3D Memory Shielding Layer for Signal Integrity

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Solution Overview

Problem

The stacked architecture of 3D memory devices leads to increased noise and signal distortion due to extra capacitance and resistance from additional metal routing, causing coupling effects between periphery circuits and memory arrays, which exacerbates signal integrity issues during operation.

Innovation Solution

Incorporating a shielding layer with a conduction region between the peripheral device and memory strings or between the memory strings and peripheral device, which receives a grounding voltage to reduce or eliminate the coupling effect by shielding electrical energy transfer between metal interconnects.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If a stacked 3D memory architecture is used to increase memory density, then memory capacity is improved, but signal distortion and noise increase due to additional metal routing and capacitance

Engineering Contradiction:
Improvememory densityVSAvoidsignal integrity
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

A shielding layer is introduced as an intermediary component between the memory array and peripheral circuits. This shielding layer includes a conduction region configured to receive a grounding voltage, which mediates the electromagnetic coupling between adjacent interconnects by providing a reference potential that prevents signal distortion and noise propagation.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Device complexity

If peripheral devices and memory arrays are placed in close proximity in a stacked architecture, then device integration is improved, but coupling effects between circuits increase causing signal distortion

Engineering Contradiction:
ImproveintegrationVSAvoidcoupling effect
Core Design Contradiction:
Device complexityVSObject-affected harmful factors

Solution Approach 1:

The shielding layer serves as a physical and electrical intermediary positioned between the peripheral devices and memory arrays. By introducing this intermediate structure with grounding capability, the direct coupling path between adjacent circuits is interrupted, reducing the harmful coupling effects while maintaining the integrated stacked architecture.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The harmful coupling effect is extracted and redirected to ground through the shielding layer's conduction region. By providing a dedicated grounding path, the electromagnetic interference that would otherwise couple between circuits is extracted and dissipated, isolating the functional circuits from each other's interference.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The shielding layer effectively reduces signal distortion and maintains signal integrity by minimizing the coupling effect between interconnects in 3D memory devices, improving the performance and efficiency of the memory operation.

Implementation Method 1

a shielding layer disposed between the peripheral device and the plurality of memory strings. The shielding layer includes a conduction region configured to receive a grounding voltage during operation of the 3D memory device

Methodology Applied
Scientific EffectElectrical shielding: Faraday Cage

Data Source

PatentUS11758731B2Three-dimensional memory device having a shielding layer and method for forming the same
Publication Date: 2023.09.12 YANGTZE MEMORY TECH CO LTD
  • US11758731B2 patent drawing
  • US11758731B2 patent drawing
  • US11758731B2 patent drawing

AI summary

A three-dimensional (3D) memory device includes a peripheral device, a plurality of memory strings, a layer between the peripheral device and the plurality of memory strings, and a contact. The layer includes a conduction region and an isolation region. The contact extends through the isolation region of the layer.