Lining Supports TRIZ Cases
- Substrate Support Heat Shield for Wafer Temperature Uniformity
A heat shield covers the substrate support when wafers are absent, cutting unnecessary heating, cooldown delay, and airflow distortion.
- Dual-Fin Refractory Anchor for Faster Hexagonal Lining
Fewer dual-fin anchors form hexagonal refractory patterns faster while an insulating gap reduces heat transfer to the mounting pin.
- Refractory Anchor Fin Structure for Faster Hexagonal Lining
Two V-shaped anchor fins form hexagonal lining with fewer installations while the insulating gap cuts heat transfer and crack risk.
- Refractory Anchor Fin Structure for Faster High-Temperature Lining Support
Y-shaped anchor fins cut anchor count and installation time while limiting heat transfer, vibration damage, and refractory liner cracking.
- Y-Shaped Refractory Anchor Layout for Single-Weld Installation
A folded Y-shaped anchor replaces rolled hex sheets, enabling single-weld refractory installation on curved surfaces with uniform support.