a distance between the first position and the second position along the optical axis direction of the optical system and a distance between the third position and the fourth position along the optical axis direction is shorter than a distance between the second position and the third position along the optical axis direction, and controls the modeling unit so that at least one of a distance between the first position and the second position along an intersecting direction that intersects with the optical axis direction and a distance between the third position and the fourth position along the intersecting direction is shorter than a distance between the second position and the third position along the intersecting direction, and controls the modeling unit to form a structure that includes at least the first structural layer and the second structural layer and is inclined with respect to the optical axis direction.

[0005] According to a second aspect, there is provided a modeling apparatus comprising a beam irradiation unit including an optical system that emits an energy beam, a modeling unit having at least a material supply unit that supplies modeling material to a position irradiated by the energy beam, and a modeling control unit that controls the modeling of a structure by the modeling unit, wherein the modeling control unit is capable of switching between a first operating mode for modeling a first structure including an inclined surface that intersects with the direction of gravity at a first angle, and a second operating mode for modeling a second structure including an inclined surface that intersects with the direction of gravity at a second angle, in response to input from a user.

[0006] According to a third aspect, there is provided a modeling device including a beam irradiation unit including an optical system that emits an energy beam, and a modeling unit including at least a material supply unit that supplies modeling material to an irradiation position of the energy beam, and a modeling control unit that controls modeling of a structure by the modeling unit, wherein the modeling control unit controls the modeling unit to model a first object extending along a scanning direction in an intersecting plane that intersects with an optical axis direction of the optical system, by moving the energy beam at a first position as an irradiation position or a focusing position of the energy beam, and to model a second object extending along the scanning direction in the intersecting plane, by moving the energy beam at a second position as an irradiation position or a focusing position of the energy beam, thereby forming a first structure layer, and The present invention provides a modeling device that controls the modeling unit to form a second structural layer by setting a third position as an irradiation position or focusing position of the energy beam and moving the energy beam to form a third object extending along the scanning direction, and by setting a fourth position of at least a part of the second object as an irradiation position or focusing position of the energy beam and moving the energy beam to form a fourth object extending along the scanning direction, and controls the modeling unit so that the first object and the second object are formed side by side in a direction intersecting the scanning direction, and the third object and the fourth object are formed side by side in a direction intersecting the scanning direction, and controls the modeling unit to form a structure inclined with respect to the optical axis direction by forming a structural layer including at least the first structural layer and the second structural layer.

[0007] The functions and other advantages of the present invention will become apparent from the following detailed description of the preferred embodiments. [Brief description of the drawings]

[0008] [Figure 1] FIG. 1 is a block diagram showing a system configuration of a modeling apparatus according to this embodiment. [Diagram 2] FIG. 2 is a cross-sectional view showing the structure of the molding apparatus of the present embodiment. [Diagram 3] FIG. 3 is a cross-sectional view showing the structure of the molding apparatus of the present embodiment. [Figure 4] Each of Figs. 4(a) to 4(e) is a cross-sectional view showing a state in which a certain area on a workpiece is irradiated with modeling light and modeling material is supplied thereto. [Diagram 5] Each of FIG. 5(a) and FIG. 5(b) is a cross-sectional view showing an irradiation target position of the shaping light. [Figure 6] Each of FIG. 6(a) and FIG. 6(b) is a cross-sectional view showing a target position for irradiation with the shaping light. [Figure 7] Each of Fig. 7(a) to Fig. 7(c) is a cross-sectional view showing a process for forming a three-dimensional structure. [Figure 8] FIG. 8(a) is a perspective view showing an example of an inclined structure, and FIG. 8(b) is a cross-sectional view showing an example of an inclined structure. [Figure 9] FIG. 9(a) is a perspective view showing one step of forming an inclined structure, and FIG. 9(b) is a cross-sectional view showing one step of forming an inclined structure. [Figure 10] FIG. 10(a) is a perspective view showing one step of forming an inclined structure, and FIG. 10(b) is a cross-sectional view showing one step of forming an inclined structure. [Figure 11] FIG. 11 is a cross-sectional view showing one step of forming a tilted structure. [Figure 12] FIG. 12(a) is a perspective view showing one step of forming an inclined structure, and FIG. 12(b) is a cross-sectional view showing one step of forming an inclined structure. [Figure 13] FIG. 13 is a cross-sectional view showing one step of forming an inclined structure. [Figure 14] FIG. 14(a) is a perspective view showing one step of forming an inclined structure, and FIG. 14(b) is a cross-sectional view showing one step of forming an inclined structure. [Figure 15] Each of Fig. 15(a) and Fig. 15(b) is a cross-sectional view showing one step of forming a tilted structure. [Figure 16]Each of Fig. 16(a) to Fig. 16(c) is a cross-sectional view showing one step of forming a tilted structure. [Figure 17] FIG. 17(a) is a perspective view showing one step of forming an inclined structure, and FIG. 17(b) is a cross-sectional view showing one step of forming an inclined structure. [Figure 18] FIG. 18(a) is a perspective view showing one step of forming an inclined structure, and FIG. 18(b) is a cross-sectional view showing one step of forming an inclined structure. [Figure 19] FIG. 19(a) is a perspective view showing one step of forming an inclined structure, and FIG. 19(b) is a cross-sectional view showing one step of forming an inclined structure. [Figure 20] FIG. 20(a) is a perspective view showing one step of forming an inclined structure, and FIG. 21(b) is a cross-sectional view showing one step of forming an inclined structure. [Figure 21] FIG. 21(a) is a perspective view showing an example of an inclined structure, and FIG. 21(b) is a cross-sectional view showing an example of an inclined structure. [Figure 22] FIG. 22(a) is a perspective view showing one step of forming an inclined structure, and FIG. 22(b) is a cross-sectional view showing one step of forming an inclined structure. [Figure 23] FIG. 23(a) is a perspective view showing one step of forming an inclined structure, and FIG. 23(b) is a cross-sectional view showing one step of forming an inclined structure. [Figure 24] FIG. 24(a) is a perspective view showing one step of forming an inclined structure, and FIG. 24(b) is a cross-sectional view showing one step of forming an inclined structure. [Diagram 25] FIG. 25(a) is a perspective view showing one step of forming an inclined structure, and FIG. 25(b) is a cross-sectional view showing one step of forming an inclined structure. [Figure 26] FIG. 26(a) is a perspective view showing an example of an inclined structure, and FIG. 26(b) is a cross-sectional view showing an example of an inclined structure. [Figure 27] Each of Fig. 27(a) and Fig. 27(b) is a cross-sectional view showing the inclination angle of the inclined surface with respect to the direction of gravity. [Figure 28] FIG. 28 is a graph showing the first and second operation modes. [Figure 29] FIG. 29 is a graph showing the first operation mode and the second operation mode. [Diagram 30] FIG. 30 is a graph showing the first and second operation modes. [Diagram 31] FIG. 31 is a graph showing the first and second operation modes. [Diagram 32] FIG. 32 is a graph showing the first operation mode and the second operation mode. [Diagram 33] FIG. 33(a) is a perspective view showing an example of a thick plate-like inclined structure, and FIG. 33(b) is a cross-sectional view showing an example of the thick plate-like inclined structure. [Diagram 34] FIG. 34 is a plan view showing a structural layer constituting a thick plate-like inclined structure. [Diagram 35] FIG. 35 is a plan view showing a structural layer constituting a thick plate-like inclined structure. [Diagram 36] Figure 36(a) is an oblique view showing an example of a thick plate-shaped inclined structure in which both the outer wall surface and the inner wall surface are inclined surfaces, and Figure 36(b) is a cross-sectional view showing an example of a thick plate-shaped inclined structure in which both the outer wall surface and the inner wall surface are inclined surfaces. [Figure 37] FIG. 37 is a plan view showing a structural layer constituting a thick plate-like inclined structure in which both the outer wall surface and the inner wall surface are inclined surfaces. [Figure 38] FIG. 38(a) is an oblique view showing an example of an inclined structure having an inclined surface that is inclined so as to fall along the scanning direction, and FIG. 38(b) is a cross-sectional view showing an example of an inclined structure having an inclined surface that is inclined so as to fall along the scanning direction. [Figure 39] FIG. 39(a) is a perspective view showing one step of forming an inclined structure, and FIG. 39(b) is a cross-sectional view showing one step of forming an inclined structure. [Diagram 40] FIG. 40(a) is a perspective view showing one step of forming an inclined structure, and FIG. 40(b) is a cross-sectional view showing one step of forming an inclined structure. [Diagram 41] FIG. 41(a) is a perspective view showing one step of forming an inclined structure, and FIG. 41(b) is a cross-sectional view showing one step of forming an inclined structure. [Diagram 42] FIG. 42(a) is a perspective view showing an example of an inclined structure, and FIG. 42(b) is a cross-sectional view showing an example of an inclined structure. [Diagram 43] FIG. 43 is a cross-sectional view showing an example of a gap structure. [Diagram 44] FIG. 44 is a cross-sectional view showing one step of forming an air gap structure. [Diagram 45] FIG. 45 is a cross-sectional view showing one step of forming an air gap structure. [Diagram 46] FIG. 46 is a cross-sectional view showing one step of forming an air gap structure. [Figure 47] FIG. 47 is a cross-sectional view showing one step of forming an air gap structure. [Figure 48] FIG. 48(a) is a perspective view showing one step of forming an inclined structure, and FIG. 48(b) is a cross-sectional view showing one step of forming an inclined structure. [Figure 49] FIG. 49(a) is a perspective view showing one step of forming an inclined structure, and FIG. 49(b) is a cross-sectional view showing one step of forming an inclined structure. [Figure 50] FIG. 50 is a perspective view showing a rotating stage. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, an embodiment of a modeling apparatus and a modeling method will be described with reference to the drawings. Hereinafter, an embodiment of a modeling apparatus and a modeling method will be described using a modeling apparatus SYS capable of performing processing on a workpiece W, which is an example of an object. In particular, below, an embodiment of a modeling apparatus and a modeling method will be described using a modeling apparatus SYS that performs additive processing based on a laser metal deposition (LMD). The additive processing based on the laser metal deposition is additive processing that forms a model that is integrated with the workpiece W or that can be separated from the workpiece W by melting a modeling material M supplied to the workpiece W with modeling light EL (i.e., an energy beam in the form of light). However, the modeling apparatus SYS may perform additive processing based on a method other than the laser metal deposition. Alternatively, the modeling apparatus SYS may perform any processing (e.g., removal processing) other than additive processing.

[0010] Laser metal deposition (LMD) may also be called direct metal deposition, directed energy deposition, laser cladding, laser engineered net shaping, direct light fabrication, laser consolidation, shape deposition manufacturing, wire-feed laser deposition, gas through wire, laser powder fusion, laser metal forming, selective laser powder remelting, laser direct casting, laser powder deposition, laser additive manufacturing, and laser rapid forming.

[0011] In the following description, the positional relationship of the various components constituting the molding apparatus SYS will be described using an XYZ Cartesian coordinate system defined by mutually orthogonal X-axis, Y-axis, and Z-axis. For convenience of explanation, the X-axis direction and the Y-axis direction are each assumed to be horizontal (i.e., a predetermined direction within a horizontal plane), and the Z-axis direction is assumed to be vertical (i.e., a direction perpendicular to the horizontal plane, essentially an up-down direction). The directions of rotation around the X-axis, Y-axis, and Z-axis are respectively referred to as the θX direction, the θY direction, and the θZ direction. Here, the Z-axis direction may be the direction of gravity. The XY plane may be assumed to be the horizontal direction.

[0012] (1) Structure of the modeling device SYS First, a structure of the molding apparatus SYS of the present embodiment will be described with reference to Fig. 1 to Fig. 3. Fig. 1 is a system configuration diagram showing a system configuration of the molding apparatus SYS of the present embodiment. Fig. 2 and Fig. 3 are each a cross-sectional view that typically shows the structure of the molding apparatus SYS of the present embodiment.

[0013] The modeling apparatus SYS is capable of performing additive processing on the workpiece W. The modeling apparatus SYS is capable of forming a structure that is integrated with (or separable from) the workpiece W by performing additive processing on the workpiece W. In this case, the additive processing performed on the workpiece W corresponds to processing for adding a structure that is integrated with (or separable from) the workpiece W to the workpiece W. Note that the structure in this embodiment may refer to any object that is formed by the modeling apparatus SYS. For example, the modeling apparatus SYS is capable of forming a three-dimensional structure ST (that is, a three-dimensional structure that has a size in all three-dimensional directions, a solid object, in other words, a structure that has a size in the X-axis direction, the Y-axis direction, and the Z-axis direction) as an example of a structure.

[0014] When the workpiece W is the stage 31 described below, the modeling apparatus SYS is capable of performing additional processing on the stage 31. When the workpiece W is a mounted object, which is an object placed on the stage 31, the modeling apparatus SYS is capable of performing additional processing on the mounted object. The mounted object placed on the stage 31 may be another three-dimensional structure ST (i.e., an existing structure) modeled by the modeling apparatus SYS. Note that FIG. 1 shows an example in which the workpiece W is an existing structure held by the stage 31. The following description will also be given using an example in which the workpiece W is an existing structure held by the stage 31.

[0015] The workpiece W may be an item that has a defect and needs to be repaired. In this case, the modeling apparatus SYS may perform repair processing to repair the item that needs to be repaired by performing additional processing to form a shaped object to fill the defect. In other words, the additional processing performed by the modeling apparatus SYS may include additional processing to add a shaped object to the workpiece W to fill the defect.

[0016] As described above, the modeling apparatus SYS is capable of performing additive processing based on the laser build-up welding method. In other words, the modeling apparatus SYS can be said to be a 3D printer that models objects using additive manufacturing technology. The additive manufacturing technology may also be called rapid prototyping, rapid manufacturing, or additive manufacturing.

[0017] The modeling device SYS performs additional processing by processing the modeling material M using the modeling light EL. The modeling material M is a material that can be melted by irradiation with the modeling light EL of a predetermined intensity or higher. For example, at least one of a metallic material and a resinous material can be used as the modeling material M. However, other materials other than the metallic material and the resinous material may be used as the modeling material M. The modeling material M is a powder or granular material. In other words, the modeling material M is a powdered granular material. However, the modeling material M does not have to be a powdered granular material. For example, at least one of a wire-shaped modeling material and a gaseous modeling material may be used as the modeling material M.

[0018] 1 to 3 , in order to perform additive processing, the modeling apparatus SYS includes a material supply source 1, a modeling unit 2, a stage unit 3, a measuring device 4, a light source 5, a gas supply source 6, and a control device 7. The modeling unit 2 and the stage unit 3 may be housed in the internal space of a housing 8.

[0019] The material supply source 1 supplies the modeling material M to the modeling unit 2. The material supply source 1 supplies a desired amount of modeling material M according to a required amount so that the amount of modeling material M required per unit time for performing additional processing is supplied to the modeling unit 2.

[0020] The modeling unit 2 processes the modeling material M supplied from the material supply source 1 to model a model. In order to model the model, the modeling unit 2 includes a modeling head 21 and a head drive system 22. The modeling head 21 may also be referred to as a "modeling section." The modeling head 21 further includes a beam irradiation section 211 and a material nozzle (i.e., a supply system that supplies the modeling material M) 212. In the example shown in FIGS. 1 to 3, the modeling head 21 includes a single material nozzle 212, but the modeling head 21 may include multiple material nozzles 212.

[0021] The beam irradiation unit 211 irradiates the workpiece W with the modeling light EL. The beam irradiation unit 211 includes an irradiation optical system 2111 for irradiating the workpiece W with the modeling light EL. The irradiation optical system 2111 is an optical system (for example, a focusing optical system) for emitting the modeling light EL. Specifically, the irradiation optical system 2111 is optically connected to the light source 5 that emits the modeling light EL via a light transmission member 51 such as an optical fiber or a light pipe. The irradiation optical system 2111 emits the modeling light EL propagated from the light source 5 via the light transmission member 51. The irradiation optical system 2111 irradiates the modeling light EL from the irradiation optical system 2111 downward (i.e., toward the -Z side). A stage 31 is disposed below the irradiation optical system 2111. When the workpiece W is placed on the stage 31, the irradiation optical system 2111 irradiates the modeling light EL, which is an energy beam, toward the workpiece W. Specifically, the irradiation optical system 2111 is capable of emitting the shaping light EL toward an irradiation target position EP that is set on or near the workpiece W as an area where the shaping light EL is emitted (or is set on or near the printing surface MS, which will be described later). Furthermore, under the control of the control device 7, the state of the irradiation optical system 2111 is switchable between a state in which the shaping light EL is emitted toward the irradiation target position EP and a state in which the shaping light EL is not emitted toward the irradiation target position EP. Note that the direction of the shaping light EL emitted from the irradiation optical system 2111 is not limited to straight down (i.e., coinciding with the -Z axis direction) and may be, for example, a direction inclined by a predetermined angle with respect to the Z axis.

[0022] The material nozzle 212 is formed with a supply outlet 214. The material nozzle 212 supplies (e.g., ejects, jets, spouts, or sprays) the modeling material M from the supply outlet 214. For this reason, the material nozzle 212 may be referred to as a material supply unit. The material nozzle 212 is physically connected to the material supply source 1, which is a supply source of the modeling material M, via the supply pipe 11 and the mixer 12. The material nozzle 212 supplies the modeling material M supplied from the material supply source 1 via the supply pipe 11 and the mixer 12. The material nozzle 212 may pressure-feed the modeling material M supplied from the material supply source 1 via the supply pipe 11. That is, the modeling material M from the material supply source 1 and the conveying gas (i.e., a pressure-feed gas, for example, an inert gas such as nitrogen or argon) may be mixed in the mixer 12 and then pressure-feed to the material nozzle 212 via the supply pipe 11. As a result, the material nozzle 212 supplies the modeling material M together with the conveying gas. As the gas for conveyance, for example, a purge gas supplied from the gas supply source 6 is used. However, as the gas for conveyance, a gas supplied from a gas supply source other than the gas supply source 6 may be used. Although the material nozzle 212 is depicted in a tube shape in FIG. 1, the shape of the material nozzle 212 is not limited to this shape. The material nozzle 212 supplies the modeling material M from the material nozzle 212 downward (i.e., toward the -Z side). The stage 31 is disposed below the material nozzle 212. When the workpiece W is mounted on the stage 31, the material nozzle 212 supplies the modeling material M toward the workpiece W or the vicinity of the workpiece W. The traveling direction of the modeling material M supplied from the material nozzle 212 is a direction inclined at a predetermined angle (as an example, an acute angle) with respect to the Z-axis direction, but may be the -Z side (i.e., directly below).

[0023] In the present embodiment, the material nozzle 212 supplies the modeling material M to a portion irradiated with the modeling light EL from the irradiation optical system 2111. For example, the material nozzle 212 may supply the modeling material M toward an irradiation target position EP from which the irradiation optical system 2111 emits the modeling light EL. For example, the material nozzle 212 may supply the modeling material M toward an actual irradiation position AP (see FIG. 6(a) and FIG. 6(b) described later) from which the irradiation optical system 2111 actually irradiates the modeling light EL. For example, the material nozzle 212 may supply the modeling material M toward a molten pool MP (see FIG. 4 described later, etc.) formed by the modeling light EL emitted from the irradiation optical system 2111. However, the material nozzle 212 may not supply the modeling material M to the molten pool MP. For example, the modeling device SYS may melt the modeling material M from the material nozzle 212 by the modeling light EL before the modeling material M from the material nozzle 212 reaches the workpiece W, and attach the molten modeling material M to the workpiece W.

[0024] The head drive system 22 moves the object-forming head 21. The head drive system 22 moves the object-forming head 21, for example, along at least one of the X-axis, the Y-axis, the Z-axis, the θX direction, the θY direction, and the θZ direction. In the example shown in FIG. 2 and FIG. 3, the head drive system 22 moves the object-forming head 21 along each of the X-axis, the Y-axis, and the Z-axis. In this case, the head drive system 22 may include a head drive system 22X, a head drive system 22Y, and a head drive system 22Z. The head drive system 22X moves the object-forming head 21 along the X-axis. The head drive system 22Y moves the object-forming head 21 along the Y-axis. The head drive system 22Z moves the object-forming head 21 along the Z-axis.

[0025] Head driving system 22Y includes Y guide member 221Y connected to support frame 224 installed on the bottom surface of housing 8 (or a base placed on the bottom surface of housing 8) via an anti-vibration device such as an air spring and extending along the Y axis, Y slide member 222Y movable along Y guide member 221Y, and a motor (not shown) for moving Y slide member 222Y. Head driving system 22X includes X guide member 221X connected to Y slide member 222Y and extending along the X axis, X slide member 222X movable along X guide member 221X, and a motor (not shown) for moving X slide member 222X. Head driving system 22Z includes Z guide member 221Z connected to X slide member 222X and extending along the Z axis, Z slide member 222Z movable along Z guide member 221Z, and a motor (not shown) for moving Z slide member 222Z. The object-forming head 21 is connected to the Z slide member 222Z. When the Y slide member 222Y moves along the Y guide member 221Y, the object-forming head 21 connected to the Y slide member 222Y via the head drive systems 22X and 22Z moves along the Y axis. When the X slide member 222X moves along the X guide member 221X, the object-forming head 21 connected to the X slide member 222X via the head drive system 22Z moves along the X axis. When the Z slide member 222Z moves along the Z guide member 221Z, the object-forming head 21 connected to the Z slide member 222Z moves along the Z axis.

