Storage container and method for charging substrate-like sensor

By designing a storage container with support structure, contact needle and driving mechanism, the problem of efficient charging and transporting meridian sensors in the storage container is solved, and the safe and efficient charging and protection of the sensor during transportation is achieved.

JP7648310B2Active Publication Date: 2025-03-18TOKYO ELECTRON LTD
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Patent Information

Application Number
JP2022101916
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Priority Date
2021-08-04
Filing Date
2022-06-24
Publication Date
2025-03-18
Estimated Expiration
2042-06-24

AI Technical Summary

Technical Problem

The prior art is difficult to efficiently charge and transport meridian sensors in storage containers, and the sensors are susceptible to environmental influences during transportation, resulting in performance degradation.

Method used

A storage container with a support structure, contact needle and drive mechanism is designed to charge inside the container and support the central part of the sensor to ensure that the sensor is not damaged during transportation.

Benefits of technology

The sensor is enabled to be charged safely and efficiently in the storage container, and to protect the sensor from damage and environmental impacts during transportation by supporting structures and protective measures.

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Abstract

To provide a containment container that houses a substrate-like sensor and a charging method of the substrate-like sensor.SOLUTION: A containment container that houses a substrate-like sensor includes a container body with an opening, a support unit that is located in the container body and supports the substrate-like sensor, a contact pin that is located in the container body and can contact a terminal of the substrate-like sensor, a drive mechanism that is located in the container body and drives the contact pin, a rotating shaft member that drives the drive mechanism from the outside of the container body, a jack that is located outside the container body and is electrically connected to the contact pin, and a lid body that can block the opening of the container body.SELECTED DRAWING: Figure 6
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