Indication device

Abstract

To provide a display device with high resolution and reduced display unevenness. [Solution] A display device having a plurality of pixels on a substrate, each of the plurality of pixels having a transistor and a light-emitting element, the light-emitting element having a first electrode, an EL layer on the first electrode and a second electrode on the EL layer, the first electrode being electrically connected to the transistor, the first electrodes of adjacent pixels being separated by an insulating layer, the second electrode containing a conductive material that is transparent to visible light, the second electrodes of the plurality of pixels being shared, and emitting light from the second electrode side, the display device having wiring, and in a plan view of the substrate, the wiring is arranged in a region where the EL layer is not arranged, and the second electrode is arranged in contact with the wiring.

Description

Technical Field

[0001] One aspect of the present invention relates to a display device and a method for manufacturing the same.

[0002] Note that one aspect of the present invention is not limited to the above technical field. The technical field of one aspect of the invention disclosed in this specification and the like relates to an article, a method, or a manufacturing method. Alternatively, one aspect of the present invention relates to a process, a machine, a manufacture, or a composition of matter. Therefore, more specifically, examples of the technical field of one aspect of the present invention disclosed in this specification include semiconductor devices, display devices, liquid crystal display devices, light-emitting devices, lighting devices, power storage devices, storage devices, imaging devices, methods of operating them, or methods of manufacturing them.

Background Art

[0003] In recent years, higher definition of display panels has been demanded. Devices that require high-definition display panels include, for example, smartphones, tablet terminals, notebook computers, etc. Also, in stationary display devices such as television sets and monitor devices, higher definition accompanying higher resolution has been demanded. Furthermore, devices that require the highest definition include, for example, devices for virtual reality (VR: Virtual Reality) or augmented reality (AR: Augmented Reality).

[0004] Also, display devices applicable to display panels typically include liquid crystal display devices, light-emitting devices having light-emitting elements such as organic EL (Electro Luminescence) elements or light-emitting diodes (LED: Light Emitting Diode), and electronic paper that performs display by an electrophoresis method or the like.

[0005] For example, the basic structure of an organic EL element consists of a layer containing a light-emitting organic compound sandwiched between a pair of electrodes. By applying a voltage to this element, light can be obtained from the light-emitting organic compound. A display device in which such organic EL elements are arranged in each pixel does not require a backlight, which is necessary for liquid crystal displays and the like, thus enabling the realization of a thin, lightweight, high-contrast, and low-power display device. For example, an example of a display device using organic EL elements is described in Patent Document 1. [Prior art documents] [Patent Documents]

[0006] [Patent Document 1] Japanese Patent Publication No. 2002-324673 [Overview of the project] [Problems that the invention aims to solve]

[0007] In organic EL display devices capable of full-color display, configurations are known that combine a white light-emitting element and a color filter, and configurations in which RGB light-emitting elements are formed on the same surface.

[0008] In terms of power consumption, the latter configuration is ideal, and currently, in the manufacturing of small and medium-sized panels, the light-emitting material is applied using metal masks. However, the process using metal masks has low alignment accuracy, so it is necessary to reduce the area occupied by the light-emitting element within the pixel and increase the spacing between the light-emitting elements of adjacent pixels. As a result, the area occupied by the light-emitting element in each pixel decreases, the pixel density decreases, and it becomes difficult to obtain a higher-resolution display device.

[0009] Therefore, one aspect of the present invention aims to improve the occupied area of ​​the light-emitting element in the pixel and increase the pixel density.

[0010] Furthermore, in a configuration where one of a pair of electrodes of a light-emitting element is shared by multiple pixels (hereinafter, this shared electrode is also referred to as a common electrode), the larger the area of ​​the display area of ​​the display device, the greater the degree of voltage drop across the common electrode depending on the pixel position within the display area. This causes variations in the potential of the common electrode, leading to display unevenness. In particular, when a conductive material that is transparent to visible light, such as indium tin oxide (ITO), is used as the common electrode to extract light from the light-emitting element (hereinafter, also referred to as a transparent conductive material), the resistivity of the common electrode tends to be higher than when a metallic material is used. Therefore, there is a possibility that the potential of the common electrode will vary significantly.

[0011] Therefore, one aspect of the present invention aims to reduce display unevenness within the display area.

[0012] Furthermore, the description of these problems does not preclude the existence of other problems. Moreover, one aspect of the present invention does not need to solve all of these problems. Other problems will naturally become apparent from the description in the specification, drawings, and claims, and it is possible to extract other problems from the description in the specification, drawings, and claims. [Means for solving the problem]

[0013] One aspect of the present invention relates to a display device and a method for manufacturing the same.

[0014] One aspect of the present invention relates to a display device obtained by forming a light-emitting element without using a metal mask, and a method for manufacturing the same.

[0015] One aspect of the present invention relates to a display device having a common electrode made of a translucent conductive material and a method for manufacturing the same. It also relates to a display device having wiring (hereinafter referred to as auxiliary wiring) electrically connected to the common electrode and made of a material with lower resistivity than the common electrode, and a method for manufacturing the same. Furthermore, it relates to a display device having a configuration in which, in a plan view, the auxiliary wiring is arranged to overlap with a region where there is no layer (hereinafter referred to as the EL layer) between a pair of electrodes of a light-emitting element, and a method for manufacturing the same. It also relates to a display device having an insulating layer (hereinafter referred to as a partition) that has the function of separating the other of a pair of electrodes of a light-emitting element (hereinafter referred to as a pixel electrode) between adjacent pixels, and in a plan view, the auxiliary wiring is arranged to overlap with the partition, and a method for manufacturing the same. Finally, it relates to a display device having a groove or opening formed in a part of the partition, and in a plan view, the auxiliary wiring is arranged to overlap with the groove or opening, and a method for manufacturing the same.

[0016] One aspect of the present invention is a display device having a plurality of pixels on a substrate, each of which has a transistor and a light-emitting element, the light-emitting element having a first electrode, an EL layer on the first electrode and a second electrode on the EL layer, the first electrode being electrically connected to the transistor, the first electrodes of adjacent pixels being separated by an insulating layer, the second electrode containing a conductive material that is transparent to visible light, the second electrodes of the plurality of pixels being shared and emitting light from the second electrode side, the display device having auxiliary wiring, in a plan view of the substrate, the auxiliary wiring being arranged in a region overlapping the EL layer and a region where the EL layer is not arranged but overlapping the insulating layer, and the second electrode being arranged in contact with the auxiliary wiring. In a plan view of the plurality of pixels, the auxiliary wiring may be in a matrix shape or a stripe shape.

[0017] Another aspect of the present invention relates to a method for manufacturing a display device having a plurality of pixels on a substrate, each of which has a transistor and a light-emitting element, the light-emitting element having a first electrode, an EL layer on the first electrode and a second electrode on the EL layer, the first electrode being electrically connected to the transistor, the first electrodes of adjacent pixels in the plurality of pixels being separated by an insulating layer, the second electrode containing a conductive material that is transparent to visible light, the second electrodes of the plurality of pixels being shared, and emitting light from the second electrode side, wherein auxiliary wiring is formed having, in a plan view of the substrate, a region overlapping the EL layer and a region where the EL layer is not arranged and overlapping the insulating layer, and the second electrode is formed in contact with the auxiliary wiring.

[0018] Furthermore, one aspect of the present invention is a display device having auxiliary wiring between adjacent first pixels and second pixels, wherein the first pixel has a first light-emitting element having a first electrode, a first EL layer on the first electrode, and an electrode on the first EL layer that is transparent to visible light, and the second pixel has a second light-emitting element having a second electrode, a second EL layer on the second electrode, and an electrode on the second EL layer that is transparent to visible light, and the display device has an insulating layer that covers the ends of the first electrode and the ends of the second electrode and is located below the first EL layer and below the second EL layer, the insulating layer has grooves, the auxiliary wiring has a region in contact with the inner wall of the grooves, and the upper surface of the first EL layer, the upper surface of the second EL layer and the upper surface of the auxiliary wiring have a region in contact with the transparent electrode.

[0019] Furthermore, one aspect of the present invention is a display device having auxiliary wiring between adjacent first pixels and second pixels, wherein the first pixel has a first light-emitting element having a first electrode, a first EL layer on the first electrode, and an electrode on the first EL layer that is transparent to visible light, and the second pixel has a second light-emitting element having a second electrode, a second EL layer on the second electrode, and an electrode on the second EL layer that is transparent to visible light, and the display device has an insulating layer that covers the ends of the first electrode and the ends of the second electrode and is located below the first EL layer and below the second EL layer, the insulating layer has an opening, the auxiliary wiring has a region in contact with the inner wall of the opening, and the upper surface of the first EL layer, the upper surface of the second EL layer and the upper surface of the auxiliary wiring have regions in contact with the transparent electrode.

[0020] Furthermore, one aspect of the present invention is a display device having auxiliary wiring between adjacent first pixels and second pixels, wherein the first pixel has a first light-emitting element having a first electrode in contact with the upper surface of a first insulating layer, a first EL layer on the first electrode, and an electrode on the first EL layer that is transparent to visible light, and the second pixel has a second light-emitting element having a second electrode in contact with the upper surface of the first insulating layer, a second EL layer on the second electrode, and an electrode on the second EL layer that is transparent to visible light. The display device has a second insulating layer that is in contact with the upper surface of the first insulating layer and covers the ends of the first electrode and the ends of the second electrode, the first EL layer and the second EL layer each have a region that is in contact with the upper surface of the second insulating layer, the second insulating layer has an opening, the first insulating layer has a groove in the region that overlaps with the opening, the auxiliary wiring has a region that is in contact with the inner wall of the opening and a region that is in contact with the inner wall of the groove, and the upper surface of the first EL layer, the upper surface of the second EL layer and the upper surface of the auxiliary wiring have a region that is in contact with a light-transmitting electrode.

[0021] Furthermore, one aspect of the present invention is a display device having auxiliary wiring between adjacent first pixels and second pixels, wherein the first pixel has a first light-emitting element having a first electrode in contact with the upper surface of a first insulating layer, a first EL layer on the first electrode, and an electrode on the first EL layer that is transparent to visible light, and the second pixel has a second light-emitting element having a second electrode in contact with the upper surface of a first insulating layer, a second EL layer on the second electrode, and an electrode on the second EL layer that is transparent to visible light, and The display device has a second insulating layer that is in contact with the upper surface of an insulating layer and covers the ends of a first electrode and a second electrode, the first EL layer and the second EL layer each have a region that is in contact with the upper surface of the second insulating layer, and a first layer located below the first insulating layer, the second insulating layer and the first insulating layer have openings that reach the first layer, the auxiliary wiring has a region that is in contact with the first layer at the opening, and the upper surface of the first EL layer, the upper surface of the second EL layer and the upper surface of the auxiliary wiring have regions that are in contact with light-transmitting electrodes.

[0022] In the display device according to one aspect of the present invention described above, the upper surface of the insulating layer may have a region in contact with an electrode that is transparent to visible light. Alternatively, in the display device according to one aspect of the present invention described above, the upper surface of the second insulating layer may have a region in contact with an electrode that is transparent to visible light.

[0023] In the display device according to one aspect of the present invention described above, the opening may be filled with auxiliary wiring.

[0024] Another aspect of the present invention is a display device having a plurality of pixels on a substrate, each of the plurality of pixels having a light-emitting element, the light-emitting element having a first electrode, an EL layer on the first electrode, and a second electrode on the EL layer, the first electrodes of adjacent pixels in the plurality of pixels being separated by an insulating layer, the second electrode including a conductive material having translucency to visible light, the second electrodes in the plurality of pixels being shared, and a method of manufacturing the display device that emits light from the second electrode side, the method including forming an auxiliary wiring in a region where the EL layer is not disposed and that overlaps an opening of the insulating layer in a plan view with respect to the substrate, and forming the second electrode so as to contact the auxiliary wiring.

Effects of the Invention

[0025] By using one aspect of the present invention, the occupied area of the light-emitting element in a pixel can be improved, and the pixels can be made denser. Thus, a high-definition display device can be obtained.

