XYZ stage device applicable to vacuum vessels
By positioning the XYZ stage device's motors outside the vacuum chamber and using drive force transmission units, the device maintains stable operation and prevents vacuum contamination, addressing the limitations of conventional designs.
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Utility models
- Current Assignee / Owner
- NAKAKA MFG CO LTD
- Filing Date
- 2026-04-20
- Publication Date
- 2026-06-18
AI Technical Summary
In conventional XYZ stage devices used in vacuum processing chambers, the motors for the Y-axis and Z-axis actuators are housed inside the chamber, leading to limited heat dissipation and potential vacuum contamination due to outgassing, requiring frequent opening of the chamber for maintenance.
The XYZ stage device is designed with X-axis, Y-axis, and Z-axis electric motors positioned outside the vacuum processing chamber, using drive force transmission units to convert rotational torque across axes, allowing for stable operation and maintenance without breaking the vacuum.
This configuration ensures effective heat dissipation and prevents vacuum contamination, enabling reliable operation and maintenance of the XYZ stage device without exposing the vacuum chamber to the atmosphere.
Smart Images
Figure 0003256254000001_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to an XYZ stage device for moving a workpiece placed on a table, and more particularly to the structure and function of an XYZ stage device applicable to a vacuum chamber.
Background Art
[0002] Conventionally, in an XYZ stage device for moving a workpiece placed on a table, a ball screw actuator is used as an actuator for the X-axis and an actuator for the Y-axis. As an actuator for the Z-axis, a pantograph jack or a screw jack is used. The actuator for the Y-axis is arranged above the actuator for the X-axis, and the Z-axis pantograph jack has a stacked structure arranged above the actuator for the Y-axis.
[0003] When such an XYZ stage device is used in a vacuum processing chamber such as an electron beam welding device or a vacuum spraying device, it is desirable to provide a motor for driving an actuator or the like outside the vacuum processing chamber. However, while the motor of the X-axis actuator arranged on the lower side can be installed outside, the Y-axis actuator is driven following the movement of the X-axis actuator, and the Z-axis jack is driven following their respective movements in the X-axis and Y-axis directions, so it is difficult to fixedly arrange the motor outside the vacuum processing chamber.
[0004] Therefore, when the XYZ stage device is used for vacuum, as shown in FIG. 1 (plan view of a conventional XYZ stage device), a Y-axis vacuum motor 40 is adopted as a motor for driving the Y-axis actuator, and a Z-axis vacuum motor 70 is adopted as a motor for driving the Z-axis pantograph jack, and these are housed in the vacuum processing chamber.
[0005] However, in a vacuum, there is no convection cooling, and the motor cools only by radiation and conduction. Even with the same torque, heat dissipation is limited in a vacuum, so the temperature tends to rise significantly. In addition, outgassing from coil insulation, adhesives, resin parts, lubricants, etc. can cause deterioration of the vacuum level and process contamination (thin films, surface treatments, etc.).
[0006] Therefore, if the vacuum motor housed in the vacuum processing chamber malfunctions or its performance deteriorates, there is a problem in that the chamber must be opened to the atmosphere, and disassembly, replacement, reassembly, and re-evacuation are required. [Overview of the Initiative] [Problems that the invention aims to solve]
[0007] Therefore, in view of the above, the object of the present invention is to provide an XYZ stage device applicable to a vacuum vessel, in which the electric motor that drives the X-axis actuator, the electric motor that drives the Y-axis actuator, and the electric motor that drives the Z-axis pantograph jack are each fixedly located outside the vacuum processing chamber. [Means for solving the problem]
[0008] To solve the above problems, the present invention provides an XYZ stage device applicable to a vacuum container for moving a workpiece placed on a sample stage inside a vacuum container, An X-axis actuator for moving the workpiece in the X-axis direction, A Y-axis actuator for moving the workpiece in the Y-axis direction, A Z-axis pantograph-type jack for moving the workpiece in the Z-axis direction, An X-axis electric motor is provided outside the vacuum vessel, connected to the screw shaft of the X-axis actuator, and drives the X-axis actuator. A Y-axis electric motor is provided outside the vacuum vessel, connected to the first ball spline shaft, and applies rotational torque to the first ball spline shaft. A Z-axis electric motor is provided outside