Dual flow meters subtract return flow from feed flow, enabling accurate shot dosing and low-pressure pre-infusion control.
Sensors placed below the FOUP air curtain capture air speed distribution without wafer-slot interference, improving airflow uniformity checks.
Dual pressure sensors and a flow restrictor replace thermal flow sensing, enabling accurate reactive gas pressure control and mass flow monitoring.
Separating the control gap into high- and low-pressure regions enables a steeper low-pressure rise and a flatter high-pressure flow curve.
Movable support elements adjust the control gap width, enabling precise constant flow tuning without changing the injection mold.
Separating the control gap into low- and high-pressure regions lets the regulator achieve a steep rise at low pressure and a flat high-pressure curve.
A flow stabilization rod narrows hydraulic diameter to suppress turbulence and pressure noise, improving mass flow sensing accuracy.
Stacked insert plates define sealed measuring and bypass channels to maintain laminar flow, reduce turbulence, and improve flowmeter accuracy.
Added signals from parallel thermal sensors raise S/N at low pressure difference, improving mass flow accuracy without mixed sensor types.
Corner flow in ionic-liquid microchannels turns strain into resistance change, enabling continuous high-sensitivity motion tracking without imaging.
A bypass channel diverts partial gas flow to protected sensors, improving low-flow measurement accuracy while reducing fouling and interference.
A bypass channel and primary anemometer separate gas quality sensing from the main flow to improve low-flow accuracy and reduce sensor interference.
Dual nozzles switch by differential pressure range to measure conduit flow accurately across low and high rates with minimal space use.
A bypass path and tapering flow channel stabilize laminar flow, improving accuracy and sensitivity in ultra-small sensors.
Segmented conduit design compensates for gas density fluctuations by combining amplitude-based mass flow with temporal velocity data.
Arched stabilizing element prevents sensor support bending under pressure, maintaining fluidic contact for accurate mass flow measurement.
Segmented bypass capillary tubes reduce pressure drops while maintaining laminar flow and linear proportionality for accurate high-rate measurements.
Modular housing and axially adjustable flow guide allow retrofitting water meters into existing plumbing without damaging embedded conduits.
A guide section directs fluid flow to prevent dust accumulation on diverter inlets within flow measurement conduits.
A central insert in the ultrasonic flow meter isolates transducers from liquid noise interference, enabling accurate two-phase measurement.
A venturi flow sensor uses a tapered region to drive airflow through a parallel bypass chamber for precise measurement.
A sensor module with a bent flow path guides fluid through a perpendicular intermediate region to generate Karman vortices for precise measurement.
A flow splitter manifold monitors fluid pressure across multiple delivery lines to detect obstructions in polishing fluid systems.
Applying force to a gas detector membrane induces volume change, allowing blockage assessment through measured pressure relaxation rates.
A multiphase flow meter uses segmented Venturi sections to determine fluid characteristics via gamma-ray attenuation and differential pressure.
Stacked insert plates divide bypass channels to reduce turbulence, preserving laminar flow stability in the measuring branch for accurate fluid detection.
Segmented resin sealing protects the semiconductor chip while stabilizing airflow over the exposed sensing unit to reduce manufacturing variations.
A flow rate adjusting valve uses a magnetic piston to drive an external ferromagnetic indicator for clear visual readouts.
Modulated ultrasonic standing waves induce flow perturbations that overcome measurement precision deterioration caused by unstable fluid flow variations.
A flow sensor arrangement uses a bypass path and removable plug to isolate calibration from the main fluid line.
Projections guide fluid into detection passages, isolating the detector from moisture intrusion that damages sensor elements.
A guide in the main path smooths fluid flow before entering a bypass, reducing turbulence to improve measurement resolution.
A flow sensor divides the main channel throttle point into multiple parallel passages to control fluidic resistance.
Conical positioning elements engage housing receptacles to align air mass sensors, resolving manufacturing tolerance issues that cause measurement drift.