[0026] When the head drive system 22 moves the model-forming head 21, the relative positions of the model-forming head 21, the stage 31, and the workpiece W placed on the stage 31 change. Therefore, the head drive system 22 may function as a position changing device for changing the relative positional relationship between the model-forming head 21, the stage 31, and the workpiece W. Furthermore, when the relative positions of the model-forming head 21, the stage 31, and the workpiece W change, the irradiation target position EP (and further, the molten pool MP) moves relative to the workpiece W. Therefore, the head drive system 22 may be considered to function as a moving device for moving the irradiation target position EP.

[0027] The stage unit 3 includes a stage 31 and a stage drive system 32 .

[0028] A workpiece W, which is an object, is placed on the stage 31. Specifically, the workpiece W is placed on a placement surface 311, which is at least a part of the upper surface of the stage 31. Usually, the placement surface 311 is a surface along the XY plane, and the surface WS of the workpiece W is also a surface along the XY plane. The stage 31 is capable of supporting the workpiece W placed on the stage 31. The stage 31 may be capable of holding the workpiece W placed on the stage 31. In this case, the stage 31 may be equipped with at least one of a mechanical chuck, an electrostatic chuck, and a vacuum chuck, etc., in order to hold the workpiece W. Alternatively, the stage 31 may not be capable of holding the workpiece W placed on the stage 31. In this case, the workpiece W may be placed on the stage 31 in a clampless manner. The irradiation optical system 2111 described above emits the modeling light EL during at least a part of the period during which the workpiece W is placed on the stage 31. Furthermore, the material nozzle 212 described above supplies the modeling material M during at least a part of the period during which the workpiece W is placed on the stage 31.

[0029] In this embodiment, the stage 31 includes a stage 31θX and a stage 31θZ. The reason why the stage 31 includes the stage 31θX and the stage 31θZ is to move the stage 31 along the θX direction and the θZ direction by a stage driving system 32 described later, as will be described in detail later. The workpiece W is placed on the stage 31θZ. For this reason, at least a part of the upper surface of the stage 31θZ is used as a mounting surface 311 on which the workpiece W is placed. The stage 31θX is movable along the θX direction by the stage driving system 32, as will be described later (i.e., rotatable around a rotation axis along the X-axis). The stage 31θZ is disposed in a recess formed in the stage 31θX so as to be rotatable around a rotation axis along the X-axis together with the stage 31θX in accordance with the rotation of the stage 31θX. As described below, stage 31θZ is disposed in a recess formed in stage 31θX so that it can be moved along the θZ direction by stage drive system 32 regardless of the rotation of stage 31θX (i.e., can rotate around a rotation axis along the Z axis). Note that the configuration of stage 31 is not limited to the configuration shown in Figures 2 and 3. As an example, stage 31θZ does not have to be disposed in a recess formed in stage 31θX.

[0030] The stage driving system 32 moves the stage 31. For example, the stage driving system 32 moves the stage 31 along at least one of the X-axis, Y-axis, Z-axis, θX direction, θY direction, and θZ direction. The operation of moving the stage 31 along at least one of the θX direction, θY direction, and θZ direction is equivalent to the operation of changing the attitude of the stage 31 relative to the modeling head 21 (and further the attitude of the workpiece W placed on the stage 31) by rotating the stage 31 around at least one of the rotation axis along the X-axis, the rotation axis along the Y-axis, and the rotation axis along the Z-axis. For this reason, the stage driving system 32 may be referred to as an attitude changing device. In the example shown in FIG. 2 to FIG. 3, the stage driving system 32 moves the stage 31 along each of the θX direction and the θZ direction. That is, the stage driving system 32 rotates the stage 31 around the rotation axis along the X-axis and rotates the stage 31 around the rotation axis along the Z-axis. In this case, the stage driving system 32 may include a stage driving system 32θX and a stage driving system 32θZ. The stage driving system 32θX rotates the stage 31 (particularly, the stage 31θX) around a rotation axis along the X-axis. The stage driving system 32θZ rotates the stage 31 (particularly, the stage 31θZ) around a rotation axis along the Z-axis. The stage driving system 32θX includes a pair of rotating shafts 321θX rotatably connected to a pair of support frames 323 installed on the bottom surface of the housing 8 (or a surface plate arranged on the bottom surface of the housing 8) via a vibration isolator such as an air spring, and a motor 322θX which is a driving device that rotates the pair of rotating shafts 321θX around a rotation axis along the X-axis. The pair of rotating shafts 321θX extend along the X-axis direction. The pair of rotating shafts 321θX are connected to the stage 31θX so as to sandwich the stage 31θX along the X-axis direction. The stage drive system 32θZ includes a rotating shaft 321θZ that extends along the Z-axis direction and is connected to the bottom surface of the stage 31θZ (specifically, the surface facing the stage 31θX), and a motor 322θZ that rotates the rotating shaft 321θZ about a rotation axis along the Z-axis. When the pair of rotating shafts 321θX rotate, the stage 31θX rotates about a rotation axis along the X-axis.As a result, the stage 31θZ supported by the stage 31θX (and further, the workpiece W supported by the stage 31θZ) also rotates about a rotation axis along the X-axis. When the rotating shaft 321θZ rotates, the stage 31θZ (and further, the workpiece W supported by the stage 31θZ) also rotates about a rotation axis along the Z-axis. Note that the stage 31 shown in FIGS. 2 and 3 has a double-supported structure in which the stage 31θX is supported from both sides by the support frame 323. However, the stage 31 may have a cantilevered structure in which the stage 31θX is supported from one side by the support frame 323.

[0031] When the stage drive system 32 moves the stage 31, the relative positions of the shaping head 21 and the stage 31 and the workpiece W placed on the stage 31 change. Therefore, the stage drive system 32 may function as a position changing device for changing the relative positional relationship between the shaping head 21 and the stage 31 and the workpiece W. Furthermore, when the relative positions of the shaping head 21 and the stage 31 and the workpiece W change, the irradiation target position EP (and further, the molten pool MP) moves relative to the workpiece W. Therefore, the stage drive system 32 may be considered to function as a moving device for moving the irradiation target position EP.

[0032] The operation of rotating the stage 31 around the rotation axis may be considered to be substantially equivalent to an operation of changing the attitude of the stage 31 (for example, changing the relative attitude of the stage 31 with respect to the object-forming head 21). For this reason, the stage drive system 32 may function as a position changing device for changing the relative positional relationships between the object-forming head 21 and each of the stage 31 and the workpiece W by changing the relative attitude of the stage 31 with respect to the object-forming head 21.

[0033] The light source 5 emits, for example, at least one of infrared light, visible light, and ultraviolet light as the shaping light EL. However, other types of light may be used as the shaping light EL. The shaping light EL may include multiple pulsed lights (i.e., multiple pulse beams). The shaping light EL may be laser light. In this case, the light source 5 may include a laser light source (for example, a semiconductor laser such as a laser diode (LD: Laser Diode). The laser light source may be a fiber laser, a CO2 laser, a YAG laser, an excimer laser, etc. However, the shaping light EL does not have to be laser light. The light source 5 may include any light source (for example, at least one of an LED (Light Emitting Diode) and a discharge lamp, etc.).

[0034] The gas supply source 6 is a supply source of a purge gas for purging the internal space of the housing 8. The purge gas includes an inert gas. Examples of the inert gas include nitrogen gas and argon gas. The gas supply source 6 supplies the purge gas to the internal space of the housing 8 through a supply pipe 61 that connects the gas supply source 6 and the housing 8. As a result, the internal space of the housing 8 becomes a space purged by the purge gas. The gas supply source 6 may be a cylinder that stores an inert gas such as nitrogen gas or argon gas. When the inert gas is nitrogen gas, the gas supply source 6 may be a nitrogen gas generator that generates nitrogen gas using the air as a raw material.

[0035] As described above, when the material nozzle 212 supplies the modeling material M together with the purge gas, the gas supply source 6 may supply the purge gas to the mixer 12 to which the modeling material M from the material supply source 1 is supplied. Specifically, the gas supply source 6 may be connected to the mixer 12 via a supply pipe 62 that connects the gas supply source 6 and the mixer 12. As a result, the gas supply source 6 supplies the purge gas to the mixer 12 via the supply pipe 62. In this case, the modeling material M from the material supply source 1 may be supplied (specifically, pumped) through the supply pipe 11 toward the material nozzle 212 by the purge gas supplied from the gas supply source 6 via the supply pipe 62. In other words, the gas supply source 6 may be connected to the material nozzle 212 via the supply pipe 62, the mixer 12, and the supply pipe 11. In that case, the material nozzle 212 supplies the modeling material M from the supply outlet 214 together with the purge gas for pumping the modeling material M.

[0036] The control device 7 controls the operation of the modeling apparatus SYS. The control device 7 controls the modeling of the three-dimensional structure ST by controlling the operation of the modeling apparatus SYS. As a result, the modeling apparatus SYS models the three-dimensional structure ST by performing additional processing on the workpiece W under the control of the control device 7. For this reason, the control device 7 may be referred to as a modeling control unit. Specifically, for example, the control device 7 may control the modeling unit 2 (e.g., at least one of the modeling head 21 and the head drive system 22) provided in the modeling apparatus SYS so as to perform additional processing on the workpiece W. For example, the control device 7 may control the stage unit 3 (e.g., the stage drive system 32) provided in the modeling apparatus SYS so as to perform additional processing on the workpiece W.

[0037] The control device 7 may include, for example, a calculation device and a storage device. The calculation device may include, for example, at least one of a CPU (Central Processing Unit) and a GPU (Graphics Processing Unit). The storage device may include, for example, a memory. The control device 7 functions as a device that controls the operation of the modeling apparatus SYS by the calculation device executing a computer program. This computer program is a computer program for making the calculation device perform (i.e., execute) the operation to be performed by the control device 7, which will be described later. In other words, this computer program is a computer program for making the control device 7 function so as to make the modeling apparatus SYS perform the operation to be described later. The computer program executed by the calculation device may be recorded in a storage device (i.e., a recording medium) included in the control device 7, or may be recorded in any storage medium (e.g., a hard disk or a semiconductor memory) built into the control device 7 or externally attachable to the control device 7. Alternatively, the calculation device may download the computer program to be executed from a device external to the control device 7 via a network interface.

[0038] The control device 7 may control the emission mode of the modeling light EL by the beam irradiation unit 211. The emission mode may include, for example, at least one of the intensity of the modeling light EL and the emission timing of the modeling light EL. When the modeling light EL includes a plurality of pulsed lights, the emission mode may include, for example, at least one of the emission time of the pulsed light, the emission cycle of the pulsed light, and the ratio between the emission time of the pulsed light and the emission cycle of the pulsed light (so-called duty ratio). Furthermore, the control device 7 may control the movement mode of the modeling head 21 by the head driving system 22. The control device 7 may control the movement mode of the stage 31 by the stage driving system 32. The movement mode may include, for example, at least one of the movement amount, the movement speed, the movement direction, and the movement timing (movement time). Furthermore, the control device 7 may control the supply mode of the modeling material M by the material nozzle 212. The supply mode may include, for example, at least one of the supply amount (particularly, the supply amount per unit time) and the supply timing (supply time).

[0039] The control device 7 may not be provided inside the molding apparatus SYS. For example, the control device 7 may be provided as a server or the like outside the molding apparatus SYS. In this case, the control device 7 and the molding apparatus SYS may be connected to each other through a wired and / or wireless network (or a data bus and / or a communication line). As the wired network, a network using a serial bus type interface represented by at least one of IEEE1394, RS-232x, RS-422, RS-423, RS-485, and USB may be used. As the wired network, a network using a parallel bus type interface may be used. As the wired network, a network using an interface conforming to Ethernet (registered trademark), represented by at least one of 10BASE-T, 100BASE-TX, and 1000BASE-T, may be used. As the wireless network, a network using radio waves may be used. An example of the network using radio waves is a network conforming to IEEE802.1x (for example, at least one of wireless LAN and Bluetooth (registered trademark)). A network using infrared rays may be used as the wireless network. A network using optical communication may be used as the wireless network. In this case, the control device 7 and the modeling device SYS may be configured to be able to transmit and receive various information via the network. The control device 7 may be able to transmit information such as commands and control parameters to the modeling device SYS via the network. The modeling device SYS may include a receiving device that receives information such as commands and control parameters from the control device 7 via the network. The modeling device SYS may include a transmitting device (i.e., an output device that outputs information to the control device 7) that transmits information such as commands and control parameters to the control device 7 via the network. Alternatively, a first control device that performs a part of the processing performed by the control device 7 may be provided inside the modeling device SYS, while a second control device that performs another part of the processing performed by the control device 7 may be provided outside the modeling device SYS.

[0040] A computation model that can be constructed by machine learning may be implemented in the control device 7 by the computation device executing a computer program. An example of a computation model that can be constructed by machine learning is, for example, a computation model including a neural network (so-called artificial intelligence (AI)). In this case, learning of the computation model may include learning of parameters of the neural network (for example, at least one of weights and biases). The control device 7 may control the operation of the modeling apparatus SYS by using the computation model. That is, the operation of controlling the operation of the modeling apparatus SYS may include an operation of controlling the operation of the modeling apparatus SYS by using the computation model. Note that, a computation model already constructed by offline machine learning using teacher data may be implemented in the control device 7. The computation model implemented in the control device 7 may be updated by online machine learning on the control device 7. Alternatively, the control device 7 may control the operation of the modeling apparatus SYS by using a computation model implemented in a device outside the control device 7 (that is, a device provided outside the modeling apparatus SYS) in addition to or instead of the computation model implemented in the control device 7.

[0041] As a recording medium for recording the computer program executed by the control device 7, at least one of CD-ROM, CD-R, CD-RW, flexible disk, MO, DVD-ROM, DVD-RAM, DVD-R, DVD+R, DVD-RW, DVD+RW, Blu-ray (registered trademark), and other optical disks, magnetic media such as magnetic tape, magneto-optical disk, semiconductor memory such as USB memory, and any other medium capable of storing a program may be used. The recording medium may include a device capable of recording a computer program (for example, a general-purpose device or a dedicated device in which a computer program is implemented in a state in which it can be executed in at least one of the forms of software and firmware). Furthermore, each process or function included in the computer program may be realized by a logical processing block realized in the control device 7 by the control device 7 (i.e., a computer) executing the computer program, or may be realized by hardware such as a predetermined gate array (FPGA, ASIC) provided in the control device 7, or may be realized in a form in which a logical processing block and a partial hardware module that realizes some elements of the hardware are mixed.

[0042] (2) Operation of the modeling device SYS Next, the operation of the modeling apparatus SYS will be described.

[0043] (2-1) Basic operations of additional processing First, the basic operation of the additive processing performed by the modeling apparatus SYS on the workpiece W will be described. The additive processing performed on the workpiece W corresponds to an operation of forming a model by adding a model that is integrated with (or separable from) the workpiece W to the workpiece W. For convenience of explanation, the additive processing for forming a three-dimensional structure ST, which is a model having a desired shape, will be described below. As described above, the modeling apparatus SYS forms the three-dimensional structure ST by performing additive processing based on the laser build-up welding method. For this reason, the modeling apparatus SYS may form the three-dimensional structure ST by performing existing additive processing that complies with the laser build-up welding method. An example of the operation of forming the three-dimensional structure ST using the laser build-up welding method will be briefly described below.

[0044] The modeling apparatus SYS models a three-dimensional structure ST on a workpiece W based on three-dimensional model data (e.g., CAD (Computer Aided Design) data) of the three-dimensional structure ST to be modeled. Measurement data of a solid object measured by at least one of a measuring device (not shown) provided in the modeling apparatus SYS and a three-dimensional shape measuring device provided separately from the modeling apparatus SYS may be used as the three-dimensional model data. In order to model the three-dimensional structure ST, the modeling apparatus SYS sequentially models, for example, a plurality of layered partial structures (hereinafter referred to as "structural layers") SL arranged along the Z-axis direction. For example, the modeling apparatus SYS sequentially models a plurality of structural layers SL one by one based on data of a plurality of layers obtained by slicing a three-dimensional model of the three-dimensional structure ST along the Z-axis direction. As a result, a three-dimensional structure ST that is a laminated structure in which a plurality of structural layers SL are stacked is modeled. The structural layers SL do not necessarily have to be models having a layered shape. The flow of operations for forming a three-dimensional structure ST by sequentially forming a plurality of structural layers SL one by one will be described below.

[0045] First, the operation of forming each structure layer SL will be described with reference to Fig. 4(a) to Fig. 4(e). Under the control of the control device 7, the modeling device SYS moves at least one of the modeling head 21 and the stage 31 so that an irradiation target position EP is set at a first desired position of the workpiece W or the modeled structure layer SL (or an arbitrary model, the same applies below). After that, the modeling device SYS emits modeling light EL from the irradiation optical system 2111 toward the irradiation target position EP. As a result, as shown in Fig. 4(a), the modeling device SYS irradiates the modeling light EL to a second desired position on the modeling surface MS corresponding to the surface of the workpiece W or the surface of the modeled structure layer SL. Since the modeling surface MS is irradiated with the modeling light EL, the modeling surface MS is typically a surface (for example, a surface along the XY plane) that intersects with the optical axis AX of the irradiation optical system 2111 that emits the modeling light EL.

[0046] Here, the irradiation target position EP will be described with reference to Figs. 5(a) to 5(b) and Figs. 6(a) to 6(b). The irradiation target position EP is a position to which the shaping light EL from the beam irradiating unit 211 should be irradiated. As shown in Fig. 5(a), the irradiation target position EP may mean a position to which the shaping light EL from the beam irradiating unit 211 should be condensed. In other words, the irradiation target position EP may mean a position to which a best focus portion (i.e., a portion where the shaping light EL is most converged) CP of the shaping light EL from the beam irradiating unit 211 should be located. In this case, the irradiation target position EP may be referred to as a condensation target position. Alternatively, as shown in Fig. 5(b), the irradiation target position EP may mean a position to which a portion different from the best focus position portion of the shaping light EL from the beam irradiating unit 211 should be located. In other words, the irradiation target position EP may mean a position to which a portion of the shaping light EL from the beam irradiating unit 211 with a desired defocus amount should be located. The irradiation target position EP includes both a position in a plane intersecting the optical axis AX of the irradiation optical system 2111 (e.g., a position in the XY plane) and a position in the direction of the optical axis AX (e.g., a position in the Z direction). For convenience of explanation, the following description will be given of an example in which the irradiation target position EP is a position where the shaping light EL from the beam irradiation unit 211 should be focused.

[0047] As shown in FIG. 6(a), the control device 7 may set the irradiation target position EP on the printing surface MS corresponding to the surface of the workpiece W or the surface of the already-printed structure layer SL. That is, as shown in FIG. 6(a), the control device 7 may set the irradiation target position EP to a position on the printing surface MS. For example, when the surface of the workpiece W includes the printing surface MS, the control device 7 may set the irradiation target position EP on the surface of the workpiece W. For example, when the surface of the structure layer SL includes the printing surface MS, the control device 7 may set the irradiation target position EP on the surface of the structure layer SL. As described above, the beam irradiation unit 211 irradiates the printing surface MS with the printing light EL. Therefore, when the irradiation target position EP is set on the printing surface MS, the actual irradiation position AP where the printing light EL is actually irradiated on the printing surface MS may coincide with the irradiation target position EP.

[0048] As shown in FIG. 6(b), the control device 7 may set the irradiation target position EP inside the workpiece W or the formed structure layer SL whose surface becomes the printing surface MS. In other words, the control device 7 may set the irradiation target position EP to a position inside the workpiece W or the formed structure layer SL whose surface becomes the printing surface MS. If the irradiation target position EP is set inside the workpiece W or the formed structure layer SL, the shaping light EL may not reach the irradiation target position EP because it is blocked (e.g., absorbed, reflected, or scattered) by the workpiece W, the formed structure layer SL, or the molten pool MP. In other words, even if the beam irradiation unit 211 emits the shaping light EL toward the irradiation target position EP, the shaping light EL may not actually be irradiated to the irradiation target position EP. In this case, the actual irradiation position AP where the shaping light EL is actually irradiated on the printing surface MS does not need to coincide with the irradiation target position EP. For example, the actual irradiation position AP may be located at a position away from the irradiation target position EP along the optical axis direction (Z-axis direction in the example shown in FIG. 6(b)) in which the optical axis AX of the irradiation optical system 2111 extends. Specifically, the actual irradiation position AP may be located in an area on the printing surface MS that includes the intersection of the optical axis AX and the printing surface MS. However, when the printing light EL reaches the irradiation target position EP, the actual irradiation position AP may coincide with the irradiation target position EP.

[0049] Considering that the positional relationship between the irradiation target position EP and the actual irradiation position AP can be defined according to a certain rule, the operation of setting the irradiation target position EP may be regarded as substantially equivalent to the operation of setting the actual irradiation position AP. Conditions regarding the position where the irradiation target position EP is set, which will be described later, may be regarded as substantially equivalent to conditions regarding the position where the actual target position EP is set.

[0050] In this way, the operation of setting the irradiation target position EP at a first desired position of the workpiece W or the already-formed structural layer SL may include at least one of the following operations: setting the irradiation target position EP at a position on the forming surface MS corresponding to the surface of the workpiece W or the surface of the already-formed structural layer SL, and setting the irradiation target position EP at a position inside the workpiece W or the already-formed structural layer SL whose surface becomes the forming surface MS.