the vacuum vessel, connected to a second ball spline shaft, and applies rotational torque to the second ball spline shaft. A drive force transmission unit 1 is slidably mounted on the first ball spline shaft and converts the rotational torque transmitted from the first ball spline shaft into rotational torque around the Y axis, and transmits the rotational torque to the screw shaft of the Y-axis actuator, A drive force transmission unit 2 is slidably mounted on the second ball spline shaft and converts the rotational torque around the X axis transmitted from the second ball spline shaft into rotational torque around the Y axis, and transmits the rotational torque to the third ball spline shaft. A drive force transmission unit 3 is slidably mounted on the third ball spline shaft and converts the rotational torque around the Y axis transmitted from the third ball spline shaft into rotational torque around the X axis, and applies the rotational torque to the Z axis jack input shaft. A component constituting the drive force transmission unit 1, comprising a first housing fixed to the end of the X-axis actuator, which causes the Y-axis actuator to be driven by the movement of the X-axis actuator in the X-axis direction along the first ball spline axis, A component constituting the drive force transmission unit 2, comprising a second housing fixed to the end of the Y-axis actuator, which causes the Y-axis actuator to be driven by the movement of the X-axis actuator in the X-axis direction along the second ball spline shaft, The drive force transmission unit 3 comprises a third housing fixed to the Y-axis stage, which causes the Z-axis pantograph-type jack to move along the third ball spline shaft in the Y-axis direction of the Y-axis actuator. [Effects of the Invention]
[0009] As described above, the present invention provides an XYZ stage device applicable to a vacuum vessel, in which an electric motor for driving the X-axis actuator, an electric motor for driving the Y-axis actuator, and an electric motor for driving the Z-axis pantograph-type jack are fixedly positioned outside the vacuum processing chamber. [Brief explanation of the drawing]
[0010] [Figure 1] This is a plan view of a conventional XYZ stage device. [Figure 2(a)] This is a front view showing the line of sight in the arrow view of an XYZ stage device, which is an embodiment of the present invention. [Figure 2(b)] This is a view of the XYZ stage device, which is an embodiment of the present invention, as seen from the JJ arrow. [Figure 2(c)] This is a detailed diagram of the drive force transmission section (section C) to the Z-axis, which is an embodiment of the present invention. [Figure 2(d)] This is a detailed view of the drive force transmission section (section d) to the Z-axis, which is an embodiment of the present invention. [Figure 3(a)] This is a plan view showing the line of sight for each arrow in the XYZ stage device, which is an embodiment of the present invention. [Figure 3(b)] This is a view of the XYZ stage device, which is an embodiment of the present invention, as seen from arrow AA. [Figure 3(c)] This is a view of the XYZ stage device, which is an embodiment of the present invention, as seen from arrow BB. [Figure 3(d)] This is a view of the XYZ stage device, which is an embodiment of the present invention, as seen from the CC arrow. [Figure 3(e)] This is a view of the XYZ stage device, which is an embodiment of the present invention, from the DD arrow perspective. [Figure 3(f)] This is a view of the XYZ stage device, which is an embodiment of the present invention, as seen from arrow KK. [Figure 4(a)] This is a plan view showing the state in which the sample stage of the XYZ stage apparatus, which is an embodiment of the present invention, is located at coordinates (Xmin, Ymax). [Figure 4(b)] This is a view of the sample stage of the XYZ stage apparatus, which is an embodiment of the present invention, from the perspective of the arrow LL at (Xmin, Zmax) position coordinates.
Best Mode for Carrying Out the Invention
[0011] Hereinafter, an embodiment of an XYZ stage device applicable to the vacuum vessel of the present invention will be described based on the drawings. The drawings schematically show the constituent members and peripheral members of the XYZ stage device, and the dimensions and dimensional ratios on the drawings do not necessarily match the actual dimensions and dimensional ratios. Also, unless otherwise specified, for the sake of convenience, the directions such as up and down are represented based on the orientation of the XYZ stage device shown in FIG. 2. Redundant explanations will be omitted as appropriate, and the same reference numerals may be assigned to the same members. In this specification, the rotation axis (Z axis) is taken as the Z axis, and the rotational torque around the Z axis is referred to as the Z-axis torque.
