A MEMS switch interrupts electrical current using electrostatic actuation for rapid state changes.
A switchable capacitor uses a reference top plate to shield charges and prevent dielectric breakdown in RF MEMS switches.
Nickel-tungsten alloy beam maintains stable separation distance to eliminate arc formation and leakage current.
Interdigitated shuttle fingers route RF signals to minimize loss and maximize isolation across wide frequency ranges.
A power amplifier bridge circuit uses surface MEMS switches to amplify square wave signals.
Patterned standoff bumps and aligned holes in RF MEMS actuators reduce contact area, minimizing surface dielectric charging that causes stiction and drift.
Segmented MEMS switch arrays isolate single failures through redundant parallel branches, preventing cascading faults across the circuit.
Parallel electrostatic MEMS switches rapidly interrupt current to prevent damaging arcs, resolving the trade-off between high fault handling and device size.
Intermediate diodes and a control circuit synchronize switching operations to prevent excessive load currents from damaging MEMS switches.
An electromagnetically actuated MEMS switch overcomes stiction and creep force by applying magnetic repulsion to reliably open the device.
A dual sacrificial layer structure defines the actuation member mold in a micro-electromechanical system switch to ensure consistent contact gap geometry.
A touchless trigger apparatus uses a photon gate with an electro-optical sensor to detect finger presence without physical contact.
Dual sacrificial layers create spatially efficient, hermetically sealed MEMS switches while preventing carbon contamination.
Electrostatic MEMS switch maintains sub-micron contact separation to inhibit arc formation in circuit breakers.
SPDT relays interrupt current flow before MEMS matrix switching operations to prevent contact agglutination and ensure reliable AMDF line-switching.
Electroactive polymers actuate conductive particle interconnects to maintain consistent electrical conductivity during thermal cycling.
Two-stage etching removes by-products from MEMS cavities, preventing voids and solvent residue.
Auxiliary circuit diverts load current via resonant switching to limit voltage across MEMS relays, resolving speed and reliability trade-offs.
A mechanical switch uses a self-assembled molecular layer to enable precise electrical contact movement.
Mechanical bistable gates replace charge storage to eliminate leakage and power dissipation at nanoscale dimensions.
A high-frequency MEMS switch employs a bent switching element to increase restoring force and prevent adhesion.
A vertical comb actuator RF MEMS switch uses electrostatic force to drive the movable component.
A pull-up electrostatic contact pad drives an RF micro-machined switch using low DC voltage.
Curved electrostatic actuators in a multi-stable MEMS switch overcome adhesion forces on soft contact materials.
A liquid dielectric MEMS switch reduces actuation voltage through high permittivity.
Control switches electrically isolate non-enabled semiconductor die to reduce parasitic pin capacitance and improve I/O signal transfer speed.
Periodic switching modulates signals away from pink noise, achieving 75 dB signal-to-noise ratio without increasing chip area.
Vertical layering of signal lines and actuation electrodes in a MEMS switch reduces electrostatic interference while maintaining strong closing force.
An arcuate beam pivots about its axis to maintain uniform air gaps, reducing premature failure risks from high electric fields in linear designs.
Vertical integrated MEMS switches use wafer vias to form movable metal wires, reducing pull-in voltage and eliminating sticktion.
Titanium diffusion into an AlCu layer prevents uneven grain growth, resolving inconsistent capacitance in RF MEMS digital variable capacitors.
A MEMS hybrid wiring system combines micro-strip and coplanar waveguide segments to reduce electrical losses in high-frequency switching.
A nanocomposite material uses a tunneling mechanism to detect mechanical strain via electrical conductivity changes.
Shallow isolation joints in an SOI substrate reduce fabrication steps and prevent damage from mechanical shocks.
Laminate-mounted magnetically actuated MEMS capacitor switches handle 100 W RF signals by eliminating silicon substrate energy absorption.
An inverted ground plane design for RF MEMS packages creates a transmission line without through-vias.
Segmented drive signals prevent oscillations during MEMS switch closure, ensuring stable electrical connection without bouncing.
A resonant switch-based Dickson charge pump boosts input voltage using gated-sinusoid excitation to drive mechanical oscillation.
Segmenting the vertical beam connector with an intermediary insulator resolves connection reliability issues that typically arise when reducing footprint area.
A refractory metal layer on the membrane reduces thermal resistance, preventing deformation and short circuits during high power operation.
High permittivity dielectric materials increase capacitance in the control electrode, enabling faster switching speeds and higher RF power handling.
A MEMS microswitch uses a conductive mechanical stopper to prevent actuator contact with the substrate electrode.
Ferromagnetic RF-MEMS switches use transient magnetic forces to overcome dielectric charge injection and Van der Waals sticking.
A MEMS switch with passivation layers isolates the host circuit from parasitic loading while shunting electrostatic discharge current to prevent silicon damage.
A segmented source electrode uses elastic deformation to sequentially engage distinct contact materials with a drain electrode.
A balanced diode bridge suppresses arc formation during contact separation, reducing power dissipation compared to solid-state switches.
Electrostatic actuation moves a liquid droplet across patterned substrate regions, eliminating mechanical wear and sticking in micromechanical switches.
A resistive protection layer dissipates accumulated electric charge to maintain actuation voltage accuracy and prevent short circuits in MEMS devices.
Ground-shields and high-resistance poly-resistors decouple RF MEMS switches from lossy CMOS substrates, maintaining high Q factors.