FOUP Air Curtain Sensor Layout for Accurate Air Speed Mapping
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Solution Overview
Problem
Existing technologies face difficulties in efficiently and accurately measuring air speed near an air curtain used in Front Opening Unified Pods (FOUPs) to inhibit air convection and protect wafers from contaminants, which affects the success rate of wafer manufacturing.
Innovation Solution
A device comprising fixing members and air speed measuring members with sensors positioned below the air curtain, integrated with a wafer box, to measure air speed accurately and efficiently.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If sensors are positioned inside the wafer box to measure air speed, then the measurement can be performed, but the measurement precision is insufficient due to interference from wafer storage structures
Solution Approach 1:
The sensor arrangement transitions from a two-dimensional plane inside the wafer box to a three-dimensional spatial distribution below the air curtain. Multiple sensors are positioned at different heights and horizontal locations to capture the air speed profile in three dimensions, enabling comprehensive measurement of the air curtain's velocity distribution without interference from wafer storage structures.
2Measurement precision
If multiple sensors are arranged to measure air speed at different locations, then the measurement comprehensiveness is improved, but the device complexity increases
Solution Approach 1:
The measurement system is segmented into multiple independent sensor units distributed at different spatial locations. Each sensor measures air speed at its specific position, and the collective data from all segments provides a comprehensive view of the air curtain's velocity distribution. This segmentation allows parallel measurement without requiring complex mechanical linkages between sensors.
Solution Approach 2:
The same sensor type and measurement principle are universally applied across all measurement locations. Each sensor unit is identical in design and function, measuring air speed through the same mechanism. This universality simplifies the overall system design by using standardized components rather than custom-designed sensors for each location.
3Reliability
If the air curtain is used to protect wafers from contaminants, then the wafer protection is improved, but the air speed uniformity becomes difficult to control and measure
Solution Approach 1:
Multiple sensors distributed below the air curtain act as intermediaries to indirectly measure the air speed uniformity. Rather than directly measuring the complex flow field within the air curtain, the sensors capture velocity data at various points, which collectively characterize the uniformity of the air stream. This intermediary measurement approach enables assessment of air curtain performance without disrupting its protective function.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise and efficient measurement of air speed near the air curtain, enhancing the uniformity assessment of the air stream and improving wafer manufacturing success rates.
Implementation Method 1
Each sensor is configured to measure the air speed near the air outlet of the air curtain
Data Source
AI summary
A device includes one or more fixing members and one or more air speed measuring members. Each fixing members is received and held in one receiving groove. Each air speed measuring member is arranged on one fixing member. Each air speed measuring member includes one or more sensors. Each sensor extends outside the wafer box and is positioned below an air curtain. Each sensor is configured to measure an air speed near the air outlet of the air curtain. A related wafer box includes the above device.