[0051] 4(a) again, when the modeling light EL is irradiated onto the modeling surface MS, a molten pool (i.e., a pool of metal or the like melted by the modeling light EL) MP is formed in an area including the actual irradiation position AP on the modeling surface MS irradiated with the modeling light EL. Furthermore, the modeling device SYS supplies modeling material M from the material nozzle 212 under the control of the control device 7. As a result, the modeling material M is supplied to the molten pool MP. The modeling material M supplied to the molten pool MP is melted by the modeling light EL irradiated onto the molten pool MP. Alternatively, the modeling material M supplied from the material nozzle 212 may be melted by the modeling light EL before reaching the molten pool MP, and the molten modeling material M may be supplied to the molten pool MP. Thereafter, when the modeling light EL is no longer irradiated onto the molten pool MP as at least one of the modeling head 21 and the stage 31 moves, the modeling material M melted in the molten pool MP is cooled and solidified (i.e., solidified). As a result, as shown in FIG. 4(c), a model made of the solidified modeling material M is deposited on the modeling surface MS.

[0052] The modeling apparatus SYS repeats a series of modeling processes, including forming a molten pool MP by irradiating the modeling light EL, supplying the modeling material M to the molten pool MP, melting the supplied modeling material M, and solidifying the molten modeling material M, while moving the modeling head 21 along at least one of the X-axis direction and the Y-axis direction relative to the modeling surface MS, as shown in Fig. 4(d). At this time, the modeling apparatus SYS irradiates the modeling light EL to the area on the modeling surface MS where a model is to be formed, while not irradiating the area on the modeling surface MS where a model is not to be formed. In other words, the modeling apparatus SYS irradiates the modeling light EL to the modeling surface MS at a timing according to the distribution of the area where a model is to be formed, while moving the irradiation target position EP along a predetermined movement trajectory relative to the modeling surface MS. As a result, the molten pool MP also moves on the modeling surface MS along a movement trajectory according to the movement trajectory of the irradiation target position EP. Specifically, the molten pool MP is formed sequentially in the area on the printing surface MS that is irradiated with the printing light EL among the areas along the movement trajectory of the irradiation target position EP. As a result, as shown in FIG. 4(e), a structure layer SL corresponding to a model that is an aggregate of the melted and then solidified modeling material M is formed on the printing surface MS. That is, a structure layer SL corresponding to an aggregate of the models formed on the printing surface MS in a pattern according to the movement trajectory of the molten pool MP (that is, a structure layer SL having a shape according to the movement trajectory of the molten pool MP in a plan view) is formed. Note that, when the irradiation target position EP is set in an area where a model is not desired to be formed, the modeling device SYS may irradiate the irradiation target position EP with the printing light EL and stop the supply of the modeling material M. Also, when the irradiation target position EP is set in an area where a model is not desired to be formed, the modeling device SYS may supply the modeling material M to the irradiation target position EP and irradiate the irradiation target position EP with the printing light EL of an intensity that does not form a molten pool MP.

[0053] The modeling apparatus SYS repeatedly performs an operation for forming such a structure layer SL based on the three-dimensional model data under the control of the control device 7. Specifically, first, before performing an operation for forming the structure layer SL, the control device 7 slices the three-dimensional model data at a layer pitch to create slice data. The modeling apparatus SYS performs an operation for forming the first structure layer SL#1 on the printing surface MS corresponding to the surface of the workpiece W based on the slice data corresponding to the structure layer SL#1. Specifically, the control device 7 generates processing control information for controlling the modeling unit 2 and the stage unit 3 to form the first structure layer SL#1 based on the slice data corresponding to the structure layer SL#1. The processing control information may include, for example, processing path information including a processing path indicating a movement trajectory (for example, a movement trajectory relative to the printing surface MS) of the irradiation target position EP of the modeling light EL. After that, the control device 7 controls the modeling unit 2 and the stage unit 3 to form the first structure layer SL#1 based on the processing control information. As a result, as shown in FIG. 7(a), a structure layer SL#1 is formed on the printing surface MS. Note that the processing control information may be generated in advance before the printing apparatus SYS starts additional processing. In this case, instead of generating the processing control information, the control device 7 may acquire the processing control information generated in advance and control the printing unit 2 and the stage unit 3 to print the structure layer SL based on the acquired processing control information. After that, the printing apparatus SYS sets the surface (i.e., the upper surface) of the structure layer SL#1 as a new printing surface MS, and then prints the second structure layer SL#2 on the new printing surface MS. In order to print the structure layer SL#2, the control device 7 first controls at least one of the head driving system 22 and the stage driving system 32 so that the printing head 21 moves along the Z axis relative to the stage 31. Specifically, the control device 7 controls at least one of the head drive system 22 and the stage drive system 32 to move the modeling head 21 toward the +Z side and / or move the stage 31 toward the -Z side so that the irradiation target position EP is set on the surface of the structural layer SL#1 (i.e., the new modeling surface MS) or inside the structural layer SL#1.Thereafter, under the control of the control device 7, the modeling device SYS models the structural layer SL#2 on the structural layer SL#1 based on the slice data corresponding to the structural layer SL#2 in a manner similar to the operation for modeling the structural layer SL#1. As a result, the structural layer SL#2 is modeled as shown in FIG. 7(b). Thereafter, the same operation is repeated until all the structural layers SL constituting the three-dimensional structure ST to be modeled on the workpiece W are modeled. As a result, the three-dimensional structure ST is modeled by a layered structure in which multiple structural layers SL are stacked, as shown in FIG. 7(c).

[0054] (2-2) Forming operation of a three-dimensional structure ST with an inclined surface SS In this embodiment, the modeling apparatus SYS may perform the above-mentioned additional processing on the workpiece W under the control of the control device 7 to model a three-dimensional structure ST having an inclined surface SS. In the following description, for convenience of explanation, the three-dimensional structure ST including the inclined surface SS is referred to as an "inclined structure SST". An example of the inclined structure SST is shown in Fig. 8(a) and Fig. 8(b). Fig. 8(a) is a perspective view showing an example of the inclined structure SST, and Fig. 8(b) is a cross-sectional view showing an example of the inclined structure SST. As shown in Fig. 8(a) and Fig. 8(b), the inclined surface SS may include a surface inclined with respect to the surface WS of the workpiece W (in the example shown in Fig. 8(a) and Fig. 8(b), a surface along the XY plane). As shown in Fig. 8(a) and Fig. 8(b), the inclined surface SS may include a surface inclined with respect to the normal line of the surface WS of the workpiece W (in the example shown in Fig. 8(a) and Fig. 8(b), a line extending along the Z-axis direction). 8(a) and 8(b), the inclined surface SS may include a surface inclined with respect to the surface WS of the workpiece W. The inclined surface SS may include a surface inclined with respect to the Z-axis direction (i.e., the direction of gravity). Since the optical axis AX of the irradiation optical system 2111 is an axis parallel to the Z-axis, the inclined surface SS may include a surface inclined with respect to the optical axis direction in which the optical axis AX of the irradiation optical system 2111 extends. The inclined surface SS may include a surface that forms a space between the inclined surface SS and the surface WS of the workpiece W. The inclined surface SS may include a surface below which there is space.

[0055] 8(a) and 8(b) show an example in which the inclined structure SST is a thin plate-like structure having an inclined surface SS, which is an inclined surface SS#1 facing the +Z side and an inclined surface SS#2 facing the -Z side. Each of the inclined surfaces SS#1 and SS#2 has a shape that moves away from the connection part C between the surface WS of the workpiece W and the inclined structure SST along the thickness direction (specifically, the Y-axis direction) as it moves upward (specifically, the +Z side) from the connection part C. In this embodiment, for convenience, the direction in which the inclined surface SS moves away from the normal N of the surface WS of the workpiece W extending from the connection part C (i.e., the direction in which the inclined surface SS falls) is referred to as the falling direction. In the example shown in FIG. 8(a) and FIG. 8(b), the normal N of the surface WS of the workpiece W extends along the Z-axis direction, and the inclined surface SS moves away from the normal N along the Y-axis direction, so the Y-axis direction is the falling direction. Typically, the falling direction is a direction that intersects with the optical axis direction. Therefore, the falling direction may be referred to as the cross direction. However, the shape of the inclined structure SST is not limited to the examples shown in Figures 8(a) and 8(b). The inclination of each of the inclined surfaces SS#1 and SS#2 of the inclined structure SST may change as it moves away from the surface WS of the workpiece W.

[0056] Even when forming the inclined structure SST, the modeling apparatus SYS forms the inclined structure SST including the multiple structural layers SL by sequentially forming the multiple structural layers SL stacked in the Z-axis direction (i.e., stacking the multiple structural layers SL along the Z-axis direction). However, when the modeling apparatus SYS forms the inclined structure SST, the modeling apparatus SYS may form at least one other structural object after forming one structural object in order to form each of the multiple structural layers ST constituting the three-dimensional structure ST. In other words, in order to form each structural layer ST, the modeling apparatus SYS may perform at least a series of modeling processes shown in FIG. 4(a) to FIG. 4(e) for forming one structural object, and then perform a series of modeling processes shown in FIG. 4(a) to FIG. 4(e) for forming another structural object. In this case, as described in detail later, the inclined structure SST can be properly formed compared to a case where one structural object is formed while the other structural objects are not formed in order to form each structural layer ST.

[0057] A specific example of the modeling operation for modeling the inclined structure SST will be further described below. Note that the modeling operation for modeling the inclined structure SST shown in FIG. 8(a) and FIG. 8(b) will be described below. However, the modeling apparatus SYS may model another inclined structure SST having a shape different from that of the inclined structure SST shown in FIG. 8(a) and FIG. 8(b) by performing an operation similar to the modeling operation described below. Also, as described above, the modeling apparatus SYS models the inclined structure SST under the control of the control device 7. For this reason, the following description of the modeling operation may be considered to be substantially equivalent to the description of the operation in which the control device 7 controls the modeling apparatus SYS to model the inclined structure SST.

[0058] (2-2-1) First modeling operation to create the inclined structure SST First, a first specific example (first modeling operation) of the modeling operation for forming the inclined structure SST on the workpiece W will be described. As described above, when forming the inclined structure SST, the modeling apparatus SYS forms at least one object after forming another object in order to form each structure layer SL on the modeling surface MS. In particular, the modeling apparatus SYS forms one object by setting an irradiation target position EP at one position on the modeling surface MS and irradiating the modeling surface MS with modeling light EL, and then forms the other object by setting an irradiation target position EP at another position on the one object and irradiating the one object with modeling light EL. The first modeling operation is an operation for forming the inclined structure SST by forming the one object and the other object such that one position where the irradiation target position EP for forming the one object is set and another position where the irradiation target position EP for forming the other object is set are the same in the tilt direction (intersecting direction). Hereinafter, the flow of the first modeling operation will be described with reference to FIGS.

[0059] First, the modeling apparatus SYS models the first structural layer SL#1 constituting the inclined structure SST on the surface WS of the workpiece W set on the modeling surface MS. Specifically, in order to model the structural layer SL#1, the modeling apparatus SYS models a structural object BO#11 (see FIG. 10 described later) as one structural object, and then models a structural object BO#12 (see FIG. 14 described later) as another structural object. Specifically, the modeling apparatus SYS models the structural objects BO#11 and BO#12 extending along a scanning direction intersecting the optical axis direction and the tilt direction. For example, when modeling the inclined structure SST shown in FIG. 8(a) and FIG. 8(b), the modeling apparatus SYS models the structural objects BO#11 and BO#12 extending along a scanning direction (i.e., the X-axis direction) intersecting the Z-axis direction, which is the optical axis direction, and the Y-axis direction, which is the tilt direction.

[0060] First, in order to form the object BO#11, the forming apparatus SYS moves at least one of the forming head 21 and the stage 31 so that the irradiation target position EP can be set on the surface WS or inside the workpiece W, as shown in FIG. 9(a) and FIG. 9(b). After that, the forming apparatus SYS moves the irradiation target position EP with respect to the forming surface MS based on the processing control information (particularly, the processing path information including the processing path PP#11 for forming the object BO#11). As a result, the irradiation target position EP is sequentially set at the position P#11 indicated by the processing path PP#11 on the surface WS or inside the workpiece W. In the example shown in FIG. 9(a) and FIG. 9(b), the processing path PP#11 indicates a movement trajectory extending along the X-axis direction, which is the scanning direction. In other words, the processing path PP#11 indicates a movement trajectory of the irradiation target position EP for forming the object BO#11, which extends along the X-axis direction, which is the scanning direction.

[0061] The printing device SYS irradiates the printing light EL onto an area of ​​the printing surface MS where the object BO#11 is to be printed, while moving the irradiation target position EP relative to the printing surface MS. As a result, as shown in Fig. 9(b), a molten pool MP is formed on the printing surface MS in the area where the object BO#11 is to be printed. Furthermore, when the molten pool MP is formed on the printing surface MS, printing material M is supplied from the material nozzle 212 to the molten pool MP. Note that the molten pool MP in Fig. 9(b) is merely an example, and a molten pool MP having a shape different from that shown in Fig. 9(b) may be formed at a position different from the position shown in Fig. 9(b).

[0062] Thereafter, when the molten pool MP is no longer irradiated with the modeling light EL due to the movement of at least one of the modeling head 21 and the stage 31, the molten modeling material M in the molten pool MP is cooled and solidified (i.e., solidified). As a result, as shown in Figures 10(a) and 10(b), a modeling object BO#11 made of the solidified modeling material M is modeled on the modeling surface MS. Note that the modeling object BO#11 in Figure 10(b) is merely an example, and a modeling object BO#11 having a shape different from that shown in Figure 10(b) may be formed at a position different from the position shown in Figure 10(b).

[0063] 10(b) shows an example in which the object BO#11 is formed on the printing surface MS (the surface WS of the workpiece W in the example shown in FIG. 10(b)). That is, FIG. 10(b) shows an example in which the object BO#11 has a shape that does not penetrate into the workpiece W. On the other hand, when a molten pool MP is formed on the printing surface MS set on the surface WS of the workpiece W, the molten pool MP may contain material (e.g., molten metal) that constituted part of the workpiece W. In this case, as shown in FIG. 11, the object BO#11 may have a shape that penetrates into the workpiece W. In addition, in FIG. 10(b) and FIG. 11, the boundary between the object BO#11 and the workpiece W is clearly shown for ease of viewing. However, the boundary between the object BO#11 and the workpiece W does not have to be a boundary that is visible in the cross section. For example, if the material M and the material constituting the workpiece W are the same type of material, the boundary between the object BO#11 and the workpiece W may not be a visible boundary in the cross section. On the other hand, if the material M and the material constituting the workpiece W are different types of material, the boundary between the object BO#11 and the workpiece W may be a visible boundary in the cross section. The same applies to the following description.

[0064] Then, the modeling apparatus SYS models the object BO#12. For this purpose, the modeling apparatus SYS first moves at least one of the modeling head 21 and the stage 31 so that the irradiation target position EP can be set on the surface WS or inside the modeled object BO#11, as shown in FIG. 12(a) and FIG. 12(b). However, if the irradiation target position EP can be set on the surface WS or inside the modeled object BO#11 without moving the modeling head 21 and the stage 31, the modeling apparatus SYS does not need to move at least one of the modeling head 21 and the stage 31. Then, the modeling apparatus SYS moves the irradiation target position EP with respect to the modeling surface MS based on the processing control information (particularly, the processing path information indicating the processing path PP#12 for forming the object BO#12). As a result, the irradiation target position EP is sequentially set on the surface or inside the object BO#11 at the position P#12 indicated by the processing path PP#12.

[0065] 12(a) and 12(b), like processing path PP#11, processing path PP#12 indicates a movement trajectory extending along the X-axis direction, which is the scanning direction. In other words, processing path PP#12 indicates a movement trajectory of the irradiation target position EP for forming object BO#12, which extends along the X-axis direction, which is the scanning direction. In this manner, at least two processing paths for respectively forming at least two objects to be formed in order to form a certain structure layer SL may indicate movement trajectories having the same shape. At least two processing paths for respectively forming at least two objects to be formed in order to form a certain structure layer SL may indicate movement trajectories having shapes that are in a congruent relationship.

[0066] In this embodiment, as shown in Fig. 12(b), the modeling apparatus SYS sets the irradiation target position EP so that a position P#12 (see the upper diagram of Fig. 12(b)) where the irradiation target position EP for forming the object BO#12 is set is the same as a position P#11 (see the lower diagram of Fig. 12(b)) where the irradiation target position EP for forming the object BO#11 is set in the Y-axis direction, which is the inclination direction. The upper diagram of Fig. 12(b) shows the position P#12 where the irradiation target position EP for forming the object BO#12 is set, and the lower diagram of Fig. 12(b) shows the position P#11 where the irradiation target position EP for forming the object BO#11 is set. For this reason, the modeling apparatus SYS may set (i.e., may move) the irradiation target position EP based on processing path information including a processing path PP#12 indicating the same position P#12 as the position P#11 indicated by the processing path PP#11 in the inclination direction.

[0067] 12(b), the modeling apparatus SYS may set the irradiation target position EP such that position P#12 (see the upper diagram in FIG. 12(b)) and position P#11 (see the lower diagram in FIG. 12(b)) are the same in the Z-axis direction, which is the optical axis direction. In this case, the modeling apparatus SYS may set (i.e., move) the irradiation target position EP based on processing path information including processing path PP#12 indicating position P#12 that is the same as position P#11 indicated by processing path PP#11 in the optical axis direction.

[0068] Alternatively, the modeling apparatus SYS may set the irradiation target position EP such that the position P#12 and the position P#11 are different positions in the optical axis direction. In this case, the modeling apparatus SYS may set (i.e., move) the irradiation target position EP based on processing path information including processing path PP#12 indicating a position P#12 different from the position P#11 indicated by processing path PP#11 in the optical axis direction. For example, as shown in FIG. 13, the modeling apparatus SYS may set the irradiation target position EP such that the position P#12 is located above the position P#11 (i.e., on the +Z side) in the optical axis direction.

[0069] The printing device SYS irradiates the printing light EL onto an area of ​​the object BO#11 where the object BO#12 is to be printed, while moving the irradiation target position EP relative to the printing surface MS. As a result, as shown in Fig. 12(b), a molten pool MP is formed in the area of ​​the object BO#11 where the object BO#12 is to be printed. Furthermore, when the molten pool MP is formed on the printing surface MS, printing material M is supplied from the material nozzle 212 to the molten pool MP. Note that the molten pool MP in Fig. 12(b) is merely an example, and a molten pool MP having a shape different from that shown in Fig. 12(b) may be formed at a position different from the position shown in Fig. 12(b).

[0070] Thereafter, when the molten pool MP is no longer irradiated with the modeling light EL as at least one of the modeling head 21 and the stage 31 moves, the molten modeling material M in the molten pool MP is cooled and solidified (i.e., solidified). As a result, as shown in Figures 14(a) and 14(b), a modeling object BO#12 made of the solidified modeling material M is formed. In the example shown in Figures 14(a) and 14(b), the modeling object BO#12 is formed on the modeling object BO#11. Note that the modeling object BO#12 in Figure 14(b) is merely an example, and a modeling object BO#14 having a shape different from the shape shown in Figure 14(b) may be formed at a position different from the position shown in Figure 14(b).

[0071] In this manner, the structure layer SL#1 including the objects BO#11 and BO#12 is formed. In this case, the height h_SL#1 of the structure layer SL#1 (i.e., the size in the Z-axis direction) is greater than the height h_BO#11 of the object BO#11 constituting the structure layer SL#1. For this reason, the first forming operation makes it possible to form a structure layer SL#1 that is taller than the case in which the structure layer SL#1 includes the object BO#11 but does not include the object BO#12. However, the height h_SL#1 of the structure layer SL#1 does not have to be greater than the height h_BO#11 of the object BO#11. For example, the height h_SL#1 of the structure layer SL#1 may be the same as the height h_BO#11 of the object BO#11.

[0072] Furthermore, the width w_SL#1 of the structure layer SL#1 (i.e., the size in the direction along the XY plane, and in the example shown in FIG. 14(b) , the size in the Y-axis direction) is greater than the width w_BO#11 of the object BO#11 constituting the structure layer SL#1. For this reason, according to the first forming operation, a structure layer SL#1 having a larger width can be formed compared to a case in which a structure layer SL#1 that includes an object BO#11 but does not include an object BO#12 is formed. However, the width w_SL#1 of the structure layer SL#1 does not have to be greater than the width w_BO#11 of the object BO#11 constituting the structure layer SL#1. For example, the width w_SL#1 of the structure layer SL#1 may be the same as the width w_BO#11 of the object BO#11 constituting the structure layer SL#1.

[0073] In addition, after forming the objects BO#11 and BO#12, the modeling apparatus SYS may form at least one other object constituting the structure layer SL#1. For example, the modeling apparatus SYS may further form an object BO#13 (not shown) different from the objects BO#11 and BO#12 by setting a new irradiation target position EP on the surface or inside of the already formed object BO#12. In this case, a structure layer SL#1 including at least one other object in addition to the objects BO#11 and BO#12 is formed. The same can be said when forming a structure layer SL different from the structure layer SL#1.