[0012] FIG. 1 is a plan view of an XYZ stage device 110 installed in a vacuum vessel of the prior art. The XYZ stage device 110 shown in FIG. 1 has a Y-axis actuator 3 mounted on the slider of an X-axis actuator 2, a Z-axis pantograph jack 5 mounted on the slider of the Y-axis actuator 3, and a sample stage 60 placed thereon. An X-axis electric motor 29 for moving the X-axis actuator 2 in the X-axis direction is provided outside the housing 1. However, a Y-axis vacuum electric motor 40 for driving the Y-axis actuator 3 is disposed inside the housing 1, and a Z-axis vacuum electric motor 70 for applying driving torque to the Z-axis pantograph jack 5 is also disposed inside the housing 1. With such a configuration, the sample stage 60 can be moved in the X-axis direction and the Y-axis direction while being moved in the Z-axis direction.
[0013] FIG. 2 is a view showing an embodiment of an XYZ stage device (also referred to as an XYZ vacuum processing device) 100 applicable to the vacuum vessel according to the present invention. FIG. 2(a) is a front view, FIG. 2(b) is a view taken in the direction of arrow J-J (plan view), and FIG. 2(c) is a detailed view of a driving force transmission unit (C unit) to the Y axis in the embodiment of the present invention. FIG. 2(d) is a detailed view of a driving force transmission unit (d unit) to the Z axis in the embodiment of the present invention.
[0014] FIG. 2(a) is a front view of the XYZ stage device according to an embodiment of the present invention. As shown in FIG. 2(a), an XYZ stage device 100 according to an embodiment of the present invention includes a housing 1, an X-axis electric motor 29 that moves an X-axis actuator 2 provided inside the housing 1 in the X-axis direction, a Y-axis electric motor 39 that moves a Y-axis actuator 3 in the Y-axis direction, and a Z-axis electric motor 69 that drives a Z-axis drive ball spline shaft 61.
[0015] FIG. 2(b) is a view of the XYZ stage device according to an embodiment of the present invention as viewed in the direction of arrow J-J. As shown in FIG. 2(b), in the present embodiment, a Y-axis actuator 3 is orthogonally attached on an X-axis stage 20. An X-axis support linear guide 4 guides the linear motion of the X-axis actuator 2, stabilizes its posture, and also serves to support the Y-axis actuator 3.
[0016] In an embodiment of the present invention, in order to move the sample stage 60 in the Y-axis direction by rotating a Y-axis ball screw shaft 31a without restricting the movement of the Y-axis actuator 3 in the X-axis direction, a Y-axis drive ball spline shaft 51 is directly connected to a Y-axis electric motor 39 via a Y-axis rotation introduction seal 37, and a Y-axis ball screw drive gear A53 and a Y-axis ball screw drive gear B33 are meshed with each other in an orthogonal arrangement, and a bevel gear structure is used as a driving force transmission unit 1 that converts torque around the X-axis into torque around the Y-axis.
[0017] Also, in an embodiment of the present invention, as a structure for applying rotational torque to a Z-axis jack input shaft 90 without restricting the movement of a Z-axis pantograph jack 5 in the X-axis direction, first, a second Z-axis drive ball spline shaft 61 is directly connected to a Z-axis electric motor 69 via a Z-axis rotation introduction seal 67, and a driving force transmission unit 2 converts rotational torque around the X-axis into rotational torque around the Y-axis. The rotational torque converted into rotational torque around the Y-axis by the driving force transmission unit 2 is again converted into rotational torque around the X-axis by a third driving force transmission unit. Then, the Z-axis pantograph jack 5 is driven by the rotational torque to raise and lower the sample stage 60.
[0018] The operation overview of this XYZ stage device will be explained based on Figure 2(b). When the X-axis ball screw shaft 21a of the X-axis actuator 2 is rotated by the X-axis electric motor 29, the X-axis ball screw nut 21b is guided by the X-axis linear guide stator 22a by this rotation and moves in the X-axis direction. The X-axis linear guide slider 22b is attached to the X-axis ball screw nut 21b via a coupling, and the Y-axis actuator 3 is mounted on it in a direction perpendicular to the X-axis actuator 2. As a result, the Y-axis actuator 3 moves in the X-axis direction along the Y-axis drive ball spline shaft 51 in conjunction with the operation of the X-axis actuator 2.
[0019] The Z-axis pantograph jack 5 is mounted on the Y-axis stage 30 of the Y-axis actuator 3. As a result, the Z-axis pantograph jack 5 moves in the Y-axis direction along the third Z-axis drive ball spline shaft 71 as the Y-axis ball screw shaft 31a rotates. The Z-axis pantograph jack 5 raises and lowers the sample stage 60 in the Z-axis direction due to the rotational torque of the drive force transmission unit 3 described above.
