Exhaust gas detoxification system

Abstract

An exhaust gas detoxification system according to the present invention comprises: an exhaust line through which exhaust gas discharged from a semiconductor manufacturing device flows; an exhaust gas treatment device which is provided in the exhaust line and is capable of detoxifying the exhaust gas; a leakage inspection line which branches from the exhaust line; and a moisture meter which is provided in the leakage inspection line and is capable of measuring the moisture concentration of a sampling gas flowing from the exhaust line to the leakage inspection line.