[0074] FIG. 14(b) shows an example in which the object BO#12 has a shape that does not penetrate into the inside of the object BO#11 before the object BO#12 is formed. On the other hand, when a molten pool MP is formed in the object BO#11, the molten pool MP may contain a material (e.g., molten metal) that constituted at least a part of the object BO#11. In this case, as shown in FIG. 15(a) and FIG. 15(b), the object BO#12 may have a shape that at least partially penetrates into the inside of the object BO#11 before the object BO#12 is formed. For example, FIG. 15(a) shows an example of the object BO#12 that is formed when a molten pool MP is formed in the object BO#11 and part of the object BO#11 melts. In this case, as shown in FIG. 15(a), the object BO#12 may have a shape that partially penetrates into the inside of the object BO#11 before the object BO#12 is formed. In this case, even if a part of the object BO#11 melts due to the formation of a molten pool MP in the object BO#11, another part of the object BO#11 does not melt. Therefore, the object BO#11 remains partially. On the other hand, for example, FIG. 15(b) shows an example of the object BO#12 that is formed when the entire object BO#11 melts due to the formation of a molten pool MP in the object BO#11. In this case, as shown in FIG. 15(b), the object BO#12 may have a shape that penetrates entirely into the object BO#11 before the object BO#12 is formed. In this case, since the entire object BO#11 melts due to the formation of a molten pool MP in the object BO#11, it is not necessary that the object BO#11 remains partially after the object BO#12 is formed. In other words, the object BO#11 may be substantially absorbed into the object BO#12. In this case, the structure layer SL#1 may be considered to include the object BO#12 but not the object BO#11. Or, even in this case, the structure layer SL#1 may be considered to include the objects BP#11 and BO#12 because the object BO#12 contains the material that originally constituted the object BO#11.Furthermore, not only in the case of object BO#12, but also when another object is formed on one object, the other object may have a shape that does not penetrate into the interior of the first object, or may have a shape that penetrates at least partially into the interior of the first object.

[0075] Here, the state in which "the first object does not enter the inside of the second object before the first object is formed" may mean "a state in which the shape of the second object does not change both before and after the formation of the first object". The state in which "the first object does not enter the inside of the second object before the first object is formed" may mean "a state in which at least a part of the first object is not present in an area where the second object existed before the formation of the first object". Conversely, the state in which "the first object enters the inside of the second object before the first object is formed" may mean "a state in which the shape of the second object changes both before and after the formation of the first object". The state where "the first object enters the inside of the second object before the first object is formed" may mean "a state where at least a part of the first object is present in a region where the second object was present before the first object was formed." The same can be said about the above-mentioned state where "the object enters or does not enter the inside of the workpiece W before the object is formed."

[0076] Furthermore, as described above with reference to FIG. 11, the object BO#11 may have a shape that penetrates into the workpiece W. Even in this case, the object BO#12 may have a shape that does not penetrate into the object BO#11 before the object BO#12 is formed. Alternatively, as shown in FIG. 16(a) and FIG. 16(b), the object BO#12 may have a shape that at least partially penetrates into the object BO#11 before the object BO#12 is formed. For example, FIG. 16(a) shows an example in which the object BO#12 penetrates into a non-penetration portion E1 of the object BO#11 that has not penetrated into the workpiece W, but does not penetrate into an entry portion E2 of the object BO#11 that has penetrated into the workpiece W. For example, Fig. 16(b) shows an example in which the object BO#12 has entered the inside of a non-entry portion E1 of the object BO#11 that has not entered the inside of the workpiece W, and has also partially entered the inside of an entry portion E2 of the object BO#11 that has entered the inside of the workpiece W. For example, Fig. 16(c) shows an example in which the object BO#12 has entered the inside of a non-entry portion E1 of the object BO#11 that has not entered the inside of the workpiece W, and has also entirely entered the inside of an entry portion E2 of the object BO#11 that has entered the inside of the workpiece W. In other words, Figs. 16(b) and 16(c) show an example in which the object BO#12 has entered the inside of the workpiece W.

[0077] In addition, when at least one of the objects BO#11 and BO#12 has a shape that penetrates into the workpiece W, the structure STa (see FIGS. 16(a) to 16(c)) including the portions of the objects BO#11 and BO#12 that have penetrated into the workpiece W may be referred to as the structure layer SL#1. Alternatively, the structure STb (see FIGS. 16(a) to 16(c)) not including the portions of the objects BO#11 and BO#12 that have penetrated into the workpiece W may be referred to as the structure layer SL#1.

[0078] After the structure layer SL#1 is formed, the modeling apparatus SYS sets the surface of the structure layer SL#1 as a new modeling surface MS, and then models the second structure layer SL#2 constituting the inclined structure SST on the structure layer SL#1. Specifically, in order to form the structure layer SL#2, the modeling apparatus SYS forms a model BO#21 as one model, and then forms a model BO#22 as another model. Specifically, the modeling apparatus SYS forms the models BO#21 and BO#22 extending along a scanning direction intersecting the optical axis direction and the tilt direction. For example, when forming the inclined structure SST shown in FIG. 8(a) and FIG. 8(b), the modeling apparatus SYS forms the models BO#21 and BO#22 extending along a scanning direction (i.e., the X-axis direction) intersecting the Z-axis direction, which is the optical axis direction, and the Y-axis direction, which is the tilt direction.

[0079] First, in order to form the object BO#21, the modeling apparatus SYS moves at least one of the modeling head 21 and the stage 31 so that the irradiation target position EP can be set on the surface or inside of the already-formed structure layer SL#1 (for example, on the surface or inside of the object BO#12 constituting the structure layer SL#1, the same applies below) as shown in FIG. 17(a) and FIG. 17(b). However, if the irradiation target position EP can be set on the surface or inside of the structure layer SL#1 without moving the modeling head 21 and the stage 31, the modeling apparatus SYS does not need to move at least one of the modeling head 21 and the stage 31. After that, the modeling apparatus SYS moves the irradiation target position EP with respect to the modeling surface MS based on the processing control information (particularly, the processing path information indicating the processing path PP#21 for forming the object BO#21). As a result, the irradiation target position EP is sequentially set on the surface or inside of the structure layer SL#1 at the position P#21 indicated by the processing path PP#21.

[0080] In this embodiment, as shown in Fig. 17(b), the modeling apparatus SYS sets the irradiation target position EP so that position P#21 (see the upper diagram in Fig. 17(b)) where the irradiation target position EP for forming the object BO#21 is set is different from the above-mentioned positions P#11 and P#12 (see the lower diagram in Fig. 17(b)) in the Y-axis direction, which is the falling direction. Note that the upper diagram in Fig. 17(b) shows position P#21 where the irradiation target position EP for forming the object BO#21 is set, and the lower diagram in Fig. 17(b) shows positions P##11 and P#12 where the irradiation target positions EP for forming the objects BO#11 and BO#12 are set, respectively. Specifically, the modeling apparatus SYS may set the irradiation target position EP such that the position P#21 is away from the positions P#11 and P#12 by a first predetermined amount in the Y-axis direction, which is the tilt direction, in the direction in which the inclined surface SS tilts (in the example shown in FIGS. 17(a) and 17(b), the direction toward the +Y side) with respect to the normal N of the workpiece W extending from the connection part C (see FIGS. 8(a) and 8(b)) between the workpiece W and the inclined structure SST. For this reason, the modeling apparatus SYS may set (i.e., move) the irradiation target position EP based on machining path information including machining path PP#21 indicating a position P#21 different from the position P#11 indicated by the machining path PP#11 and the position P#12 indicated by the machining path PP#12 in the tilt direction.

[0081] Here, as described above with reference to FIG. 12(b), the positions P#11 and P#12 are the same position in the falling direction. Therefore, the modeling apparatus SYS may be considered to set the irradiation target position EP such that the distance between the positions P#11 and P#12 in the falling direction is shorter than the distance between the position P#21 and at least one of the positions P#11 and P#12 in the falling direction. The modeling apparatus SYS may be considered to set the irradiation target position EP such that the distance between the positions P#11 and P#12 in the falling direction is shorter than the first predetermined distance, while the distance between the position P#21 and at least one of the positions P#11 and P#12 in the falling direction is longer than the first predetermined distance.

[0082] 17(b), the modeling apparatus SYS sets the irradiation target position EP such that position P#21 (see the upper diagram in FIG. 17(b)) is different from positions P#11 and P#12 (see the lower diagram in FIG. 17(b)) in the Z-axis direction, which is the optical axis direction. For this reason, the modeling apparatus SYS may set (i.e., move) the irradiation target position EP based on machining path information including machining path PP#21 indicating position P#21 different from position P#11 indicated by machining path PP#11 and position P#12 indicated by machining path PP#12 in the optical axis direction.

[0083] Here, as described above, the positions P#11 and P#12 may be the same position in the optical axis direction, or may be different positions. In this case, the modeling apparatus SYS may set the irradiation target position EP such that the distance between the positions P#11 and P#12 in the optical axis direction is shorter than the distance between the position P#21 and at least one of the positions P#11 and P#12 in the optical axis direction. The modeling apparatus SYS may set the irradiation target position EP such that the distance between the positions P#11 and P#12 in the optical axis direction is shorter than the second predetermined distance, while the distance between the position P#21 and at least one of the positions P#11 and P#12 in the optical axis direction is longer than the second predetermined distance.

[0084] The modeling device SYS irradiates the modeling light EL to an area of ​​the structure layer SL#1 (e.g., the object BO#12) where the object BO#21 is to be modeled, while moving the irradiation target position EP with respect to the workpiece W. As a result, as shown in FIG. 17(b), a molten pool MP is formed in an area of ​​the structure layer SL#1 (e.g., the object BO#12) where the object BO#21 is to be modeled. Furthermore, when the molten pool MP is formed on the modeling surface MS, modeling material M is supplied from the material nozzle 212 to the molten pool MP. Note that the molten pool MP in FIG. 17(b) is merely an example, and a molten pool MP having a shape different from that shown in FIG. 17(b) may be formed at a position different from that shown in FIG. 9(b).

[0085] Thereafter, when the molten pool MP is no longer irradiated with the modeling light EL as at least one of the modeling head 21 and the stage 31 moves, the molten modeling material M in the molten pool MP is cooled and solidified (i.e., solidified). As a result, as shown in FIGS. 18(a) and 18(b), a modeling object BO#21 made of the solidified modeling material M is formed. In the example shown in FIGS. 18(a) and 18(b), the modeling object BO#21 is formed on the structure layer SL#1 (e.g., the modeling object BO#12). Note that the modeling object BO#21 in FIG. 18(b) is merely an example, and the modeling object BO#21 may be formed at a position different from the position shown in FIG. 18(b) and in a shape different from the shape shown in FIG. 18(b).

[0086] Here, as described above, in the Y-axis direction, which is the inclination direction, the position P#21 at which the irradiation target position EP for forming the object BO#21 is set is away from the positions P#11 and P#12 at which the irradiation target position EP for forming the structure layer SL#1 is set. Therefore, as shown in FIG. 18(b), the center of the object BO#21 in the inclination direction is away from the center of the structure layer SL#1 in the inclination direction. As a result, the object BO#21 is formed so as to extend from the structure layer SL#1 in a direction inclined with respect to the Z-axis direction, which is the optical axis direction (i.e., the direction of gravity). As a result, the object BO#21, together with the structure layer SL#1, can form an inclined surface SS inclined to incline along the Y-axis direction, which is the inclination direction. In other words, the object BO#21, together with the structure layer SL#1, can form an inclined surface SS extending (widening) in a direction inclined with respect to the direction of gravity (the optical axis direction or the normal N to the surface WS of the workpiece W).

[0087] 18(b) shows an example in which the object BO#21 has a shape that does not penetrate into the interior of the structure layer SL#1 located below the object BO#21. On the other hand, when a molten pool MP is formed on the building surface MS set on the surface of the structure layer SL#1, the molten pool MP may contain material (e.g., molten metal) that constituted at least a part of the structure layer SL#1. In this case, the object BO#21 may have a shape that penetrates at least partially into the interior of the structure layer SL#1. The state in which the object BO#21 at least partially penetrates into the structure layer SL#1 located below the object BO#21 may be the same as at least one of the state in which the object BO#11 penetrates into the workpiece W located below the object BO#11 (see FIG. 11) and the state in which the object BO#12 penetrates into the object BO#11 located below the object BO#12 (see FIGS. 15(a) to 15(b) and 16(a) to 16(c)). For this reason, a detailed description of the state in which the object BO#21 at least partially penetrates into the structure layer SL#1 located below the object BO#21 will be omitted.

[0088] Then, the modeling apparatus SYS models the object BO#22. For this purpose, the modeling apparatus SYS first moves at least one of the modeling head 21 and the stage 31 so that the irradiation target position EP can be set on the surface WS or inside the modeled object BO#21, as shown in FIG. 19(a) and FIG. 19(b). However, if the irradiation target position EP can be set on the surface WS or inside the modeled object BO#21 without moving the modeling head 21 and the stage 31, the modeling apparatus SYS does not need to move at least one of the modeling head 21 and the stage 31. Then, the modeling apparatus SYS moves the irradiation target position EP with respect to the modeling surface MS based on the processing control information (particularly, the processing path information indicating the processing path PP#22 for forming the object BO#22). As a result, the irradiation target position EP is sequentially set on the surface or inside the object BO#21 at the position P#22 indicated by the processing path PP#22.

[0089] In this embodiment, as shown in FIG. 19(b), the modeling apparatus SYS sets the irradiation target position EP so that a position P#22 (see the upper diagram of FIG. 19(b)) where the irradiation target position EP for forming the object BO#22 is set is the same as a position P#21 (see the lower diagram of FIG. 19(b)) where the irradiation target position EP for forming the object BO#21 is set in the Y-axis direction, which is the inclination direction. The upper diagram of FIG. 19(b) shows the position P#22 where the irradiation target position EP for forming the object BO#22 is set, and the lower diagram of FIG. 19(b) shows the position P#21 where the irradiation target position EP for forming the object BO#21 is set. For this reason, the modeling apparatus SYS may set (i.e., may move) the irradiation target position EP based on processing path information including a processing path PP#22 indicating the same position P#22 as the position P#21 indicated by the processing path PP#21 in the inclination direction.

[0090] In this case, the modeling apparatus SYS may be considered to have set the irradiation target position EP such that the distance between the position P#21 and the position P#22 in the falling direction is shorter than the distance between at least one of the positions P#21 and P#22 and at least one of the positions P#11 and P#12 in the falling direction. The modeling apparatus SYS may be considered to have set the irradiation target position EP such that the distance between the position P#21 and the position P#22 in the falling direction is shorter than the first predetermined distance, while the distance between at least one of the positions P#21 and P#22 and at least one of the positions P#11 and P#12 in the falling direction is longer than the first predetermined distance.

[0091] Furthermore, as shown in FIG. 19B, the modeling apparatus SYS may set the irradiation target position EP so that the position P#22 and the position P#21 are the same position in the Z-axis direction, which is the optical axis direction. In this case, the modeling apparatus SYS may set (i.e., may move) the irradiation target position EP based on machining path information including a machining path PP#22 indicating the same position P#22 as the position P#21 indicated by the machining path PP#21 in the optical axis direction. Alternatively, the modeling apparatus SYS may set the irradiation target position EP so that the position P#22 and the position P#21 are different positions in the optical axis direction. In this case, the modeling apparatus SYS may set (i.e., may move) the irradiation target position EP based on machining path information including a machining path PP#22 indicating a position P#22 different from the position P#21 indicated by the machining path PP#21 in the optical axis direction.

[0092] In this case, the modeling apparatus SYS may set the irradiation target position EP such that the distance between the position P#21 and the position P#22 in the optical axis direction is shorter than the distance between at least one of the positions P#21 and P#22 and at least one of the positions P#11 and P#12 in the optical axis direction. The modeling apparatus SYS may set the irradiation target position EP such that the distance between the position P#21 and the position P#22 in the optical axis direction is shorter than the second predetermined distance, while the distance between at least one of the positions P#21 and P#22 and at least one of the positions P#11 and P#12 in the optical axis direction is longer than the second predetermined distance.

[0093] The printing device SYS irradiates the printing light EL onto an area of ​​the object BO#21 where the object BO#22 is to be printed, while moving the irradiation target position EP relative to the printing surface MS. As a result, as shown in Fig. 19(b), a molten pool MP is formed in the area of ​​the object BO#21 where the object BO#22 is to be printed. Furthermore, when the molten pool MP is formed on the printing surface MS, printing material M is supplied from the material nozzle 212 to the molten pool MP. Note that the molten pool MP in Fig. 19(b) is merely an example, and a molten pool MP having a shape different from that shown in Fig. 19(b) may be formed at a position different from the position shown in Fig. 19(b).

[0094] Thereafter, when the molten pool MP is no longer irradiated with the modeling light EL as at least one of the modeling head 21 and the stage 31 moves, the molten modeling material M in the molten pool MP is cooled and solidified (i.e., solidified). As a result, as shown in Figures 20(a) and 20(b), a modeled object BO#22 made of the solidified modeling material M is formed. In the example shown in Figures 20(a) and 20(b), the modeled object BO#22 is formed on the modeled object BO#21. Note that the modeled object BO#22 in Figure 20(b) is merely an example, and the modeled object BO#22 may be formed at a position different from the position shown in Figure 20(b) and in a shape different from the shape shown in Figure 20(b).

[0095] In this manner, the structure layer SL#2 including the objects BO#21 and BO#22 is formed. In this case, the height h_SL#2 of the structure layer SL#2 (i.e., the size in the Z-axis direction) is higher than the height h_BO#21 of the structure object BO#21 constituting the structure layer SL#2. For this reason, the first forming operation makes it possible to form a structure layer SL#2 that is taller than the case in which the structure layer SL#2 that includes the object BO#21 but does not include the object BO#22 is formed. However, the height h_SL#2 of the structure layer SL#2 does not have to be higher than the height h_BO#21 of the object BO#21. For example, the height h_SL#2 of the structure layer SL#2 may be the same as the height h_BO#21 of the object BO#21.

[0096] Furthermore, the width w_SL#2 of the structure layer SL#2 (i.e., the size in the direction along the XY plane; in the example shown in FIG. 20(b) , the size in the Y-axis direction) is greater than the width w_BO#21 of the structure object BO#21 constituting the structure layer SL#2. For this reason, according to the first forming operation, a structure layer SL#2 having a larger width can be formed compared to a case in which a structure layer SL#2 that includes a structure object BO#21 but does not include a structure object BO#22 is formed. However, the width w_SL#2 of the structure layer SL#2 does not have to be greater than the width w_BO#21 of the structure object BO#21 constituting the structure layer SL#2. For example, the width w_SL#2 of the structure layer SL#2 may be the same as the width w_BO#21 of the structure object BO#21 constituting the structure layer SL#2.

[0097] As described above, in the Y-axis direction, which is the inclination direction, the position P#22 at which the irradiation target position EP for forming the object BO#22 is set is away from the positions P#11 and P#12 at which the irradiation target position EP for forming the structure layer SL#1 is set. Therefore, as shown in FIG. 20B, the center of the object BO#22 in the inclination direction is away from the center of the structure layer SL#1 in the inclination direction, similar to the center of the object BO#21 in the inclination direction. As a result, the object BO#22 is formed so as to extend from the structure layer SL#1 in a direction inclined with respect to the Z-axis direction, which is the optical axis direction (i.e., the direction of gravity). As a result, the object BO#22, together with the structure layer SL#1, can form an inclined surface SS inclined so as to incline along the Y-axis direction, which is the inclination direction. In other words, the structure layer SL#2 including the objects BO#21 and BO#22, together with the structure layer SL#1, can form an inclined surface SS that extends (widens) in a direction inclined with respect to the direction of gravity (the optical axis direction or the normal N to the surface WS of the workpiece W).

[0098] In addition, after forming the objects BO#21 and BO#22, the modeling apparatus SYS may form at least one other object constituting the structure layer SL#2. For example, the modeling apparatus SYS may further form an object BO#23 (not shown) different from the objects BO#21 and BO#22 by setting a new irradiation target position EP on the surface or inside of the already formed object BO#22. In this case, a structure layer SL#2 including at least one other object in addition to the objects BO#21 and BO#22 is formed. The same can be said when forming a structure layer SL different from the structure layer SL#2.

[0099] FIG. 20(b) shows an example in which the object BO#22 has a shape that does not penetrate into the interior of the object BO#21 before the object BO#22 is formed. On the other hand, when a molten pool MP is formed in the object BO#21, the molten pool MP may contain a material (e.g., molten metal) that constituted at least a part of the object BO#21. In this case, the object BO#22 may have a shape that at least partially penetrates into the interior of the object BO#21 before the object BO#22 is formed. Note that the state in which the object BO#22 at least partially penetrates into the interior of the object B#21 located below the object BO#22 may be the same as the state in which the object BO#22 penetrates into the interior of the object BO#21 located below the object BO#22 (see FIGS. 15(a) to 15(b) and 16(a) to 16(c)). Therefore, a detailed description of the state in which the object BO#22 at least partially enters the interior of the object BO#21 located below the object BO#22 will be omitted.

[0100] In addition, when at least one of the objects BO#21 and BO#22 has a shape that extends into the structure layer SL#1, a structure including the portion of the objects BO#21 and BO#22 that has extended into the structure layer SL#1 (a structure similar to the structure STa shown in FIG. 16(a) to FIG. 16(c)) may be referred to as the structure layer SL#2. Alternatively, a structure not including the portion of the objects BO#21 and BO#22 that has extended into the structure layer SL#1 (a structure similar to the structure STa shown in FIG. 16(a) to FIG. 16(c)) may be referred to as the structure layer SL#2.