[0020] Figure 2(c) is a detailed view of the drive force transmission unit (c) shown in Figure 2(b). The drive force transmission unit (c) consists of a drive force transmission unit 1 that converts the rotational torque around the X axis by the Y-axis motor 39 into rotational torque around the Y axis and rotates the Y-axis ball screw shaft 31a, and a drive force transmission unit 2 that converts the rotational torque around the X axis of the second Z-axis drive ball spline shaft 61, which is rotated by the Z-axis drive motor 69, into rotational torque around the Y axis and rotates the Z-axis drive ball spline shaft 71.
[0021] As shown in Figure 2(c), the drive force transmission unit 1 has a bevel gear consisting of a Y-axis ball screw drive gear A53 attached to a Y-axis drive ball spline nut 52 that rotates due to the rotation of the Y-axis drive ball spline shaft 51, and a Y-axis ball screw drive gear B33 whose rotation axes are perpendicular to each other. The bevel gear rotates together with the nut, causing the Y-axis ball screw shaft 31a to rotate. As a result, the sample stage 60 moves in the Y-axis direction.
[0022] The housing 55 houses a support bearing 54 for the ball spline nut 52, which is positioned on the outer circumference of the ball spline nut 52 for Y-axis drive. This configuration ensures that the ball spline nut 52 for Y-axis drive is stably supported. The housing 55 is fixed to one end (end) of the Y-axis actuator 3, so that when the X-axis actuator 2 moves in the X-axis direction, the Y-axis actuator 3 follows along the groove of the ball spline shaft 51 for Y-axis drive in the X-axis direction. The bevel gear, consisting of the Y-axis ball screw drive gear A53 and the Y-axis ball screw drive gear B33, also moves in the X-axis direction without any gaps in the gear meshing.
[0023] As shown in Figure 2(c), the drive force transmission unit 2 has a bevel gear consisting of a Z-axis drive gear A63 attached to a Z-axis drive ball spline nut 62 that rotates due to the rotation of the Z-axis drive ball spline shaft 61, and a Z-axis drive gear B73 whose rotation axes are perpendicular to each other. The bevel gear rotates together with the nut, causing the Z-axis drive ball spline shaft 71 to rotate.
[0024] Figure 2(d) is a detailed view of the drive force transmission unit 3 for the Z axis. As shown in Figure 2(d), the drive force transmission unit 3 is composed of a bevel gear consisting of a Z-axis drive gear A79 attached to a Z-axis drive ball spline nut 72 that rotates on a Z-axis drive ball spline shaft 71, and a Z-axis drive gear B83 whose rotation axis is perpendicular to that of the Z-axis drive gear A79 and the Z-axis drive gear B83. The bevel gear rotates together with the nut, and the Z-axis pantograph jack 5 is raised and lowered in the Z-axis direction by the Z-axis pantograph jack input shaft 90.
[0025] Figure 3 shows the views of the XYZ stage device 100 from various viewpoints. Figure 3(a) is a plan view indicating the line of sight for each view. Figure 3(b) is the AA view, Figure 3(c) is the BB view, Figure 3(d) is the CC view, Figure 3(e) is the DD view, and Figure 3(f) is the KK view. Each view will be explained below.
[0026] The arrow-view in Figure 3(b) shows the X-axis motor 29, Y-axis motor 39, and Z-axis motor 69 located on the side of the housing 1. The X-axis motor 29 is connected to an X-axis ball screw 21a via an X-axis coupling 28 and an X-axis rotation introduction seal 28. The Y-axis motor 39 is connected to a Y-axis drive ball spline shaft 51 via a Y-axis coupling 38 and a Y-axis rotation introduction seal 37. The Z-axis motor 69 is connected to a Z-axis drive ball spline shaft 61 via a Z-axis coupling 68 and a Z-axis rotation introduction seal 67.
