Aluminium Oxynitrides TRIZ Cases
- Spherical Aluminum Oxynitride Powder via Spray Drying and Carbothermic Reduction
Spray drying coats alumina with resin to form spherical powder, preventing agglomeration during high-temperature nitridation.
- High Purity AlON Semiconductor Chamber Components
High purity polycrystalline AlON bodies withstand corrosive gases without introducing impurities that contaminate wafers.
- AlON Powder Synthesis via High-Pressure Direct Nitridation
Direct nitridation of aluminum and alumina powders under 1-3 MPa pressure yields spherical AlON ceramic powder with enhanced sintering activity.