[0026] By using one aspect of the present invention, display unevenness in a display area can be reduced. In particular, display unevenness in the display area due to the electrical resistance of a common electrode using a translucent conductive material can be reduced.

[0027] By using one aspect of the present invention, a display device with high definition and reduced display unevenness can be obtained.

[0028] Alternatively, a display device with low power consumption can be provided. Alternatively, a highly reliable display device can be provided. Alternatively, a novel display device or the like can be provided. Alternatively, an operation method of the above display device can be provided. Alternatively, a novel semiconductor device or the like can be provided.

[0029] Note that the description of these effects does not prevent the existence of other effects. Note that one aspect of the present invention does not necessarily have all of these effects. Note that other effects can be extracted from the description of the specification, drawings, claims, and the like.

Brief Description of the Drawings

[0030] [Figure 1] Figure 1 is a perspective cross-sectional view illustrating a display device. [Figure 2] Figures 2A to 2D illustrate the display device. [Figure 3] Figures 3A to 3D illustrate the method for manufacturing a display device. [Figure 4] Figures 4A to 4D illustrate the method for manufacturing a display device. [Figure 5] Figures 5A to 5C illustrate the method for manufacturing a display device. [Figure 6] Figures 6A to 6E illustrate the method for manufacturing a display device. [Figure 7] Figures 7A to 7D illustrate a display device and a method for manufacturing the same. [Figure 8] Figure 8 is a perspective cross-sectional view illustrating the display device. [Figure 9] Figures 9A to 9D illustrate the display device. [Figure 10] Figures 10A to 10F illustrate the method for manufacturing a display device. [Figure 11] Figures 11A to 11D illustrate the display device. [Figure 12] Figure 12A is a diagram illustrating an example configuration of a display device. Figure 12B is a diagram illustrating an example configuration of a pixel circuit. [Figure 13] Figures 13A to 13C illustrate the display device. [Figure 14] Figure 14 is a diagram illustrating a display device. [Figure 15] Figure 15 is a diagram illustrating a display device. [Figure 16] Figures 16A to 16C illustrate a transistor. [Figure 17] Figures 17A to 17C illustrate a transistor. [Figure 18] Figures 18A and 18B illustrate transistors. [Figure 19] Figures 19A to 19D show examples of electronic devices. [Modes for carrying out the invention]

[0031] Embodiments will be described in detail with reference to the drawings. However, it will be readily apparent to those skilled in the art that the present invention is not limited to the following description, and that its form and details can be modified in various ways without departing from the spirit and scope of the invention. Therefore, the present invention is not to be interpreted as being limited to the descriptions of the embodiments shown below. In the configuration of the invention described below, the same reference numerals are used in common between different drawings for the same parts or parts having similar functions, and repeated descriptions may be omitted. In addition, hatching of the same elements constituting the figures may be omitted or changed as appropriate between different drawings.

[0032] In this specification, devices fabricated using a metal mask or FMM (Fine Metal Mask, a high-resolution metal mask) may be referred to as MM (Metal Mask) structured devices. In addition, in this specification, devices fabricated without using a metal mask or FMM may be referred to as MML (Metal Maskless) structured devices.

[0033] In this specification, a structure in which different light-emitting layers are created or painted for each color of light-emitting device (here, blue (B), green (G), and red (R)) may be referred to as an SBS (Side By Side) structure. Also, in this specification, a light-emitting device capable of emitting white light may be referred to as a white light-emitting device. A white light-emitting device can be combined with a colored layer (for example, a color filter) to become a full-color display light-emitting device.

[0034] Furthermore, light-emitting devices can be broadly classified into single-structure and tandem-structure devices. A single-structure device has one light-emitting unit between a pair of electrodes, and it is preferable that this light-emitting unit includes one or more light-emitting layers. To obtain white light emission, one should select light-emitting layers such that the light emitted from each of the two or more layers is complementary in color. For example, by making the light-emitting color of the first light-emitting layer and the light-emitting color of the second light-emitting layer complementary, a configuration that emits white light as a whole can be obtained. The same applies to light-emitting devices having three or more light-emitting layers.

[0035] A tandem device preferably has two or more light-emitting units between a pair of electrodes, and each light-emitting unit preferably includes one or more light-emitting layers. To obtain white light emission, the device should be configured such that the light from the light-emitting layers of the multiple light-emitting units is combined to produce white light emission. The configuration for obtaining white light emission is the same as that for a single-structure device. In a tandem device, it is preferable to provide an intermediate layer, such as a charge-generating layer, between the multiple light-emitting units.

[0036] Furthermore, when comparing the aforementioned white light-emitting devices (single or tandem structure) with SBS structure light-emitting devices, SBS structure light-emitting devices can consume less power than white light-emitting devices. If you want to keep power consumption low, it is preferable to use SBS structure light-emitting devices. On the other hand, white light-emitting devices are preferable because their manufacturing process is simpler than that of SBS structure light-emitting devices, which can lead to lower manufacturing costs or higher manufacturing yields.

[0037] Furthermore, a tandem structure device may have a configuration (such as BB, GG, RR) in which light-emitting layers emit light of the same color. Although a tandem structure, which obtains light emission from multiple layers, requires a high voltage for light emission, the current required to obtain the same light emission intensity as a single structure is smaller. Therefore, in a tandem structure, the current stress per light-emitting unit can be reduced, and the device lifespan can be extended.

[0038] (Embodiment 1) In this embodiment, the configuration and manufacturing method of a display device, which is one aspect of the present invention, will be described with reference to the drawings.

[0039] <Configuration Example 1> Figure 1 shows a perspective cross-sectional view of a display device 100 according to one embodiment of the present invention. Figure 2A shows a schematic top view of a display device 100 according to one embodiment of the present invention. The display device 100 has multiple red-emitting light-emitting elements 110R, green-emitting light-emitting elements 110G, and blue-emitting light-emitting elements 110B. In Figure 2A, the labels R, G, and B are added within the light-emitting area of ​​each light-emitting element to simplify the distinction between them.

[0040] The light-emitting elements 110R, 110G, and 110B are each arranged in a matrix. Figure 2A shows a so-called stripe arrangement, in which light-emitting elements of the same color are arranged in one direction. Note that the arrangement method of the light-emitting elements is not limited to this; other arrangement methods such as delta arrangement and zigzag arrangement may be applied, and pentile arrangement can also be used.

[0041] It is preferable to use EL elements such as OLED (Organic Light Emitting Diode) or QLED (Quantum-dot Light Emitting Diode) as the light-emitting elements 110R, 110G, and 110B. Examples of light-emitting materials for EL elements include fluorescent materials, phosphorescent materials, inorganic compounds (such as quantum dot materials), and thermally activated delayed fluorescence (TADF) materials.

[0042] Figure 2B is a schematic cross-sectional view corresponding to the dashed line A1-A2 in Figure 2A, and Figure 2C is a schematic cross-sectional view corresponding to the dashed line B1-B2.

[0043] Figure 2B shows cross-sections of the light-emitting elements 110R, 110G, and 110B. Each of the light-emitting elements 110R, 110G, and 110B is mounted on a substrate 101 and has a pixel electrode 111 that functions as an anode and a common electrode 113 that functions as a cathode. An auxiliary wiring 115 is also provided that is electrically connected to the common electrode 113. In Figures 1 and 2A, the auxiliary wiring 115 has a mesh-like (or grid-like or matrix-like) shape when viewed from above in the display area.

[0044] The light-emitting element 110R has an EL layer 112R between the pixel electrode 111 and the common electrode 113. The EL layer 112R has a luminescent organic compound that emits light having a peak in at least the red wavelength range. The EL layer 112G of the light-emitting element 110G has a luminescent organic compound that emits light having a peak in at least the green wavelength range. The EL layer 112B of the light-emitting element 110B has a luminescent organic compound that emits light having a peak in at least the blue wavelength range.

[0045] Each of the EL layers 112R, 112G, and 112B may have, in addition to a layer containing a light-emitting organic compound (light-emitting layer), one or more of the following: an electron injection layer, an electron transport layer, a hole injection layer, and a hole transport layer.

[0046] A pixel electrode 111 is provided for each light-emitting element. A common electrode 113 is provided as a continuous layer common to each light-emitting element. A conductive film that is transparent to visible light is used for either the pixel electrode 111 or the common electrode 113, and a conductive film that is reflective is used for the other. By making the pixel electrode 111 transparent and the common electrode 113 reflective, a bottom-emission type display device can be made. Conversely, by making the pixel electrode 111 reflective and the common electrode 113 transparent, a top-emission type display device can be made. Furthermore, by making both the pixel electrode 111 and the common electrode 113 transparent, a dual-emission type display device can be made. In this embodiment, an example of manufacturing a top-emission type display device will be described.

[0047] An insulating layer 131 is provided to cover the ends of the pixel electrodes 111 so as to insulate adjacent pixel electrodes 111. The ends of the insulating layer 131 are preferably tapered.

[0048] Each of the EL layers 112R, 112G, and 112B has a region in contact with the upper surface of the pixel electrode 111 and a region in contact with the surface of the insulating layer 131. The edges of the EL layers 112R, 112G, and 112B are located on the insulating layer 131.

[0049] As shown in Figure 2B, a gap is provided between the two EL layers between light-emitting elements of different colors. It is preferable that the EL layers 112R, 112G, and 112G are arranged so that they do not touch each other. This effectively prevents current from flowing through two adjacent EL layers and causing unintended light emission. Therefore, contrast can be enhanced, and a display device with high display quality can be realized.

[0050] In this embodiment, auxiliary wiring 115 is arranged on the insulating layer 131. The auxiliary wiring 115 is electrically connected to the common electrode 113 and can be made of a material with higher conductivity than the common electrode 113. In the configurations shown in Figures 1 and 2B, the auxiliary wiring 115 is electrically connected to the common electrode 113 by the upper surface of the auxiliary wiring 115 being in contact with the common electrode 113. Also in the configurations shown in Figures 1 and 2B, the auxiliary wiring 115 is arranged on the EL layer so as to cover the edge of the EL layer. The auxiliary wiring 115 is electrically connected to a cathode extraction terminal (not shown) outside the display area.

[0051] Figure 2C shows an example where the EL layer 112G is processed in an island-like manner. However, as shown in Figure 2D, the EL layer 112G may also be processed in a strip-like manner so that it forms a continuous series in the column direction. By making the EL layer 112G etc. into a strip shape, the space required to separate them is eliminated, and the area of ​​the non-emitting region between the light-emitting elements can be reduced, thereby increasing the aperture ratio.

[0052] Furthermore, as shown in Figure 2D, auxiliary wiring 115 may be formed only between pixels exhibiting different colors, without providing auxiliary wiring 115 between adjacent pixels exhibiting the same color. In this case, the auxiliary wiring 115 can have a stripe shape when viewed from above. By making the auxiliary wiring 115 stripe-shaped, the space required to form the auxiliary wiring 115 is reduced compared to when it has a grid shape, thus increasing the aperture ratio. In addition, it becomes possible to reduce crosstalk between pixels exhibiting the same color.

[0053] Note that while Figures 2C and 2D show a cross-section of the light-emitting element 110G as an example, the light-emitting elements 110R and 110B can also have similar shapes.

[0054] Furthermore, a protective layer 121 is provided on the common electrode 113, covering the light-emitting elements 110R, 110G, and 110B. The protective layer 121 has the function of preventing impurities from diffusing to each light-emitting element from above.

[0055] The protective layer 121 can be, for example, a single-layer structure or a multilayer structure including at least an inorganic insulating film. Examples of inorganic insulating films include oxide films or nitride films such as silicon oxide film, silicon oxide nitride film, silicon nitride film, silicon nitride film, aluminum oxide film, aluminum oxide nitride film, and hafnium oxide film. Alternatively, semiconductor materials such as indium gallium oxide and indium gallium zinc oxide may be used as the protective layer 121.

[0056] <Example of manufacturing method> In the following, an example of a method for manufacturing a display device according to one aspect of the present invention will be described with reference to the drawings. Here, the display device 100 shown in the above configuration example will be used as an example. Figures 3A to 6E are schematic cross-sectional views of each step in the method for manufacturing the display device illustrated below.

