Integrated multi-ported valve assembly

The integrated multiported valve assembly addresses the challenge of supplying multiple vaporized precursors in substrate processing systems by using a compact, integrated design with optimized flow paths and carrier gases, achieving efficient and flexible precursor delivery while preventing cross-contamination.

WO2025071923A1 Publication Date: 2025-04-03LAM RES CORP
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Patent Information

Application Number
PCT/US2024/046090
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Priority Date
2023-09-28
Filing Date
2024-09-11
Publication Date
2025-04-03

AI Technical Summary

Technical Problem

Substrate processing systems face challenges in efficiently supplying multiple vaporized precursors to a processing chamber without cross-contamination, particularly due to space constraints and the need for frequent modifications in vaporized precursor delivery systems.

Method used

An integrated multiported valve assembly is developed, comprising a manifold block with multiple inputs and outputs, and a set of valves configured to supply multiple vaporized precursors through a single assembly, preventing cross-contamination by using carrier gases and optimizing flow paths.

Benefits of technology

The solution enables efficient, compact, and flexible delivery of multiple vaporized precursors, preventing cross-contamination and allowing for quick modifications, thereby enhancing processing speed and reducing waste.

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Abstract

A multiport valve assembly for a substrate processing system includes a manifold block and a plurality of valves mounted to the manifold block. The manifold block includes N first inputs connected to N sources of N vaporized precursors, where N is an integer greater than 1; an outlet connectable to a showerhead of a processing chamber; and a plurality of manifolds enclosed in the manifold block. The valves are coupled to the N first inputs by the manifolds in the manifold block. The valves are configured to supply the N vaporized precursors through respective supply manifolds in the manifold block. The respective supply manifolds are connected to an output manifold in the manifold block. The output manifold includes the outlet to supply one or more of the N vaporized precursors to the showerhead.
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