Slit die

The slit die design addresses non-uniform stripe patterns by using a partitioned manifold with controlled pressure loss and exhaust means to achieve uniform coating films in the width direction, enhancing precision and adjustability.

JP7875001B2Active Publication Date: 2026-06-17TORAY ENG CO LTD

Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
TORAY ENG CO LTD
Filing Date
2022-03-30
Publication Date
2026-06-17

AI Technical Summary

Technical Problem

Conventional slit dies for applying coating liquid to substrates result in non-uniform stripe patterns due to collisions of coating liquid flows, leading to variations in the shape of the coating film in the width direction.

Method used

A slit die design with a partition portion that divides the manifold into small manifolds, connected via a communication portion with controlled pressure loss, and equipped with an exhaust means to suppress liquid collisions and uniformize the coating flow, allowing for detachable partitions to adjust application conditions.

Benefits of technology

The design achieves a more uniform stripe pattern in the width direction by suppressing liquid collisions and variations, enabling precise control over coating film width and shape.

✦ Generated by Eureka AI based on patent content.

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Abstract

To provide a slit die capable of making a shape in a width direction of a coating film formed in a stripe shape in the width direction more uniform than a conventional one.SOLUTION: A slit die for applying coating liquid to a substrate includes: a manifold as a space formed long in a width direction of the substrate and storing coating liquid; a plurality of supply ports disposed in the manifold so as to be aligned in the width direction and supplying the coating liquid to the manifold; a long slit in the width direction connected to the manifold; a discharge port for discharging the coating liquid from the manifold via the slit; a shim for dividing the slit into a plurality of spaces in the width direction to form small slits; and a division part for dividing the manifold into a plurality of spaces in the width direction to form small manifolds. The division part is arranged at a position of dividing the manifold so that at least the one supply port is positioned in each small manifold, and the one small manifold is connected to the one small slit.SELECTED DRAWING: Figure 2
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Description

Technical Field

[0001] The present invention relates to a slit die for applying a coating liquid to a substrate.

Background Art

[0002] Conventionally, a battery electrode plate is manufactured by applying and drying a slurry (hereinafter referred to as a coating liquid) in which an active material, a binder, and a conductive assistant are mixed with a solvent on the surface of a substrate such as an aluminum foil or a copper foil.

[0003] In this manufacturing process, a coating device forms a coating film by applying a coating liquid to a substrate by discharging the coating liquid with a slit die while continuously conveying the substrate in a roll-to-roll manner (for example, Patent Document 1). And, as coating forms, there are single-strip coating in which a wide coating liquid is applied over the width direction of the substrate and multi-strip coating (hereinafter referred to as stripe coating) in which the coating liquid is applied in stripes in the width direction of the substrate.

Prior Art Documents

Patent Documents

[0004] <​​​​​​​​​​​​​​​​Conventional slit dies, as shown in Figures 4(a) and 4(b), are formed to be long in the width direction (hereinafter referred to as the width direction) of the substrate 960 (see Figure 5) and have a manifold 910 which is a space for accumulating coating liquid, multiple supply ports 950 which are provided on the manifold 910 so as to be arranged in the width direction and supply coating liquid to the manifold 910, a slit 920 which is long in the width direction and connected to the manifold 910, and a discharge port 930 which discharges the coating liquid from the manifold 910 via the slit 920. In order to perform stripe coating with this slit die 900, as shown in Figures 4(a) and 4(b), shims 940 are provided on the slit 920 which divide the slit 920 into multiple spaces in the width direction, and by dividing the slit 920 in the width direction with the shims 940, a stripe-shaped coating liquid is applied to the substrate 960 in the width direction.

[0007] In such a slit die 900, the coating liquid supplied to the manifold 910 from each of the multiple supply ports 950 flows into each space of the slit 920 partitioned by the shim 940 and is discharged from the discharge port 930. Here, as shown in Figure 4(b), the coating liquid supplied from one of the multiple supply ports 950 located near the shim 940 flows in the width direction, avoiding the part where the shim 940 is located. This coating liquid collides with the coating liquid supplied from another supply port 950 and flowing towards each adjacent space of the slit 920 within the manifold 910. As a result, the direction of flow of the coating liquid supplied from each supply port 950 and flowing towards the slit 920 via the manifold 910 changes, causing variations in the amount of coating liquid flowing into each space of the slit 920 partitioned by the shim 940.