[0057] Furthermore, thin films (insulating films, semiconductor films, conductive films, etc.) that constitute the display device can be formed using methods such as sputtering, chemical vapor deposition (CVD), vacuum deposition, and atomic layer deposition (ALD). CVD methods include plasma-enhanced CVD (PECVD) and thermal CVD. One type of thermal CVD is metal-organic CVD (MOCVD).

[0058] Furthermore, the coating of thin films (insulating films, semiconductor films, conductive films, etc.) that constitute the display device can be carried out using methods such as spin coating, dip coating, spray coating, inkjet printing, dispensing, screen printing, offset printing, doctor knife method, slit coating, roll coating, curtain coating, and knife coating.

[0059] Furthermore, when processing the thin film that constitutes the display device, photolithography or the like can be used. Alternatively, the thin film may be processed using nanoimprint lithography. In addition, a method of directly forming island-shaped thin films using a film deposition method with a shielding mask may be used in combination.

[0060] There are two main methods for processing thin films using photolithography. One method involves forming a resist mask on the thin film to be processed, then processing the thin film by etching or other means, and finally removing the resist mask. The other method involves forming a photosensitive thin film, then exposing and developing it to process the thin film into the desired shape.

[0061] In photolithography, the light used for exposure can be, for example, i-line (wavelength 365 nm), g-line (wavelength 436 nm), h-line (wavelength 405 nm), or a mixture thereof. Other options include ultraviolet light, KrF laser light, or ArF laser light. Exposure may also be performed using immersion lithography. Furthermore, extreme ultraviolet (EUV) light or X-rays may be used as the light source for exposure. An electron beam can also be used instead of the light source. Using extreme ultraviolet light, X-rays, or an electron beam is preferable because it allows for extremely fine processing. Note that a photomask is not required when exposure is performed by scanning a beam such as an electron beam.

[0062] For etching thin films, methods such as dry etching and wet etching can be used.

[0063] <Preparation of substrate 101> As the substrate 101, a substrate having at least sufficient heat resistance to withstand subsequent heat treatment can be used. When an insulating substrate is used as the substrate 101, glass substrates, quartz substrates, sapphire substrates, ceramic substrates, organic resin substrates, etc., can be used. In addition, semiconductor substrates such as single-crystal semiconductor substrates made of silicon or silicon carbide, polycrystalline semiconductor substrates, compound semiconductor substrates such as silicon germanium, and SOI substrates can be used.

[0064] In particular, it is preferable to use a substrate 101 on which a semiconductor circuit including semiconductor elements such as transistors is formed on the semiconductor substrate or insulating substrate. It is preferable that the semiconductor circuit constitutes, for example, a pixel circuit, a gate line driving circuit (gate driver), a source line driving circuit (source driver), etc. In addition to the above, an arithmetic circuit, a memory circuit, etc. may also be configured.

[0065] <Formation of pixel electrode 111> Next, multiple pixel electrodes 111 are formed on the substrate 101. First, a conductive film to be formed as the pixel electrode 111 is deposited, a resist mask is formed by photolithography, and unnecessary parts of the conductive film are removed by etching. After that, the pixel electrodes 111 can be formed by removing the resist mask.

[0066] For the pixel electrode 111, it is preferable to use a material with the highest possible reflectivity across the entire wavelength range of visible light (for example, silver or aluminum). A pixel electrode 111 formed from such a material can be described as an electrode with light reflectivity. This not only improves the light extraction efficiency of the light-emitting element but also enhances color reproduction.

[0067] <Formation of insulating layer 131> Subsequently, an insulating layer 131 is formed to cover the end portion of the pixel electrode 111 (see FIG. 3A). As the insulating layer 131, an organic insulating film or an inorganic insulating film can be used. The insulating layer 131 preferably has a tapered end portion in order to improve the step coverage of the subsequent EL film. In particular, when an organic insulating film is used, it is preferable to use a photosensitive material because the shape of the end portion can be easily controlled according to the exposure and development conditions.

[0068] <Formation of EL film 112Rf> Subsequently, an EL film 112Rf, which will later become the EL layer 112R, is formed on the pixel electrode 111 and the insulating layer 131 (see FIG. 3B).

[0069] The EL film 112Rf has a film containing at least a red light-emitting organic compound. In addition, it may have a structure in which an electron injection layer, an electron transport layer, a charge generation layer, a hole transport layer, and a hole injection layer are laminated. The EL film 112Rf can be formed by, for example, a vapor deposition method or a sputtering method. Note that the present invention is not limited to this, and the above-described film formation methods can be appropriately used.

[0070] <Formation of resist mask 143a> Subsequently, a resist mask 143a is formed on the pixel electrode 111 corresponding to the light-emitting element 110R (see FIG. 3C). The resist mask 143a can be formed in a lithography process.

[0071] <Formation of EL layer 112R> Subsequently, the EL film 112Rf is etched using the resist mask 143a as a mask, and the EL layer 112R is formed in an island shape (see FIG. 3D). A dry etching method or a wet etching method can be used in the etching process.

[0072] <Formation of EL film 112Gf> Subsequently, an EL film 112Gf, which will later become the EL layer 112G, is formed on the exposed pixel electrode 111 and insulating layer 131, and on the resist mask 143a (see FIG. 4A).

[0073] The EL film 112Gf has a film containing at least a green light-emitting organic compound. In addition, it may have a structure in which an electron injection layer, an electron transport layer, a charge generation layer, a hole transport layer, and a hole injection layer are laminated.

[0074] <Formation of resist mask 143b> Subsequently, a resist mask 143b is formed on the pixel electrode 111 corresponding to the light-emitting element 110G (see FIG. 4B). The resist mask 143b can be formed by a lithography process.

[0075] <Formation of EL layer 112G> Subsequently, using the resist mask 143b as a mask, the EL film 112Gf is etched to form the EL layer 112G in an island shape (see FIG. 4C). A dry etching method or a wet etching method can be used in the etching process.

[0076] <Formation of EL film 112Bf> Subsequently, an EL film 112Bf that will later become the EL layer 112B is formed on the exposed pixel electrode 111 and the insulating layer 131, as well as on the resist mask 143a and the resist mask 143b (see FIG. 4D).

[0077] The EL film 112Bf has a film containing at least a blue light-emitting organic compound. In addition, it may have a structure in which an electron injection layer, an electron transport layer, a charge generation layer, a hole transport layer, and a hole injection layer are laminated.

[0078] <Formation of resist mask 143c> Subsequently, a resist mask 143c is formed on the pixel electrode 111 corresponding to the light-emitting element 110B (see FIG. 5A). The resist mask 143c can be formed by a lithography process.

[0079] <Formation of EL layer 112B> Next, the EL film 112Bf is etched using the resist mask 143c as a mask to form the EL layer 112B in an island-like manner (see Figure 5B). Either a dry etching method or a wet etching method can be used for the etching process.

[0080] <Resistance Mask Removal> Next, resist masks 143a, 143b, and 143c are removed (see Figure 5C). For removing the resist masks, methods such as stripping with an organic solvent can be used. Alternatively, ashing using a dry etching apparatus may be used.

[0081] <Formation of resist mask 150> Next, a resist mask 150 is formed on the EL layer 112R, EL layer 112G, and EL layer 112B (see Figure 6A). The resist mask 150 can be formed by a lithography process. The resist mask 150 is formed such that its sides are inversely tapered in a cross-sectional shape perpendicular to the upper surface of the substrate 101. The resist mask 150 can be shaped such that the angle between the side of the resist mask 150 and the upper surface of the substrate 101 increases as it approaches the edge of the resist mask 150 in a cross-sectional shape perpendicular to the substrate 101. A resist mask of this shape is preferably made using, for example, a negative-type photoresist.

[0082] <Formation of auxiliary wiring 115> Next, a conductive film 115f is formed. The conductive film 115f can be made using any conductive material, for example, a material selected from aluminum (Al), titanium (Ti), tantalum (Ta), tungsten (W), molybdenum (Mo), chromium (Cr), neodymium (Nd), scandium (Sc), nickel (Ni), copper (Cu), or an alloy material mainly composed of these materials, and can be formed as a single layer or in layers. Sputtering, vapor deposition, coating, etc., can be used for the process of forming the conductive film 115f. Here, because the sides of the resist mask are inversely tapered, the formed conductive film 115f has a region formed on the upper surface of the resist mask 150 and a region formed in the region between the resist masks 150, and is separated at the edges of the resist mask 150 (see Figure 6B). In Figure 6B, the conductive film 115f is shown to be separated at the edge of the resist mask 150, but it may not be separated and may be deposited with a thinner film thickness compared to other regions, thus remaining connected.

[0083] <Resistance Mask Removal> Next, the resist mask 150 is removed (see Figure 6C). For removing the resist mask, for example, a stripping method using an organic solvent can be used. Alternatively, ashing using a dry etching apparatus may be used. This process of forming a pattern by removing the resist mask is called the lift-off method. Note that the auxiliary wiring 115 may be formed by processing the conductive film 115f without using the lift-off method.

[0084] In this way, auxiliary wiring 115 can be formed on the insulating layer 131 in areas where EL layers 112R, 112G, and 112B are not formed. In Figure 6C, the auxiliary wiring 115 is positioned in contact with the ends of EL layers 112R, 112G, and 112B.

[0085] <Common electrode formation> Next, a conductive layer that will become the common electrode 113 of the organic EL element is formed on the EL layer 112R, EL layer 112G, EL layer 112B, and auxiliary wiring 115 that were exposed in the previous step (see Figure 6D). As the common electrode 113, a thin metal film that semi-transmits light emitted from the light-emitting layer (for example, an alloy of silver and magnesium) or a translucent conductive film (for example, indium tin oxide, or an oxide containing one or more indium, gallium, zinc, etc.) can be used, either as a single film or a laminate of both. The common electrode 113 made of such a film can be said to be an electrode that transmits light. A vapor deposition apparatus and / or a sputtering apparatus can be used in the process of forming the conductive layer that will become the common electrode 113.

[0086] By having a light-reflecting electrode as the pixel electrode 111 and a light-transmitting electrode as the common electrode 113, light emitted from the light-emitting layer can be emitted to the outside through the common electrode 113. In other words, a top-emission type light-emitting element is formed.

[0087] <Protective layer formation> Next, a protective layer 121 is formed on the common electrode 113 (see Figure 6E). A sputtering apparatus, CVD apparatus, or ALD apparatus can be used for the process of forming the protective layer.

[0088] In this way, the display device 100 can be manufactured.

[0089] <Configuration Example 2> Figure 7A shows another configuration example of the display device 100 of this embodiment. In the configuration shown in Figure 6E, the auxiliary wiring 115 had a region that was positioned to be in contact with the edges of the EL layer 112R, EL layer 112G, and EL layer 112B. However, as shown in Figure 7A, the auxiliary wiring 115 can also be configured not to be in contact with the EL layer 112R, EL layer 112G, and EL layer 112B.

[0090] <Configuration Example 3> Figures 7B to 7D show other configuration examples of the display device 100 of this embodiment. In Figures 6E and 7A, the common electrode 113 was placed on the auxiliary wiring 115, but it is also possible to place the auxiliary wiring 115 on the common electrode 113.

[0091] For example, as shown in Figure 7B, common electrodes 113R, 113G, and 113B are formed on the EL layer 112R, EL layer 112G, and EL layer 112B, respectively. The common electrodes 113R, 113G, and 113B may be separated according to the color corresponding to the light-emitting element, separated according to the light-emitting element, or connected by multiple light-emitting elements. Next, as shown in Figure 7C, auxiliary wiring 115 is formed in contact with the common electrodes 113R, 113G, and 113B. Lithography can be used to form the auxiliary wiring 115. Then, as shown in Figure 7D, a protective layer 121 is formed on the common electrodes 113R, 113G, 113B, and auxiliary wiring 115. Thus, a display device 100 can be configured with auxiliary wiring 115 positioned on the common electrodes 113.

