Semiconductor Electrostatic Transducers TRIZ Cases
- Wafer Thickness Reduction via Anisotropic Etching
Anisotropic etching reduces wafer thickness and forms deep recesses, avoiding mechanical damage risks associated with grinding.
- CNT Support Posts for MEMS Microphone Durability
Carbon nanotube support posts mechanically fix vibration membranes via frictional force, resolving impact damage risks while maintaining sensitivity.