Piezoelectric/Electrostrictive Devices TRIZ Cases
- Humidity Sensor Support Structure for Miniaturized Electrode Stability
Stacked support layers and fixation grooves secure the second electrode, preserving compact size and stable humidity detection.
- Electrostatic Actuator With Tapered Comb Fingers for Low Voltage
Tapered comb fingers increase electrostatic force in a MEMS actuator, enabling lower actuation voltage and larger displacement.
- Piezoelectric MEMS Light Deflector With Grounded Crosstalk Shield
Grounding a conductor layer beneath MEMS signal wirings redirects high-frequency current and reduces crosstalk for accurate detection.
- Fully Symmetric MEMS Sensing Structures for Stress-Induced Offset Control
Aligned, fully symmetric fixed-finger anchors keep sensing gaps consistent and reduce stress-induced offset and quadrature errors in MEMS sensors.
- Scanning MEMS Mirror Leaf-Spring Coupling for Vibration Robustness
Parallel leaf springs replace relief springs in a scanning MEMS mirror coupling, raising undesirable-mode eigenfrequencies and reducing vibration sensitivity.