MEMS Switch Deformable Conductive Element
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Solution Overview
Problem
Conventional circuit breakers are large, slow, complex, and expensive, with macro-electromechanical switches that can form arcs leading to current leakage and damage, while solid-state switches experience power dissipation and heat issues due to internal resistance and leakage current, making them unsuitable for circuit breaker applications.
Innovation Solution
A microelectromechanical switch structure with a deformable conductive element, such as a cantilevered beam, made of a nickel-tungsten alloy, that stores mechanical energy and maintains a stable separation distance and angle over time, allowing for fast and reliable current switching with minimal leakage and heat generation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If macro-electromechanical switches are used in conventional circuit breakers, then current switching capability is achieved, but the device size becomes large and activation force increases
Solution Approach 1:
The patent replaces traditional macro-electromechanical switching mechanisms with a microelectromechanical system (MEMS) based switch. The MEMS switch uses a micro-scale conductive element that can be deformed between contacting and non-contacting positions with minimal force, eliminating the need for bulky mechanical components while maintaining current switching capability.
Solution Approach 2:
The patent changes the scale parameter from macro to micro dimensions. The conductive element is designed with specific geometric parameters (length, width, thickness) that enable it to function as a switch at micro-scale. The aspect ratio and dimensions are optimized to achieve both mechanical deformability and electrical switching function, reducing overall device size while maintaining reliability.
2Reliability
If macro-electromechanical switches are used in conventional circuit breakers, then current switching capability is achieved, but the switching speed becomes slow
Solution Approach 1:
The patent replaces slow macro-mechanical actuation with a microelectromechanical system that responds faster to actuation signals. The MEMS switch can transition between states more rapidly due to its reduced mass and optimized mechanical structure, achieving faster switching speeds while maintaining reliable current interruption capability.
3Reliability
If macro-electromechanical switches are used in conventional circuit breakers, then current switching capability is achieved, but the device complexity and fabrication cost increase
Solution Approach 1:
The patent segments the switching function into distinct micro-scale components: a conductive element, support structure, and contact element. This segmentation allows each component to be optimized independently and fabricated using standard MEMS processes, reducing overall fabrication complexity compared to monolithic macro-mechanical designs.
4Reliability
If physical separation of contacts is achieved in conventional circuit breakers, then current interruption is achieved, but arc formation occurs causing current leakage and contact damage
Solution Approach 1:
The patent uses a microelectromechanical switch that creates a more controlled separation between contacts. The micro-scale conductive element can be precisely positioned and separated, reducing the conditions that lead to arc formation while maintaining effective current interruption capability.
5Speed
If solid-state switches are used, then fast switching speed is achieved, but leakage current occurs when non-conducting
Solution Approach 1:
The patent employs a microelectromechanical switch that combines the fast response characteristics of solid-state devices with the physical contact separation of mechanical switches. When the conductive element is in the non-contacting position, there is no physical connection between contacts, eliminating leakage current while maintaining fast switching capability through electrostatic or magnetic actuation.
6Speed
If solid-state switches are used, then fast switching speed is achieved, but voltage drop and power dissipation occur due to internal resistance
Solution Approach 1:
The patent uses a microelectromechanical switch with physical contact elements that have very low contact resistance when closed. The conductive element makes direct physical contact with the contact element, minimizing voltage drop and power dissipation during the conducting state while maintaining fast switching speeds through non-contact actuation mechanisms.
7Speed
If the conductive element is made deformable, then fast switching response is achieved, but time-deformation (creep) occurs under stress
Solution Approach 1:
The patent employs a composite structure for the conductive element, combining materials with complementary properties. The conductive element can be made from a composite of metals or metal alloys that provide both the necessary mechanical deformability for fast switching and resistance to time-deformation. The support structure may also use composite materials to maintain dimensional stability under stress while allowing controlled deformation during switching operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The microelectromechanical switch structure provides a compact, efficient, and reliable solution for current switching with low leakage and reduced heat generation, enabling faster response times and longer operational lifetimes compared to traditional technologies.
Implementation Method 1
the conductive element is configured to be deformable between a first position, in which the conductive element is separated from the contact by a separation distance, and a second position, in which the conductive element contacts (and, in some cases, establishes electrical communication with) the contact and stores mechanical energy
Implementation Method 2
The switch structure may include an electrode disposed on the substrate and configured to be charged so as to apply an electrostatic force configured to urge the conductive element toward the second position
Implementation Method 3
the conductive element is configured such that, subsequent to being deformed into the second position at a temperature between about room temperature and about half of a melting temperature of the metallic material for a cumulative time of at least 10^7 seconds, a separation distance between the conductive element and the contact varies by less than 20 percent
Data Source
Figure 1~2
Figure 3~5
Figure 6A~6C
AI summary
A device, such as a switch structure (100), is provided. The switch structure can include a contact (102) and a conductive element (104) each respectively disposed on a substrate (108). The conductive element can be composed substantially of metallic material, and can be configured to be deformable between a first position, in which the conductive element is separated from the contact by a separation distance, and a second position, in which the conductive element contacts the contact and stores mechanical energy. The conductive element can be further configured such that, subsequent to being deformed into the second position at a temperature between about room temperature and about half of a melting temperature of the metallic material for a cumulative time of at least 107 seconds, the separation distance in the absence of external forces varies by less than 20 percent over the cumulative time. Associated methods are also provided.