3D Variable Resistance Memory Strings for High-Density Fabrication

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Solution Overview

Problem

Existing memory devices with variable resistance memory elements lack a three-dimensional structure that facilitates easy manufacturing and high integration, leading to increased processing costs and development time.

Innovation Solution

A memory device with a memory cell structure that includes a variable resistance memory region, a select transistor, and a memory cell string, where memory cells are coupled in series, allowing for efficient selection and operation through a select transistor and shared word and source lines, reducing the need for block-level erase operations and enabling faster write and read operations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If a three-dimensional memory structure is implemented, then integration density is improved, but manufacturing complexity increases

Engineering Contradiction:
Improveintegration densityVSAvoidmanufacturing complexity
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The patent implements a three-dimensional memory structure where memory cells are stacked vertically across multiple layers (first layer, second layer, third layer) with word lines extending in the third dimension perpendicular to the substrate. This vertical stacking achieves high integration density by utilizing the third spatial dimension rather than expanding only in the planar direction, thereby improving storage capacity per unit area while maintaining manufacturability through systematic layer formation processes.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Reliability

If block-level erase operations are required, then memory reliability is improved, but operation speed deteriorates

Engineering Contradiction:
Improvememory reliabilityVSAvoidoperation speed
Core Design Contradiction:
ReliabilityVSSpeed

Solution Approach 1:

The memory device is divided into multiple independently controllable layers, each with its own set of word lines (first word lines, second word lines, third word lines) that can be selectively activated. This segmentation allows individual layers or specific memory cells within layers to be accessed and operated independently, enabling faster write and read operations on selected cells without requiring erase operations on entire blocks, thus improving operation speed while maintaining reliability through selective access.

Inventive Principle:
Principle #1Segmentation

3Ease of manufacture

If higher integration is achieved, then processing cost is reduced, but device complexity increases

Engineering Contradiction:
Improveprocessing costVSAvoiddevice complexity
Core Design Contradiction:
Ease of manufactureVSDevice complexity

Solution Approach 1:

The patent combines multiple memory cells from different layers into a unified three-dimensional memory structure that shares common bit lines and control mechanisms. Memory cells in the first layer, second layer, and third layer are integrated with shared wiring infrastructure, reducing the total number of independent components and interconnections required. This merging approach achieves higher integration density while simplifying the overall device architecture and reducing processing costs through standardized fabrication processes.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed structure enables high integration with reduced manufacturing costs and development time, allowing for efficient and faster write and read operations at lower voltages, without the need for block-level erase operations.

Implementation Method 1

a variable resistance memory region extending in a first direction that is orthogonal to a semiconductor substrate

Methodology Applied
Scientific EffectVariable resistance: Electrical Resistance

Data Source

PatentUS20250344407A1Memory device with memory strings using variable resistance memory regions
Publication Date: 2025.11.06 KIOXIA CORP
  • US20250344407A1 patent drawing
  • US20250344407A1 patent drawing
  • US20250344407A1 patent drawing

AI summary

A memory device includes a memory cell and a first select transistor. The memory cell includes a variable resistance memory region, a first semiconductor layer in contact with the variable resistance memory region, a first insulating layer in contact with the first semiconductor layer, and a first voltage application electrode in contact with the first insulating layer. The first select transistor includes a second semiconductor layer, a second insulating layer in contact with the second semiconductor layer, and a second voltage application electrode extending in the second direction and being in contact with the second insulating layer.