Investigating Crystals TRIZ Cases
- Examination Wafer Metal Layers for Laser Spot Energy Distribution
Two metal layers with different melting or heat properties turn a tiny laser spot's energy distribution into visible marks for process matching.
- Off-Axis Substrate Defect Detection Using Dark-Field and Photoluminescence
Directional dark-field imaging plus photoluminescence separates crystalline defects from particles and scratches in off-axis monocrystalline substrates.