Microelectromechanical Systems TRIZ Cases
- Electrostatic MEMS Micromirror Comb-Frame Support for Stable Rotation
Comb-frame support on both sides of the rotation axis increases moment of inertia and improves micromirror stability.
- Variable Width Torsional Beam Flexure for MEMS Scanner Strain
A torsional beam flexure with varying cross-sectional area maximizes mechanical strain at the sensor location within a MEMS scanning device.
- Ultra-thin Planar Lens-less Camera Using Pixel Array
A lens-less imaging device uses a pixel array with unique optical elements to capture light from different directions.
- Micromechanical Oscillating Mirror Connecting Structure Torsion Detection
Narrow outer legs amplify mechanical stress on piezoresistive resistors to increase torsion detection precision while maintaining structural strength.
- Micro Mirror with Segmented Electrodes for High Tilting Angle
Segmenting the address electrode and pre-charging the charging unit resolves the trade-off between low driving voltage and large tilting angle.
- Microfluidic Chip Testing via Common Capillary Wafer
Parallel testing through a common capillary reduces calibration time and eliminates individual fluid line reconnection for each chip.
- MEMS Mirror Calibration via Lookup Table for Uniform Scanning
A MEMS scanning mirror calibration method establishes a driving lookup table to map reference voltages to projection positions.