[0008] As a result, when the coating liquid that flows into each space of the slit 920 partitioned by the shim 940 is discharged from the discharge port 930 to form a coating film 970 on the substrate 960, variations occur in the shape of the coating film 970 in the width direction, as shown in Figure 5.

[0009] This invention has been made in view of the above problems, and aims to provide a slit die that can make the shape of a coating film formed in a stripe pattern in the width direction more uniform than conventional slit dies. [Means for solving the problem]

[0010] The present invention, which solves the above problems, is a slit die for applying a coating liquid to a substrate, comprising: a manifold formed to be long in the width direction of the substrate and serving as a space for storing the coating liquid; a plurality of supply ports provided on the manifold so as to be arranged in the width direction and supplying the coating liquid to the manifold; a slit long in the width direction connected to the manifold; a discharge port for discharging the coating liquid from the manifold through the slit; a shim that divides the slit into a plurality of spaces in the width direction to form small slits; and a partition portion that divides the manifold into a plurality of spaces in the width direction to form small manifolds, wherein the partition portion is positioned to partition the manifold such that at least one of the supply ports is located in each small manifold and one of the small manifolds is connected to one of the small slits. The partition portion is formed to form a communication portion that connects adjacent small manifolds in the width direction, and the communication portion is formed such that the pressure loss from the small manifold to the adjacent small manifold via the communication portion is greater than the pressure loss from the small manifold to the discharge port via the small slit. It is characterized by the following.

[0011] According to the above-described slit die, a partition is provided, and this partition divides the manifold in the width direction of the substrate so that one small manifold is connected to one small slit. This prevents the coating liquid from moving between adjacent small manifolds, thereby suppressing collisions of the coating liquid within the manifold. As a result, the coating liquid flows from each small manifold into each small slit and is discharged from the discharge port so that it is uniform in the width direction of the substrate. This suppresses variations in the width direction of the coating liquid discharged from the discharge port through each small slit. Therefore, the shape of the coating film formed in a stripe pattern in the width direction can be made more uniform than in conventional methods.

[0013] Furthermore, at least one of the small manifolds may be provided with an exhaust means for exhausting the air present in the manifold.

[0014] With this configuration, the movement of the coating liquid between adjacent manifolds is suppressed, while air can be exhausted from each small manifold through the communication section formed by the partition.

[0015] Furthermore, the manifold may be provided with a plurality of partition mounting sections for attaching the partition sections, and the partition sections may be configured to be detachably attached to each of the partition mounting sections.

[0016] This configuration allows for the application of coating liquid according to application conditions, such as adjusting the width of the coating film formed on the substrate, by appropriately changing the position of the partition. [Effects of the Invention]

[0017] According to the slit die of the present invention, the shape of the coating film formed in a stripe pattern in the width direction can be made uniform in the width direction. [Brief explanation of the drawing]

[0018] [Figure 1] This figure schematically shows a coating apparatus equipped with a slit die according to one embodiment of the present invention. [Figure 2] This is a diagram illustrating a slit die in one embodiment of the present invention. [Figure 3] This figure shows a coating film formed by a slit die in one embodiment of the present invention. [Figure 4] This is a diagram illustrating a conventional slitting die. [Figure 5] This figure shows a coating film formed by a conventional slit die. [Modes for carrying out the invention]

[0019] A coating apparatus according to an embodiment of the present invention will be described with reference to the drawings. In the following description, the three axes of the orthogonal coordinate system are denoted as X, Y, and Z, the horizontal direction is expressed as the X-axis direction and the Y-axis direction, and the direction perpendicular to the XY plane (i.e., the vertical direction) is expressed as the Z-axis direction.

[0020] FIG. 1 is a diagram schematically showing a coating apparatus 100 including a slit die 2 in the present embodiment. FIG. 2 is a diagram for explaining the slit die 2 in the present embodiment, FIG. 2(a) is a cross-sectional view taken along the arrow a in FIG. 1, and FIG. 2(b) is a cross-sectional view taken along the arrow b in FIG. 1. FIG. 3 is a diagram showing a coating film M formed by the slit die 2 in the present embodiment.

[0021] As shown in FIG. 1, the coating apparatus 100 in the present embodiment includes a conveying means 1 for conveying a substrate W, a slit die 2 for applying a coating liquid to the substrate W, and a supply means 3 for supplying the coating liquid to the slit die 2.

