3D Memory Devices With Vertical Bit-Line Pillars

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Solution Overview

Problem

As integrated circuits (ICs) scale down, wire performance and functionality degrade, leading to increased power consumption and reduced efficiency, while 3D stacking techniques aim to address these issues but face challenges in optimizing transistor placement and interconnects.

Innovation Solution

The development of 3D Integrated Circuit (IC) devices with vertically oriented bit-line pillars and horizontally oriented channels, incorporating metallic properties and crystallized polysilicon, along with advanced layer transfer technologies for heterogeneous integration, enabling efficient memory cell design and reduced power consumption.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Length of moving object

If conventional 2D transistor arrangement is used, then manufacturing process is simple, but wire lengths are long and performance degrades

Engineering Contradiction:
Improvewire lengthVSAvoidtransistor arrangement complexity
Core Design Contradiction:
Length of moving objectVSDevice complexity

Solution Approach 1:

The patent transitions from conventional 2D planar transistor arrangement to 3D vertical stacking architecture. Multiple transistor layers are stacked vertically with through-silicon vias (TSVs) providing inter-layer interconnects, thereby reducing wire lengths and improving signal transmission performance while managing the increased structural complexity through systematic 3D integration

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Quantity of substance

If transistor size is scaled down, then transistor density improves, but wire performance degrades and power consumption increases

Engineering Contradiction:
Improvetransistor densityVSAvoidpower consumption
Core Design Contradiction:
Quantity of substanceVSUse of energy by moving object

Solution Approach 1:

By stacking multiple transistor layers vertically, the patent achieves high transistor density without further lateral scaling. This 3D arrangement reduces interconnect lengths significantly, lowering RC delays and power consumption while maintaining high device density. The vertical integration allows transistors to be placed closer together in the Z-direction rather than continuing to scale in the X-Y plane

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Length of moving object

If 3D stacking is implemented, then wire lengths are reduced, but manufacturing complexity increases

Engineering Contradiction:
Improvewire lengthVSAvoidfabrication complexity
Core Design Contradiction:
Length of moving objectVSEase of manufacture

Solution Approach 1:

The patent divides the integrated circuit into multiple discrete transistor layers stacked vertically, with each layer potentially fabricated using separate processing steps. Through-silicon vias (TSVs) are used to create inter-layer interconnects, allowing independent optimization of each layer while managing overall manufacturing complexity through modular 3D integration architecture

Inventive Principle:
Principle #1Segmentation

Data Source

PatentUS11296106B23D memory semiconductor devices and structures
Publication Date: 2022.04.05 MONOLITHIC 3D INC
  • US11296106B2 patent drawing
  • US11296106B2 patent drawing
  • US11296106B2 patent drawing

AI summary

A 3D memory device, the device including: a plurality of memory cells, where each memory cell of the plurality of memory cells includes at least one memory transistor, where each of the at least one memory transistor includes a source, a drain, and a channel; a plurality of bit-line pillars, where each bit-line pillar of the plurality of bit-line pillars is directly connected to a plurality of the source or the drain, where the bit-line pillars are vertically oriented, where the channel is horizontally oriented; and a level of memory control circuits, where the memory control circuits is disposed either above or below the plurality of memory cells.