A MEMS switch interrupts electrical current using electrostatic actuation for rapid state changes.
A switchable capacitor uses a reference top plate to shield charges and prevent dielectric breakdown in RF MEMS switches.
Nickel-tungsten alloy beam maintains stable separation distance to eliminate arc formation and leakage current.
Interdigitated shuttle fingers route RF signals to minimize loss and maximize isolation across wide frequency ranges.
A power amplifier bridge circuit uses surface MEMS switches to amplify square wave signals.
Patterned standoff bumps and aligned holes in RF MEMS actuators reduce contact area, minimizing surface dielectric charging that causes stiction and drift.
Segmented MEMS switch arrays isolate single failures through redundant parallel branches, preventing cascading faults across the circuit.
Parallel electrostatic MEMS switches rapidly interrupt current to prevent damaging arcs, resolving the trade-off between high fault handling and device size.
Intermediate diodes and a control circuit synchronize switching operations to prevent excessive load currents from damaging MEMS switches.
An electromagnetically actuated MEMS switch overcomes stiction and creep force by applying magnetic repulsion to reliably open the device.
A dual sacrificial layer structure defines the actuation member mold in a micro-electromechanical system switch to ensure consistent contact gap geometry.
A touchless trigger apparatus uses a photon gate with an electro-optical sensor to detect finger presence without physical contact.