[0022] The coating apparatus 100 in the present embodiment applies the coating liquid to a predetermined surface of the substrate W conveyed by the conveying means 1 by means of the slit die 2 to form a coating film M (see FIG. 3).

[0023] The substrate W in the present embodiment is a metal foil that serves as an electrode plate for a battery such as a lithium-ion battery. When forming a positive electrode, an aluminum foil or the like is used, and when forming a negative electrode, a copper foil or the like is used. This substrate W is a strip-shaped sheet that is long in one direction and is conveyed by the conveying means 1.

[0024] The coating liquid in the present embodiment is, for example, a slurry containing an active material, a binder, a conductive assistant, and a solvent, and is used as a material for an electrode plate for a battery (so-called electrode material) such as a lithium-ion battery. By applying this coating liquid to the substrate W, a coating film M is formed on the substrate W.

[0025] In this embodiment, the transport means 1 is for transporting the substrate W, and employs a roll-to-roll system in which the substrate W is transported by the rotation of multiple rolls. The transport speed of the substrate W by this transport means 1 is controlled by a control unit (not shown). This control unit is, for example, a general-purpose computer. In this embodiment, only the coating roll 11 that guides the substrate W to the location where the coating liquid is applied is shown in Figure 1.

[0026] Furthermore, the coating roll 11 is positioned opposite the slit die 2 and is arranged to maintain a predetermined distance from the discharge port 23 (described later) when the coating liquid is applied by the slit die 2. Therefore, the substrate W can be conveyed while maintaining a constant distance from the slit die 2.

[0027] The slit die 2 in this embodiment is for applying a coating liquid to the conveyed substrate W to form a coating film M. The slit die 2 is formed to be long along the width direction (Y-axis direction in Figure 1) of the substrate W. Here, the aforementioned coating roll 11 is arranged at a predetermined distance from the coating section 2 such that the rotation axis direction of the coating roll 11 and the width direction of the coating section 2 are parallel. In the following description, the width direction of the substrate W will be referred to as the width direction.

[0028] Furthermore, as shown in Figure 1, the slit die 2 in this embodiment consists of a first segment 24 having a tapered first lip 24a and a second segment 25 having a tapered second lip 25a, with a shim plate 26 sandwiched between them.

[0029] Inside the slit die 2, there is a manifold 21 consisting of a space that is long in the width direction and stores the coating liquid, and a wide slit 22 connected to the manifold 21. Between the first lip 24a and the second lip 25a, there is a discharge port 23 which is the open end of the slit 22. In other words, the first manifold 21 and the discharge port 23 are connected via the slit 22.

[0030] In this embodiment, the manifold 21 is formed in a substantially cylindrical shape that extends in the width direction, as shown in Figures 1 and 2(a). The coating liquid is supplied to this manifold 21 by the supply means 3, which will be described later.

[0031] Furthermore, the dimensions of the slit 22 connected to the manifold 21 are determined by the inner dimension L of the shim plate 26 (see Figure 2(b)). The slit die 2 then applies a coating liquid onto the substrate W with a width dimension approximately the same as that of the slit 22. By changing the thickness of the shim plate 26, the pressure inside the manifold 21 can be adjusted, and this adjustment allows for the formation of coating films M of various thicknesses on the substrate W.

[0032] Furthermore, the discharge port 23 faces the coating roll 11 with the substrate W in between. That is, the discharge port 23 faces the substrate W on the surface side of the substrate W. With this configuration, the slit die 2 discharges the coating liquid stored in the manifold 21 onto the substrate W from the discharge port 23 through the slit 22 while maintaining a constant distance between the discharge port 23 and the substrate W.

[0033] In this embodiment, the supply means 3 is for supplying coating liquid to the slit die 2. As shown in Figures 1 and 2(a), the supply means 3 includes a tank 31 for storing the coating liquid, a supply passage 32 connecting the tank 31 and the slit die 2, a supply port 33 connecting the supply passage 32 to the manifold 21 from outside the slit die 2, and a pump (not shown) for transporting the coating liquid.

[0034] In this embodiment, multiple supply ports 33 are formed at the bottom of the manifold 21 so as to be arranged in the width direction, as shown in Figures 2(a) and 2(b). A supply passage 32 is connected to each of these supply ports 33. In other words, the supply means 3 supplies the coating liquid to the manifold 21 from multiple locations. Note that the supply passage 32 connected to each supply port 33 may be one for each supply port 33, or one supply passage 32 may be branched off from the tank 31 to each supply port 33.

