A conical table cover drains processing liquid radially during substrate grinding, suppressing residue buildup and easing maintenance.
Laser fusion heals grinding cracks and chipping at recess and annular projection boundaries, improving workpiece strength for later processing.
Discharge and outer circumferential grooves collect swarf and liquid while suction stabilizes the substrate to keep its back surface clean.
Negative-pressure suction lets the grinding robot hold walls and ceilings while maintaining contact pressure for automated surface finishing.