[0092] As described above, in the example of the method for manufacturing the display device, the EL layer is formed on a single surface without using a metal mask deposition method, and then processed, so island-shaped EL layers can be formed with a uniform thickness.

[0093] The EL layers 113a, 113b, and 113c that constitute each color of light-emitting element are formed in separate processes. Therefore, each EL layer can be manufactured with a configuration (material, film thickness, etc.) suitable for each color of light-emitting element. This makes it possible to manufacture light-emitting elements with good characteristics.

[0094] Since the display device of this embodiment is formed without using a metal mask to deposit the EL layer, it is possible to achieve larger size, higher resolution, or higher definition of the display device.

[0095] This embodiment can be combined with other embodiments as appropriate. Furthermore, if multiple configuration examples are shown within a single embodiment in this specification, these configuration examples can be combined as appropriate.

[0096] (Embodiment 2) In this embodiment, a configuration and manufacturing method of a display device different from that of Embodiment 1 will be described with reference to the drawings.

[0097] <Configuration Example 4> Figure 8 shows a perspective cross-sectional view of a display device 200 according to one embodiment of the present invention. Figure 9A shows a schematic top view of a display device 200 according to one embodiment of the present invention. The display device 200 has multiple red-emitting light-emitting elements 110R, green-emitting light-emitting elements 110G, and blue-emitting light-emitting elements 110B. In Figure 9A, the labels R, G, and B are added within the light-emitting area of ​​each light-emitting element to simplify the distinction between them.

[0098] The light-emitting elements 110R, 110G, and 110B are each arranged in a matrix. Figure 9A shows a so-called stripe arrangement, in which light-emitting elements of the same color are arranged in one direction. Note that the arrangement method of the light-emitting elements is not limited to this; other arrangement methods such as delta arrangement and zigzag arrangement may be applied, and pentile arrangement can also be used.

[0099] Figure 8 shows cross-sections of light-emitting elements 110R, 110G, and 110B. Figure 9B is a schematic cross-sectional view corresponding to the dashed line A1-A2 in Figure 9A, and Figure 9C is a schematic cross-sectional view corresponding to the dashed line B1-B2.

[0100] As shown in Figures 8 and 9B, the light-emitting element 110R, 110G, and 110B are each provided on the substrate 101 and have a pixel electrode 111 that functions as an anode and a common electrode 113 that functions as a cathode. In addition, auxiliary wiring 115 is provided that is electrically connected to the common electrode 113. In Figures 8 and 9A, the auxiliary wiring 115 has a mesh-like (or grid-like or matrix-like) shape when viewed from above in the display area.

[0101] The light-emitting element 110R has an EL layer 112R between the pixel electrode 111 and the common electrode 113. The EL layer 112R has a luminescent organic compound that emits light having a peak in at least the red wavelength range. The EL layer 112G of the light-emitting element 110G has a luminescent organic compound that emits light having a peak in at least the green wavelength range. The EL layer 112B of the light-emitting element 110B has a luminescent organic compound that emits light having a peak in at least the blue wavelength range.

[0102] Each of the EL layers 112R, 112G, and 112B may have, in addition to a layer containing a light-emitting organic compound (light-emitting layer), one or more of the following: an electron injection layer, an electron transport layer, a hole injection layer, and a hole transport layer.

[0103] A pixel electrode 111 is provided for each light-emitting element. A common electrode 113 is provided as a continuous layer common to all light-emitting elements. This embodiment describes an example of manufacturing a top-emission type display device.

[0104] An insulating layer 131 is provided to cover the ends of the pixel electrodes 111 so as to insulate adjacent pixel electrodes 111. The ends of the insulating layer 131 are preferably tapered.

[0105] In this embodiment, the insulating layer 131 has an opening, and a portion of the substrate 101 is etched in the region overlapping the opening to form a groove. If a conductive layer or insulating layer is formed between the substrate 101 and the insulating layer 131, a groove is formed in the conductive layer or insulating layer. An auxiliary wiring 115 is provided so as to be in contact with the inner wall of the opening in the insulating layer 131 and the groove in the substrate 101 (or the groove in the layer formed between the substrate 101 and the insulating layer 131). At least the upper surface of the auxiliary wiring 115 is in contact with the common electrode 113. The auxiliary wiring 115 is made of a conductive material and is electrically connected to a cathode extraction terminal (not shown) outside the display area.

[0106] Figure 9B illustrates a case where the width of the opening in the insulating layer 131 in the cross-sectional shape is roughly the same as the width of the groove in the substrate 101, but the embodiments of the present invention are not limited to this. For example, the width of the opening in the insulating layer 131 may be larger than the width of the groove in the substrate 101 (or the groove of the layer provided between the substrate 101 and the insulating layer 131). By adopting this shape, the coverage of the auxiliary wiring 115 provided inside the groove and opening can be improved.

[0107] Each of the EL layers 112R, 112G, and 112B has a region in contact with the upper surface of the pixel electrode 111 and a region in contact with the surface of the insulating layer 131. The edges of the EL layers 112R, 112G, and 112B are located on the insulating layer 131.

[0108] As shown in Figure 9B, a gap is provided between the two EL layers between light-emitting elements of different colors. It is preferable that the EL layers 112R, 112G, and 112G are arranged so that they do not touch each other. This effectively prevents current from flowing through two adjacent EL layers, thus preventing unintended light emission. Therefore, contrast can be enhanced, and a display device with high display quality can be realized.

[0109] Figure 9C shows an example where the EL layer 112G is processed in an island-like manner. However, as shown in Figure 9D, the EL layer 112G may also be processed in a strip-like manner so that it forms a continuous series in the column direction. By making the EL layer 112G etc. into a strip shape, the space required to separate them is eliminated, and the area of ​​the non-emitting region between the light-emitting elements can be reduced, thereby increasing the aperture ratio.

[0110] Furthermore, as shown in Figure 9D, auxiliary wiring 115 may be formed only between pixels exhibiting different colors, without providing auxiliary wiring 115 between adjacent pixels exhibiting the same color. In this case, the auxiliary wiring 115 can have a stripe shape when viewed from above. By making the auxiliary wiring 115 stripe-shaped, the space required to form the auxiliary wiring 115 is reduced compared to when it has a grid shape, thus increasing the aperture ratio. In addition, it becomes possible to reduce crosstalk between pixels exhibiting the same color.

[0111] Although Figures 9C and 9D show a cross-section of the light-emitting element 110G as an example, the light-emitting elements 110R and 110B can also have similar shapes.

[0112] Furthermore, a protective layer 121 is provided on the common electrode 113, covering the light-emitting elements 110R, 110G, and 110B. The protective layer 121 has the function of preventing impurities from diffusing to each light-emitting element from above.

[0113] The protective layer 121 can be, for example, a single-layer structure or a multilayer structure including at least an inorganic insulating film. Examples of inorganic insulating films include oxide films or nitride films such as silicon oxide film, silicon oxide nitride film, silicon nitride film, silicon nitride film, aluminum oxide film, aluminum oxide nitride film, and hafnium oxide film. Alternatively, semiconductor materials such as indium gallium oxide and indium gallium zinc oxide may be used as the protective layer 121.

[0114] <Example of manufacturing method> In the following, an example of a method for manufacturing a display device according to one aspect of the present invention will be described with reference to the drawings. Here, the display device 200 shown in the above configuration example will be used as an example. Figures 10A to 10F are schematic cross-sectional views of each step in the method for manufacturing the display device illustrated below.

[0115] First, the pixel electrode 111, insulating layer 131, EL layer 112R, EL layer 112G, and EL layer 112B are fabricated on the substrate 101 using the same fabrication method as shown in Figures 3A to 5C of Embodiment 1.

[0116] <Formation of resist mask 150> A resist mask 150 is formed on the EL layer 112R, EL layer 112G, and EL layer 112B so as to expose a portion of the insulating layer 131 (see Figure 10A). The resist mask 150 can be formed in a lithography process.

[0117] <Formation of opening 160> Next, the insulating layer 131 is etched using the resist mask 150 as a mask to form the openings 160 (see Figure 10B). Either a dry etching method or a wet etching method can be used for the etching process. The openings 160 are formed in a mesh or stripe pattern when viewed from above, dividing the pixels vertically and / or horizontally.

[0118] Figure 10B shows an example where, during the etching process of the insulating layer 131, a portion of the substrate 101 is also etched, forming grooves in the substrate 101. Although not shown, if an insulating layer or conductive layer is provided between the substrate 101 and the insulating layer 131, grooves are formed in the insulating layer or conductive layer instead of the substrate 101, or in addition to the substrate 101.

[0119] <Formation of conductive film 115f> Next, a conductive film 115f, which will later become auxiliary wiring 115, is formed on the resist mask 150 and within the opening 160 (see Figure 10C). The conductive film 115f can be made of any conductive material, for example, a material selected from aluminum (Al), titanium (Ti), tantalum (Ta), tungsten (W), molybdenum (Mo), chromium (Cr), neodymium (Nd), scandium (Sc), nickel (Ni), copper (Cu), or an alloy material mainly composed of these materials, and can be formed as a single layer or in layers. Sputtering, vapor deposition, coating, etc., can be used in the process of forming the conductive film 115f.

[0120] <Formation of auxiliary wiring 115> Next, the resist mask 150 and the conductive film 115f in contact with the resist mask 150 are removed by a lift-off method or the like (see Figure 10D). This allows auxiliary wiring 115 to be formed in the areas in contact with the openings 160 of the insulating layer 131 and the inner walls of the grooves in the substrate 101. Alternatively, the auxiliary wiring 115 may be formed by processing the conductive film 115f without using the lift-off method.

[0121] <Common electrode formation> Next, a conductive layer, which will become the common electrode 113 of the organic EL element, is formed on the EL layer 112R, EL layer 112G, EL layer 112B, auxiliary wiring 115, and insulating layer 131 that were exposed in the previous step. As the common electrode 113, a thin metal film that semi-transmits light emitted from the light-emitting layer (for example, an alloy of silver and magnesium) or a translucent conductive film (for example, indium tin oxide, or an oxide containing one or more indium, gallium, zinc, etc.) can be used, either as a single film or a laminate of both. The common electrode 113 made of such a film can be said to be an electrode that transmits light. A vapor deposition apparatus and / or a sputtering apparatus can be used in the step of forming the conductive layer that will become the common electrode 113.

[0122] By having a light-reflecting electrode as the pixel electrode 111 and a light-transmitting electrode as the common electrode 113, light emitted from the light-emitting layer can be emitted to the outside through the common electrode 113. In other words, a top-emission type light-emitting element is formed (see Figure 10E).

[0123] <Protective layer formation> Next, a protective layer 121 is formed on the common electrode 113 (see Figure 10F). A sputtering apparatus, a CVD apparatus, or an ALD apparatus can be used for the process of forming the protective layer.

[0124] The display device 200 can be manufactured through the above process.

[0125] <Configuration Example 5> Figure 11A shows another configuration example of the display device 200 of this embodiment. In Figure 11A, the substrate 101 (or the layer formed on the substrate 101) is not etched during etching when the opening 160 is formed, and the auxiliary wiring 115 is in contact with the upper surface of the substrate 101 (or the layer formed on the substrate 101). On the other hand, as shown in Figure 9B, the bottom surface of the opening 160 reaches the interior of the substrate 101 (or the layer formed on the substrate 101), which increases the area of ​​the region where the auxiliary wiring 115 is formed, thus further reducing the contact resistance between the auxiliary wiring 115 and the common electrode 113.

[0126] <Configuration Example 6> Figure 11B shows another configuration example of the display device 200 of this embodiment. In Figure 11B, grooves 161 are provided in the insulating layer 131 instead of openings, and auxiliary wiring 115 is provided so as to be in contact with the inner wall of the grooves 161. By adopting the configuration of Figure 11B, it is possible to further shorten the cycle time in the etching process of the insulating layer 131.