[0035] Furthermore, the pump is capable of adjusting the flow rate of the coating liquid supplied from the tank 31 to the supply port 33 via the supply passage 32. In this embodiment, a pump is provided in each of the supply passages 32 connected to each supply port 33 so as to adjust the flow rate of the coating liquid supplied from the tank 31 to each supply port 33. This makes it possible to adjust the flow rate of the coating liquid supplied to the manifold 21 across the width direction.

[0036] Furthermore, the slit die 2 in this embodiment forms a striped coating film M in the width direction. Forming a striped coating film M in the width direction means forming the coating film M in the width direction (Y-axis direction in Figure 3) of the substrate W such that the substrate W has multiple coated areas T on which the coating film M is formed, and uncoated areas N between the multiple coated areas T where the coating film M is not formed.

[0037] To achieve this, the slit die 2 in this embodiment is equipped with shims 4 that divide the slit 22 into multiple spaces in the width direction, as shown in Figures 2(a) and 2(b).

[0038] In this embodiment, the shim 4 is a block that extends from the starting end of the slit 22, which is the boundary between the manifold 21 and the slit 22, to the open end, as shown in Figure 2(b), and has the same thickness in the height direction as the shim plate 26 described above, as shown in Figure 2(a). In this embodiment, an example in which two shims 4 are used will be described. By sandwiching these two shims 4 between the first divided body 24 and the second divided body 25 so that they are arranged in the width direction, the slit 22 is fixed in a state in which it is divided into multiple spaces in the width direction.

[0039] As a result, as shown in Figures 2(a) and 2(b), the space of the slit 22 is divided in the width direction into small slits 41a, 41b, and 41c.

[0040] In this state, when the supply means 3 supplies the coating liquid to the manifold 21, the coating liquid flows into the small slits 41a, 41b, and 41c, and is applied from the discharge port 23, which is the open end of each. In other words, the coating liquid is applied to the parts without shims 4, and not to the parts with shims 4. As a result, a striped coating film M can be formed on the substrate W in the width direction.

[0041] Furthermore, the width of the coating film M can be adjusted by changing the dimensions of the shim 4 in the width direction. That is, the width of the coated area T and the uncoated area N in the width direction of the substrate W can be adjusted. In addition, the width of the coating film M can be adjusted by changing the position in which the shim 4 is fixed, that is, by changing the position in which the shim 4 is sandwiched between the first divided body 24 and the second divided body 25. That is, the width of the coated area T and the uncoated area N in the width direction of the substrate W can be adjusted.

[0042] With these configurations, the slit die 2 can form a striped coating film M on the substrate W in the width direction.

[0043] Furthermore, as shown in Figures 2(a) and 2(b), the slit die 2 in this embodiment is equipped with partitions 5 that divide the manifold 21 into multiple spaces in the width direction.

[0044] In this embodiment, the partition 5 is a block formed to match the shape of the manifold 21. As mentioned above, the manifold 21 in this embodiment is formed in a substantially cylindrical shape that extends in the width direction. In order to divide this substantially cylindrical manifold 21 into multiple spaces in the width direction, the partition 5 is formed in a substantially cylindrical shape, and is arranged so that the outer surface of this cylinder and the inner surface of the manifold 21 face each other, as shown in Figures 2(a) and 2(b). The width dimension of the partition 5 is formed to be smaller than or the same as the width dimension of the shim 4 mentioned above.

[0045] The number and position of the partition sections 5 are linked to the number and position of the shims 4. In this embodiment, two partition sections 5 are placed on the manifold 21. By arranging these two partition sections 5 in the width direction of the manifold 21 as shown in Figures 2(a) and 2(b), the space of the manifold 21 is divided in the width direction into small manifolds 51a, 51b, and 51c.

[0046] In this embodiment, as shown in Figures 2(a) and 2(b), the partition 5 is positioned to divide the manifold 21 so that one small manifold 51 is connected to one small slit 41. That is, the partition 5 is positioned opposite the shim 4 in the direction in which the coating liquid flows from the manifold 21 toward the discharge port 23 (the X-axis direction in Figure 2(a)). It is preferable to position the partition 5 so that it is hidden by the shim 4 when viewed from the direction of the discharge port 23. As a result, in this embodiment, the small slit 41a is connected to the small manifold 51a, the small slit 41b to the small manifold 51b, and the small slit 41c to the small manifold 51c. The partition 5 is also positioned so that at least one supply port 33 is located in each small manifold 51.

