A cleaning composition with bulky protecting ligands and organic amines removes post-CMP contaminants from semiconductor wafers.
An amine-free cleaning composition removes post-CMP residues using complexing agents and basic compounds.
Segmenting laundry pastilles into scent and performance types resolves the contradiction between fragrance impact and cleaning reliability.
A polyamino-polycarboxylic acid cleaning composition enhances wetting ability on semiconductor wafers.
Hexosaminidase polypeptides break down poly-N-acetylglucosamine to eliminate malodor and redeposition on textiles.
Gas flow removes adhered droplets from the processing nozzle before arm movement, preventing water marks on substrates caused by unintended dripping.
Trimellitic anhydride esterified polysaccharides resist hydrolysis at basic pH while inhibiting calcium carbonate scale formation.