Investigating Semiconductor Impurities TRIZ Cases
- Photoluminescence Edge Detection Using a Light-Emitting Sample Holder
A light-emitting support behind a transparent sample holder boosts edge contrast, helping detect photovoltaic cell defects more accurately.
- OPC Model Calibration Using SEM-GDS Alignment and Contour Verification
SEM-GDS image alignment, filtering, and genetic contour verification improve OPC model accuracy and reduce lithography pattern distortion.