Polarisation-Affecting Properties TRIZ Cases
- Polarization-Based Wafer Mapping for Fast Defect Localization
Polarization matrix reduction replaces slow, wafer-damaging microscope mapping to quickly locate abnormal process regions with reliable wafer maps.
- Polarized Wafer Inspection for Micropipe Defect Detection
Polarizing optics and a mirror let bright-field wafer inspection separate micropipe defects from contaminants, reducing false wafer rejection.
- Autonomous Vehicle LiDAR Using Depolarization Ratio for Object Disambiguation
Dual-polarization LiDAR separates return signals to calculate depolarization ratio, improving material discrimination and object tracking stability.