Removing material along the chamfered wafer edge stabilizes internal laser separation and helps avoid focal deviation, breakage, and uneven thickness.
A two-tape ring frame setup prevents tape twisting at the wafer opening, keeping chips stable for back-surface grinding and handling.
Deep edge trimming plus wet polishing removes debris and abnormal surface layers before wafer bonding, reducing joint defects and breakage.
Pre-thinning the wafer notch with a notch wheel preserves notch integrity during back grinding and improves alignment recognition yield.
Eccentric wheel motion spins and sways the rim so brush wheels fully remove spoke-hole burrs, cutting manual work, injuries, and defects.
Interspersed subsurface laser damage lines enable thin crystal layer separation with lower kerf loss, less surface damage, and higher throughput.
A two-stage trim blade process cuts an annular trench before edge removal, reducing wafer bond peeling while preserving usable die area.