[0027] The arrow-view in Figure 3(c) shows the X-axis actuator 2 and X-axis support linear guide 4 positioned on the bottom surface of the housing 1, with the Y-axis actuator 3 mounted on top of them by a mounting plate. A Y-axis stage 30 is mounted on the upper surface of a Y-axis ball screw nut 31b, which moves in the Y-axis direction guided by a Y-axis linear guide stator 32a. A Z-axis pantograph jack 5 is mounted on the Y-axis stage 30, and a sample stage 60 is placed on top of it. The X-axis ball screw nut 21b and X-axis linear guide slider 22b, which constitute the X-axis actuator 2, are also shown.
[0028] The arrow-view in Figure 3(d) shows the X-axis actuator 2, the Y-axis actuator 3 mounted on top of it by a mounting plate, the Y-axis stage 30 to which the Y-axis ball screw nut 31b is attached, and the Z-axis pantograph jack 5 mounted on top of the Y-axis stage 30.
[0029] Also shown is the Y-axis ball screw shaft 31a, which is driven by a drive force transmission unit 1 that converts the orientation of the rotation axis of the Y-axis drive ball spline shaft 51 from around the X axis to around the Y axis. Furthermore, the Z-axis drive ball spline shaft 71, which transmits drive force to the Z-axis pantograph type jack 5, is also shown.
[0030] The arrow-view in Figure 3(e) shows the X-axis actuator 2 and the X-axis support linear guide 4 installed on the bottom surface of the housing 1, with the Y-axis actuator 3 mounted on top of them by a mounting plate on the X-axis actuator 2. The Z-axis pantograph jack 5 is attached to the upper surface of the Y-axis ball screw nut 31b, which moves in the Y-axis direction due to the rotation of the Y-axis ball screw shaft 31a of the Y-axis actuator 3, via the Y-axis stage 30, and the sample stage 60 is placed on top of it. Due to the different line of sight, the Y-axis and Z-axis ball spline shaft holder B57, the Z-axis drive ball spline shaft holder A77 which holds the Z-axis drive ball spline shaft 71, the Z-axis drive ball spline shaft holder B78, and the support bearing housing 75 for the Z-axis drive ball spline nut are shown.
[0031] The arrow-view in Figure 3(f) shows the X-axis linear guide slider 22b of the X-axis actuator 2, which is operated by the X-axis electric motor 29, the Y-axis actuator 3 connected to its upper surface, the Y-axis drive ball spline shaft 51, the Y-axis and Z-axis ball spline shaft holder A56, the Y-axis and Z-axis ball spline shaft holder B57, the Y-axis drive ball spline shaft 51, and the support bearing housing 65 for the Z-axis drive ball spline nut that supports it. The Z-axis pantograph type jack 5 is mounted on top of the Y-axis actuator 3, and the sample stage 60 is placed on top of the Z-axis pantograph type jack 5.
[0032] Figure 4(a) is a plan view showing the state in which the sample stage of an XYZ stage apparatus, an embodiment of the present invention, is located at coordinates (Xmin, Ymax). In the XYZ axis stage apparatus of the present invention, the X-axis motor, Y-axis motor, and Z-axis motor are fixedly positioned outside the vacuum processing chamber, and the X-axis actuator 2 moves the sample stage 60 in the X-axis direction, the Y-axis actuator 3 moves the sample stage 60 in the Y-axis direction, and the Z-axis pantograph jack 5 raises and lowers the sample stage 60 in the Z-axis direction. A Z-axis ball spline shaft 71 is used as the rotating shaft that applies rotational torque to the Z-axis pantograph jack input shaft 90 of the Z-axis pantograph jack 5, and a Z-axis drive ball spline shaft 61 and a drive force transmission unit 2 are provided to apply rotational torque to the Z-axis ball spline shaft 71. This allows the sample stage 60 to be raised and lowered in the Z-axis direction while the Y-axis actuator 3 moves the sample stage 60 in the Y-axis direction, and the X-axis actuator 2 moves the sample stage 60 in the X-axis direction, all with the electric motors installed outside the vacuum chamber.
