Electron source, and electron gun and device using same

WO2025069589A1 Publication Date: 2025-04-03HAMAMATSU PHOTONICS KK
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Patent Information

Application Number
PCT/JP2024/021521
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Priority Date
2023-09-27
Filing Date
2024-06-13
Publication Date
2025-04-03

AI Technical Summary

Technical Problem

The temperature stability of the electron emitting part of the existing electron source is insufficient during heating, resulting in unstable electron beam emission.

Method used

The electron-emitting portion containing erbium and rare earth element alloy is used to improve temperature stability by coating the erbium and metal on the connecting portion and reducing the concentration of rare earth element in the closed portion.

Benefits of technology

It effectively improves the temperature stability of the electron emitting part during heating, reduces fluctuations in the emission amount of electron beam, and extends the service life of the electron source.

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Abstract

This electron source comprises: an electron emission part that contains an alloy of iridium and a rare earth element; a support part that is formed from a metal; and a joining part that joins the electron emission part and the support part. The joining part includes a coating layer containing iridium and the metal in the support part. The coating layer contains iridium and the metal in the support part.
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