Multi-phase interferometer for 3D metrology
The multi-phase interferometer system addresses the inefficiencies of traditional interferometry methods by using multiple detectors with preset phase shifts to calculate interferogram envelopes, resulting in faster and more precise 3D metrology measurements.
WO2025068813A1 Publication Date: 2025-04-03ORBOTECH LTD
2 Cites 0 Cited by
Patent Information
- Application Number
- PCT/IB2024/058856
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2023-09-28
- Filing Date
- 2024-09-12
- Publication Date
- 2025-04-03
AI Technical Summary
Technical Problem
Existing interferometry methods for 3D metrology are time-consuming and reduce system throughput due to the need for hundreds of thousands of measurements per scan to achieve accurate measurement resolution.
Method used
A multi-phase interferometer system that uses a processor to calculate an interferogram envelope based on intensities measured by multiple detectors with preset phase shifts, allowing for reduced measurement points and increased throughput.
Benefits of technology
The system achieves accurate height measurements with significantly fewer steps in the scan, reducing total measurement time by a factor of 10 to 100 compared to traditional methods while maintaining precision.
✦ Generated by Eureka AI based on patent content.
Abstract
In the system, an illumination source emits light, a first beam splitter directs a portion of the light toward a sample and directs another portion of the light toward a reference surface that reflects the light back to the first beam splitter to be recombined with light reflected by the sample, at least one second beam splitter that directs n portions of the light toward n detectors, each of the n portions of the light having a preset phase shift and n ≥ 2, and a processor receives intensities of the n portions of the light. The processor calculates an interferogram envelope based on the intensities measured by the n detectors as the reference surface moves between a plurality of signal collection positions.
Need to check novelty before this filing date? Find Prior Art