Baffled Inlet Nozzle for Higher Effluent Abatement DRE
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Solution Overview
Problem
Existing abatement apparatuses for treating effluent gas streams in semiconductor manufacturing have inefficiencies in destruction rate efficiency (DRE) due to rapid transit of effluent streams through inlet assemblies, leading to suboptimal mixing and residence time, which is exacerbated by non-uniform flow patterns.
Innovation Solution
An inlet assembly with a baffle positioned between the effluent stream conduit and inlet nozzle redirects the effluent stream flow to inhibit direct line-of-sight paths, promoting turbulent and laminar flow, and incorporating a baffle conduit with apertures to ensure uniform axial flow and increased mixing with fuel before entering the abatement chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the effluent stream is conveyed directly from the effluent stream conduit to the inlet nozzle, then the flow path is short and simple, but the effluent stream transits too rapidly through the inlet assembly, reducing destruction rate efficiency
Solution Approach 1:
A baffle is introduced as an intermediary component between the effluent stream conduit and the inlet nozzle. The baffle forces the effluent stream to follow a diverted, non-line-of-sight path, increasing the residence time within the inlet nozzle while maintaining a relatively compact overall structure. This intermediary element resolves the contradiction by adding path length without proportionally increasing device complexity.
2Productivity
If the effluent stream flows directly into the inlet nozzle, then the device structure is simple, but the flow pattern is non-uniform and mixing is suboptimal
Solution Approach 1:
The baffle serves as a mediating structure that improves flow uniformity and mixing characteristics without requiring complete redesign of the inlet assembly. By strategically positioning the baffle to create a diverted flow path, the invention achieves better flow distribution and fuel-effluent mixing while adding only a single structural component, thus resolving the contradiction between performance improvement and device complexity.
3Reliability
If a baffle is introduced to redirect effluent stream flow, then residence time and mixing are improved, but the device complexity increases
Solution Approach 1:
The inlet assembly is segmented into distinct functional zones: the effluent stream conduit, the baffle component, and the inlet nozzle. This segmentation allows each component to be optimized independently and facilitates easier manufacturing, assembly, and maintenance. The baffle is designed as a separate, simple geometric element that can be easily fabricated and positioned, minimizing the complexity increase while achieving the desired flow redirection and residence time extension.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The baffle configuration enhances destruction rate efficiency (DRE) by increasing mixing and residence time, reducing fuel consumption, and stabilizing NOx emissions, achieving consistent and repeatable performance.
Implementation Method 1
a baffle interposed between the effluent stream conduit and the inlet nozzle, the baffle being shaped and configured to redirect flow of the effluent stream from the effluent stream conduit into the inlet nozzle by inhibiting effluent stream flow along the major direction of flow into the inlet nozzle
Implementation Method 2
promoting turbulent and laminar flow, and incorporating a baffle conduit with apertures to ensure uniform axial flow and increased mixing with fuel before entering the abatement chamber
Implementation Method 3
Known abatement apparatus use combustion to remove the PFCs and other compounds from the effluent gas stream
Data Source
AI summary
An inlet assembly for an abatement apparatus includes: an effluent stream conduit configured to convey an effluent stream along a major direction of flow within the effluent stream conduit; an inlet nozzle fluidly coupled with the effluent stream conduit and configured to convey the effluent stream received from the effluent stream conduit to an abatement chamber of the abatement apparatus; and a baffle interposed between the effluent stream conduit and the inlet nozzle, the baffle being shaped and configured to redirect flow of the effluent stream from the effluent stream conduit into the inlet nozzle by inhibiting effluent stream flow along the major direction of flow into the inlet nozzle. A line-of-sight flow from the effluent stream conduit into the inlet nozzle is prevented by the baffle and the effluent stream instead follows a non-line-of-sight or diversionary path from the effluent stream conduit into the inlet nozzle, which improves DRE.