[0127] <Configuration Example 7> Figure 11C shows another configuration example of the display device 200 of this embodiment. In Figure 11C, a first layer 116 is formed in a region overlapping below the insulating layer 131, and the auxiliary wiring 115 is in contact with the upper surface of the first layer 116 within the opening 160. In Figure 11C, the first layer 116 functions as an etching stopper when the opening 160 is formed.

[0128] The material of the first layer 116 may be a conductive material or an insulating material. When forming the first layer 116 using an insulating material, the first layer 116 may be provided without separating it for each pixel. When forming the first layer 116 using a conductive material, the first layer 116 may be formed using the same process as the gate electrode of the transistor formed on the substrate 101, or the same process as the source electrode and drain electrode. Furthermore, when the first layer 116 is formed of a conductive material, the auxiliary wiring 115 and the common electrode 113 can be electrically connected to the cathode extraction terminal via the first layer 116.

[0129] As shown in Figure 11C, another insulating layer or conductive layer may be formed between the first layer 116, which functions as an etching stopper, and the insulating layer 131. In this case, an opening will also be formed in the region of the other insulating layer or conductive layer that overlaps with the opening 160. The upper surface of the first layer 116 may be provided in contact with the insulating layer 131.

[0130] <Configuration Example 8> Figure 11D shows another configuration example of the display device 200 of this embodiment. Figure 11D shows a configuration in which the auxiliary wiring 115 is provided in a manner that fills the opening 160 of the insulating layer 131 and the groove portion overlapping the opening 160. As shown in the configuration in Figure 11D, by filling the opening 160 and the groove portion overlapping the opening 160 with the auxiliary wiring 115, the cross-sectional area of ​​the auxiliary wiring 115 can be increased, thereby reducing the wiring resistance.

[0131] As described above, in the example of the method for manufacturing the display device, the EL layer is formed on a single surface without using a metal mask deposition method, and then processed, so island-shaped EL layers can be formed with a uniform thickness.

[0132] The EL layers 113a, 113b, and 113c that constitute each color of light-emitting element are formed in separate processes. Therefore, each EL layer can be manufactured with a configuration (material, film thickness, etc.) suitable for each color of light-emitting element. This makes it possible to manufacture light-emitting elements with good characteristics.

[0133] Since the display device of this embodiment is formed without using a metal mask to deposit the EL layer, it is possible to achieve larger size, higher resolution, or higher definition of the display device.

[0134] Furthermore, since the display device of this embodiment forms the EL layer using photolithography, the insulating layer 131, which functions as a partition, has an exposed region between pixels. By providing auxiliary wiring so as to overlap this region, the space required for forming the auxiliary wiring can be reduced. In addition, by providing openings or grooves in the insulating layer 131, the area of ​​the auxiliary wiring can be increased. By efficiently laying out the auxiliary wiring in this way, it is possible to achieve both high pixel resolution and low resistance of the common electrode.

[0135] In this embodiment, the display device is provided such that the common electrode 113 is in direct contact with the upper surface of the auxiliary wiring 115, thereby effectively reducing the contact resistance with the cathode.

[0136] By using the configuration and manufacturing method of the display device according to one aspect of the present invention as described above, a display device equipped with a fine, high-brightness, and highly reliable organic EL element can be made.

[0137] This embodiment can be implemented in appropriate combination with the configurations described in other embodiments. Furthermore, if multiple configuration examples are shown within a single embodiment in this specification, the configuration examples can be combined as appropriate.

[0138] (Embodiment 3) In this embodiment, a more specific configuration example of a display device according to one aspect of the present invention will be described. Figure 12A is a block diagram illustrating the display device 100. The display device 100 has a display area 335 (which can also be called a pixel area or display area), a peripheral circuit area 332, and a peripheral circuit area 333.

[0139] The circuits included in peripheral circuit area 332 function, for example, as scan line driving circuits. The circuits included in peripheral circuit area 333 function, for example, as signal line driving circuits. Additionally, some circuits may be provided at a position facing peripheral circuit area 332 across the display area 335. Similarly, some circuits may be provided at a position facing peripheral circuit area 333 across the display area 335. As mentioned above, the circuits included in peripheral circuit area 332 and peripheral circuit area 333 are sometimes collectively referred to as "peripheral driving circuits."

[0140] Various types of circuits can be used in the peripheral drive circuit, such as shift registers, level shifters, inverters, latches, analog switches, and logic circuits. Transistors and capacitive elements can also be used in the peripheral drive circuit. The transistors in the peripheral drive circuit can be formed using the same process as the transistors included in the pixel 330.

[0141] Furthermore, the display device 100 has m wires 336, each arranged substantially parallel to the others and whose potential is controlled by circuits included in the peripheral circuit region 332, and n wires 337, each arranged substantially parallel to the others and whose potential is controlled by circuits included in the peripheral circuit region 333.

[0142] The display area 335 has multiple pixels 330 arranged in a matrix. By combining the pixels 330 that control red light, the pixels 330 that control green light, and the pixels 330 that control blue light into a single pixel and controlling the amount of light emitted (luminescence) of each pixel 330, full-color display can be achieved. Therefore, each of these three pixels 330 functions as a sub-pixel. Each of the three sub-pixels controls the amount of light emitted, such as red light, green light, or blue light. Note that the color of light controlled by each of the three sub-pixels is not limited to a combination of red (R), green (G), and blue (B), but may also be cyan (C), magenta (M), and yellow (Y).

[0143] Alternatively, the four subpixels may be combined and function as a single pixel. For example, a subpixel controlling white light may be added to three subpixels that control red, green, and blue light, respectively. Adding a subpixel that controls white light can increase the brightness of the display area. Alternatively, a subpixel that controls yellow light may be added to three subpixels that control red, green, and blue light, respectively. Alternatively, a subpixel that controls white light may be added to three subpixels that control cyan, magenta, and yellow light, respectively.

[0144] By increasing the number of subpixels that function as a single pixel, and by appropriately combining subpixels that control light such as red, green, blue, cyan, magenta, and yellow, the reproduction of midtones can be improved. Therefore, the display quality can be enhanced.

[0145] Furthermore, a display device according to one aspect of the present invention can reproduce a variety of color gamuts. For example, it can reproduce color gamuts such as the PAL (Phase Alternating Line) and NTSC (National Television System Committee) standards used in television broadcasting, the sRGB (standard RGB) and Adobe RGB standards widely used in display devices for electronic devices such as personal computers, digital cameras, and printers, the ITU-R BT.709 (International Telecommunication Union Radiocommunication Sector Broadcasting Service (Television) 709) standard used in HDTV (High Definition Television), the DCI-P3 (Digital Cinema Initiatives P3) standard used in digital cinema projection, and the ITU-R BT.2020 (REC.2020 (Recommendation 2020)) standard used in UHDTV (Ultra High Definition Television).

[0146] Furthermore, by arranging the pixels in a 1920 x 1080 matrix, a display device 100 capable of full-color display at a resolution known as Full HD (also called "2K resolution," "2K1K," or "2K"). Also, for example, by arranging the pixels in a 3840 x 2160 matrix, a display device 100 capable of full-color display at a resolution known as Ultra HD (also called "4K resolution," "4K2K," or "4K"). Furthermore, for example, by arranging the pixels in a 7680 x 4320 matrix, a display device 100 capable of full-color display at a resolution known as Super Hi-Vision (also called "8K resolution," "8K4K," or "8K"). By increasing the number of pixels, it is also possible to realize a display device 100 capable of full-color display at a resolution of 16K or 32K.

[0147] <Example of circuit configuration for pixel 330> Figure 12B shows an example of the circuit configuration of a pixel 330. The pixel 330 has a pixel circuit 431 and a display element 432.

[0148] Each wire 336 is electrically connected to n pixel circuits 431 located in any row of the m rows and n columns of the display area 335. Similarly, each wire 337 is electrically connected to m pixel circuits 431 located in any column of the m rows and n columns of the pixel circuits 431. m and n are both integers greater than or equal to 1.

[0149] The pixel circuit 431 includes a transistor 436, a capacitive element 433, a transistor 351, and a transistor 434. The pixel circuit 431 is also electrically connected to a light-emitting element 370 that functions as a display element 432.

[0150] One of the source and drain electrodes of transistor 436 is electrically connected to a wiring to which a data signal (also called a "video signal") is supplied (hereinafter referred to as signal line DL_n). Furthermore, the gate electrode of transistor 436 is electrically connected to a wiring to which a gate signal is supplied (hereinafter referred to as scan line GL_m). Signal line DL_n and scan line GL_m correspond to wiring 337 and wiring 336, respectively.

[0151] Transistor 436 has the function of controlling the writing of data signals to node 435.

[0152] One of the pair of electrodes of the capacitive element 433 is electrically connected to node 435, and the other is electrically connected to node 437. Additionally, the source electrode and the other drain electrode of the transistor 436 are electrically connected to node 435.

[0153] The capacitive element 433 functions as a holding capacitor that holds the data written to node 435.

[0154] One of the source and drain electrodes of transistor 351 is electrically connected to the potential supply line VL_a, and the other is electrically connected to node 437. Furthermore, the gate electrode of transistor 351 is electrically connected to node 435.

[0155] One of the source and drain electrodes of transistor 434 is electrically connected to the potential supply line V0, and the other is electrically connected to node 437. Furthermore, the gate electrode of transistor 434 is electrically connected to the scan line GL_m.

[0156] One of the light-emitting element 370's anode or cathode is electrically connected to the potential supply line VL_b, and the other is electrically connected to node 437.

[0157] For example, an organic electroluminescent element (also called an organic EL element) can be used as the light-emitting element 370. However, the light-emitting element 370 is not limited to this, and for example, an inorganic EL element made of inorganic material may be used.

[0158] Furthermore, the power supply potential can be, for example, the potential on the relatively higher or lower side. The power supply potential on the higher side is called the high power supply potential (also called "VDD"), and the power supply potential on the lower side is called the low power supply potential (also called "VSS"). In addition, the ground potential can be used as the high or low power supply potential. For example, if the high power supply potential is the ground potential, the low power supply potential is lower than the ground potential, and if the low power supply potential is the ground potential, the high power supply potential is higher than the ground potential.

[0159] For example, a high power supply potential VDD is supplied to one of the potential supply lines VL_a or VL_b, and a low power supply potential VSS is supplied to the other.

[0160] In a display device having pixel circuits 431, the circuits included in the peripheral circuit region 332 sequentially select the pixel circuits 431 of each row, and turn on transistors 436 and 434 to write a data signal to node 435.

[0161] When data is written to node 435, the pixel circuit 431 enters a holding state when transistors 436 and 434 are turned off. Furthermore, the amount of current flowing between the source and drain electrodes of transistor 351 is controlled according to the potential of the data written to node 435, and the light-emitting element 370 emits light with a brightness corresponding to the amount of current flowing. By performing this sequentially row by row, an image can be displayed.

[0162] <Example of display device configuration> Figures 13A to 13C show the configuration of a display device that can utilize one embodiment of the present invention.

[0163] In Figure 13A, a sealing material 4005 is provided so as to surround the display unit 215 which is provided on the first substrate 4001, and the display unit 215 is sealed by the sealing material 4005 and the second substrate 4006.

[0164] In Figure 13A, the scan line drive circuit 221a, signal line drive circuit 231a, signal line drive circuit 232a, and common line drive circuit 241a each have multiple integrated circuits 4042 provided on the printed circuit board 4041. The integrated circuits 4042 are formed from single-crystal or polycrystalline semiconductors.

[0165] The various signals and potentials supplied to the scan line drive circuit 221a, the common line drive circuit 241a, the signal line drive circuit 231a, and the signal line drive circuit 232a are supplied via the FPC (Flexible printed circuit) 4018.

[0166] The integrated circuit 4042 in the scan line drive circuit 221a and the common line drive circuit 241a has the function of supplying selection signals to the display unit 215. The integrated circuit 4042 in the signal line drive circuit 231a and the signal line drive circuit 232a has the function of supplying image data to the display unit 215. The integrated circuit 4042 is mounted in an area different from the area surrounded by the sealing material 4005 on the first substrate 4001.

[0167] The connection method for the integrated circuit 4042 is not particularly limited, and methods such as wire bonding, COF (Chip On Film), COG (Chip On Glass), and TCP (Tape Carrier Package) can be used.

