Humidity Sensor Support Structure for Miniaturized Electrode Stability
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Solution Overview
Problem
Existing micro humidity sensors face challenges in miniaturization and stability, particularly in maintaining the mechanical integrity of electrodes, which affects their performance and reliability in detecting humidity.
Innovation Solution
A humidity sensor design featuring a support structure with stacked support layers and a fixation groove to stabilize the second electrode, combined with an adsorption layer that changes capacitance in response to humidity, allowing for accurate and stable detection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If the sensor is miniaturized, then the size is reduced, but the mechanical integrity and stability of electrodes deteriorate
Solution Approach 1:
The support structure is divided into multiple support layers (first support layer, second support layer, third support layer) that are stacked and connected through fixation grooves. This segmentation allows each layer to provide localized support to the second electrode, maintaining mechanical integrity while enabling miniaturization of the overall sensor structure.
Solution Approach 2:
The support structure transitions from a two-dimensional planar support to a three-dimensional stacked configuration. Multiple support layers are arranged vertically with fixation grooves connecting them, creating a multi-layered support system that provides enhanced mechanical stability in the vertical dimension while keeping the horizontal footprint minimal for sensor miniaturization.
2Stability of the object's composition
If the support structure is added to stabilize the electrode, then the electrode stability is improved, but the device complexity increases
Solution Approach 1:
Multiple support layers are merged into a single integrated support structure through the fixation grooves. The first, second, and third support layers are connected vertically to form one unified support system that stabilizes the second electrode, reducing the number of separate components needed while maintaining stability.
Solution Approach 2:
The fixation grooves serve multiple functions: they connect different support layers together, provide mechanical anchoring for the second electrode, and maintain the structural integrity of the stacked configuration. This multi-functionality reduces the need for additional specialized components, simplifying the overall device structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design ensures electrode stability, enables miniaturization, and provides accurate humidity detection with good linearity and simplicity, suitable for applications in agricultural and industrial environments.
Implementation Method 1
an adsorption layer arranged on a side of the second electrode away from the base substrate
Data Source
AI summary
A humidity sensor, a manufacturing method therefor and an electronic device are provided, and the humidity sensor includes: a base substrate, and at least one sensor unit arranged on the base substrate; the sensor unit includes: a first electrode and a support structure arranged on the base substrate, the support structure is located on at least one side of the first electrode; a second electrode located on a side of the first electrode away from the base substrate, an orthographic projection of the second electrode on the base substrate is overlapped with an orthographic projection of the first electrode on the base substrate, a space is arranged between the second electrode and the first electrode, and at least one end of the second electrode is fixed with the support structure; and an adsorption layer arranged on a side of the second electrode away from the base substrate.