[0101] After that, the modeling device SYS repeats the operation of forming the structural layer SL until all the structural layers SL constituting the inclined structure SST are formed. The operation of forming the structural layer SL#n (note that n is a variable indicating an integer greater than m by 1) on the structural layer SL#m (note that m is a variable indicating an integer greater than 1) is the same as the operation of forming the structural layer SL#2 on the structural layer SL#1. In other words, the explanation of the operation of forming the structural layer SL#2 on the structural layer SL#1 can be used as an explanation of the operation of forming the structural layer SL#n on the structural layer SL#m by replacing the reference characters "#1" and "#2" with the reference characters "#m" and "#n".

[0102] As a result, as shown in FIG. 21(a) and FIG. 21(b), a sloped structure SST is formed which is made up of a plurality of structure layers SL and includes a sloped surface SS.

[0103] (2-2-2) Second printing operation to print the inclined structure SST Next, a second specific example (second forming operation) of the forming operation for forming an inclined structure SST on the workpiece W will be described with reference to Figs. 22 to 26. The second forming operation is different from the first forming operation described above in that the second forming operation is an operation for forming an inclined structure SST including one object and another object by forming the one object and the other object such that one position where an irradiation target position EP for forming the one object is set in the above-mentioned falling direction (intersecting direction) is different from another position where an irradiation target position EP for forming the other object is set. For this reason, hereinafter, steps different between the first forming operation and the second forming operation will be mainly described. Steps of the second forming operation that are not particularly described may be the same as those of the first forming operation.

[0104] First, the modeling apparatus SYS models a first structural layer SL#1 constituting the inclined structure SST on the front surface WS of the workpiece W set on the modeling surface MS. To this end, the modeling apparatus SYS models a model BO#11, and then models a model BO#12.

[0105] 22(a) and 22(b), in order to print the object BO#12, the printing apparatus SYS sets the irradiation target position EP so that position P#12 (see the upper diagram in FIG. 22(b)) where the irradiation target position EP for printing the object BO#12 is set and position P#11 (see the upper diagram in FIG. 22(b)) where the irradiation target position EP for printing the object BO#11 is set are different in the Y-axis direction, which is the falling direction. Note that the upper diagram in FIG. 22(b) shows position P#12 where the irradiation target position EP for printing the object BO#12 is set, and the lower diagram in FIG. 22(b) shows position P#11 where the irradiation target position EP for printing the object BO#11 is set. Specifically, the forming device SYS may set the irradiation target position EP so that, in the Y-axis direction, which is the falling direction, position P#12 is away from position P#11 by a second predetermined amount in the direction in which the inclined surface SS falls relative to the normal N of the workpiece W extending from the connection point C between the workpiece W and the inclined structure SST (see Figures 8(a) and 8(b)) (in the example shown in Figures 22(a) and 22(b), the direction toward the +Y side).

[0106] Here, in the second modeling operation, similarly to the first modeling operation, the modeling apparatus SYS sets the irradiation target position EP so that the distance between the position P#11 and the position P#12 in the falling direction (the above-mentioned second predetermined amount) is shorter than the distance between the position P#21 and the position P#12 in the falling direction (the above-mentioned first predetermined amount). In other words, the modeling apparatus SYS sets the irradiation target position EP so that the distance between the position P#11 and the position P#12 in the falling direction is shorter than the first predetermined distance, while the distance between the position P#21 and the position P#12 in the falling direction is longer than the first predetermined distance.

[0107] After that, the modeling device SYS irradiates the modeling light EL to the area of ​​the model BO#11 where the model BO#12 is to be formed, while moving the irradiation target position EP relative to the modeling surface MS. As a result, as shown in FIG. 22(b), a molten pool MP is formed in the area of ​​the model BO#11 where the model BO#12 is to be formed. Furthermore, when the molten pool MP is formed on the modeling surface MS, the modeling material M is supplied from the material nozzle 212 to the molten pool MP. Note that the molten pool MP in FIG. 22(b) is merely an example, and a molten pool MP having a shape different from that shown in FIG. 22(b) may be formed at a position different from the position shown in FIG. As a result, the model BO#12 is formed as shown in FIG. 23(a) and FIG. 23(b). Here, as described above, since the position P#12 is distant from the position P#11 in the Y-axis direction, which is the falling direction, as shown in FIG. 23(b), the center of the object BO#12 in the falling direction is distant from the center of the object BO#11 in the falling direction in the Y-axis direction, which is the falling direction. As a result, as shown in FIG. 23(b), the width w_SL#1 of the structure layer SL#1 including the objects BO#11 and BO#12 is larger than the width w_BO#11 of the object BO#11 constituting the structure layer SL#1. Therefore, according to the second forming operation, it is possible to form a structure layer SL#1 having a larger width compared to the case where the structure layer SL#1 includes the object BO#11 but does not include the object BO#12. However, the width w_SL#1 of the structure layer SL#1 does not have to be larger than the width w_BO#11 of the object BO#11 constituting the structure layer SL#1. For example, the width w_SL#1 of the structure layer SL#1 may be the same as the width w_BO#11 of the model BO#11 that constitutes the structure layer SL#1.

[0108] 23(b), the height h_SL#1 of the structure layer SL#1 is higher than the height h_BO#11 of the object BO#11 constituting the structure layer SL#1. Therefore, according to the second forming operation, a structure layer SL#1 that is taller can be formed compared to a case in which a structure layer SL#1 that includes the object BO#11 but does not include the object BO#12 is formed. However, the height h_SL#1 of the structure layer SL#1 does not have to be higher than the height h_BO#11 of the object BO#11. For example, the height h_SL#1 of the structure layer SL#1 may be the same as the height h_BO#11 of the object BO#11.

[0109] After the structure layer SL#1 is formed, the modeling apparatus SYS sets the surface of the structure layer SL#1 as a new modeling surface MS, and then models a second structure layer SL#2 constituting the inclined structure SST on the structure layer SL#1. Specifically, in order to form the structure layer SL#2, the modeling apparatus SYS forms a modeling object BO#21, and then forms a modeling object BO#22.

[0110] 24(a) and 24(b), in order to print the object BO#22, the printing apparatus SYS sets the irradiation target position EP so that position P#22 (see the upper diagram in FIG. 22(b)) where the irradiation target position EP for printing the object BO#22 is set and position P#21 (see the lower diagram in FIG. 22(b)) where the irradiation target position EP for printing the object BO#21 is set are different in the Y-axis direction, which is the falling direction. Note that the upper diagram in FIG. 24(b) shows position P#22 where the irradiation target position EP for printing the object BO#22 is set, and the lower diagram in FIG. 24(b) shows position P#21 where the irradiation target position EP for printing the object BO#21 is set. Specifically, the forming device SYS may set the irradiation target position EP so that, in the Y-axis direction, which is the falling direction, position P#22 is away from position P#21 by a second predetermined amount in the direction in which the inclined surface SS falls relative to the normal N of the workpiece W extending from the connection point C between the workpiece W and the inclined structure SST (see Figures 8(a) and 8(b)) (in the example shown in Figures 24(a) and 24(b), the direction toward the +Y side).

[0111] Here, in the second modeling operation, similarly to the first modeling operation, the modeling apparatus SYS sets the irradiation target position EP so that the distance between the position P#21 and the position P#22 in the falling direction (the above-mentioned second predetermined amount) is shorter than the distance between the position P#21 and the position P#12 in the falling direction (the above-mentioned first predetermined amount). In other words, the modeling apparatus SYS sets the irradiation target position EP so that the distance between the position P#21 and the position P#22 in the falling direction is shorter than the first predetermined distance, while the distance between the position P#21 and the position P#12 in the falling direction is longer than the first predetermined distance.

[0112] After that, the modeling device SYS irradiates the modeling light EL to the area of ​​the model BO#21 where the model BO#22 is to be formed, while moving the irradiation target position EP relative to the modeling surface MS. As a result, as shown in FIG. 24(b), a molten pool MP is formed in the area of ​​the model BO#21 where the model BO#22 is to be formed. Furthermore, when the molten pool MP is formed on the modeling surface MS, the modeling material M is supplied from the material nozzle 212 to the molten pool MP. Note that the molten pool MP in FIG. 24(b) is merely an example, and a molten pool MP having a shape different from that shown in FIG. 24(b) may be formed at a position different from the position shown in FIG. As a result, the model BO#22 is formed as shown in FIG. 25(a) and FIG. 25(b). Here, as described above, since the position P#22 is distant from the position P#21 in the Y-axis direction, which is the falling direction, as shown in FIG. 25(b), the center of the object BO#22 in the falling direction is distant from the center of the object BO#21 in the falling direction in the Y-axis direction, which is the falling direction. As a result, as shown in FIG. 25(b), the width w_SL#2 of the structure layer SL#2 including the objects BO#21 and BO#22 is larger than the width w_BO#21 of the object BO#21 constituting the structure layer SL#2. Therefore, according to the second forming operation, it is possible to form a structure layer SL#2 having a larger width compared to the case where the structure layer SL#2 including the object BO#21 but not including the object BO#22 is formed. However, the width w_SL#2 of the structure layer SL#2 does not have to be larger than the width w_BO#21 of the object BO#21 constituting the structure layer SL#2. For example, the width w_SL#2 of the structure layer SL#2 may be the same as the width w_BO#21 of the model BO#21 that constitutes the structure layer SL#2.

[0113] 25(b), the height h_SL#2 of the structure layer SL#2 is higher than the height h_BO#21 of the object BO#21 constituting the structure layer SL#2. Therefore, according to the second forming operation, a structure layer SL#2 that is taller can be formed compared to a case in which a structure layer SL#2 that includes the object BO#21 but does not include the object BO#22 is formed. However, the height h_SL#2 of the structure layer SL#2 does not have to be higher than the height h_BO#21 of the object BO#21. For example, the height h_SL#2 of the structure layer SL#2 may be the same as the height h_BO#21 of the object BO#21.

[0114] Thereafter, the modeling apparatus SYS repeats the operation of forming the structure layer SL until all the structure layers SL constituting the inclined structure SST are formed. As a result, as shown in Fig. 26(a) and Fig. 26(b), the inclined structure SST is formed, which is composed of a plurality of structure layers SL and includes an inclined surface SS.

[0115] (3) Technical effect As described above, the modeling apparatus SYS can appropriately model the inclined structure SST. In particular, in order to model the structural layer SL#m (note that 1 is a variable indicating an integer equal to or greater than 2) constituting the inclined structure SST, the modeling apparatus SYS models the structural object BO#m1 and then models the structural object BO#m2. Therefore, the modeling apparatus SYS can model the structural layer SL#m having a higher height and / or a larger width compared to the case where the structural layer SL#m is modeled while modeling the structural object BO#m1 and without modeling the structural object BO#m2. Here, the structural layer SL#m becomes larger as the height of the structural layer SL#m increases and / or the width of the structural layer SL#m increases. Therefore, the structural layer SL#m can appropriately support, from below, the structural layer SL#n (note that n is a variable indicating an integer equal to or greater than m) that is modeled on the structural layer SL#m so as to extend from the structural layer SL#m along a direction inclined with respect to the optical axis direction. Therefore, even if a structural layer SL#n extending from the structural layer SL#m in a direction inclined with respect to the optical axis direction is formed on the structural layer SL#m, the structural layer SL#m as a base and the structural layer SL#n supported by the structural layer SL#m are unlikely to collapse. Therefore, the modeling apparatus SYS can model, with relatively high accuracy, the inclined structure SST having an inclined surface SS that has a desired inclination angle with respect to the gravity direction.

[0116] (4) Variations Next, a modification of the modeling apparatus SYS will be described.

[0117] (4-1) First Modification As described above, in order to form a structural layer SL#m having a greater height and / or width, the modeling apparatus SYS forms a structural object BO#m2 after forming a structural object BO#m1. In the first modified example, the modeling apparatus SYS forms a structural layer SL#m having a greater height and / or width while forming the structural object BO#m1 and without forming the structural object BO#m2. In other words, the modeling apparatus SYS forms an inclined structure SST having an inclined surface SS whose inclination angle with respect to the direction of gravity is at a desired angle with relatively high accuracy while forming the structural object BO#m1 and without forming the structural object BO#m2.

[0118] For example, the modeling apparatus SYS may model a structural layer SL#m having a greater height and / or width by controlling the number of times the modeling light EL is irradiated per unit area or per unit time. Specifically, the more times the modeling surface MS is irradiated with the modeling light EL per unit area or per unit time, the greater the amount of energy transferred from the modeling light EL to the modeling surface MS per unit area or per unit time. The more the amount of energy transferred from the modeling light EL to the modeling surface MS per unit area or per unit time, the greater the amount of modeling material M melted on the modeling surface MS. The more the amount of modeling material M melted on the modeling surface MS, the larger the molten pool MP formed on the modeling surface MS. The larger the molten pool MP formed on the modeling surface MS, the larger the modeled object BO#m1 modeled on the modeling surface MS. The larger the modeled object BO#m1 modeled on the modeling surface MS, the larger the structural layer SL#m including the modeled object BO#m1. In other words, the height of the structural layer SL#m becomes larger and / or the width of the structural layer SL#m becomes larger. Therefore, the modeling apparatus SYS can control at least one of the height and width of the structural layer SL#m by controlling the number of times the modeling light EL is irradiated. In other words, the modeling apparatus SYS can model a structural layer SL#m that is taller and / or wider by controlling the number of times the modeling light EL is irradiated. As a result, the modeling apparatus SYS can relatively accurately model an inclined structure SST having an inclined surface SS that has a desired inclination angle with respect to the direction of gravity by controlling the number of times the modeling light EL is irradiated.

[0119] For example, the modeling apparatus SYS may model a structural layer SL#m having a greater height and / or a greater width by controlling the characteristics of the modeling light EL. Specifically, when the characteristics of the modeling light EL change, the amount of energy transferred from the modeling light EL to the modeling surface MS per unit area or per unit time may change. For example, the higher the intensity of the modeling light EL, which is an example of the characteristics of the modeling light EL, the greater the amount of energy transferred from the modeling light EL to the modeling surface MS per unit area or per unit time. For this reason, the modeling apparatus SYS can control at least one of the height and width of the structural layer SL#m by controlling the characteristics of the modeling light EL (e.g., the intensity of the modeling light EL) in the same way as when controlling the number of times the modeling light EL is irradiated. In other words, the modeling apparatus SYS can model a structural layer SL#m having a greater height and / or a greater width by controlling the characteristics of the modeling light EL (e.g., the intensity of the modeling light EL). As a result, the modeling device SYS can control the characteristics of the modeling light EL (e.g., the intensity of the modeling light EL) to model, with relatively high precision, an inclined structure SST having an inclined surface SS that has a desired inclination angle with respect to the direction of gravity.

[0120] For example, the modeling apparatus SYS may model a structure layer SL#m having a higher height and / or a wider width by controlling the movement manner of the irradiation target position EP, from which the irradiation optical system 2111 emits the modeling light EL, relative to the modeling surface. Specifically, when the movement manner of the irradiation target position EP changes, the amount of energy transferred from the modeling light EL to the modeling surface MS per unit area or per unit time may change. For example, the slower the movement speed (i.e., the movement speed of the irradiation target position EP), which is an example of the movement manner, the longer the time during which the modeling light EL is irradiated to a certain area of ​​the modeling surface MS. The longer the time during which the modeling light EL is irradiated to a certain area of ​​the modeling surface MS, the greater the amount of energy transferred from the modeling light EL to the certain area of ​​the modeling surface MS. For this reason, the modeling apparatus SYS can control at least one of the height and width of the structure layer SL#m by controlling the movement manner of the irradiation target position EP (for example, the movement speed of the irradiation target position EP), in the same way as in the case of controlling the number of times of irradiation of the modeling light EL. That is, the modeling apparatus SYS can model a structural layer SL#m having a greater height and / or width by controlling the movement manner of the irradiation target position EP (for example, the movement speed of the irradiation target position EP). As a result, the modeling apparatus SYS can model, with relatively high accuracy, an inclined structure SST having an inclined surface SS having a desired inclination angle with respect to the gravity direction by controlling the movement manner of the irradiation target position EP (for example, the movement speed of the irradiation target position EP).

[0121] For example, the modeling apparatus SYS may model a structure layer SL#m having a greater height and / or a greater width by controlling the supply mode of the modeling material M from the material nozzle 212. Specifically, when the supply mode of the modeling material M changes, the amount of the modeling material M melted on the modeling surface MS may change. For example, the amount of the modeling material M melted on the modeling surface MS increases as the supply amount (particularly, the supply amount per unit time), which is an example of a supply mode, increases. For this reason, the modeling apparatus SYS can control at least one of the height and width of the structure layer SL#m by controlling the supply mode of the modeling material M (e.g., the supply amount of the modeling material M) in the same way as when controlling the number of times of irradiation of the modeling light EL. In other words, the modeling apparatus SYS can model a structure layer SL#m having a greater height and / or a greater width by controlling the supply mode of the modeling material M (e.g., the supply amount of the modeling material M). As a result, the modeling apparatus SYS can control the supply mode of the modeling material M (e.g., the supply amount of the modeling material M) to model, with relatively high precision, an inclined structure SST having an inclined surface SS whose inclination angle with respect to the direction of gravity is the desired angle.

[0122] (4-2) Second Modification As described above, in order to form an inclined structure SST having an inclined surface SS with relatively high precision, the modeling apparatus SYS adopts a modeling operation of forming a structure BO#m1 and then a modeling object BO#m2 as a modeling operation for forming a structural layer SL#m that constitutes the inclined structure SST.

[0123] On the other hand, as described above, the modeling apparatus SYS may model a three-dimensional structure ST that does not have an inclined surface SS. In this case, the modeling apparatus SYS does not need to perform a modeling operation of modeling an object BO#m2 after modeling an object BO#m1 in order to model a structural layer SL#m that constitutes the three-dimensional structure ST that does not have an inclined surface SS.

[0124] Furthermore, in the case where a modeling operation is performed to model the structure layer SL#m after the modeling object BO#m1 is formed in order to model the structure layer SL#m, the throughput related to the modeling of the structure layer SL#m is deteriorated compared to the case where a modeling operation is performed in which the modeling object BO#m1 is formed while the modeling object BO#m2 does not need to be formed in order to model the structure layer SL#m. As a result, the throughput related to the modeling of the inclined structure SST is deteriorated. In other words, it can be said that the modeling operation for modeling the inclined structure SST described above prioritizes improving the accuracy of the modeling of the inclined structure SST by allowing the deterioration of the throughput related to the modeling of the inclined structure SST. However, there is a possibility that some users of the modeling apparatus SYS prioritize the throughput related to the modeling of the inclined structure SST over the accuracy of the modeling of the inclined structure SST. In this case, there is no high need for the modeling apparatus SYS to perform a modeling operation to model the structure layer SL#m after the modeling object BO#m1.

[0125] Furthermore, when the inclination angle θ of the inclined surface SS with respect to the gravity direction (i.e., the Z-axis direction) is relatively small (for example, when the inclination angle θ is a relatively small second angle θ2 shown in FIG. 27(b) described later), the modeling apparatus SYS may be able to model the inclined structure SST with relatively high accuracy without performing a modeling operation of modeling the object BO#m2 after modeling the object BO#m1 in order to model the structure layer SL#m. This is because, when the inclination angle θ of the inclined surface SS is relatively small, the structure layer SL#m as a base and the structure layer SL#n supported by the structure layer SL#m are less likely to collapse even if the structure layer SL#n extending from the structure layer SL#m along a direction inclined with respect to the optical axis direction is modeled on the structure layer SL#m, compared to when the inclination angle θ of the inclined surface SS is relatively large (for example, when the inclination angle θ is a relatively large first angle θ1 shown in FIG. 27(b) described later). Therefore, when the inclination angle θ of the inclined surface SS with respect to the direction of gravity is relatively small, there is no strong need for the modeling apparatus SYS to perform a modeling operation of forming a model BO#m2 after forming a model BO#m1 in order to form the structural layer SL#m.

[0126] Incidentally, the inclination angle θ of the inclined surface SS with respect to the direction of gravity may mean the angle between the axis extending along the direction of gravity and the inclined surface SS, as shown in Fig. 27(a) and Fig. 27(b). In addition, when the surface WS of the workpiece W is parallel to the XY plane, the normal N of the surface WS of the workpiece W extends along the direction of gravity. Therefore, the inclination angle θ of the inclined surface SS with respect to the direction of gravity may mean the angle between the normal N of the surface WS of the workpiece W and the inclined surface SS. Fig. 27(a) shows an inclined surface SS in which the inclination angle θ is a relatively large first angle θ1. Meanwhile, Fig. 27(b) shows an inclined surface SS in which the inclination angle θ is a relatively small second angle θ2 (where θ2<θ1).

[0127] Therefore, in the second modified example, the modeling apparatus SYS may switch the operation mode of the modeling apparatus SYS between a first operation mode and a second operation mode. The first operation mode is an operation mode in which a modeling object BO#m2 is modeled after a modeling object BO#m1 is modeled in order to model the structure layer SL#m, as shown in FIG. 28 (for example, an operation mode in which the first or second modeling operation is performed in order to model the inclined structure SST described above). In other words, the first operation mode is an operation mode in which the number of models to be modeled in order to model the structure layer SL#m is relatively large. On the other hand, the second operation mode is an operation mode in which a modeling object BO#m1 is modeled in order to model the structure layer SL#m, but the modeling object BO#m2 does not need to be modeled (for example, an operation mode in which the basic operation of the additive processing described above is performed), as shown in FIG. In other words, the second operation mode is an operation mode in which the number of models to be modeled in order to model the structure layer SL#m is relatively small.