[0168] Figure 13B shows an example of mounting the integrated circuit 4042 included in the signal line drive circuits 231a and 232a using the COG method. Furthermore, a part or all of the drive circuit can be integrally formed on the same substrate as the display unit 215 to form a system-on-panel.

[0169] Figure 13B shows an example in which the scan line drive circuit 221a and the common line drive circuit 241a are formed on the same substrate as the display unit 215. By forming the drive circuits simultaneously with the pixel circuits in the display unit 215, the number of components can be reduced. Therefore, productivity can be increased.

[0170] Furthermore, in Figure 13B, a sealing material 4005 is provided so as to surround the display unit 215, the scan line drive circuit 221a, and the common line drive circuit 241a, which are provided on the first substrate 4001. A second substrate 4006 is provided on top of the display unit 215, the scan line drive circuit 221a, and the common line drive circuit 241a. Thus, the display unit 215, the scan line drive circuit 221a, and the common line drive circuit 241a are sealed together with the light-emitting element by the first substrate 4001, the sealing material 4005, and the second substrate 4006.

[0171] Furthermore, Figure 13B shows an example in which the signal line drive circuits 231a and 232a are formed separately and mounted on the first substrate 4001, but the configuration is not limited to this. The scan line drive circuit may be formed separately and mounted, or a part of the signal line drive circuit or a part of the scan line drive circuit may be formed separately and mounted. Also, as shown in Figure 13C, the signal line drive circuits 231a and 232a may be formed on the same substrate as the display unit 215.

[0172] Furthermore, the display device may include a panel in which light-emitting elements are sealed, and a module on which an IC including a controller is mounted.

[0173] Furthermore, the display unit and scan line driving circuit provided on the first substrate have multiple transistors.

[0174] The transistors in the peripheral drive circuit and the transistors in the pixel circuit of the display unit may have the same structure or be different. The transistors in the peripheral drive circuit may all have the same structure or may have two or more different structures. Similarly, the transistors in the pixel circuit may all have the same structure or may have two or more different structures.

[0175] Furthermore, an input device can be provided on the second substrate 4006. The display device shown in Figures 13A to 13C, with an input device provided, can function as a touch panel.

[0176] The detection device (also called a sensor element) of a touch panel according to one aspect of the present invention is not limited. Various sensors capable of detecting the proximity or contact of an object to be detected, such as a finger or stylus, can be applied as the detection device.

[0177] Various sensor types can be used, such as capacitive, resistive, surface acoustic wave, infrared, optical, and pressure-sensitive sensors.

[0178] Figure 14 is a cross-sectional view of the portion indicated by the dashed line N1-N2 in Figure 13B of a display device in which auxiliary wiring is arranged on an insulating layer covering the ends of the pixel electrodes, as shown in Embodiment 1. Figure 15 is a cross-sectional view of the portion indicated by the dashed line N1-N2 in Figure 13B of a display device in which grooves or openings are provided in the insulating layer covering the ends of the pixel electrodes, as shown in Embodiment 2.

[0179] The display devices shown in Figures 14 and 15 have electrodes 4015, which are electrically connected to terminals on the FPC 4018 via an anisotropic conductive layer 4019. In Figures 14 and 15, electrodes 4015 are also electrically connected to wiring 4014 at openings formed in the insulating layers 4112, 4111, and 4110.

[0180] Electrode 4015 is formed from the same conductive layer as pixel electrode 4030, and wiring 4014 is formed from the same conductive layer as the source and drain electrodes of transistors 4010 and 4011.

[0181] Furthermore, the display unit 215 and the scan line driving circuit 221a, which are provided on the first substrate 4001, have multiple transistors, with transistor 4010 included in the display unit 215 and transistor 4011 included in the scan line driving circuit 221a being examples. In Figures 14 and 15, bottom-gate type transistors are shown as examples for transistors 4010 and 4011, but top-gate type transistors may also be used.

[0182] An insulating layer 4112 is provided on transistors 4010 and 4011. A partition wall 4510 is also formed on the insulating layer 4112.

[0183] The partition wall 4510 is formed using an organic insulating material or an inorganic insulating material. It is particularly preferable to use a photosensitive resin material to form an opening on the pixel electrode 4030, and to form the opening such that the side surface of the opening is an inclined surface with a continuous curvature.

[0184] Furthermore, transistors 4010 and 4011 are provided on an insulating layer 4102. Transistors 4010 and 4011 also have electrodes 4017 formed on an insulating layer 4111. Electrodes 4017 can function as back gate electrodes.

[0185] The display device also includes a capacitor 4020. The capacitor 4020 is shown as having an electrode 4021 formed in the same process as the gate electrode of the transistor 4010, an insulating layer 4103, and an electrode formed in the same process as the source and drain electrodes. The configuration of the capacitor 4020 is not limited to this and may be formed of other conductive and insulating layers.

[0186] Furthermore, the display device has an insulating layer 4111 and an insulating layer 4104. Insulating layers 4111 and 4104 are used, which are less permeable to impurity elements. By sandwiching the semiconductor layer of the transistor between insulating layers 4111 and 4104, the intrusion of impurities from the outside can be prevented.

[0187] The transistor 4010 provided in the display unit 215 is electrically connected to the light-emitting element. As the light-emitting element, for example, an EL device utilizing electroluminescence can be used. The EL device has a layer containing a light-emitting compound (also called the "EL layer") between a pair of electrodes. When a potential difference greater than the threshold voltage of the EL device is generated between the pair of electrodes, holes are injected into the EL layer from the anode side and electrons are injected from the cathode side. The injected electrons and holes recombine in the EL layer, and the light-emitting compound contained in the EL layer emits light.

[0188] For example, organic EL devices or inorganic EL devices can be used as EL devices. LEDs (including micro-LEDs) that use compound semiconductors as light-emitting materials are also a type of EL element, and LEDs can also be used.

[0189] In addition to luminescent compounds, the EL layer may also contain materials with high hole injection properties, materials with high hole transport properties, hole blocking materials, materials with high electron transport properties, materials with high electron injection properties, or bipolar materials (materials with high electron transport and hole transport properties).

[0190] The EL layer can be formed by methods such as vapor deposition (including vacuum deposition), transfer, printing, inkjet, and coating.

[0191] Inorganic EL devices are classified into dispersed inorganic EL devices and thin-film inorganic EL devices based on their element configuration. Dispersed inorganic EL devices have an emissive layer in which particles of emissive material are dispersed in a binder, and the emissive mechanism is donor-acceptor recombination type emissive emission utilizing donor and acceptor levels. Thin-film inorganic EL devices have a structure in which the emissive layer is sandwiched between dielectric layers, and then sandwiched between electrodes, and the emissive mechanism is localized type emissive emission utilizing inner-shell electron transitions of metal ions. Here, we will use organic EL devices as the light-emitting elements for explanation.

[0192] Furthermore, optical components (optical substrates) such as a black matrix (light-shielding layer), a colored layer (color filter), a polarizing member, a phase difference member, and an anti-reflective member may be provided as needed.

[0193] Materials that can be used as a light-shielding layer include carbon black, titanium black, metals, metal oxides, and composite oxides containing solid solutions of multiple metal oxides. The light-shielding layer may be a film containing a resin material or a thin film of an inorganic material such as a metal. In addition, a laminated film containing the material for the colored layer can be used as the light-shielding layer. For example, a laminated structure can be used in which a film containing the material for a colored layer that transmits light of one color and a film containing the material for a colored layer that transmits light of another color are used. It is preferable to use the same materials for the colored layer and the light-shielding layer because it is possible to use the same equipment and simplify the process.

[0194] Materials that can be used for the colored layer include metal materials, resin materials, and resin materials containing pigments or dyes. The light-shielding layer and the colored layer can be formed, for example, using an inkjet method.

[0195] The light-emitting element 4513, which is a display element, is electrically connected to the transistor 4010 provided in the display unit 215. The light-emitting element 4513 according to one aspect of the present invention has a stacked structure of a pixel electrode 4030, a light-emitting layer 4511, and a common electrode 4031. The common electrode 4031 is electrically connected to an auxiliary wiring 4152 formed in a region overlapping with the partition wall 4510. The configuration of one aspect of the present invention is not limited to the configurations shown in Figures 14 and 15, and the auxiliary wiring 4152 and the light-emitting layer 4511 may not be in contact. Alternatively, the auxiliary wiring 4152 may be formed on the partition wall 4510 in a manner that is in contact with the top and side surfaces of the common electrode 4031 and the side surfaces of the light-emitting layer 4511.

[0196] The light-emitting layer 4511 may consist of a single layer or may be configured as a stack of multiple layers.

[0197] The light-emitting color of the light-emitting element 4513 can be white, red, green, blue, cyan, magenta, or yellow, depending on the material that makes up the light-emitting layer 4511.

[0198] The light-emitting layer 4511 may also contain inorganic compounds such as quantum dots. For example, quantum dots can be used in the light-emitting layer to function as a light-emitting material.

[0199] A protective layer may be formed on the common electrode 4031 and the partition wall 4510 to prevent oxygen, hydrogen, moisture, carbon dioxide, etc. from entering the light-emitting element 4513. The protective layer can be made of silicon nitride, silicon oxide nitride, aluminum oxide, aluminum nitride, aluminum oxide nitride, aluminum oxide nitride, DLC (Diamond-Like Carbon), etc. Furthermore, a filler material 4514 is provided to seal the space sealed by the first substrate 4001, the second substrate 4006, and the sealing material 4005. Thus, it is preferable to package (encapsulate) the device with a protective film (laminated film, UV-curing resin film, etc.) or cover material that is highly airtight and minimizes degassing, so as not to expose it to the outside air.

[0200] As the filler 4514, in addition to inert gases such as nitrogen or argon, ultraviolet-curing resins or thermosetting resins can be used, and PVC (polyvinyl chloride), acrylic resins, polyimide, epoxy resins, silicone resins, PVB (polyvinyl butyral), or EVA (ethylene vinyl acetate) can be used. Furthermore, the filler 4514 may contain a desiccant.

[0201] The sealing material 4005 can be made of glass materials such as glass frit, resin materials such as two-component resins that cure at room temperature, photocurable resins, or thermosetting resins. The sealing material 4005 may also contain a desiccant.

[0202] Furthermore, if necessary, optical films such as polarizers, circular polarizers (including elliptical polarizers), phase difference plates (λ / 4 plates, λ / 2 plates), and color filters may be appropriately provided on the emission surface of the light-emitting element. An anti-reflective coating may also be provided on the polarizer or circular polarizer. For example, an anti-glare treatment can be applied that diffuses reflected light due to surface irregularities, thereby reducing reflections.

[0203] Furthermore, by using a microcavity structure for the light-emitting element, it is possible to extract light with high color purity. In addition, by combining the microcavity structure with a color filter, reflections can be reduced, improving the visibility of the displayed image.

[0204] The pixel electrode 4030 and common electrode 4031 can be made of a light-transmitting conductive material such as indium oxide containing tungsten oxide, indium zinc oxide containing tungsten oxide, indium oxide containing titanium oxide, indium tin oxide, indium tin oxide containing titanium oxide, indium zinc oxide, or indium tin oxide with silicon oxide added.

[0205] Furthermore, the pixel electrode 4030 and the common electrode 4031 can be formed using one or more of the following metals, alloys thereof, or metal nitrides, such as tungsten (W), molybdenum (Mo), zirconium (Zr), hafnium (Hf), vanadium (V), niobium (Nb), tantalum (Ta), chromium (Cr), cobalt (Co), nickel (Ni), titanium (Ti), platinum (Pt), aluminum (Al), copper (Cu), and silver (Ag).

[0206] Furthermore, the pixel electrode 4030 and the common electrode 4031 can be formed using a conductive composition containing a conductive polymer (also called a conductive polymer). As the conductive polymer, a so-called π-electron conjugated conductive polymer can be used. Examples include polyaniline or its derivatives, polypyrrole or its derivatives, polythiophene or its derivatives, or copolymers or derivatives thereof consisting of two or more of aniline, pyrrole, and thiophene.

