Angular oscillation of seismic masses minimizes sensitivity to external linear accelerations, maintaining signal accuracy under mechanical interference.
Rigid bars couple accordion springs to restrict relative motion and enable large proof mass displacements.
Rigid mechanical coupling increases transverse resonant frequency, preventing signal distortion from high transverse loads in gas turbine engines.
Inter-digital electrodes on suspension beams generate voltage from lateral strain, resolving the trade-off between accelerometer size and electrical output.
Wafer-level folding creates polyhedral sensor assemblies using flexible hinges, resolving alignment errors in compact inertial measurement units.
A three-axis linear acceleration sensor detects tilt changes to adjust object velocity in virtual environments.
Merges the spacer function into the mass part to eliminate dual bonding steps and reduce adhesive stress.
A processing system locks orientation values when an electronic device is stationary to reduce gyroscope drift errors.
Dual-surface trench etching creates MEMS structures with high stiffness and displacement by eliminating bonding-induced stress.
An elastic restricting section absorbs impact energy from the movable electrode, preventing comb tooth damage and maintaining detection accuracy.
Radially outward reference structure minimizes parasitic capacitance between electrodes and substrate, improving z-axis measurement accuracy.
Electroactive material actuator units connect across three shared power lines to address individual actuators via modulated signals.
Fixing electronic substrate at multiple points increases target area resonance frequency to prevent sensor signal overlap and erroneous vehicle control.
Sensors adjust parameters by comparing motion observations to maintain accuracy without external calibration equipment.
Segmenting gyroscopes across stacked dies reduces footprint while hermetic cavities maintain tailored pressures for sensor performance.
Segmenting the electrode layer with insulation reduces electrical field interference and radiometric effects while maintaining measurement precision.
An insulating layer blocks mobile ions from reaching the movable member, eliminating electrostatic attraction and output drift.
Segmented ferrous pole pieces guide magnetic flux through a MEMS accelerometer coil, reducing production costs while maintaining measurement accuracy.
A compact accelerometer apparatus switches to full operation only when acceleration exceeds a threshold, storing data on non-volatile memory.
A through hole gap in an acceleration sensor cap layer maintains a reduced pressure state within the device cavity.