[0128] The modeling apparatus SYS may set the operation mode of the modeling apparatus SYS to a first operation mode when modeling an inclined structure SST having an inclined surface SS. On the other hand, the modeling apparatus SYS may set the operation mode of the modeling apparatus SYS to a second operation mode when modeling a three-dimensional structure ST not having an inclined surface SS.

[0129] The modeling apparatus SYS may set the operation mode of the modeling apparatus SYS to the first operation mode when the improvement of the modeling accuracy of the inclined structure SST is prioritized over the improvement of the throughput of the modeling of the inclined structure SST. On the other hand, the modeling apparatus SYS may set the operation mode of the modeling apparatus SYS to the second operation mode when the improvement of the throughput of the modeling of the inclined structure SST is prioritized over the improvement of the accuracy of the modeling of the inclined structure SST.

[0130] The modeling apparatus SYS may set the operation mode of the modeling apparatus SYS to the first operation mode when modeling an inclined structure SST having an inclined surface SS whose inclination angle θ is a predetermined first angle θ1. The state in which the inclination angle θ is the predetermined first angle θ1 may include a state in which the inclination angle θ is larger than a predetermined angle threshold. In this case, the modeling apparatus SYS may set the operation mode of the modeling apparatus SYS to the first operation mode when modeling an inclined structure SST having an inclined surface SS whose inclination angle θ is larger than a predetermined angle threshold. On the other hand, the modeling apparatus SYS may set the operation mode of the modeling apparatus SYS to the second operation mode when modeling an inclined structure SST having an inclined surface SS whose inclination angle θ is a predetermined second angle θ2. The state in which the inclination angle θ is the predetermined second angle θ2 may include a state in which the inclination angle θ is smaller than a predetermined angle threshold. In this case, when forming an inclined structure SST having an inclined surface SS whose inclination angle θ is smaller than a predetermined angle threshold, the modeling apparatus SYS may set the operation mode of the modeling apparatus SYS to the second operation mode.

[0131] The modeling apparatus SYS may set the operation mode of the modeling apparatus SYS to the first operation mode when modeling a first portion of a three-dimensional structure ST, and may set the operation mode of the modeling apparatus SYS to the second operation mode when modeling a second portion of the same three-dimensional structure ST that is different from the first portion. That is, the modeling apparatus SYS may switch the operation mode of the modeling apparatus SYS from the first operation mode to the second operation mode or from the second operation mode to the first operation mode during a period in which a certain three-dimensional structure ST is being modeled. The first portion modeled by the modeling apparatus SYS in the first operation mode may include a portion of the inclined structure SST that has an inclined surface SS. On the other hand, the second portion modeled by the modeling apparatus SYS in the second operation mode may include a portion of the inclined structure SST that does not have an inclined surface SS. Alternatively, the first portion may include a portion of the inclined structure SST for which improvement in modeling accuracy is prioritized over improvement in throughput for modeling. On the other hand, the second portion may include a portion of the inclined structure SST for which improvement in throughput for modeling is prioritized over improvement in accuracy for modeling. Alternatively, the first portion may include a portion of the inclined structure SST that has an inclined surface SS whose inclination angle θ is a first angle θ1, while the second portion may include a portion of the inclined structure SST that has an inclined surface SS whose inclination angle θ is a second angle θ2.

[0132] As described in the first modified example, the modeling apparatus SYS can model the inclined structure SST with relatively high accuracy while modeling the object BO#m1 without modeling the object BO#m2. In this case, the first operation mode and the second operation mode may be two operation modes that are distinguished from each other from the viewpoint of the number of objects to be modeled in order to model the structure layer SL#m.

[0133] 29, the first operation mode and the second operation mode may be two operation modes having different numbers of times of irradiation of the shape-forming light EL. More specifically, the first operation mode may be an operation mode having a greater number of times of irradiation of the shape-forming light EL compared to the second operation mode.

[0134] 29, the first operation mode and the second operation mode may be two operation modes having different characteristics of the shaping light EL (e.g., the intensity of the shaping light EL). More specifically, the first operation mode may be an operation mode in which the intensity of the shaping light EL is higher than that of the second operation mode.

[0135] For example, as shown in Fig. 31, the first operation mode and the second operation mode may be two operation modes in which the movement manner of the irradiation target position EP is different. More specifically, the first operation mode may be an operation mode in which the movement speed of the irradiation target position EP is slower than that of the second operation mode.

[0136] 32, the first operation mode and the second operation mode may be two operation modes having different supply modes of the modeling material M. More specifically, the first operation mode may be an operation mode in which the supply amount of the modeling material M is larger than that of the second operation mode.

[0137] (4-3) Third Modification In the above description, the modeling apparatus SYS models a thin-plate-like inclined structure SST having a relatively thin thickness in the Y-axis direction, which is the tilt direction, as shown in Figs. 8(a) and 8(b). On the other hand, the modeling apparatus SYS may model a thick-plate-like inclined structure SST having a relatively thick thickness in the Y-axis direction, which is the tilt direction, as shown in Figs. 33(a) and 33(b). The thick-plate-like inclined structure SST may be, for example, a structure in which a plurality of structure layers SL are stacked along the Z-axis direction, the structure layers SL being formed by forming a plurality of objects extending in the X-axis direction, which is the scanning direction, along the Y-axis direction, the tilt direction. The thick-plate-like inclined structure SST may be, for example, a structure in which a plurality of structure layers SL are stacked along the Z-axis direction, the structure layers SL being formed based on processing control information indicating a movement trajectory of the irradiation target position EP extending in the X-axis direction, which is the scanning direction, and indicating a plurality of processing paths aligned along the Y-axis direction, which is the tilt direction.

[0138] In this case, the modeling apparatus SYS may adopt a modeling operation of modeling an object BO#m2 after modeling an object BO#m1 as a modeling operation for modeling the structural layer SL#m constituting the thick-plate-like inclined structure SST. Alternatively, as described in the second modified example, the modeling apparatus SYS may set the operation mode of the modeling apparatus SYS to the first operation mode when modeling a first portion of the structural layer SL#m constituting the thick-plate-like inclined structure SST, and may set the operation mode of the modeling apparatus SYS to the second operation mode when modeling a second portion of the structural layer SL#m constituting the thick-plate-like inclined structure SST. Below, a specific example of an operation of switching the operation mode of the modeling apparatus SYS between the first operation mode and the second operation mode to model the thick-plate-like inclined structure SST will be described.

[0139] As shown in FIG. 34, which is a plan view showing the structural layer SL#m constituting the thick-plate-like inclined structure SST shown in FIG. 33(a) to FIG. 33(b), when forming an outer wall portion SL_ow constituting the outer wall surface OS (i.e., the outer edge) of the structural layer SL#m, the modeling apparatus SYS may set the operation mode of the modeling apparatus SYS to the first operation mode. For example, the modeling apparatus SYS may form the outer wall portion SL_ow by forming the object BO#m2 after forming the object BO#m1. On the other hand, as shown in FIG. 34, when forming an inner portion SL_i surrounded by the outer wall portion SL_ow of the structural layer SL#m, the modeling apparatus SYS may set the operation mode of the modeling apparatus SYS to the second operation mode. For example, the modeling apparatus SYS may form the inner portion SL_i while forming the object BO#m1, without forming the object BO#m2. In this case, the outer wall portion SL_ow constituting the inclined surface SS is formed with relatively high accuracy. Therefore, the modeling apparatus SYS can model, with relatively high precision, a thick plate-like inclined structure SST having an inclined surface SS whose inclination angle with respect to the direction of gravity is a desired angle.

[0140] As shown in FIG. 35, which is a plan view showing a structure layer SL#m constituting a thick-plate-like inclined structure SST in FIG. 33(a) to FIG. 33(b), the outer wall portion SL_ow includes a first outer wall portion SL_ow1 including an inclined surface SS, and a second outer wall portion SL_ow2 including a surface different from the inclined surface SS. In this case, when forming the first outer wall portion SL_ow1, the modeling apparatus SYS may set the operation mode of the modeling apparatus SYS to the first operation mode. For example, the modeling apparatus SYS may form the first outer wall portion SL_ow1 by forming the object BO#m1 and then forming the object BO#m2. On the other hand, when forming the second outer wall portion SL_ow2 of the outer wall portion SL_o, the operation mode of the modeling apparatus SYS may be set to the second operation mode. For example, the modeling apparatus SYS may form the second outer wall portion SL_ow2 while forming the object BO#m1, without forming the object BO#m2. In this case, the first outer wall portion SL_ow1 including the inclined surface SS is formed with relatively high accuracy. Therefore, the modeling apparatus SYS can model, with relatively high accuracy, the thick plate-like inclined structure SST having the inclined surface SS with a desired inclination angle with respect to the gravity direction. Furthermore, the throughput for modeling the inclined structure SST is improved compared to the case where the entire outer wall portion SL_ow is modeled by the modeling apparatus SYS operating in the first operation mode.

[0141] (4-4) Fourth Modification In the above-mentioned third modified example, the modeling apparatus SYS models a thick-plate-like inclined structure SST whose outer wall surface is an inclined surface SS. On the other hand, in the fourth modified example, the modeling apparatus SYS may model a thick-plate-like inclined structure SST whose outer wall surface OS and inner wall surface IS are both inclined surfaces SS, as shown in FIG. 36(a) and FIG. 36(b). Even in this case, the modeling apparatus SYS may adopt a modeling operation of modeling a modeling object BO#m1 and then a modeling object BO#m2 as a modeling operation for modeling a structural layer SL#m constituting the thick-plate-like inclined structure SST. Alternatively, as in the third modified example, the modeling apparatus SYS may set the operation mode of the modeling apparatus SYS to the first operation mode when modeling a first portion of the structural layer SL#m constituting the thick-plate-like inclined structure SST, and set the operation mode of the modeling apparatus SYS to the second operation mode when modeling a second portion of the structural layer SL#m constituting the thick-plate-like inclined structure SST. For example, as shown in Fig. 37, which is a plan view showing a structural layer SL#m constituting a thick-plate-like inclined structure SST in which both the outer wall surface OS and the inner wall surface IS are inclined surfaces SS, the modeling apparatus SYS may set the operation mode of the modeling apparatus SYS to the first operation mode when forming an outer wall portion SL_ow constituting the outer wall surface OS (i.e., outer edge) of the structural layer SL#m and an inner wall portion SL_iw constituting the inner wall surface IS (i.e., inner edge) of the structural layer SL#m. For example, the modeling apparatus SYS may form a modeling object BO#m2 after forming a modeling object BO#m1 to form the outer wall portion SL_ow and the inner wall portion SL_iw. On the other hand, as shown in Fig. 37, the modeling apparatus SYS may set the operation mode of the modeling apparatus SYS to the second operation mode when forming an inner portion SL_i surrounded by the outer wall portion SL_ow and the inner wall portion SL_iw of the structural layer SL#m. For example, the modeling apparatus SYS may model the inner part SL_i while modeling the object BO#m1, without modeling the object BO#m2.

[0142] However, if the distance D between the outer wall surface OS and the inner wall surface IS (this distance D may be referred to as the "thickness of the inclined structure SST") becomes too short, the outer wall portion SL_ow and the inner wall portion SL_iw may at least partially overlap (i.e., at least partially join). As a result, the heights of the outer wall portion SL_ow and the inner wall portion SL_iw may become higher than necessary. Therefore, when the distance D is smaller than the predetermined first distance threshold THD1, the modeling apparatus SYS may lower the heights of the objects BO#m1 and BO#m2 formed in the first operation mode compared to when the distance D is larger than the predetermined first distance threshold THD1. For example, when the distance D is smaller than the predetermined first distance threshold THD1, the modeling apparatus SYS may halve the heights of the objects BO#m1 and BO#m2 formed in the first operation mode compared to when the distance D is larger than the predetermined first distance threshold THD1. As a result, even in a situation where the outer wall portion SL_ow and the inner wall portion SL_iw may at least partially overlap each other, the heights of the outer wall portion SL_ow and the inner wall portion SL_iw do not become unnecessarily high. Alternatively, for example, when the distance D is smaller than a predetermined first distance threshold THD1, the modeling apparatus SYS may set the operation mode of the modeling apparatus SYS to the second operation mode even in the case of modeling the outer wall portion SL_ow and the inner wall portion SL_iw. In other words, in order to model the outer wall portion SL_ow and the inner wall portion SL_iw of the structure layer SL#m, the modeling system SYS may model the object BO#m1 while not modeling the object BO#m2.

[0143] The first distance threshold THD1 may be set based on the overlap amount of the objects BO#m1 and SL#m2 formed to form the above-mentioned structure layer SL#m, and the line widths of the objects BO#m1 and SL#m2. The overlap amount of the objects BO#m1 and SL#m2 may mean the overlap amount of the objects BO#m1 and SL#m2 in a direction intersecting the X-axis direction, which is the scanning direction (i.e., the Y-axis direction, which is the leaning direction). The line widths of the objects BO#m1 and SL#m2 may mean the sizes of the objects BO#m1 and SL#m2 in a direction intersecting the X-axis direction, which is the scanning direction (i.e., the Y-axis direction, which is the leaning direction). As an example, the first distance threshold THD1 may be set to a value obtained by adding the overlap amount and the line width (or a value larger than that value).

[0144] Note that the modeling apparatus SYS cannot model an inclined structure SST in which the distance D between the outer wall portion SL_ow and the inner wall portion SL_iw is smaller than the line width of each of the objects BO#m1 and SL#m2. Therefore, when the distance D between the outer wall portion SL_ow and the inner wall portion SL_iw is equal to or smaller than the line width, the modeling apparatus SYS may output a warning that such an inclined structure SST cannot be modeled.

[0145] (4-5) Fifth Modification In the above description, the modeling apparatus SYS models an inclined structure SST having an inclined surface SS inclined so as to fall along a falling direction (i.e., Y-axis direction) intersecting the X-axis direction, which is the scanning direction, as shown in Fig. 8(a) and Fig. 8(b). That is, in the above description, the modeling apparatus SYS models an inclined structure SST having an inclined surface SS inclined so as to fall along a falling direction different from the scanning direction in which each of the objects BO#m1 and BO#m2 to be modeled in order to model the structure layer SL#m extends. On the other hand, in the fifth modified example, the modeling apparatus SYS may model an inclined structure SST having an inclined surface SS inclined so as to fall along the scanning direction (i.e., in a falling direction that is the same direction as the scanning direction), as shown in Fig. 38(a) and Fig. 38(b). That is, the modeling apparatus SYS may model an inclined structure SST having an inclined surface SS inclined so as to fall along the scanning direction as it moves upward in the optical axis direction.

[0146] The following describes the flow of operations for forming a structural layer SL#m that constitutes an inclined structure SST having an inclined surface SS inclined so as to fall along the scanning direction. In the following, the steps that differ between the above-mentioned first and second forming operations and the forming operation in the fifth modified example are mainly described. The steps of the forming operation in the fifth modified example that are not specifically described may be the same as the steps of the first and second forming operations.

[0147] First, the modeling apparatus SYS models the first structural layer SL#1 constituting the inclined structure SST on the surface WS of the workpiece W set on the modeling surface MS. Specifically, as shown in Fig. 39(a) and Fig. 39(b), the modeling apparatus SYS models the structural layer SL#1 by forming objects BO#11 and BO#12 in the same manner as in the first modeling operation.

[0148] Then, after the structure layer SL#1 is formed, the modeling apparatus SYS sets the surface of the structure layer SL#1 as a new modeling surface MS, and then models the second structure layer SL#2 constituting the inclined structure SST on the structure layer SL#1. Specifically, the modeling apparatus SYS forms the structure layer SL#2 by forming objects BO#21 and BO#22 in the same manner as in the first modeling operation.

[0149] However, in the fifth modified example, the modeling apparatus SYS does not have to set the irradiation target positions EP such that the positions P#21 and P#22 at which the irradiation target positions EP for forming the objects BO#21 and BO#22 are set, respectively, are different from the positions P#11 and P#12 at which the irradiation target positions EP for forming the objects BO#11 and BO#12 are set, respectively, in the Y-axis direction, which is the falling direction. For example, the modeling apparatus SYS may set the irradiation target positions EP such that the positions P#21 and P#22 are the same as the positions P#11 and P#12 in the Y-axis direction, which is the falling direction.

[0150] On the other hand, in the fifth modified example, as shown in Fig. 40(a) and Fig. 40(b), the modeling apparatus SYS sets the irradiation target positions EP such that the ends AE#21 and AE#22 (see the upper diagram in Fig. 40(b)) of the two regions where the irradiation target positions EP for forming the objects BO#21 and BO#22 are set are different from the ends AE#11 and AE#12 (see the lower diagram in Fig. 40(b)) of the two regions where the irradiation target positions EP for forming the objects BO#11 and BO#12 are set in different positions in the X-axis direction, which is the scanning direction. In other words, the modeling apparatus SYS sets the irradiation target positions EP such that the ends AE#21 and AE#22 are separated from the ends AE#11 and AE#12 in the X-axis direction, which is the scanning direction. The end AE#21 is the end in the scanning direction of the region where the irradiation target position EP for forming the object BO#21 is set. In particular, the end portion AE#21 is one of the two ends (both ends) in the scanning direction of the area where the irradiation target position EP for forming the object BO#21 is set, which is located on the inclined surface SS side (the +X side in the example shown in FIGS. 40(a) and 40(b)). The same is true for the ends AE#11, EE#12, and EE#22.

[0151] After the irradiation target position EP for forming the object BO#21 is set, the modeling device SYS irradiates the modeling light EL to the area of ​​the structure layer SL#1 where the object BO#21 is to be formed, while moving the irradiation target position EP relative to the modeling surface MS. As a result, a molten pool MP is formed in the area of ​​the structure layer SL#1 where the object BO#21 is to be formed. Furthermore, when the molten pool MP is formed on the modeling surface MS, the modeling material M is supplied from the material nozzle 212 to the molten pool MP. As a result, the object BO#21 is formed. Then, the irradiation target position EP for forming the object BO#22 is set. Then, the modeling device SYS irradiates the modeling light EL to the area of ​​the object BO#21 where the object BO#22 is to be formed, while moving the irradiation target position EP relative to the modeling surface MS. As a result, as shown in FIG. 40(b), a molten pool MP is formed in an area on the object BO#21 where the object BO#22 is to be formed. Furthermore, when the molten pool MP is formed on the printing surface MS, a printing material M is supplied from the material nozzle 212 to the molten pool MP. Note that the molten pool MP in FIG. 40(b) is merely an example, and a molten pool MP having a shape different from that shown in FIG. 40(b) may be formed at a position different from the position shown in FIG. 40(b). As a result, the object BO#22 is printed. As a result, as shown in FIG. 41(a) and FIG. 41(b), a structure layer SL#2 including the objects BO#21 and BO#22 is printed. 41(a) and 41(b), the end BE#21 of the object BO#21 in the scanning direction (X-axis direction) (particularly, the end on the +X side that is the inclined surface SS side) and the end BE#22 of the object BO#22 in the scanning direction (particularly, the end on the +X side that is the inclined surface SS side) are located at different positions from the end BE#11 of the object BO#11 in the scanning direction (particularly, the end on the +X side that is the inclined surface SS side) and the end BE#12 of the object BO#12 in the scanning direction (particularly, the end on the +X side that is the inclined surface SS side). In other words, in the X-axis direction, which is the scanning direction, the ends BE#21 and BE#22 are separated from the ends BE#11 and BE#12.As a result, objects BO#21 and BO#22 are formed such that ends BE#21 and BE#22 extend from the structure layer SL#1 in a direction inclined with respect to the Z-axis direction, which is the optical axis direction (i.e., the direction of gravity). As a result, objects BO#21 and BO#22 (particularly ends BE#21 and BE#22) can form an inclined surface SS inclined to fall along the X-axis direction, which is the scanning direction, together with the structure layer SL#1.

[0152] After that, the modeling device SYS repeats the operation of forming the structural layer SL until all structural layers SL constituting the inclined structure SST are formed. The operation of forming the structural layer SL#n (where n is a variable indicating an integer greater than m by 1) on the structural layer SL#m (where m is a variable indicating an integer greater than 1) is the same as the operation of forming the structural layer SL#2 on the structural layer SL#1. As a result, as shown in Figures 42(a) and 42(b), a structural structure SST is formed that is composed of multiple structural layers SL and includes an inclined surface SS.

[0153] (4-6) Sixth Modification In the sixth modified example, the modeling system SYS may model a three-dimensional structure ST having a void SP formed therein by performing a modeling operation for modeling the inclined structure SST described above. In the following description, for convenience of explanation, the three-dimensional structure ST having a void SP formed therein is referred to as an "void structure PST". Hereinafter, an operation for modeling the void structure PST will be described. In addition, below, as shown in FIG. 43, which is a cross-sectional view showing an example of the void structure PST, an operation for modeling a void structure PST including a base member PSTb, a cylindrical wall member PSTw protruding from the base member PSTb in the Z-axis direction and having a void SP formed therein (i.e., an inner wall surrounding the void SP is formed), and a ceiling member PSTc formed on the upper part of the wall member PSTw so as to at least partially close the void SP will be described. Incidentally, the base member PSTb, the wall member PSTw, and the ceiling member PSTc are distinguished merely for the convenience of explanation, and the base member PSTb, the wall member PSTw, and the ceiling member PSTc are typically integrated together.

