3D Image Sensor Dark Current Suppression via Segmented Architecture

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Solution Overview

Problem

Conventional image sensors face challenges in achieving high photoconductive gain and sensitivity without increasing dark current levels, and they struggle with compact integration of pixels with control units across various spectral ranges due to limitations in noise reduction and exposure time, especially in infrared and ultraviolet ranges.

Innovation Solution

A monolithic three-dimensional integrated circuit architecture is employed, where the photosensitive element is placed in the upper level and the active device in the lower level, utilizing a two-dimensional material transport layer and a photosensitizing layer to achieve high photoconductive gain and responsivity, while a dark current suppressing circuit minimizes dark current, allowing for efficient integration and extended spectral sensitivity without deep cooling.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If photodetectors with photoconductive gain (avalanche photodiodes or image intensifiers) are used, then photoconductive gain and sensitivity are improved, but device complexity and difficulty of integration increase

Engineering Contradiction:
Improvephotoconductive gainVSAvoidintegration difficulty
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The image sensor is divided into two separate levels: the first level contains the photodetector array, and the second level contains the control unit with readout circuitry. This segmentation allows each level to be optimized independently, enabling the use of photodetectors with photoconductive gain without increasing overall device complexity

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent transitions from a planar two-dimensional integration architecture to a three-dimensional stacked architecture. By stacking the photodetector level and control unit level vertically, the patent achieves compact integration while maintaining the photoconductive gain capability of the photodetectors

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Measurement precision

If pre-amplification stage is placed close to photodiode, then noise levels are reduced, but device complexity increases

Engineering Contradiction:
Improvesignal-to-noise ratioVSAvoidreadout circuit design
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The control unit with readout circuitry is positioned in a second level directly above the photodetector array in the first level. This three-dimensional arrangement places the amplification stages physically close to the photodiodes for noise reduction, while the vertical stacking keeps the overall device compact and simplifies routing

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Measurement precision

If exposure time is increased, then signal-to-noise ratio is improved, but frame rate decreases and thermal noise increases

Engineering Contradiction:
Improvesignal-to-noise ratioVSAvoidframe rate
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The patent employs photodetectors with photoconductive gain capability, which amplify the photo signal internally. This parameter change in detection mechanism allows achieving high signal-to-noise ratios with shorter exposure times, thereby maintaining high frame rates without suffering from thermal noise accumulation

Inventive Principle:
Principle #35Parameter changes

4Measurement precision

If photodetectors with high photoconductive gain are used, then sensitivity is improved, but dark current levels increase

Engineering Contradiction:
ImprovesensitivityVSAvoiddark current
Core Design Contradiction:
Measurement precisionVSObject-generated harmful factors

Solution Approach 1:

The patent extracts and addresses the dark current issue separately by implementing a dedicated dark current suppression circuit in the control unit. This circuit is specifically designed to compensate for and reduce the dark current generated by the photodetectors, allowing the system to maintain high sensitivity while minimizing dark current effects

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach results in a compact image sensor with high sensitivity and signal-to-noise ratios across a wide spectral range, including infrared and ultraviolet, without the need for deep cooling, by effectively managing dark current and optimizing pixel design.

Implementation Method 1

a transport layer including at least one layer of a two-dimensional material... The high carrier mobility of graphene and the long carrier lifetime in the quantum dots make it possible for the phototransistor disclosed therein to obtain a large photoconductive gain

Methodology Applied
Scientific EffectPhotoconductivity: Photoconductivity

Implementation Method 2

The sensitizing layer absorbs incident light and induces changes in the conductivity of the transport layer to which is associated

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentEP3104414B1Image sensor, optoelectronic system comprising said image sensor, and method for manufacturing said image sensor
Publication Date: 2020.05.06 FUNDACIO INST DE CIENCIES FOT NIQUES
  • EP3104414B1 patent drawingFigure 1a
  • EP3104414B1 patent drawingFigure 1b
  • EP3104414B1 patent drawingFigure 2a~2b

AI summary

The invention relates to an image sensor (100) comprising a plurality of pixels (101) operatively connected to a control unit that includes a readout circuit (102), wherein it comprises a monolithic three-dimensional integrated circuit (104) comprising an upper level (105) and a lower level (106); wherein each pixel comprises: a photosensitive element (107) arranged in said upper level and comprising a photosensitizing layer (108) associated to a transport layer (109); an active device (110) arranged in said lower level and operatively coupled to the photosensitive element; and a first intermediate terminal and an output terminal circuitally connected, respectively, to the photosensitive element and to the readout circuit; wherein the image sensor further comprises a dark current suppressing circuit; and wherein the control unit is configured to, upon readout of a pixel, circuitally connect the first intermediate terminal of said pixel with its output terminal through the dark current suppressing circuit. The invention also relates to an optoelectronic system comprising said image sensor and to a method of manufacturing said image sensor.