Dual flow meters subtract return flow from feed flow, enabling accurate shot dosing and low-pressure pre-infusion control.
Sensors placed below the FOUP air curtain capture air speed distribution without wafer-slot interference, improving airflow uniformity checks.
Dual pressure sensors and a flow restrictor replace thermal flow sensing, enabling accurate reactive gas pressure control and mass flow monitoring.
Separating the control gap into high- and low-pressure regions enables a steeper low-pressure rise and a flatter high-pressure flow curve.
Movable support elements adjust the control gap width, enabling precise constant flow tuning without changing the injection mold.
Separating the control gap into low- and high-pressure regions lets the regulator achieve a steep rise at low pressure and a flat high-pressure curve.
A flow stabilization rod narrows hydraulic diameter to suppress turbulence and pressure noise, improving mass flow sensing accuracy.
Stacked insert plates define sealed measuring and bypass channels to maintain laminar flow, reduce turbulence, and improve flowmeter accuracy.
Added signals from parallel thermal sensors raise S/N at low pressure difference, improving mass flow accuracy without mixed sensor types.
Corner flow in ionic-liquid microchannels turns strain into resistance change, enabling continuous high-sensitivity motion tracking without imaging.
A bypass channel diverts partial gas flow to protected sensors, improving low-flow measurement accuracy while reducing fouling and interference.
A bypass channel and primary anemometer separate gas quality sensing from the main flow to improve low-flow accuracy and reduce sensor interference.
Dual nozzles switch by differential pressure range to measure conduit flow accurately across low and high rates with minimal space use.