[0154] First, as shown in Fig. 44, the modeling apparatus SYS sets the surface WS of the workpiece W as the modeling surface MS, and models a base member PSTb on the modeling surface MS. In the example shown in Fig. 43, the base member PSTb does not have an inclined surface SS that is inclined with respect to the direction of gravity when the surface WS of the workpiece W is horizontal (i.e., the placement surface 311 is horizontal). For this reason, the modeling apparatus SYS may model the base member PSTb by performing a basic operation of additional processing. However, if the base member PSTb has an inclined surface SS, the modeling apparatus SYS may model the base member PSTb by performing a modeling operation for modeling the inclined structure SST.

[0155] Thereafter, as shown in Fig. 45, the modeling apparatus SYS sets the surface of the base member PSTb as the modeling surface MS, and models a wall member PSTw on the modeling surface MS. In the example shown in Fig. 43, the wall member PSTw does not have an inclined surface SS that is inclined with respect to the direction of gravity when the surface WS of the workpiece W is horizontal (i.e., the placement surface 311 is horizontal). For this reason, the modeling apparatus SYS may model the wall member PSTw by performing a basic operation of additional processing. However, if the wall member PSTw has an inclined surface SS, the modeling apparatus SYS may model the wall member PSTw by performing a modeling operation for modeling the inclined structure SST.

[0156] After that, the modeling apparatus SYS sets the surface of the wall member PSTw as the modeling surface MS, and models the ceiling member PSTc on the modeling surface MS. However, when the surface WS of the workpiece W is horizontal (i.e., the placement surface 311 is horizontal), the ceiling member PSTc has a surface perpendicular to the direction of gravity. Therefore, when the surface WS of the workpiece W is horizontal (i.e., the placement surface 311 is horizontal), it may be difficult for the modeling apparatus SYS to model the ceiling member PSTc. Therefore, as shown in FIG. 46, the modeling apparatus SYS moves the stage 31 so that the surface WS of the workpiece W (i.e., the placement surface 311) becomes non-horizontal (specifically, inclined with respect to the Z-axis direction, which is the direction of gravity). In other words, the modeling apparatus SYS moves the stage 31 so that the normal N of the surface WS of the workpiece W (i.e., the normal to the placement surface 311) becomes non-horizontal (specifically, inclined with respect to the Z-axis direction, which is the direction of gravity). As a result, in the state shown in Fig. 46, the ceiling member PSTc becomes an inclined structure SST having an inclined surface SS inclined with respect to the direction of gravity. Therefore, as shown in Fig. 47, the modeling apparatus SYS can model the ceiling member PSTc by modeling an inclined structure SST having an inclined surface SS inclined with respect to the direction of gravity on an object including the base member PSTb and the wall member PSTw placed on the surface WS of the workpiece W. In other words, the modeling apparatus SYS performs a modeling operation for modeling the inclined structure SST, thereby forming the ceiling member PSTc above the surface WS of the workpiece W (i.e., above the placement surface 311).

[0157] At this time, the modeling apparatus SYS models the ceiling member PSTc so that a space corresponding to the gap SP is included below the ceiling member PSTc. Specifically, the modeling apparatus SYS models the ceiling member PSTc including an inclined surface SS facing the gap SP.

[0158] The modeling apparatus SYS may form a ceiling member PSTc on one wall member PSTw (for example, the left wall member PSTw shown in FIG. 47) to form a ceiling member PSTc that connects the one wall member PSTw to another wall member PStw (for example, the right wall member PSTw shown in FIG. 47) that is located at a position different from the one wall member PSTw. Alternatively, the modeling apparatus SYS may form a first ceiling portion that is a part of the ceiling member PSTc on one wall member PSTw (for example, the left wall member PSTw shown in FIG. 47), and form a second ceiling portion that is another part of the ceiling member PSTc and is connected to the first ceiling portion on the other wall member PStw (for example, the right wall member PSTw shown in FIG. 47).

[0159] When the ceiling member PSTc is formed, the sum of the angle θ1 between the normal N to the surface WS of the workpiece W (i.e., the normal to the mounting surface 311 of the stage 31 on which the workpiece W is placed) and the direction of gravity, and the angle θ2 between the direction along the inclined surface SS of the ceiling member PSTc and the direction of gravity may be 90 degrees or more. Fig. 47 shows an example in which the sum of the angles θ1 and θ2 is 90 degrees.

[0160] In this manner, in the sixth modified example, the void structure PST is formed.

[0161] (4-7) Seventh Modification In the above description, in order to form the structural layer #2 on the structural layer SL#1, the modeling apparatus SYS forms the structural layer SL#1 by forming a structure BO#11 and then forming a structure BO#12 on the structure BO#11, and then forms the structural layer SL#2 by forming a structure BO#21 on the structure BO#12 and then forming a structure BO#22 on the structure BO#21.

[0162] In the seventh modified example, in order to form the structure layer #2 on the structure layer SL#1, the modeling apparatus SYS may first form objects BO#11 and BO#12 aligned along the Y-axis direction, which is the tilt direction, on the modeling surface MS, as shown in FIG. 48. As a result, the structure layer SL#1 including the objects BO#11 and BO#12 is formed. After that, the modeling apparatus SYS may form the object BO#21 by setting an irradiation target position EP on the surface or inside of the object BO#11 and irradiating the object BO#11 with the modeling light EL. In other words, the modeling apparatus SYS may form the object BO#21 on the object BO#11. Furthermore, the modeling apparatus SYS may form the object BO#22 by setting an irradiation target position EP on the surface or inside of the object BO#12 and irradiating the object BO#12 with the modeling light EL. That is, the modeling apparatus SYS may form the object BO#22 on the object BO#12. In this manner, as shown in Fig. 49, the modeling apparatus SYS may form the objects BO#21 and BO#22 that are aligned along the Y-axis direction, which is the falling direction, on the structure layer SL#1.

[0163] At this time, as described in the description of the first or second formation operation, the formation apparatus SYS may set the irradiation target position EP such that the position P#21 at which the irradiation target position EP for forming the object BO#21 is set and the position P#11 at which the irradiation target position EP for forming the object BO#11 is set are different in the Y-axis direction, which is the inclination direction. Furthermore, the formation apparatus SYS may set the irradiation target position EP such that the position P#22 at which the irradiation target position EP for forming the object BO#22 is set and the position P#12 at which the irradiation target position EP for forming the object BO#12 is set are different in the Y-axis direction, which is the inclination direction. As a result, as shown in FIG. 49, the structure layer SL#2 including the objects BO#21 and BO#22, together with the structure layer SL#1, can form an inclined surface SS inclined so as to incline along the Y-axis direction, which is the inclination direction.

[0164] Similarly, when forming a structural layer #n on the structural layer SL#m, the modeling apparatus SYS may form the structural layer SL#m by forming objects BO#m1 and BO#m2 aligned along the Y-axis direction, which is the tilt direction. After that, the modeling apparatus SYS may form the structural object BO#n1 by setting an irradiation target position EP on the surface or inside of the structural object BO#m1 and irradiating the structural object BO#m1 with the modeling light EL. Furthermore, the modeling apparatus SYS may form the structural object BO#n2 by setting an irradiation target position EP on the surface or inside of the structural object BO#m2 and irradiating the structural object BO#m2 with the modeling light EL. In other words, the modeling apparatus SYS may form the structural layer SL#n by forming objects BO#21 and BO#22 aligned along the Y-axis direction, which is the tilt direction, on the structural layer SL#1.

[0165] By performing such an operation, the modeling apparatus SYS may model the above-mentioned inclined structure SST.

[0166] (4-8) Eighth Modification There is a possibility that the modeling material M that was not used in modeling the three-dimensional structure ST may remain on at least one of the workpiece W and the stage 31. Alternatively, a part of the modeling material M that was not used in modeling the three-dimensional structure ST may scatter or spill from the surface of the workpiece W to the outside of the workpiece W (e.g., to the stage 31). For this reason, the modeling apparatus SYS may be equipped with a recovery device that recovers the modeling material M that was not used in modeling the three-dimensional structure ST. The modeling material M recovered by the recovery device may be supplied to the workpiece W from the material nozzle 212.

[0167] When the recovery device recovers the modeling material M, as shown in FIG. 50, the modeling device SYS may rotate the stage 31 using the stage drive system 32 to cause the recovery device to recover the modeling material M remaining on at least one of the workpiece W and the stage 31. For example, the modeling device SYS may rotate the stage 31θX around a rotation axis RX (typically a rotation axis along the X-axis) of the stage 31θX using the stage drive system 32. For example, the modeling device SYS may rotate the stage 31θZ around a rotation axis RZ of the stage 31θZ using the stage drive system 32. As a result, the modeling material M remaining on at least one of the workpiece W and the stage 31 is removed from at least one of the workpiece W and the stage 31 by the action of at least one of the centrifugal force and gravity of the rotation of the stage 31. As a result, the recovery device can appropriately recover the modeling material M remaining on the workpiece W or the stage 31.

[0168] Alternatively, even if the recovery device does not recover the modeling material M or the modeling apparatus SYS is not equipped with a recovery device, the modeling apparatus SYS may rotate the stage 31 using the stage drive system 32. As a result, the modeling material M remaining on at least one of the workpiece W and the stage 31 is removed from at least one of the workpiece W and the stage 31 by the action of at least one of the centrifugal force and gravity caused by the rotation of the stage 31. This reduces the possibility that the modeling material M remaining on at least one of the workpiece W and the stage 31 will adversely affect the additional processing of the workpiece Z (i.e., the modeling of the three-dimensional structure ST).

[0169] (4-9) Other variations In the above description, the modeling apparatus SYS processes the workpiece W by irradiating the workpiece W with the modeling light EL. However, the modeling apparatus SYS may process the workpiece W by irradiating the workpiece W with an arbitrary energy beam. In this case, the modeling apparatus SYS may be equipped with a beam irradiation device capable of irradiating an arbitrary energy beam in addition to or instead of the light source 5 and the irradiation optical system 2111. An example of the arbitrary energy beam is at least one of a charged particle beam and an electromagnetic wave. An example of the charged particle beam is at least one of an electron beam and an ion beam.

