Perfluorocarbons/Hydrofluorocarbons Capture TRIZ Cases
- Baffled Inlet Nozzle for Higher Effluent Abatement DRE
A baffle blocks direct effluent flow into the inlet nozzle, increasing mixing and residence time to improve abatement DRE and stabilize NOx emissions.
- Heated Inert Gas Exhaust for CVD Vacuum Pump Blockage Prevention
Introducing heated inert gas into chemical vapor deposition exhaust pipelines prevents powder adhesion and maintains continuous vacuum pump operation.
- CVD Bubbler Bypass Line for Precursor Disposal
A bypass line diverts surplus precursors from a chemical vapor deposition bubbler directly to an abatement device.
- CVD Reactor Exhaust Gas Valve Switching Pressure Control
A CVD reactor exhaust gas valve arrangement uses pressure regulation to switch between treatment devices.
- Wet Electrostatic Precipitator Purge Gas Flow Control
Purge gas perturbs the liquid curtain to remove deposits from electrodes, preventing accumulation that reduces reliability in semiconductor manufacturing.
- Tangential Gas Nozzles for EUV Exhaust Combustion
Tangential gas nozzles inject processing and oxidizing gases into a cylindrical combustion chamber to form a swirling mixed flame.
- Selective Separation of Perfluorinated Hydrocarbons via Amine Reactivity
Specific amines target linear perfluorocarbon double bonds, resolving separation challenges caused by identical boiling points in alicyclic mixtures.
- Halocarbon Recycling via Sulfur Trioxide Reaction
Sulfur trioxide reacts with halocarbons to form sulfonic acids, eliminating high temperature requirements and hazardous hydrogen fluoride generation.