[0207] Furthermore, since transistors are susceptible to damage from static electricity and other factors, it is preferable to provide a protection circuit to protect the drive circuit. The protection circuit is preferably constructed using nonlinear elements.

[0208] This embodiment can be implemented in appropriate combination with the configurations described in other embodiments.

[0209] (Embodiment 4) In this embodiment, an example of a transistor that can be used as a replacement for each of the transistors shown in the above embodiment will be described with reference to the drawings.

[0210] A display device according to one aspect of the present invention can be manufactured using various types of transistors, such as bottom-gate transistors or top-gate transistors. Therefore, the semiconductor layer material and transistor structure used can be easily replaced to match existing manufacturing lines.

[0211] There are no major restrictions on the semiconductor material and its crystallinity used for the semiconductor layer of the transistor. Amorphous semiconductors, crystalline semiconductors (microcrystalline semiconductors, polycrystalline semiconductors, single-crystal semiconductors, or semiconductors with crystalline regions in part) may be used. Using a crystalline semiconductor is preferable because it suppresses the degradation of transistor characteristics.

[0212] For example, silicon, germanium, and other materials can be used as semiconductor materials for the semiconductor layer of a transistor. Additionally, compound semiconductors such as silicon carbide, gallium arsenide, metal oxides, and nitride semiconductors, as well as organic semiconductors, can be used.

[0213] For example, polycrystalline silicon (polysilicon) and amorphous silicon can be used as semiconductor materials for transistors. Furthermore, oxide semiconductors, a type of metal oxide, can also be used as semiconductor materials for transistors.

[0214] Furthermore, the metal oxide used as the oxide semiconductor preferably contains at least indium or zinc. In particular, it is preferable that it contains indium and zinc. In addition, it is preferable that it also contains aluminum, gallium, yttrium, tin, etc. It may also contain one or more selected from boron, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, magnesium, cobalt, etc.

[0215] For example, an In-M-Zn oxide containing indium, element M, and zinc can be used as the metal oxide. Element M can be aluminum, gallium, yttrium, or tin. Other elements that can be used for element M include boron, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, magnesium, and cobalt. However, in some cases, multiple elements mentioned above may be combined as element M.

[0216] In this specification, metal oxides containing nitrogen may also be collectively referred to as metal oxides. Furthermore, metal oxides containing nitrogen may also be called metal oxynitrides.

[0217] [Bottom-gate transistor] Figure 16A is a cross-sectional view in the channel length direction of a channel-protected transistor 810, a type of bottom-gate transistor. In Figure 16A, the transistor 810 is formed on a substrate 771. The transistor 810 also has an electrode 746 on the substrate 771 via an insulating layer 772. Furthermore, the electrode 746 has a semiconductor layer 742 via an insulating layer 726. The electrode 746 can function as a gate electrode. The insulating layer 726 can function as a gate insulating layer.

[0218] Furthermore, an insulating layer 741 is provided on the channel-forming region of the semiconductor layer 742. Also, electrodes 744a and 744b are provided on the insulating layer 726 in contact with a portion of the semiconductor layer 742. Electrode 744a can function as either a source electrode or a drain electrode. Electrode 744b can function as either a source electrode or a drain electrode. A portion of electrode 744a and a portion of electrode 744b are formed on the insulating layer 741.

[0219] The insulating layer 741 can function as a channel protection layer. By providing the insulating layer 741 on the channel formation region, exposure of the semiconductor layer 742 that occurs during the formation of electrodes 744a and 744b can be prevented. Therefore, etching of the channel formation region of the semiconductor layer 742 can be prevented during the formation of electrodes 744a and 744b.

[0220] Furthermore, the transistor 810 has an insulating layer 728 on electrodes 744a and 744b and insulating layer 741, and an insulating layer 729 on insulating layer 728.

[0221] When an oxide semiconductor is used for the semiconductor layer 742, it is preferable to use a material capable of removing oxygen from a part of the semiconductor layer 742 and creating an oxygen vacancy in at least the portion of electrodes 744a and 744b that is in contact with the semiconductor layer 742. The oxygen vacancy in the semiconductor layer 742 increases in carrier concentration, and the region becomes n-type, and the n-type region (n + This becomes a layer. Therefore, this region can function as a source region or a drain region. When an oxide semiconductor is used for the semiconductor layer 742, examples of materials that can remove oxygen from the semiconductor layer 742 and create an oxygen vacancy include tungsten and titanium.

[0222] By forming source and drain regions in the semiconductor layer 742, the contact resistance between electrodes 744a and 744b and the semiconductor layer 742 can be reduced. Therefore, the electrical characteristics of the transistor, such as field-effect mobility and threshold voltage, can be improved.

[0223] When a semiconductor such as silicon is used for the semiconductor layer 742, it is preferable to provide layers that function as n-type or p-type semiconductors between the semiconductor layer 742 and electrode 744a, and between the semiconductor layer 742 and electrode 744b. The layers that function as n-type or p-type semiconductors can function as the source region or drain region of the transistor.

[0224] The insulating layer 729 is preferably formed using a material that has the function of preventing or reducing the diffusion of impurities from the outside to the transistor. The insulating layer 729 may be omitted if necessary.

[0225] An electrode 723, which can function as a back gate electrode, is provided on the insulating layer 729. The electrode 723 can be formed using the same material and method as the electrode 746. Alternatively, the electrode 723 may be omitted.

[0226] Generally, the back gate electrode is formed from a conductive layer and is positioned so as to sandwich the channel formation region of the semiconductor layer between the gate electrode and the back gate electrode. Therefore, the back gate electrode can function in the same way as the gate electrode. The potential of the back gate electrode may be the same as that of the gate electrode, the ground potential (GND potential), or any other potential. Furthermore, by changing the potential of the back gate electrode independently of the gate electrode, the threshold voltage of the transistor can be changed.

[0227] Both electrodes 746 and 723 can function as gate electrodes. Therefore, insulating layers 726, 728, and 729 can each function as gate insulating layers. Electrode 723 may be placed between insulating layer 728 and insulating layer 729.

[0228] Furthermore, when one of the electrodes, 746 or 723, is referred to as the "gate electrode," the other is referred to as the "back gate electrode." For example, in transistor 810, when electrode 723 is referred to as the "gate electrode," electrode 746 is referred to as the "back gate electrode." Also, when electrode 723 is used as the "gate electrode," transistor 810 can be considered a type of top-gate transistor. In addition, one of the electrodes, 746 or 723, may be referred to as the "first gate electrode," and the other as the "second gate electrode."

[0229] By providing electrodes 746 and 723 on either side of the semiconductor layer 742, and further by setting electrodes 746 and 723 to the same potential, the region in the semiconductor layer 742 where carriers flow becomes larger in the film thickness direction, thus increasing the amount of carrier movement. As a result, the on-current of the transistor 810 increases, and the field-effect mobility also increases.

[0230] Therefore, transistor 810 is a transistor that has a large on-current relative to its occupied area. In other words, the occupied area of ​​transistor 810 can be reduced relative to the required on-current.

[0231] Furthermore, since the gate electrode and back gate electrode are formed from conductive layers, they have the function of preventing electric fields generated outside the transistor from acting on the semiconductor layer where the channel is formed (particularly an electric field shielding function against static electricity). The electric field shielding function can be enhanced by making the back gate electrode larger than the semiconductor layer and covering the semiconductor layer with the back gate electrode.

[0232] Furthermore, by forming the back gate electrode with a light-shielding conductive film, it is possible to prevent light from entering the semiconductor layer from the back gate electrode side. Therefore, photodegradation of the semiconductor layer can be prevented, and deterioration of electrical characteristics such as a shift in the transistor's threshold voltage can be prevented.

[0233] Figure 16B is a cross-sectional view in the channel length direction of a channel-protected transistor 820 with a different configuration from Figure 16A. Transistor 820 has a structure almost identical to transistor 810, except that the insulating layer 741 covers the edge of the semiconductor layer 742. In addition, the semiconductor layer 742 and electrode 744a are electrically connected at an opening formed by selectively removing a portion of the insulating layer 741 that overlaps with the semiconductor layer 742. Furthermore, the semiconductor layer 742 and electrode 744b are electrically connected at another opening formed by selectively removing a portion of the insulating layer 741 that overlaps with the semiconductor layer 742. The region of the insulating layer 741 that overlaps with the channel formation region can function as a channel protection layer.

[0234] By providing the insulating layer 741, exposure of the semiconductor layer 742 that occurs during the formation of electrodes 744a and 744b can be prevented. Therefore, thinning of the semiconductor layer 742 during the formation of electrodes 744a and 744b can be prevented.

[0235] Furthermore, in transistor 820, the distance between electrode 744a and electrode 746, and the distance between electrode 744b and electrode 746, are longer than in transistor 810. Therefore, the parasitic capacitance between electrode 744a and electrode 746 can be reduced. Also, the parasitic capacitance between electrode 744b and electrode 746 can be reduced.

[0236] Figure 16C is a cross-sectional view in the channel length direction of a channel-etched transistor 825, which is a type of bottom-gate transistor. Transistor 825 forms electrodes 744a and 744b without using an insulating layer 741. Therefore, a portion of the semiconductor layer 742 that is exposed during the formation of electrodes 744a and 744b may be etched. On the other hand, because an insulating layer 741 is not provided, the productivity of the transistor can be increased.

[0237] [Top-gate transistor] The transistor 842 illustrated in Figure 17A is a top-gate type transistor. Electrodes 744a and 744b are electrically connected to the semiconductor layer 742 at openings formed in the insulating layers 728 and 729.

[0238] Furthermore, by removing a portion of the insulating layer 726 that does not overlap with electrode 746, and using electrode 746 and the remaining insulating layer 726 as a mask to introduce impurities into semiconductor layer 742, an impurity region can be formed in semiconductor layer 742 in a self-aligned manner. Transistor 842 has a region where the insulating layer 726 extends beyond the edge of electrode 746. The impurity concentration in the region of semiconductor layer 742 where impurities are introduced via the insulating layer 726 is smaller than that in the region where impurities are introduced without going through the insulating layer 726. Therefore, in semiconductor layer 742, an LDD (Lightly Doped Drain) region is formed in the region that overlaps with the insulating layer 726 but does not overlap with electrode 746.

[0239] Furthermore, the transistor 842 has an electrode 723 formed on the substrate 771. The electrode 723 has a region that overlaps with the semiconductor layer 742 via the insulating layer 772. The electrode 723 can function as a back gate electrode. Note that a configuration without the electrode 723 is also possible.

[0240] Alternatively, as shown in Figure 17B for transistor 844, the insulating layer 726 in the region that does not overlap with the electrode 746 may be completely removed. Alternatively, as shown in Figure 17C for transistor 846, the insulating layer 726 may be left in place.

[0241] Figure 18A shows a cross-sectional view of transistor 810 in the channel width direction, and Figure 18B shows a cross-sectional view of transistor 842 in the channel width direction.

[0242] In the structures shown in Figures 18A and 18B, the gate electrode and the back gate electrode are connected, and the potentials of the gate electrode and the back gate electrode are the same. Furthermore, the semiconductor layer 742 is sandwiched between the gate electrode and the back gate electrode.

[0243] The length of each gate electrode and back gate electrode in the channel width direction is longer than the length of the semiconductor layer 742 in the channel width direction, and the entire channel width direction of the semiconductor layer 742 is covered by the gate electrode or back gate electrode with each insulating layer in between.

[0244] This configuration allows the semiconductor layer 742 included in the transistor to be electrically surrounded by the electric fields of the gate electrode and the back gate electrode.

[0245] Thus, a transistor device structure in which the semiconductor layer 742, where the channel formation region is formed, is electrically surrounded by the electric fields of the gate electrode and back gate electrode can be called a Surrounded channel (S-channel) structure.

[0246] By adopting an S-channel structure, an electric field for inducing a channel can be effectively applied to the semiconductor layer 742 by one or both of the gate electrode and / or back gate electrode, thereby improving the transistor's current-driving capability and enabling high on-current characteristics. Furthermore, the ability to increase the on-current allows for miniaturization of the transistor. Additionally, the S-channel structure can increase the mechanical strength of the transistor.

