Beam scanning apparatus, processing apparatus, and processing method

The beam scanning apparatus addresses the challenges of beam focusing and aberration reduction by incorporating an aberration reduction member in the optical path, resulting in improved accuracy and efficiency for additive manufacturing.

WO2025069363A1 Publication Date: 2025-04-03NIKON CORP +1
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Patent Information

Application Number
PCT/JP2023/035587
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Filing Date
2023-09-29
Publication Date
2025-04-03

AI Technical Summary

Technical Problem

Existing beam scanning apparatuses face challenges in efficiently scanning processing beams for additive manufacturing, particularly in maintaining accurate beam focusing and reducing aberrations caused by beam splitting.

Method used

The proposed beam scanning apparatus includes a condensing optical system, a beam split member, a scanning optical member, and an aberration reduction member. The aberration reduction member is disposed in the optical path between the condensing optical system and the scanning optical member, reducing aberrations generated by the beam split member and allowing for precise scanning of the processing beam.

Benefits of technology

This configuration enables improved beam focusing and reduced aberrations, leading to higher build accuracy and efficiency in additive manufacturing processes.

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Abstract

A beam scanning apparatus is a beam scanning apparatus configured to perform a scanning of a processing beam that is used by a processing apparatus, and includes: a condensing optical system that condenses the processing beam entering the beam scanning apparatus in a divergent state; a beam split member that transmits the processing beam from the condensing optical system; and a scanning optical member which scans the processing beam from the beam split member, the beam split member reflects light that enters the beam split member through the scanning optical member to direct the light toward a light receiving apparatus.
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