[0033] Figure 4(b) is a view from the LL arrow in a plan view of the XYZ stage apparatus, which is an embodiment of the present invention shown in Figure 4(a). It shows the state in which the sample stage 60 is being raised in the Z-axis direction by the Z-axis pantograph type jack 5 due to the rotational torque of the Z-axis jack input shaft 90, caused by the Z-axis drive gear A79 and Z-axis drive gear B83 in the support bearing housing 75 for the Z-axis drive ball spline nut. [Explanation of symbols]
[0034] 100: XYZ Stage Device 110: XYZ Stage Device 1: Cabinet 2: Actuator for the X-axis 3: Y-axis actuator 4: X-axis support linear guide 5: Z-axis pantograph type jack 20: X-axis stage 21a: X-axis ball screw shaft 21b: X-axis ball screw nut 22a: X-axis linear guide stator 22b: X-axis linear guide slider 27: X-axis rotation introduction seal 28: X-axis coupling 29:X-axis electric motor 30: Y-axis stage 31a: Y-axis ball screw shaft 31b: Y-axis ball screw nut 32a: Y-axis linear guide stator 32b: Y-axis linear guide slider 33: Y-axis ball screw drive gear B 37: Y-axis rotation introduction seal 38: Y-axis coupling 39:Y-axis electric motor 40:Y-axis vacuum motor 51: Ball spline shaft for Y-axis drive 52: Ball spline nut for Y-axis drive 53: Y-axis ball screw drive gear A 54: Support bearing for ball spline nut for Y-axis drive 55: Support bearing housing for ball spline nut for Y-axis drive (first housing) 56: Y-axis Z-axis ball spline shaft holder A 57: Y-axis Z-axis ball spline shaft holder B 60: Sample stage 61: Ball spline shaft for Z-axis drive 62: Ball spline nut for Z-axis drive 63: Z-axis drive gear A 64: Support bearing for ball spline nut for Z-axis drive 65: Support bearing housing for ball spline nut for Z-axis drive (second housing) 67: Z-axis rotation introduction seal 68: Z-axis coupling 69: Z-axis electric motor 70:Z-axis vacuum motor 71: Ball spline shaft for Z-axis drive 72: Ball spline nut for Z-axis drive 73: Z-axis drive gear B 74: Support bearing for ball spline nut for Z-axis drive 75: Support bearing housing for ball spline nut for Z-axis drive (third housing) 76: Support bearing housing for ball spline shaft for Z-axis drive 77: Z-axis drive ball spline shaft holder A 78: Z-axis drive ball spline shaft holder B 79: Z-axis drive gear A 80: Z-axis drive gear B 90: Z-axis jack input axis
Claims
[Claim 1] An XYZ stage device applicable to a vacuum chamber for moving a workpiece placed on a sample stage inside the vacuum chamber, An X-axis actuator for moving the aforementioned workpiece in the X-axis direction, A Y-axis actuator for moving the workpiece in the Y-axis direction, A Z-axis pantograph-type jack for moving the workpiece in the Z-axis direction, An X-axis electric motor is provided outside the vacuum vessel, connected to the screw shaft of the X-axis actuator, and drives the X-axis actuator. A Y-axis electric motor is provided outside the vacuum vessel, connected to the first ball spline shaft, and applies rotational torque to the first ball spline shaft. A Z-axis electric motor is provided outside the vacuum vessel, connected to a second ball spline shaft, and applies rotational torque to the second ball spline shaft. A drive force transmission unit 1 is slidably mounted on the first ball spline shaft and converts the rotational torque transmitted from the first ball spline shaft into rotational torque around the Y axis, and transmits the rotational torque to the screw shaft of the Y-axis actuator. A drive force transmission unit 2 is slidably mounted on the second ball spline shaft and converts the rotational torque around the X axis transmitted from the second ball spline shaft into rotational torque around the Y axis, and transmits the rotational torque to the third ball spline shaft. A drive force transmission unit 3 converts the rotational torque around the Y axis transmitted from the third ball spline shaft into rotational torque around the X axis, applies the rotational torque to the Z axis jack input shaft, and raises and lowers the Z axis pantograph type jack in the Z axis direction. A component constituting the drive force transmission unit 1, comprising a first housing fixed to the end of the Y-axis actuator, which causes the drive force transmission unit 1 to be driven by the movement of the X-axis actuator in the X-axis direction along a first ball spline axis, A component constituting the drive force transmission unit 2, comprising a second housing fixed to the end of the Y-axis actuator, which causes the drive force transmission unit 2 to be driven by the movement of the X-axis actuator in the X-axis direction along a second ball spline shaft, An XYZ stage device applicable to a vacuum vessel, characterized in that it comprises a component constituting the drive force transmission unit 3, which is fixed to the Y-axis stage and has a third housing along a third ball spline shaft that causes the drive force transmission unit 3 to be driven by the Y-axis movement of the Y-axis actuator.