[0247] Alternatively, the gate electrode and back gate electrode may not be connected, and different potentials may be supplied to each. For example, the threshold voltage of the transistor can be controlled by supplying a constant potential to the back gate electrode.

[0248] This embodiment can be combined with other embodiments as appropriate. Furthermore, if multiple configuration examples are shown within a single embodiment in this specification, these configuration examples can be combined as appropriate.

[0249] (Embodiment 5) In this embodiment, an electronic device according to one aspect of the present invention will be described with reference to the drawings.

[0250] The electronic device of this embodiment has a display device according to one aspect of the present invention. The display device according to one aspect of the present invention is easily made high-definition, high-resolution, and large-scale. Therefore, the display device according to one aspect of the present invention can be used in the display units of various electronic devices.

[0251] Furthermore, since the display device according to one aspect of the present invention can be manufactured at a low cost, the manufacturing cost of electronic devices can be reduced.

[0252] Examples of electronic devices include television sets, desktop or notebook personal computers, computer monitors, digital signage, and large game machines such as pachinko machines, as well as other electronic devices with relatively large screens, digital cameras, digital video cameras, digital photo frames, mobile phones, portable game consoles, personal digital assistants, and audio playback devices.

[0253] In particular, since the display device according to one aspect of the present invention can suppress the cathode voltage drop by auxiliary wiring, it can be suitably used in electronic devices having a medium to large display unit.

[0254] A display device according to one aspect of the present invention preferably has an extremely high resolution such as HD (1280 x 720 pixels), FHD (1920 x 1080 pixels), WQHD (2560 x 1440 pixels), WQXGA (2560 x 1600 pixels), 4K2K (3840 x 2160 pixels), or 8K4K (7680 x 4320 pixels). In particular, a resolution of 4K2K, 8K4K, or higher is preferred. Furthermore, the pixel density (resolution) of the display device according to one aspect of the present invention is preferably 300 ppi or more, more preferably 500 ppi or more, more preferably 1000 ppi or more, more preferably 2000 ppi or more, more preferably 3000 ppi or more, more preferably 5000 ppi or more, and even more preferably 7000 ppi or more. By using display devices with such high resolution or high detail, it becomes possible to enhance the sense of presence and depth in personal electronic devices such as portable or home-use devices.

[0255] The electronic device of this embodiment can be incorporated along the curved surfaces of the interior or exterior walls of a house or building, or the interior or exterior of an automobile.

[0256] The electronic device of this embodiment may have an antenna. By receiving signals with the antenna, the display unit can display images and information. Furthermore, if the electronic device has an antenna and a secondary battery, the antenna may be used for contactless power transmission. In addition, the electronic device of this embodiment may have a touch sensor.

[0257] The electronic device of this embodiment may have sensors (including those with the function of measuring force, displacement, position, velocity, acceleration, angular velocity, rotational speed, distance, light, liquid, magnetism, temperature, chemical substances, sound, time, hardness, electric field, current, voltage, power, radiation, flow rate, humidity, gradient, vibration, odor, or infrared radiation).

[0258] The electronic device of this embodiment can have a variety of functions. For example, it can have a function to display various information (still images, videos, text images, etc.) on the display unit, a touch panel function, a function to display a calendar, date or time, a function to execute various software (programs), a wireless communication function, a function to read programs or data recorded on a recording medium, and so on.

[0259] Figure 19A shows an example of a television system. The television system 7100 has a display unit 7000 incorporated into a housing 7101. Here, the housing 7101 is shown supported by a stand 7103.

[0260] A display device according to one embodiment of the present invention can be applied to the display unit 7000.

[0261] The television device 7100 shown in Figure 19A can be operated using the operation switches on the housing 7101 and a separate remote control unit 7111. Alternatively, the display unit 7000 may be equipped with a touch sensor, and the television device 7100 can be operated by touching the display unit 7000 with a finger or the like. The remote control unit 7111 may have a display unit that displays information output from the remote control unit 7111. Channels and volume can be controlled and the image displayed on the display unit 7000 can be controlled using the operation keys or touch panel on the remote control unit 7111.

[0262] The television system 7100 is configured to include a receiver and a modem. The receiver can receive general television broadcasts. Furthermore, by connecting to a wired or wireless communication network via the modem, it is possible to perform one-way (from sender to receiver) or two-way (between sender and receiver, or between receivers, etc.) information communication.

[0263] FIG. 19B shows an example of a notebook personal computer. The notebook personal computer 7200 has a housing 7211, a keyboard 7212, a pointing device 7213, an external connection port 7214, etc. A display unit 7000 is incorporated in the housing 7211.

[0264] The display device according to one aspect of the present invention can be applied to the display unit 7000.

[0265] FIGS. 19C and 19D show an example of digital signage.

[0266] The digital signage 7300 shown in FIG. 19C has a housing 7301, a display unit 7000, a speaker 7303, etc. Further, it can have an LED lamp, operation keys (including a power switch or an operation switch), connection terminals, various sensors, a microphone, etc.

[0267] FIG. 19D shows a digital signage 7400 attached to a columnar pillar 7401. The digital signage 7400 has a display unit 7000 provided along the curved surface of the pillar 7401.

[0268] In FIGS. 19C and 19D, the display device according to one aspect of the present invention can be applied to the display unit 7000.

[0269] The larger the display unit 7000 is, the more information can be provided at one time. Also, the larger the display unit 7000 is, the easier it is to catch people's eyes, and for example, the advertising effect can be enhanced.

[0270] By applying a touch panel to the display unit 7000, not only can an image or a video be displayed on the display unit 7000, but also the user can operate intuitively, which is preferable. Also, when used for applications such as providing route information or traffic information, the usability can be enhanced by intuitive operation.

[0271] Furthermore, as shown in Figures 19C and 19D, it is preferable that the digital signage 7300 or digital signage 7400 can be linked wirelessly with an information terminal 7311 or information terminal 7411 such as a smartphone owned by the user. For example, the advertising information displayed on the display unit 7000 can be displayed on the screen of the information terminal 7311 or information terminal 7411. Also, the display on the display unit 7000 can be switched by operating the information terminal 7311 or information terminal 7411.

[0272] Furthermore, the digital signage 7300 or digital signage 7400 can be used to run games using the screen of the information terminal 7311 or information terminal 7411 as the control device (controller). This allows a large number of users to participate in and enjoy the game simultaneously.

[0273] This embodiment can be combined with other embodiments as appropriate. [Explanation of symbols]

[0274] 100: Display device, 101: Substrate, 110B: Light-emitting element, 110G: Light-emitting element, 110R: Light-emitting element, 111: Pixel electrode, 112B: EL layer, 112Bf: EL film, 112G: EL layer, 112Gf: EL film, 112R: EL layer, 112Rf: EL film, 113: Common electrode, 113a: EL layer, 113b: EL layer, 113B: Common electrode, 113c: EL layer, 113G: Common electrode, 113R: Common electrode, 115: Auxiliary wiring, 115f: Conductive film, 121: Protective layer, 131: Insulating layer, 143a: Resist mask, 143b: Resist mask, 143c: Resist mask ,150: Resist mask, 200: Display device, 215: Display unit, 221a: Scan line drive circuit, 231a: Signal line drive circuit, 232a: Signal line drive circuit, 241a: Common line drive circuit, 330: Pixel, 332: Peripheral circuit area, 333: Peripheral circuit area, 335: Display area, 336: Wiring, 337: Wiring, 351: Transistor, 370: Light-emitting element, 431: Pixel circuit, 432: Display element, 433: Capacitive element, 434: Transistor, 435: Node, 436: Transistor, 437: Node, 723: Electrode, 726: Insulating layer, 728: Insulating layer, 729: Insulating layer, 741: Insulating layer, 742: Semiconductor layer, 744a: Electrode, 744b: Electrode, 746: Electrode, 771: Substrate, 772: Insulating layer, 810: Transistor, 820: Transistor, 825: Transistor, 842: Transistor, 844: Transistor, 846: Transistor, 4001: Substrate, 4005: Sealing material, 4006: Substrate, 4010: Transistor, 4011: Transistor, 4014: Wiring, 4015: Electrode, 4017: Electrode, 4018: FPC, 4019: Anisotropic conductive layer, 4020: Capacitor, 4021: Electrode, 4030: Pixel electrode, 4031: Common electrode, 4041: Printed circuit board, 4042: Integrated circuit, 4102: Insulating layer, 4103: Insulating layer, 4104: Insulating layer, 4110: Insulating layer, 4111: Insulating layer, 4112: Insulating layer, 4152: Auxiliary wiring, 4510: Partition wall, 4511: Light-emitting layer, 4513: Light-emitting element, 4514: Filler material, 7000: Display unit, 7100: Television equipment, 7101: Enclosure, 7103: Stand, 7111: Remote control unit, 7200: Notebook personal computer, 7211: Enclosure, 7212: Keyboard, 7213: Pointing device, 7214: External connection port,7300: Digital signage, 7301: Enclosure, 7303: Speaker, 7311: Information terminal, 7400: Digital signage, 7401: Pillar, 7411: Information terminal,

Claims

1. A display device having a pixel section comprising: a first pixel; a second pixel arranged adjacent to the first pixel; and an auxiliary wiring having a region arranged between the first pixel and the second pixel in a plan view, A first conductive layer having the function of a pixel electrode for the first pixel, A second conductive layer having the function of a pixel electrode for the second pixel, A first insulating layer having a region in contact with the upper surface of the first conductive layer and a region in contact with the upper surface of the second conductive layer, A first EL layer having a region in contact with the upper surface of the first insulating layer and a region in contact with the upper surface of the first conductive layer, and having a first luminescent organic compound, A second EL layer having a region in contact with the upper surface of the first insulating layer and a region in contact with the upper surface of the second conductive layer, and having a second luminescent organic compound, A third conductive layer having a region in contact with the upper surface of the first EL layer, a region in contact with the upper surface of the second EL layer, and a region in contact with the upper surface of the first insulating layer, and having the function of an auxiliary wiring, A fourth conductive layer having a region in contact with the upper surface of the first EL layer, a region in contact with the upper surface of the second EL layer, and a region in contact with the upper surface of the third conductive layer, and having the function of a common electrode for the first pixel and the function of a common electrode for the second pixel, The present invention comprises a second insulating layer having a region located above the fourth conductive layer, A display device wherein the first luminescent organic compound and the second luminescent organic compound emit light of different colors.

2. A display device having a pixel section comprising: a first pixel; a second pixel arranged adjacent to the first pixel; and an auxiliary wiring having a region arranged between the first pixel and the second pixel in a plan view, A first conductive layer having the function of a pixel electrode for the first pixel, A second conductive layer having the function of a pixel electrode for the second pixel, A first insulating layer having a region in contact with the upper surface of the first conductive layer and a region in contact with the upper surface of the second conductive layer, A first EL layer having a region in contact with the upper surface of the first insulating layer and a region in contact with the upper surface of the first conductive layer, and having a first luminescent organic compound, A second EL layer having a region in contact with the upper surface of the first insulating layer and a region in contact with the upper surface of the second conductive layer, and having a second luminescent organic compound, A third conductive layer having a region in contact with the upper surface of the first EL layer, a region in contact with the upper surface of the second EL layer, and a region in contact with the upper surface of the first insulating layer, and having the function of an auxiliary wiring, A fourth conductive layer having a region in contact with the upper surface of the first EL layer, a region in contact with the upper surface of the second EL layer, and a region in contact with the upper surface of the third conductive layer, and having the function of a common electrode for the first pixel and the function of a common electrode for the second pixel, The present invention comprises a second insulating layer having a region located above the fourth conductive layer, The first luminescent organic compound and the second luminescent organic compound exhibit light of different colors. In the first pixel, light from the first EL layer is emitted towards the fourth conductive layer. A display device in which, in the second pixel, light from the second EL layer is emitted towards the fourth conductive layer.

Images