3D Stacked IC Thermal Management for Power Density Control

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Solution Overview

Problem

Three-dimensional integrated circuits (3D ICs) face challenges in managing power and temperature effectively, leading to potential overheating and reduced performance due to increased power density and heat generation, which can result in premature failure and reliability issues.

Innovation Solution

The implementation of thermal management components, such as metal layers with high heat conductivity, temperature sensors, and active cooling systems, along with the use of through-silicon vias (TSVs) for interconnects, allows for efficient heat dissipation and power management within the 3D IC structure, enabling better temperature regulation and reduced power consumption.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If 3D IC stacking is implemented to increase integration density, then device performance and footprint are improved, but power density and heat generation increase

Engineering Contradiction:
Improvedevice performanceVSAvoidpower density
Core Design Contradiction:
ProductivityVSPower

Solution Approach 1:

The patent divides the 3D IC into multiple functional blocks or regions, each with independent power and temperature monitoring. This segmentation allows selective power management of specific hot regions without affecting the entire device, enabling finer-grained control over power density while maintaining high integration density.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent implements dynamic power management by continuously monitoring temperature and power consumption of individual functional blocks, then dynamically adjusting power supply to each block based on real-time conditions. This dynamic approach allows the system to maintain optimal performance while preventing overheating in specific regions.

Inventive Principle:
Principle #15Dynamics

2Power

If power input is increased to improve device performance, then device functionality is enhanced, but heat generation and temperature increase

Engineering Contradiction:
Improvepower inputVSAvoidheat generation
Core Design Contradiction:
PowerVSTemperature

Solution Approach 1:

The patent incorporates temperature sensors and power monitoring circuits that provide real-time feedback to a control mechanism. This feedback loop enables the system to detect temperature increases and automatically reduce power input to affected functional blocks, preventing thermal runaway while maintaining optimal performance when temperatures are acceptable.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent changes operational parameters such as voltage and current levels dynamically based on temperature conditions. When temperature exceeds thresholds, the system adjusts electrical parameters to reduce power dissipation, thereby controlling heat generation while allowing higher power input when thermal conditions permit improved performance.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If thermal management components are added to control temperature, then reliability is improved, but device complexity increases

Engineering Contradiction:
ImprovereliabilityVSAvoiddevice complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent designs thermal management components that serve multiple functions: temperature sensing, power monitoring, and selective power control are integrated into the same structural elements. For example, interlayer dielectric layers and via structures serve both as electrical interconnects and as thermal management pathways, reducing the need for separate dedicated thermal management components.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent embeds temperature sensors and power monitoring circuits within existing functional blocks and interconnect structures. The thermal management functionality is nested within the standard 3D IC architecture rather than being added as external components, thereby improving reliability while minimizing increases in overall device complexity.

Inventive Principle:
Principle #7Nested doll (Nesting)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively manages heat dissipation and power usage in 3D ICs, enhancing reliability, preventing premature failure, and improving performance by maintaining optimal operating temperatures and reducing energy consumption.

Implementation Method 1

metal layers with high heat conductivity

Methodology Applied
Scientific EffectHeat conduction: Conduction (thermal)

Implementation Method 2

through-silicon vias (TSVs) for interconnects

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 3

temperature sensors

Methodology Applied
Scientific EffectTemperature sensing: Thermistor

Data Source

PatentUS11935869B2Power and temperature management for functional blocks implemented by a 3D stacked integrated circuit
Publication Date: 2024.03.19 MICRON TECHNOLOGY INC
  • US11935869B2 patent drawing
  • US11935869B2 patent drawing
  • US11935869B2 patent drawing

AI summary

A three-dimensional stacked integrated circuit (3D SIC) having a non-volatile memory die, a volatile memory die, a logic die, and a thermal management component. The non-volatile memory die, the volatile memory die, the logic die, and the thermal management component are stacked. The thermal management component can be stacked in between the non-volatile memory die and the logic die, stacked in between the volatile memory die and the logic die, or both.