Distributing wirings through multiple bonding regions stabilizes airtightness and prevents leaks caused by uneven stress concentration.
Dual frequency mode opto-mechanical resonator cancels temperature drift by measuring the difference between two resonance frequencies.
Replacing dual magnets with a single unit ensures identical minor loop slopes, eliminating imbalance errors and improving measurement accuracy.
Angled detection laser beam selects atomic velocities to maintain interferometer signal contrast across accelerations exceeding ±1g.
Resin covering portions suppress solder fillet rise on terminal electrodes, preventing movement limitations and improving detection accuracy.
Inverting conventional mode configurations reduces cross-talk sensitivity while simplifying circuitry for reliable three-axis sensing.
Segmented Coriolis masses in a yaw rate sensor compensate for rotational acceleration interference through differential capacitance measurement.
Groove portions on the outer edge of a physical quantity sensor element suppress leakage vibration and force transmission.
Recessed insulating portions and dummy electrodes in a capacitive acceleration sensor reduce electrostatic attraction, preventing movable body sticking.
A tri-axis angular rate sensor uses a single planar sense frame to detect rotation about three perpendicular axes via Coriolis forces.
Cylindrical piezoelectric transducers extend as cantilever beams from a bulkhead partition to form a compact vector sensor.