[0047] Furthermore, as shown in Figures 2(a) and 2(b), the partition portion 5 in this embodiment is formed to form a communication portion 52 that connects adjacent small manifolds 51 in the width direction. The communication portion 52 in this embodiment is a gap, and will be referred to as the gap portion 52 in the following description. Specifically, the partition portion 5 is formed in such a shape that a part of the inner circumferential surface of the manifold 21 and a part of the outer circumferential surface of the partition portion 5 face each other with a predetermined gap between them. As a result, a gap portion 52 is formed between the inner circumferential surface of the manifold 21 and a part of the outer circumferential surface of the partition portion 5, and adjacent small manifolds 51, i.e., small manifold 51a, small manifold 51b, and small manifold 51c are connected via the gap portion 52. Here, the pump of the supply means 3 adjusts the flow rate of the coating liquid supplied from the tank 31 to each supply port 33 so that it is equal in each small manifold 51. That is, the amount of coating liquid in each small manifold 51 becomes uniform.

[0048] Here, the gap 52 is formed such that the pressure loss from the small manifold 51 to the adjacent small manifold 51 via the gap 52 is greater than the pressure loss from the small manifold 51 to the discharge port 23 via the small slit 41.

[0049] Specifically, the cross-sectional area of ​​the gap between the inner surface of the manifold 21 and the outer surface of the partition 5, which form the gap 52, is made smaller than the cross-sectional area of ​​the small slit 41. This makes it difficult for the coating liquid to flow into the gap 52, and suppresses the movement of the coating liquid between adjacent small manifolds 51.

[0050] Furthermore, the dimensions of the gap 52, that is, the distance between the inner surface of the manifold 21 and the outer surface of the partition 5, should be as small as possible, preferably a size that minimizes the movement of the coating liquid between adjacent small manifolds 51 while allowing the movement of air. More preferably, the dimensions of the gap 52 should be about 0.5 to 1.0 mm. Note that the air referred to here is air that enters the supply passage 32 through joints of the supply passage 32 (not shown) and sliding members of the pump (not shown) before the coating liquid reaches the manifold 21 from the tank 31 and mixes with the manifold 21.

[0051] As a result of the formation of the gap 52, the partition 5 does not completely separate the adjacent small manifolds 51, but the above configuration can suppress the movement of the coating liquid between adjacent small manifolds 51. Therefore, in this embodiment, even when the gap 52 is formed, the partition 5 divides the manifold 21 into multiple small manifolds 51 in the width direction.

[0052] Furthermore, the slit die 2 in this embodiment is equipped with an exhaust means 6 for exhausting air present in the manifold 21, as shown in Figures 1 and 2(a). As shown in Figure 2(a), at least one exhaust port 61 is provided on the upper surface of the manifold 21 and has an exhaust port 61 for exhausting air present in the manifold 21 to the outside. The exhaust port 61 is provided to communicate with one of the multiple small manifolds 51 separated by the partition 5.

[0053] By providing this exhaust port 61 on the upper surface of the manifold 21, the air that has moved to the upper surface of the manifold 21 due to buoyancy is exhausted to the outside.

[0054] Here, because the gap 52 mentioned above connects each adjacent small manifold 51, the air present in each small manifold 51 moves between adjacent small manifolds 51 and is exhausted from the exhaust port 61. In addition, in this embodiment, the partition 5 is formed so that the gap 52 is formed near the upper surface of the manifold 21. This makes it easier for the air that moves to the upper surface of each small manifold 51 due to buoyancy to be exhausted from the exhaust port 61 through the gap 52.

[0055] Furthermore, the slit die 2 in this embodiment is equipped with a partition mounting portion 53 for attaching the partition portion 5, as shown in Figure 2(b). The partition mounting portion 53 in this embodiment is a groove provided so as to be arranged on the bottom surface of the manifold 21 in the width direction.

[0056] Here, as shown in Figures 2(a) and 2(b), projections 54 are formed on the outer surface of the partition portion 5 that engage with the partition portion mounting portion 53. By engaging these projections 54 with the partition portion mounting portion 53, the partition portion 5 can be attached to the partition portion mounting portion 53. In other words, the partition portion 35 is detachable.