[0170] (5) Additional Notes The following additional notes are provided regarding the above-described embodiment. [Appendix 1] a modeling unit including at least a beam irradiation unit including an optical system that emits an energy beam, and a material supply unit that supplies a modeling material to a position irradiated with the energy beam; a modeling control unit that controls the modeling of a structure by the modeling unit; A molding apparatus comprising: The forming control unit is controlling the modeling unit to form a first structure layer by irradiating an energy beam onto a first position as an irradiation position of the energy beam, and forming a second structure by irradiating the first object with the energy beam onto a second position of the first object as an irradiation position of the energy beam; controlling the modeling unit to model a second structural layer by setting a third position of the first structural layer as an irradiation position of the energy beam, and irradiating the first structural layer with the energy beam to form a third object, and by setting a fourth position of the third object as an irradiation position of the energy beam, and irradiating the third object with the energy beam to form a fourth object, and controlling the modeling unit so that at least one of a distance between the first position and the second position along the optical axis direction of the optical system and a distance between the third position and the fourth position along the optical axis direction is shorter than a distance between the second position and the third position along the optical axis direction; and controlling the modeling unit so that at least one of a distance between the first position and the second position along an intersecting direction intersecting with the optical axis direction and a distance between the third position and the fourth position along the intersecting direction is shorter than a distance between the second position and the third position along the intersecting direction; and The forming unit is controlled so as to form a structure including at least the first structure layer and the second structure layer and tilted with respect to the optical axis direction. Modeling equipment. [Appendix 2] The forming control unit controls the forming unit so that the first position and the second position are the same position in the optical axis direction, the first position and the second position are the same position in the intersecting direction, the third position and the fourth position are the same position in the optical axis direction, and / or the third position and the fourth position are the same position in the intersecting direction. 2. The molding apparatus of claim 1. [Appendix 3] The modeling control unit controls the modeling unit so that at least one of a distance between the first position and the second position along the optical axis direction, a distance between the first position and the second position along the intersecting direction, a distance between the third position and the fourth position along the optical axis direction, and a distance between the third position and the fourth position along the intersecting direction is shorter than a predetermined distance. 3. The molding apparatus according to claim 1 or 2. [Appendix 4] The modeling control unit controls the modeling unit so that a distance between the second position and the third position along the intersecting direction is longer than a predetermined distance. 4. The molding apparatus according to any one of claims 1 to 3. [Appendix 5] The width of the first structure layer is greater than the width of the first object, The width of the second structure layer is greater than the width of the third object. 5. The molding apparatus according to any one of claims 1 to 4. [Appendix 6] The height of the first structure layer is greater than the height of the first object. The height of the second structure layer is greater than the height of the third object. 6. The molding apparatus according to any one of claims 1 to 5. [Appendix 7] The modeling control unit (i) controls the modeling unit so that the irradiation position moves relatively along a scanning direction in a plane including the intersecting direction, and (ii) controls the modeling unit so that the structure, which includes the first structural layer and the second structural layer and is modeled by relatively moving the irradiation position along the scanning direction, includes an inclined surface that is inclined so as to fall along the scanning direction. 7. The molding apparatus of any one of claims 1 to 6. [Appendix 8] The modeling control unit controls the modeling unit so that a first end of a region to which the energy beam is irradiated during a period in which the first structural layer is formed and a second end of a region to which the energy beam is irradiated during a period in which the second structural layer is formed on the first structural layer are separated in the scanning direction. 8. The molding apparatus of claim 7. [Appendix 9] the third location comprises a location on a surface of the first structural layer; The fourth position includes a position inside the third object or a position on a surface of the first structural layer. 9. The molding apparatus of any one of claims 1 to 8. [Appendix 10] The formation control unit controls the formation unit so as to form the second object on the first object, to form the third object on the second object, and to form the fourth object on the third object. 10. The molding apparatus of any one of claims 1 to 9. [Appendix 11] The modeling control unit controls the modeling unit so as to model the third object on the first structure layer. 11. The molding apparatus of any one of claims 1 to 10. [Appendix 12] An end surface of the structure including the first end and the second end is inclined along the scanning direction. 9. The molding apparatus of claim 8. [Appendix 13] The modeling control unit controls the modeling unit so that a space is formed below the inclined surface. 13. The molding apparatus of claim 7, 8, or 12. [Appendix 14] The irradiation position of the energy beam includes at least one of an irradiation target position of the energy beam and a focusing target position of the energy beam. 14. The molding apparatus of any one of claims 1 to 13. [Appendix 15] a modeling unit including at least a beam irradiation unit including an optical system that emits an energy beam, and a material supply unit that supplies a modeling material to a position irradiated with the energy beam; a modeling control unit that controls the modeling of a structure by the modeling unit; A molding apparatus comprising: The modeling control unit is capable of switching, in response to an input by a user, between a first operation mode for modeling a first structure including an inclined surface intersecting with a gravity direction at a first angle and a second operation mode for modeling a second structure including an inclined surface intersecting with the gravity direction at a second angle. Modeling equipment. [Appendix 16] Each of the first structure and the second structure includes a plurality of stacked structural layers; The number of times of irradiation of the energy beam when forming each structural layer in the first operation mode is different from the number of times of irradiation of the energy beam when forming each structural layer in the second operation mode. 16. The molding apparatus of claim 15. [Appendix 17] When the first angle is greater than the second angle, the number of irradiations of the energy beam for forming each structure layer in the first operation mode is greater than the number of irradiations of the energy beam for forming each structure layer in the second operation mode. 17. The molding apparatus of claim 16. [Appendix 18] the first angle and the second angle are equal; The number of irradiations of the energy beam for forming each structural layer in the first operation mode is greater than the number of irradiations of the energy beam for forming each structural layer in the second operation mode. 17. The molding apparatus of claim 16. [Appendix 19] the modeling device operating in the first operating mode irradiates the energy beam at a first position to model a first object, and irradiates the energy beam at a second position of the first object to model a second object, thereby forming each structural layer including the first object and the second object; The modeling apparatus operating in the second operating mode irradiates the energy beam to a first position to model the third object, while forming each structural layer including the third object without irradiating the energy beam to the second position of the first object. 19. The molding apparatus of any one of claims 15 to 18. [Appendix 20] Each of the first structure and the second structure includes a plurality of stacked structural layers; The characteristics of the energy beam for forming each structural layer in the first operating mode are different from the characteristics of the energy beam for forming each structural layer in the second operating mode. 20. The molding apparatus of any one of claims 15 to 19. [Appendix 21] The characteristics of the energy beam include an intensity of the energy beam. 21. The molding apparatus of claim 20. [Appendix 22] When the first angle is greater than the second angle, an intensity of the energy beam for forming each structural layer in the first mode of operation is greater than an intensity of the energy beam for forming each structural layer in the second mode of operation. 22. The molding apparatus of claim 21. [Appendix 23] The energy beam irradiation device further includes a moving device for moving the irradiation position of the energy beam, A movement manner of the irradiation position when forming each structure layer in the first operation mode is different from a movement manner of the irradiation position when forming each structure layer in the second operation mode. 23. The molding apparatus of any one of claims 15 to 22. [Appendix 24] The movement mode includes a movement speed. 24. The molding apparatus of claim 23. [Appendix 25] When the first angle is greater than the second angle, the moving speed when forming each structure layer in the first operation mode is slower than the moving speed when forming each structure layer in the second operation mode. 25. The molding apparatus of claim 24. [Appendix 26] A supply mode of the modeling material from the material supply unit when forming each structure layer in the first operation mode is different from a supply mode of the modeling material from the material supply unit when forming each structure layer in the second operation mode. 26. The molding apparatus of any one of claims 15 to 25. [Appendix 27] The supply mode includes a supply amount. 27. The molding apparatus of claim 26. [Appendix 28] When the first angle is greater than the second angle, the supply amount when forming each structure layer in the first operation mode is greater than the supply amount when forming each structure layer in the second operation mode. 28. The molding apparatus of claim 27. [Appendix 29] a modeling unit including at least a beam irradiation unit including an optical system that emits an energy beam toward an object, a material supply unit that supplies modeling material to an irradiation position of the energy beam, and a posture change device that can change the posture of the object with respect to the beam irradiation unit; a modeling control unit that controls the modeling of a structure by the modeling unit; A molding apparatus comprising: the modeling control unit changes a posture of the object so that a normal line of a placement surface on which the object is placed and on which the energy beam is irradiated is inclined with respect to a gravity direction, and controls the modeling unit to model a structure including an inclined surface extending in an inclined direction inclined with respect to the gravity direction above the placement surface; The structure includes at least a space below it. Modeling equipment. [Appendix 30] The object has a void surrounded by an inner wall surface, The modeling control unit controls the modeling unit to form the structure including the inclined surface facing the gap above the placement surface. 30. The molding apparatus of claim 29. [Appendix 31] The modeling control unit controls the modeling unit to form the structure above the placement surface, the structure at least partially filling the gap. 31. The molding apparatus of claim 30. [Appendix 32] The sum of the angle between the normal to the placement surface and the direction of gravity and the angle between the inclination direction and the direction of gravity is 90 degrees or more. 32. The molding apparatus of any one of claims 29 to 31. [Appendix 33] a modeling unit including at least a beam irradiation unit including an optical system that emits an energy beam, and a material supply unit that supplies a modeling material to a position irradiated with the energy beam; a modeling control unit that controls the modeling of a structure by the modeling unit; A molding apparatus comprising: The forming control unit is controlling the modeling unit so as to model a first object using a first position as an irradiation position or a focusing position of the energy beam, and to model a second object using a second position of the first object as an irradiation position or a focusing position of the energy beam; and controlling the modeling unit so as to model a third object by setting a third position of the second object as an irradiation position or a focusing position of the energy beam, and to model a fourth object by setting a fourth position of the third object as an irradiation position or a focusing position of the energy beam; and controlling the modeling unit such that at least one of a distance between the first position and the second position along a direction of gravity and a distance between the third position and the fourth position along a direction of gravity is shorter than a distance between the second position and the third position along the direction of gravity; and controlling the modeling unit such that at least one of a distance between the first position and the second position along an intersecting direction intersecting with a gravity direction and a distance between the third position and the fourth position along the intersecting direction is shorter than a distance between the second position and the third position along the intersecting direction; Modeling equipment. [Appendix 34] a modeling unit including at least a beam irradiation unit including an optical system that emits an energy beam, and a material supply unit that supplies a modeling material to a position irradiated with the energy beam; a modeling control unit that controls the modeling of a structure by the modeling unit; A molding apparatus comprising: The forming control unit is controlling the modeling unit so as to model a first object using a first position as an irradiation position or a focusing position of the energy beam, and to model a second object using a second position of the first object as an irradiation position or a focusing position of the energy beam; and controlling the modeling unit so as to model a third object by setting a third position of the second object as an irradiation position or a focusing position of the energy beam, and to model a fourth object by setting a fourth position of the third object as an irradiation position or a focusing position of the energy beam; and controlling the modeling unit so that at least one of a distance between the first position and the second position along the optical axis direction of the optical system and a distance between the third position and the fourth position along the optical axis direction is shorter than a distance between the second position and the third position along the optical axis direction; and controlling the modeling unit so that at least one of a distance between the first position and the second position along an intersecting direction intersecting with the optical axis direction and a distance between the third position and the fourth position along the intersecting direction is shorter than a distance between the second position and the third position along the intersecting direction. Modeling equipment. [Appendix 35] a modeling unit including at least a beam irradiation unit including an optical system that emits an energy beam, and a material supply unit that supplies a modeling material to a position irradiated with the energy beam; a modeling control unit that controls the modeling of a structure by the modeling unit; A molding apparatus comprising: The modeling control unit controls the modeling unit to repeat a layer formation operation of forming a structural layer by irradiating the energy beam at a first position to form a structure, and forming a structure including an inclined surface by stacking a plurality of the structural layers, the layer formation operation including forming a structural object by irradiating the energy beam at a second position of the structure formed by irradiating the energy beam at the first position as an irradiation position of the energy beam. Modeling equipment. [Appendix 36] a modeling unit including at least a beam irradiation unit including an optical system that emits an energy beam, and a material supply unit that supplies a modeling material to a position irradiated with the energy beam; a modeling control unit that controls the modeling of a structure by the modeling unit; A molding apparatus comprising: The forming control unit is controlling the modeling unit to model a first object extending along a scanning direction in an intersecting plane that intersects with an optical axis direction of the optical system, by moving the energy beam along the scanning direction in the intersecting plane, the first position being an irradiation position or a focusing position of the energy beam, and to model a second object extending along the scanning direction in the intersecting plane, by moving the energy beam along the scanning direction in the intersecting plane, the second position being an irradiation position or a focusing position of the energy beam, thereby forming a first structure layer; and controlling the modeling unit to model a second structure layer by setting a third position of at least a part of the first object as an irradiation position or a focusing position of the energy beam, and moving the energy beam to model a third object extending along the scanning direction, and setting a fourth position of at least a part of the second object as an irradiation position or a focusing position of the energy beam, and moving the energy beam to model a fourth object extending along the scanning direction, and controlling the modeling unit so that the first object and the second object are modeled side by side in a direction intersecting the scanning direction, and the third object and the fourth object are modeled side by side in a direction intersecting the scanning direction; and The forming unit is controlled so as to form a structure inclined with respect to the optical axis direction by forming a structure layer including at least the first structure layer and the second structure layer. Modeling equipment. [Appendix 37] The modeling control unit controls the modeling unit to model a structure inclined toward the scanning direction. 37. The molding apparatus of claim 36. [Appendix 38] The inclined surface of the inclined structure includes a portion that is spaced apart along the scanning direction toward the upper portion in the optical axis direction. 38. The molding apparatus of claim 36 or 37. [Appendix 39] a modeling unit including at least a beam irradiation unit including an optical system that emits an energy beam, and a material supply unit that supplies a modeling material to a position irradiated with the energy beam; a modeling control unit that controls the modeling of a structure by the modeling unit; A molding apparatus comprising: The forming control unit is controlling the modeling unit to model a first object extending along a scanning direction in an intersecting plane intersecting with a gravity direction, by moving the energy beam along the scanning direction, with a first position set as an irradiation position or a focusing position of the energy beam, and to model a second object extending along the scanning direction, by moving the energy beam along the scanning direction in the intersecting plane, with a second position set as an irradiation position or a focusing position of the energy beam, thereby forming a first structure layer; and controlling the modeling unit to model a second structure layer by setting a third position of at least a part of the first object as an irradiation position or a focusing position of the energy beam and moving the energy beam to model a third object extending along the scanning direction, and by setting a fourth position of at least a part of the second object as an irradiation position or a focusing position of the energy beam and moving the energy beam to model a fourth object extending along the scanning direction; controlling the modeling unit so that the first object and the second object are modeled side by side in a direction intersecting the scanning direction, and the third object and the fourth object are modeled side by side in a direction intersecting the scanning direction; and and controlling the modeling unit so as to model a structure inclined with respect to the direction of gravity by forming a structure layer including at least the first structure layer and the second structure layer. Modeling equipment. [Appendix 40] A modeling method for modeling a structure using a modeling unit including at least a beam irradiation unit including an optical system that emits an energy beam, and a material supply unit that supplies a modeling material to an irradiation position of the energy beam, comprising: controlling the modeling unit to form a first structure layer by irradiating an energy beam onto a first position as an irradiation position of the energy beam, and forming a second structure by irradiating the first object with the energy beam onto a second position of the first object as an irradiation position of the energy beam; controlling the modeling unit to model a second structural layer by setting a third position of the first structural layer as an irradiation position of the energy beam, and irradiating the first structural layer with the energy beam to form a third object, and by setting a fourth position of the third object as an irradiation position of the energy beam, and irradiating the third object with the energy beam to form a fourth object, and controlling the modeling unit so that at least one of a distance between the first position and the second position along the optical axis direction of the optical system and a distance between the third position and the fourth position along the optical axis direction is shorter than a distance between the second position and the third position along the optical axis direction; and controlling the modeling unit so that at least one of a distance between the first position and the second position along an intersecting direction intersecting with the optical axis direction and a distance between the third position and the fourth position along the intersecting direction is shorter than a distance between the second position and the third position along the intersecting direction; and The forming unit is controlled so as to form a structure including at least the first structure layer and the second structure layer and tilted with respect to the optical axis direction. Modeling method. [Appendix 41] A modeling method for modeling a structure using a modeling unit including at least a beam irradiation unit including an optical system that emits an energy beam, and a material supply unit that supplies a modeling material to an irradiation position of the energy beam, comprising: A first operation mode for forming a first structure including an inclined surface intersecting with the direction of gravity at a first angle and a second operation mode for forming a second structure including an inclined surface intersecting with the direction of gravity at a second angle can be switched in response to an input by a user. Modeling method. [Appendix 42] A method for forming a structure using a modeling unit including at least a beam irradiation unit including an optical system that emits an energy beam toward an object, a material supply unit that supplies a modeling material to an irradiation position of the energy beam, and a posture change device that can change the posture of the object with respect to the beam irradiation unit, comprising: changing a posture of the object so that a normal line of a placement surface on which the object is placed and on which the energy beam is irradiated is inclined with respect to a gravity direction, and controlling the modeling unit to model a structure including an inclined surface extending in an inclined direction inclined with respect to the gravity direction above the placement surface; The structure includes at least a space below it. Modeling method. [Appendix 43] A modeling method for modeling a structure using a modeling unit including at least a beam irradiation unit including an optical system that emits an energy beam, and a material supply unit that supplies a modeling material to an irradiation position of the energy beam, comprising: controlling the modeling unit so as to model a first object using a first position as an irradiation position or a focusing position of the energy beam, and to model a second object using a second position of the first object as an irradiation position or a focusing position of the energy beam; and controlling the modeling unit so as to model a third object by setting a third position of the second object as an irradiation position or a focusing position of the energy beam, and to model a fourth object by setting a fourth position of the third object as an irradiation position or a focusing position of the energy beam; and controlling the modeling unit such that at least one of a distance between the first position and the second position along a direction of gravity and a distance between the third position and the fourth position along a direction of gravity is shorter than a distance between the second position and the third position along the direction of gravity; and controlling the modeling unit such that at least one of a distance between the first position and the second position along an intersecting direction intersecting with a gravity direction and a distance between the third position and the fourth position along the intersecting direction is shorter than a distance between the second position and the third position along the intersecting direction; Modeling method. [Appendix 44] A modeling method for modeling a structure using a modeling unit including at least a beam irradiation unit including an optical system that emits an energy beam, and a material supply unit that supplies a modeling material to an irradiation position of the energy beam, comprising: controlling the modeling unit so as to model a first object using a first position as an irradiation position or a focusing position of the energy beam, and to model a second object using a second position of the first object as an irradiation position or a focusing position of the energy beam; and controlling the modeling unit so as to model a third object by setting a third position of the second object as an irradiation position or a focusing position of the energy beam, and to model a fourth object by setting a fourth position of the third object as an irradiation position or a focusing position of the energy beam; and controlling the modeling unit so that at least one of a distance between the first position and the second position along the optical axis direction of the optical system and a distance between the third position and the fourth position along the optical axis direction is shorter than a distance between the second position and the third position along the optical axis direction; and controlling the modeling unit so that at least one of a distance between the first position and the second position along an intersecting direction intersecting with the optical axis direction and a distance between the third position and the fourth position along the intersecting direction is shorter than a distance between the second position and the third position along the intersecting direction. Modeling method. [Appendix 45] A modeling method for modeling a structure using a modeling unit including at least a beam irradiation unit including an optical system that emits an energy beam, and a material supply unit that supplies a modeling material to an irradiation position of the energy beam, comprising: The layer forming operation is repeated to form a structure by irradiating the energy beam at a first position to form a structure, and a second position of the structure formed by irradiating the energy beam at the first position is set as an irradiation position of the energy beam to form a structure, and the modeling unit is controlled so that a structure including an inclined surface is formed by stacking a plurality of the structural layers. Modeling method. [Appendix 46] A modeling method for modeling a structure using a modeling unit including at least a beam irradiation unit including an optical system that emits an energy beam, and a material supply unit that supplies a modeling material to an irradiation position of the energy beam, comprising: controlling the modeling unit to model a first object extending along a scanning direction in an intersecting plane that intersects with an optical axis direction of the optical system, by moving the energy beam along the scanning direction in the intersecting plane, the first position being an irradiation position or a focusing position of the energy beam, and to model a second object extending along the scanning direction in the intersecting plane, by moving the energy beam along the scanning direction in the intersecting plane, the second position being an irradiation position or a focusing position of the energy beam, thereby forming a first structure layer; and controlling the modeling unit to model a second structure layer by setting a third position of at least a part of the first object as an irradiation position or a focusing position of the energy beam, and moving the energy beam to model a third object extending along the scanning direction, and setting a fourth position of at least a part of the second object as an irradiation position or a focusing position of the energy beam, and moving the energy beam to model a fourth object extending along the scanning direction, and controlling the modeling unit so that the first object and the second object are modeled side by side in a direction intersecting the scanning direction, and the third object and the fourth object are modeled side by side in a direction intersecting the scanning direction; and The forming unit is controlled so as to form a structure inclined with respect to the optical axis direction by forming a structure layer including at least the first structure layer and the second structure layer. Modeling method. [Appendix 47] A modeling method for modeling a structure using a modeling unit including at least a beam irradiation unit including an optical system that emits an energy beam, and a material supply unit that supplies a modeling material to an irradiation position of the energy beam, comprising: controlling the modeling unit to model a first object extending along a scanning direction in an intersecting plane intersecting with a gravity direction, by moving the energy beam along the scanning direction, with a first position set as an irradiation position or a focusing position of the energy beam, and to model a second object extending along the scanning direction, by moving the energy beam along the scanning direction in the intersecting plane, with a second position set as an irradiation position or a focusing position of the energy beam, thereby forming a first structure layer; and controlling the modeling unit to model a second structure layer by setting a third position of at least a part of the first object as an irradiation position or a focusing position of the energy beam and moving the energy beam to model a third object extending along the scanning direction, and by setting a fourth position of at least a part of the second object as an irradiation position or a focusing position of the energy beam and moving the energy beam to model a fourth object extending along the scanning direction; controlling the modeling unit so that the first object and the second object are modeled side by side in a direction intersecting the scanning direction, and the third object and the fourth object are modeled side by side in a direction intersecting the scanning direction; and and controlling the modeling unit so as to model a structure inclined with respect to the direction of gravity by forming a structure layer including at least the first structure layer and the second structure layer. Modeling method.

[0171] At least a part of the components of each of the above-mentioned embodiments can be appropriately combined with at least a part of other components of each of the above-mentioned embodiments. Some of the components of each of the above-mentioned embodiments may not be used. In addition, to the extent permitted by law, the disclosures of all publications and U.S. patents cited in each of the above-mentioned embodiments are incorporated by reference into the present description.

[0172] The present invention is not limited to the above-described embodiments, but may be modified as appropriate within the scope of the claims and the gist or concept of the invention as can be read from the entire specification, and the molding apparatus and molding method involving such modifications are also included in the technical scope of the present invention. [Explanation of symbols]

[0173] SYS modeling equipment 2 Modeling Unit 21 Sculpted head 211 Beam irradiation system 2111 Irradiation optical system 212 Material nozzle 22 Head drive system 3 Stage Unit 31, 31θX, 31θZ stage 32 Stage drive system 7 Control Device Double work EL Shaped Light EP irradiation target position MS printing surface ST 3D structure SST inclined structure SS slope SL structure layer BO Sculpture PP Processing Path AX optical axis MP molten pool

Claims

1. a modeling unit including at least a beam irradiation unit including an optical system that emits an energy beam, and a material supply unit that supplies a modeling material to a position irradiated with the energy beam; a modeling control unit that controls the modeling of a structure by the modeling unit; A molding apparatus comprising: The forming control unit is controlling the modeling unit to form a first object by irradiating an energy beam at a first position as an irradiation position of the energy beam, and to form a second object by irradiating the first object with the energy beam at a second position of the first object as an irradiation position of the energy beam, thereby forming a first structure layer; and controlling the modeling unit to model a second structure layer by irradiating the first structure layer with the energy beam, setting a third position of the first structure layer as an irradiation position of the energy beam, and forming a fourth object by irradiating the third object with the energy beam, setting a fourth position of the third object as an irradiation position of the energy beam, and controlling the modeling unit so that at least one of a distance between the first position and the second position along the optical axis direction of the optical system and a distance between the third position and the fourth position along the optical axis direction is shorter than a distance between the second position and the third position along the optical axis direction; and controlling the modeling unit such that at least one of a distance between the first position and the second position along an intersecting direction intersecting with the optical axis direction and a distance between the third position and the fourth position along the intersecting direction is shorter than a distance between the second position and the third position along the intersecting direction; and The forming unit is controlled so as to form a structure including at least the first structure layer and the second structure layer and tilted with respect to the optical axis direction. Modeling equipment.

2. The forming control unit controls the forming unit so that the first position and the second position are the same position in the optical axis direction, the first position and the second position are the same position in the intersecting direction, the third position and the fourth position are the same position in the optical axis direction, and / or the third position and the fourth position are the same position in the intersecting direction. The molding apparatus according to claim 1 .

3. The modeling control unit controls the modeling unit so that at least one of a distance between the first position and the second position along the optical axis direction, a distance between the first position and the second position along the intersecting direction, a distance between the third position and the fourth position along the optical axis direction, and a distance between the third position and the fourth position along the intersecting direction is shorter than a predetermined distance. The molding apparatus according to claim 1 or 2.

4. The modeling control unit controls the modeling unit so that a distance between the second position and the third position along the intersecting direction is longer than a predetermined distance. The molding apparatus according to claim 1 .

5. a width of the first structure layer is greater than a width of the first object; The width of the second structure layer is greater than the width of the third object. The molding apparatus according to claim 1 .

6. The height of the first structure layer is greater than the height of the first object. The height of the second structure layer is greater than the height of the third object. The molding apparatus according to claim 1 .

7. The modeling control unit (i) controls the modeling unit so that the irradiation position moves relatively along a scanning direction in a plane including the intersecting direction, and (ii) controls the modeling unit so that the structure, which includes the first structure layer and the second structure layer and is modeled by relatively moving the irradiation position along the scanning direction, includes an inclined surface that is inclined so as to fall along the scanning direction. The molding apparatus according to claim 1 .

8. The modeling control unit controls the modeling unit so that a first end of a region to which the energy beam is irradiated during a period in which the first structural layer is formed and a second end of a region to which the energy beam is irradiated during a period in which the second structural layer is formed on the first structural layer are separated in the scanning direction. The molding apparatus according to claim 7 .

9. the third location comprises a location on a surface of the first structural layer; The fourth position includes a position inside the third object or a position on a surface of the first structural layer. The molding apparatus according to claim 1 .

10. The formation control unit controls the formation unit so as to form the second object on the first object, form the third object on the second object, and form the fourth object on the third object. The molding apparatus according to claim 1 .

11. The modeling control unit controls the modeling unit so as to model the third object on the first structure layer. The molding apparatus according to claim 1 .

12. An end surface of the structure including the first end and the second end is inclined along the scanning direction. The molding apparatus according to claim 8 .

13. The modeling control unit controls the modeling unit so that a space is formed below the inclined surface. The molding apparatus according to claim 7, 8 or 12.

14. The irradiation position of the energy beam includes at least one of an irradiation target position of the energy beam and a focusing target position of the energy beam. The molding apparatus according to claim 1 .

15. a modeling unit including at least a beam irradiation unit including an optical system that emits an energy beam, and a material supply unit that supplies a modeling material to a position irradiated with the energy beam; a modeling control unit that controls the modeling of a structure by the modeling unit; A molding apparatus comprising: The modeling control unit is capable of switching, in response to an input by a user, between a first operation mode for modeling a first structure including an inclined surface intersecting with a gravity direction at a first angle and a second operation mode for modeling a second structure including an inclined surface intersecting with the gravity direction at a second angle. Modeling equipment.

16. Each of the first structure and the second structure includes a plurality of stacked structural layers; The number of times of irradiation of the energy beam when forming each structural layer in the first operation mode is different from the number of times of irradiation of the energy beam when forming each structural layer in the second operation mode. The molding apparatus of claim 15.

17. When the first angle is greater than the second angle, the number of irradiations of the energy beam for forming each structure layer in the first operation mode is greater than the number of irradiations of the energy beam for forming each structure layer in the second operation mode. The molding apparatus of claim 16.

18. the first angle and the second angle are equal; The number of irradiations of the energy beam for forming each structural layer in the first operation mode is greater than the number of irradiations of the energy beam for forming each structural layer in the second operation mode. The molding apparatus of claim 16.

19. the modeling device operating in the first operation mode irradiates a first position with the energy beam to model a first object, and irradiates a second position on the first object with the energy beam to model a second object, thereby forming each structural layer including the first object and the second object; The modeling apparatus operating in the second operation mode irradiates the energy beam to a first position to model the third object, while forming each structural layer including the third object without irradiating the energy beam to the second position of the first object. The molding apparatus according to any one of claims 15 to 18.

20. Each of the first structure and the second structure includes a plurality of stacked structural layers; The characteristics of the energy beam for forming each structural layer in the first mode of operation are different from the characteristics of the energy beam for forming each structural layer in the second mode of operation. The molding apparatus according to any one of claims 15 to 19.

21. The characteristics of the energy beam include an intensity of the energy beam. The molding apparatus of claim 20.

22. When the first angle is greater than the second angle, an intensity of the energy beam for forming each structural layer in the first mode of operation is greater than an intensity of the energy beam for forming each structural layer in the second mode of operation. The molding apparatus of claim 21 .

23. The energy beam irradiation device further includes a moving device for moving the irradiation position of the energy beam, A movement manner of the irradiation position when forming each structure layer in the first operation mode is different from a movement manner of the irradiation position when forming each structure layer in the second operation mode. The molding apparatus according to any one of claims 15 to 22.

24. The movement mode includes a movement speed. The molding apparatus of claim 23.

25. When the first angle is greater than the second angle, the moving speed when forming each structure layer in the first operation mode is slower than the moving speed when forming each structure layer in the second operation mode. The molding apparatus of claim 24.

26. A supply mode of the modeling material from the material supply unit when forming each structure layer in the first operation mode is different from a supply mode of the modeling material from the material supply unit when forming each structure layer in the second operation mode. The molding apparatus according to any one of claims 15 to 25.

27. The supply mode includes a supply amount. The molding apparatus of claim 26.

28. When the first angle is greater than the second angle, the supply amount when forming each structure layer in the first operation mode is greater than the supply amount when forming each structure layer in the second operation mode. The molding apparatus of claim 27.

29. a modeling unit including at least a beam irradiation unit including an optical system that emits an energy beam, and a material supply unit that supplies a modeling material to a position irradiated with the energy beam; a modeling control unit that controls the modeling of a structure by the modeling unit; A molding apparatus comprising: The forming control unit is controlling the modeling unit to model a first object extending along a scanning direction in an intersecting plane that intersects with an optical axis direction of the optical system, by moving the energy beam along the scanning direction in the intersecting plane, the first position being an irradiation position or a focusing position of the energy beam, and to model a second object extending along the scanning direction in the intersecting plane, by moving the energy beam along the scanning direction in the intersecting plane, the second position being an irradiation position or a focusing position of the energy beam, thereby forming a first structure layer; and controlling the modeling unit to model a second structure layer by setting a third position of at least a part of the first object as an irradiation position or a focusing position of the energy beam, and moving the energy beam to model a third object extending along the scanning direction, and setting a fourth position of at least a part of the second object as an irradiation position or a focusing position of the energy beam, and moving the energy beam to model a fourth object extending along the scanning direction, and controlling the modeling unit so that the first object and the second object are modeled side by side in a direction intersecting the scanning direction, and the third object and the fourth object are modeled side by side in a direction intersecting the scanning direction; and The forming unit is controlled so as to form a structure inclined with respect to the optical axis direction by forming a structure layer including at least the first structure layer and the second structure layer. Modeling equipment.

30. The modeling control unit controls the modeling unit to model a structure inclined toward the scanning direction.

30. The molding apparatus of claim 29.

31. The inclined surface of the inclined structure includes a portion that is spaced apart along the scanning direction toward the upper portion in the optical axis direction.

31. The molding apparatus according to claim 29 or 30.

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