[0057] Then, when sandwiching the shim plate 26 and shim 4 between the first divided body 24 and the second divided body 25, the partition 5 is attached by engaging the projection 54 with one of the multiple partition mounting parts 53 in accordance with the arrangement of the shim 4. This allows the partition 5 to be attached to the manifold 21 in accordance with the arrangement of the shim 4.

[0058] Thus, according to the slit die 2 in the above embodiment, the shape of the coating film M formed in a stripe pattern in the width direction can be made more uniform than in the conventional method.

[0059] Let me explain in detail. When forming a striped coating film in the width direction on the substrate W without partitioning the manifold 21 in the width direction as in the conventional method, as shown in Figures 4(a) and 4(b), the coating liquid supplied to the manifold 910 from each of the multiple supply ports 950 flows into each space of the slit 920 divided by the shim 940 and is discharged from the discharge port 930. Here, as shown in Figure 4(b), the coating liquid supplied from the supply port 950 located near the shim 940 flows in the width direction so as to avoid the part where the shim 940 is located.

[0060] The coating liquid flowing in the width direction and the coating liquid supplied from another supply port 950 and flowing towards each of the divided slit spaces collide within the manifold 910. As a result, the direction of flow of the coating liquid supplied from each supply port 950 changes between the time it enters the slit 920 from the manifold 910. This causes variations in the amount of coating liquid flowing into each of the divided slit spaces 920 by the shim 940.

[0061] As a result, when the coating liquid that flows into each space of the slit 920 divided by the shim 940 is discharged from the discharge port 930 to form a coating film 970 on the substrate 960, variations occur in the shape of the coating film 970 in the width direction, as shown in Figure 5.

[0062] In contrast, the slit die 2 in this embodiment has a partition portion 5, which partitions the manifold 21 in the width direction so that one small manifold 51 is connected to one small slit 41, which is partitioned in the width direction by a shim 4. Therefore, it is possible to suppress the movement of the coating liquid supplied from each supply port 33 between adjacent small manifolds 51, thereby preventing the coating liquid supplied from a supply port 33 located near the shim 4 from colliding with the coating liquid supplied from another supply port 33 that flows toward each small slit 22, avoiding the shim 4 as in the conventional method.

[0063] As a result, compared to the conventional slit die 900, it is possible to suppress changes in the flow direction of the coating liquid supplied from each supply port 35 as it flows from the manifold 21 into each small slit 41. Furthermore, since the coating liquid flows from each small manifold 51 into each small slit 41 in a uniform manner in the width direction of the substrate W, it is possible to suppress variations in the width direction of the coating liquid discharged from the discharge port 23 through each small slit 41. Therefore, as shown in Figure 3, the shape of the coating film formed in a stripe pattern in the width direction can be made more uniform than in the conventional method.

[0064] Furthermore, the partition portion 5 in this embodiment is formed to form a gap portion 52 that connects adjacent small manifolds 51 in the width direction. This gap portion 52 is formed such that the pressure loss from the small manifold 51 to the adjacent small manifold 51 via the gap portion 52 is greater than the pressure loss from the small manifold 51 to the discharge port 23 via the small slit 41.

[0065] This makes it easier for the exhaust means 6 to exhaust the air present in the manifold 21 to the outside. Specifically, the air present in each small manifold 51 can be moved between adjacent small manifolds 51 through the gap 52. Therefore, by providing one exhaust port 61 of the exhaust means 6 in any one of the multiple small manifolds 51, the air present in each small manifold 51 can be exhausted to the outside together.

[0066] Furthermore, in this embodiment, the partition portion 5 is formed so that the gap portion 52 is located near the upper surface of the manifold 21, and the exhaust port 61 is provided on the upper surface of the manifold 21. As a result, the air that moves to the upper surface of each small manifold 51 due to buoyancy is made more easily moved through the gap portion 52, making it easier to exhaust the air present in each small manifold 51 to the outside through the exhaust port 61.

[0067] Furthermore, the slit die 2 in this embodiment is provided with a plurality of partition mounting portions 53 arranged in the width direction of the manifold, and protrusions 54 that fit into these partition mounting portions 53 are formed on the partition portion 5. As a result, the partition portion 5 can be attached to and detached from the manifold 21, and the position in which the partition portion 5 is attached can be changed to match the position of the shim 4. This makes it possible to appropriately change the position of the partition portion 5 so that the coating liquid can be applied according to the application conditions, such as adjusting the width of the coating film M formed on the substrate W.

[0068] Furthermore, since the partition portion 5 is formed to create a gap 52, the partition portion 5 can be attached to and detached from the manifold 21 more easily than if there were no gap 52.

[0069] Furthermore, in the above embodiment, since a pump is provided in each supply passage 32 connected to each supply port 33, even if there is a difference in the number of supply ports 33 located in each of the small manifolds 51 separated by the partition 5, the flow rate of the coating liquid supplied to each small manifold 51 can be adjusted to an appropriate amount.

[0070] Although embodiments of the present invention have been described in detail above with reference to the drawings, the configurations and combinations thereof in each embodiment are merely examples, and additions, omissions, substitutions, and other modifications are possible without departing from the spirit of the present invention. For example, in the above embodiment, an example in which the slit 22 is partitioned by two shims 4 has been described, but the invention is not limited to this. The partitioning portion 5 is arranged in the manifold 21 in the same number as the shims 4.

[0071] Furthermore, in the above embodiment, the partition portion 5 was formed to create a gap portion 52, but the partition portion 5 may be formed in a way that does not create a gap portion 52. That is, the outer circumferential surface of the partition portion 5 and the inner circumferential surface of the manifold 21 may be in close contact. In this case, it is preferable to provide one exhaust port 61 in each of the small manifolds 51 separated by the partition portion 5.

[0072] Furthermore, in the above embodiment, it was described that the dimension of the gap 52, which is the distance between the inner surface of the manifold 21 and the outer surface of the partition 5, is about 0.5 to 1.0 mm. However, it is not limited to this, and it is preferable that the dimension be at least large enough to allow air to move between the small manifolds 51. In other words, the dimension of the gap 52 should be such that air can escape.

[0073] Furthermore, although the above embodiment describes an example where the communication portion 52 is a gap portion 52, it is not limited to this. For example, it may be a through hole formed in a part of the partition portion 5 so as to penetrate in the width direction. In this case, the cross-sectional area of ​​the through hole is formed to be smaller than the cross-sectional area of ​​the slit 22. That is, the through hole is formed such that the pressure loss from the small manifold 51 to the adjacent small manifold 51 via the through hole is greater than the pressure loss from the small manifold 51 to the discharge port 23 via the small slit 41. It is also preferable that this through hole be formed near the upper surface of the manifold 21. [Explanation of Symbols]

[0074] 100 Coating device 1. Conveying means 11. Coating Roll 2 Slit Dies 21 Manifold 22 slits 23 Discharge port 24 First division 24a First lip section 25 Second division 25a Second lip section 26 Sim bodies 3 Supply means 31 tanks 32 Supply route 33 Supply port 4 Sims 41 Small Slits 41a Small Slit 41b Small Slit 41c Small Slit 5. Partition section 51 Small Manifold 51a Small Manifold 51b Small Manifold 51c Small Manifold 52 Connecting section (gap section) 53 Partition mounting section 54 Protrusion 6. Exhaust means 61 Exhaust port W Base material M Paint film T Application area N Uncoated area

Claims

1. A slit die for applying a coating solution to a substrate, A manifold, which is formed to be long in the width direction of the substrate and is a space for accumulating the coating liquid, Multiple outlets are provided on the manifold so as to be arranged in the width direction, and each outlet supplies a coating liquid to the manifold. The manifold is connected to the aforementioned slit which is long in the width direction, A discharge port for discharging the coating liquid from the manifold via the slit, A shim divides the slit into multiple spaces in the width direction, forming a small slit. The manifold is divided into multiple spaces in the width direction, and a partition section is provided to form a sub-manifold. The partition is positioned to partition the manifold such that at least one supply port is located in each small manifold, and one small manifold is connected to one small slit. The partition portion is formed to form a communication portion that connects each of the adjacent small manifolds in the width direction. The slit die is characterized in that the communication portion is formed such that the pressure loss from the small manifold to the adjacent small manifold via the communication portion is greater than the pressure loss from the small manifold to the discharge port via the small slit.

2. The slit die according to claim 1, characterized in that at least one of the small manifolds is provided with an exhaust means for exhausting air present in the manifold.

3. The manifold is provided with a plurality of partition mounting sections for attaching the partition section, The slit die according to claim 1 or 2, characterized in that the partition portion is formed to be detachably attached to each of the partition portion mounting portions.